154 results about "Elastic beam" patented technology

Disclosed in the present invention is a stepped elastic beam for a six-axis force sensor. The stepped elastic beam comprises a central platform, a stepped main beam, a floating beam, rims, and strain gauges, wherein the central platform is connected to the floating beam on the outer side by means of the stepped main beam, and the rims at four corners are connected to the floating beam; 24 strain gauges are pasted to the stepped main beam to form six sets of Wheatstone bridges; and when the force / torque of a certain dimension acts on the center of the stepped elastic beam, the sensor deforms, and the resistance value of the strain gauge at a corresponding position is changed, such that an output voltage of a corresponding bridge is changed, and the numerical value of the force / torque of the dimension can be obtained by measuring the change of the voltage. A structure is simple, the sensitivity is high, and the inter-dimensional coupling is low.

The invention relates to the technical field of sensors, and provides a six-dimensional force and torque force sensor and a preparation method thereof.The six-dimensional force sensor is of a disc-shaped structure and comprises an outer supporting ring, an inner mass block and eight elastic beams connected between the outer supporting ring and the inner mass block; wherein the eight elastic beams comprise a first elastic beam and a second elastic beam which are alternately arranged around the inner mass block, the first elastic beam is a straight beam, the second elastic beam is a special-shaped beam, and a strain gauge preset on the main surface of each elastic beam responds to the strain of the elastic beam to generate a measurement signal; and the force and / or the torque applied to the inner mass block or the outer support ring can be determined according to the measurement signal. Due to the fact that the different elastic beams are different in shape and structure, the strain gauges are preset on the elastic beams of different types and positions, and the bridging mode is set, the output of each Wheatstone bridge is only sensitive to the force or the moment of force in the changed direction and is not sensitive to the force or the moment of force applied in other directions, and the decoupling capacity of the sensor structure is improved to the maximum degree.

The invention discloses an MOMES accelerometer based on light intensity modulation, and belongs to the technical field of micro-electro-mechanical systems and inertial measurement. The MOMES accelerometer comprises a silicon-based base, a mass block, a fixed anchor point, an elastic beam assembly and a double-photoelectric detector. The mass block is hung on the silicon-based base through the elastic beam assembly and the fixed anchor point, the fixed anchor point is fixed on the surface of the silicon-based base, and the fixed anchor point is connected with the elastic beam assembly; the center of the mass block is provided with a light hole which completely penetrates through the thickness direction. And the double photoelectric detector is fixed on the surface of the silicon-based base and is positioned in a light projection area of the light hole. When the accelerometer is subjected to the action of external acceleration along the Y-axis direction, the rectangular mass block generates displacement relative to the silicon-based base, so that the light intensity distribution of a light spot projected by the light hole on the double photoelectric detector generates differential change; the accelerometer has the advantages of high sensitivity, strong anti-interference capability, good process compatibility and the like, and is suitable for high-precision inertial measurement.

The invention discloses a temperature self-compensation Wheatstone bridge structure, and relates to the field of Wheatstone bridges, at least one group of sub-strain gauges which are separated from adjacent arms, are mutually compatible and are attached to the same area of the same elastic beam exist in a four-arm resistor of the Wheatstone bridge structure; the temperature resistance change trends of the compatible sub strain gauges tend to be the same; wherein each group of compatible two sub-strain gauges are closely attached to each other so that the two sub-strain gauges are located in the same area of the same elastic beam, so that the two closely attached sub-strain gauges generate homodromous temperature resistance variation, resistance temperature drift caused by local temperature difference of different arms is counteracted, and temperature self-compensation is realized. According to the invention, temperature compensation can be carried out on the local temperature difference of the force sensor, so that the measurement accuracy of the six-dimensional force sensor is improved.

The invention provides a key and electronic equipment. Relates to the technical field of electronic equipment, and is used for solving the problem of low pressing force detection accuracy of a conventional key. The key comprises a key cap, an elastic beam, a pressure-sensitive feedback assembly, a sensor and a supporting structure. The key cap is provided with a pressing surface for a user to press. The elastic beam is connected with the keycap. The pressure-sensitive feedback assembly comprises a first magnet and a second magnet. The first magnet and the second beam body are oppositely arranged at an interval, and the second magnet is arranged on the elastic beam. The sensor is located on the elastic beam and used for sensing the deformation quantity of the elastic beam. The supporting structure is fixedly connected with the elastic beam and the first magnet. The connecting position of the supporting structure and the elastic beam is located between the sensor and the second magnet.

