The present invention which relates to the micro-mechanism electric technology provides a single-shaft and integrated device for measuring the
inertia based on the single quality block. And the present solves the problems of the prior single-shaft and integrated
assembly for measuring the
inertia that the structure is complex, the volume and quality are big, etc. The single-shaft and integrated device for measuring the
inertia includes a quality block and a
glass cover bottom. The quality block which is hang on the upper of the
glass cover bottom through a supporting beam includes a quality
chip and four supporting bodies that are fixed with the four sides of the quality
chip through the
elastic beam. A moveable comb for detecting is fixed on the external of the supporting body relative to the Y direction and a moveable comb for driving is fixed on the external of the supporting body relative to the X direction. A fixed comb for detecting and a fixed comb for driving are fixed on the
glass cover bottom, and electrodes for forming the
capacitance are fixed on the lower end surface and the glass cover bottom of the quality
chip. The device in the present invention has advantages of a reasonable structure, an easy
processing, a high reliability, a small volume, a strong ability of resisting the interference, a high precision, a high precision of measuring the paralleling and orthogonality of the vectors, etc.