Uniaxle integrated inertia measurement device based on single mass-block

An integrated inertial, single-mass technology, applied in measuring devices, measuring acceleration, gyroscopic effect for velocity measurement, etc., can solve the problems of complex structure, large volume and mass, achieve small size, strong anti-interference ability, and reduce separation effect of difficulty

Inactive Publication Date: 2007-09-19
ZHONGBEI UNIV
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Problems solved by technology

[0004] In order to solve the problems of the existing micro-inertial measurement combination assembled by an accelerometer and a gyroscope (that is, a singl

Method used

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  • Uniaxle integrated inertia measurement device based on single mass-block
  • Uniaxle integrated inertia measurement device based on single mass-block
  • Uniaxle integrated inertia measurement device based on single mass-block

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Embodiment Construction

[0015] A single-axis integrated inertial measurement device based on a single mass block, including a mass block and a glass cover bottom 1, the mass block is suspended above the glass cover bottom 1 through 2 supporting beams, and the mass block is composed of a mass core block 3 and an elastic beam 5 respectively Four support bodies 4 fixed to the four sides of the quality core block 3 are formed. The outer side of the support body 4 opposite to the Y direction is fixed with a detection movable comb tooth 6, and the outer side of the support body opposite to the X direction is fixed with a driving movable comb tooth 8, which is consistent with the detection activity. The detection fixed comb 7 and the driving fixed comb 9 coordinated by the comb teeth 6 and the driving movable comb teeth 8 are fixed on the glass cover bottom 1, and the lower end surface of the mass core block 3 is correspondingly fixed on the glass cover bottom 1 to form a plate capacitor. The electrode 10. ...

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Abstract

The present invention which relates to the micro-mechanism electric technology provides a single-shaft and integrated device for measuring the inertia based on the single quality block. And the present solves the problems of the prior single-shaft and integrated assembly for measuring the inertia that the structure is complex, the volume and quality are big, etc. The single-shaft and integrated device for measuring the inertia includes a quality block and a glass cover bottom. The quality block which is hang on the upper of the glass cover bottom through a supporting beam includes a quality chip and four supporting bodies that are fixed with the four sides of the quality chip through the elastic beam. A moveable comb for detecting is fixed on the external of the supporting body relative to the Y direction and a moveable comb for driving is fixed on the external of the supporting body relative to the X direction. A fixed comb for detecting and a fixed comb for driving are fixed on the glass cover bottom, and electrodes for forming the capacitance are fixed on the lower end surface and the glass cover bottom of the quality chip. The device in the present invention has advantages of a reasonable structure, an easy processing, a high reliability, a small volume, a strong ability of resisting the interference, a high precision, a high precision of measuring the paralleling and orthogonality of the vectors, etc.

Description

technical field [0001] The invention relates to micro-mechanical electronic technology, in particular to a single-axis integrated inertial measurement device based on a single mass block. Background technique [0002] At present, there are usually two combinations of silicon micro-inertial measurement combinations: one is to install six single-axis inertial sensors (that is, three accelerometers and three gyroscopes) in several orthogonal cubes as required by mechanical assembly. On the surface, it can be called multi-chip integration. Among them, each inertial sensor is relatively independent and can be flexibly selected according to needs; but this method is not suitable for mass production and the sensitive axes of each sensor will not be completely orthogonal due to installation, which will affect the attitude calculation; the other is through a microfabrication The process processes the required multiple silicon micro inertial sensors on the silicon chip at the same ti...

Claims

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Application Information

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IPC IPC(8): G01P15/125G01P15/14G01C19/5684G01C19/5747
Inventor 刘俊石云波张文栋马宗敏崔永俊薛晨阳杨玉华
Owner ZHONGBEI UNIV
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