The invention belongs to the field of agricultural automation equipment, and discloses a leaf mustard harvesting and laying machine which comprises a rack, the rack comprises a supporting plate and a mounting frame connected to one end of the supporting plate, and a walking chassis is arranged at the bottoms of the supporting plate and the mounting frame; the elastic collecting device comprises a collecting frame and two pairs of tensioning wheel belt sets fixed to the collecting frame, and a leaf mustard conveying channel is formed between the two pairs of tensioning wheel belt sets. The clamping and conveying device comprises a pair of conveying belts which are in butt joint with the elastic collecting device; the cutting device is installed at the bottom of the clamping and conveying device, the turnover mechanism is fixed to the installation frame and comprises a pair of circular ring rotating discs, the circular ring rotating discs are provided with elastic clamping rods, and the distance between the elastic clamping rods is adjustable; and the elastic binding device and the clamping and conveying device are obliquely arranged at the end part of the mounting frame. The brassica juncea harvesting and laying machine is simple in structure and capable of laying brassica juncea.

The utility model relates to a pressure touch button and an electronic device thereof, comprising a body, two sides of the bottom of the body are provided with elastic beams which extend outwards and have elastic deformation, the elastic beams are connected with a strain sensing unit in the thickness direction, and the strain sensing unit comprises four strain sensing resistors which are arranged in a quadrilateral manner. When pressure is applied to the body, the pressure can be transmitted to the elastic beams from the body to cause deformation of the elastic beams, the elastic beams are arranged on the two sides of the bottom, so that the deformation of the two elastic beams is different due to the different acting positions of the applied pressure, and the values of the induction strain units installed on the elastic beams are different. Therefore, the functions of pressure identification and touch sensing are realized. Compared with the prior art, the pressure touch key and the electronic device thereof can achieve the purpose of being simple and compact in structure.

The invention discloses an overlapping structure comb tooth capacitance type Z-axis acceleration sensitive chip and a manufacturing method thereof, and belongs to the technical field of MEMS sensors. The sensitive chip is formed by overlapping a comb tooth capacitor layer and an elastic beam structure layer, and the comb tooth capacitor layer and the elastic beam structure layer are bonded together through an oxide layer. In addition to the advantage of small damping coefficient, the comb capacitor has the following three advantages: 1, the structure of overlapping the comb capacitor and the elastic beam does not need to occupy extra chip area, which is beneficial to microminiaturization and can reduce chip cost at the same time; secondly, the comb capacitor and the elastic beam are overlapped, so that the elastic beam is prevented from occupying the space for distributing the comb teeth around the mass block when the comb capacitor and the elastic beam are placed in a plane, the number of the comb teeth is greatly increased, and the capacitance of the comb structure is effectively increased; and thirdly, the elastic beams can be symmetrically distributed around the mass block due to the overlapping structure, and the cross coupling influence in the X-axis direction and the Y-axis direction is remarkably reduced.

The utility model provides a capacitive vibration sensor, a sealed cavity is formed in the capacitive vibration sensor, and an elastic beam and a movable structure are arranged in the sealed cavity; the fixed end of the movable structure is connected to the tail end of the elastic beam, and the free end, opposite to the fixed end, of the movable structure is suspended in the sealing cavity; an upper groove is formed above the free end of the movable structure, and / or a lower groove is formed below the free end of the movable structure. According to the capacitive vibration sensor, the air flowing space in the sealing cavity, especially the air flowing space near the free end of the movable structure, can be increased by adding the upper groove and / or the lower groove, so that the air damping under high frequency is reduced, and the measurement bandwidth of the capacitive vibration sensor can be increased.

Provided are a button and an electronic device. The present application relates to the technical field of electronic devices, and aims to solve the problem of low accuracy of pressure detection in existing buttons. The button comprises a cap, an elastic beam, a pressure sensing feedback assembly, a sensor and a supporting structure. The cap is provided with a pressing surface that can be pressed by a user. The elastic beam is connected to the cap. The pressure sensing feedback assembly comprises a first magnet and a second magnet. The first magnet and a second beam body are arranged opposite each other and spaced apart, and the second magnet is arranged on the elastic beam. The sensor is located on the elastic beam and used for sensing a degree of deformation of the elastic beam. The supporting structure is fixedly connected to each of the elastic beam and the first magnet, wherein the joint of the supporting structure and the elastic beam is located between the sensor and the second magnet.

