The invention discloses a precise micro-dynamic parallel locating
system and method for micro-nano operation environment. The precise micro-dynamic parallel locating
system for the micro-nano operation environment comprises a mechanical body, a calibrating device and a control device which are connected in sequence; the mechanical body comprises a pedestal, more than three groups of the same
ultrasonic motor drive branched chains and a movable platform; the calibrating device is used for calibrating the actual value of a
kinematics parameter, feeding back the movement position of a joint and correcting the original point of the movable platform; the control device is used for
processing each module
signal,
processing correspondingly and driving the mechanical body to move according to a scheduled track. The precise micro-dynamic parallel locating
system and method avoid the disadvantages of a traditional electromagnetic motor and reduce the influences of such nonlinear factors as friction and elastic deformation of additional mechanisms and gaps between additional mechanisms, and the precise micro-dynamic parallel locating system is gapless, high in intensity, compact in structure, capable of eliminating
assembly error and size error and suitable for the micro-nano operation environment; the precise micro-dynamic parallel locating system and method for the micro-nano operation environment can achieve sub-micron locating precision and
millimeter travel and can also be used for
macro-micro locating tables.