The multi-mode piezoelectric actuator based on the double-stator structure comprises a base, a guide rail and a piezoelectric driving module are arranged on the base, and the guide rail is connected with a sliding block in a sliding mode; the piezoelectric driving module comprises a stator frame, and one end of the stator frame is integrally provided with a displacement transmission structure. The stator frame at the opposite end of the displacement transmission structure is in threaded connection with a piezoelectric stack pre-pressing bolt, the piezoelectric stack pre-pressing bolt extends into the stator frame and is in compression joint with the piezoelectric stack, and the piezoelectric stack is in compression joint with the inner surface of the displacement transmission side wall; the polarization direction of the piezoelectric stack is parallel to the sliding block; the piezoelectric driving modules are arranged in pairs, a triangular elastic beam is integrally connected between the outer surfaces of the two displacement transmission side walls, the triangular elastic beam is fixedly connected with a driving foot, and the driving foot faces the sliding block and is used for driving the sliding block to do linear motion along the guide rail. The problems of contradiction between high precision and large stroke, a rollback phenomenon and the like of a piezoelectric actuator are solved, macro / micro continuous driving and nano-scale positioning can be achieved, and the micro / micro continuous driving and nano-scale positioning can be achieved only through one set of actuator.

A cantilever type tension sensor with a probe structure relates to the technical field of force measuring structures and comprises a knife handle dynamometer, a knife head is detachably fixed at the head end of the knife handle dynamometer, a sensor signal leading-out wire is detachably fixed at the tail end of the knife handle dynamometer, and an elastomer beam is arranged on the knife handle dynamometer. And a metal resistance strain gauge connected with a sensor signal outgoing line is arranged on the elastomer beam. According to the utility model, the problem that the force value in the process cannot be detected and controlled in real time because the force value is controlled by the current of the motor or experience or displacement in the prior art is solved.

The invention discloses a flexible six-dimensional force / moment sensing device, system and method based on a U-shaped micro-nano optical fiber, and the device comprises a flexible elastomer, a first U-shaped micro-nano optical fiber, a second U-shaped micro-nano optical fiber, a third U-shaped micro-nano optical fiber and a fourth U-shaped micro-nano optical fiber. The flexible elastic body comprises a floating beam on the edge, a boss in the center, and a first elastic beam, a second elastic beam, a third elastic beam and a fourth elastic beam which are arranged between the boss and the floating beam, and the first U-shaped micro-nano optical fiber and the second U-shaped micro-nano optical fiber are embedded into the first elastic beam and the second elastic beam in the length direction respectively; the third U-shaped micro-nano optical fiber and the fourth U-shaped micro-nano optical fiber are embedded into the third elastic beam and the fourth elastic beam respectively in the width direction, the first U-shaped micro-nano optical fiber and the second U-shaped micro-nano optical fiber are parallel to the surface of the flexible elastomer, and the third U-shaped micro-nano optical fiber and the fourth U-shaped micro-nano optical fiber are perpendicular to the surface of the flexible elastomer. The six-dimensional force / torque sensor is high in sensitivity and can realize six-dimensional force / torque sensing.

This utility model discloses a MEMS capacitive sensor, relating to the field of micro-motor technology. Anchor points and a fixed structure are fixedly arranged. Elastic beams and connecting beams are perpendicular to each other. The anchor points support the inner frame via the elastic beams, making the inner frame suspended. The inner frame, in turn, supports the mass frame via the connecting beams, making the mass fixed structure frame suspended. Movable comb teeth on the mass frame and fixed comb teeth on the fixed structure are spaced and interleaved to form a differential capacitor. The movable and fixed comb teeth use differential output, which can differentially eliminate the capacitance change caused by vibration or acceleration of non-detected axes, preventing signal output. This helps reduce the sensor's cross-axis sensitivity and improve sensor performance.

The invention belongs to the technical field of micro-electro-mechanical system processing, and discloses a system for a stretching test of a nano-film and a manufacturing method of the system. The system comprises a tensile on-sheet testing machine and a probe station, the tensile on-sheet testing machine comprises a main body frame, a probe loading structure, a dowel bar, a plurality of elastic beams, two deformation quantity scales, two pointers, a plurality of suspension folding beams and a plurality of anchor points; the two pointers are respectively used for marking the scales of the two deformation quantity scales; one end of each suspension folding beam is connected with the main body frame, and the other end is fixedly connected with an anchor point; one end of the dowel bar is connected with the main body frame, the other end of the dowel bar is connected with one end of the nano-film sample, and the other end of the nano-film sample is fixedly connected with an anchor point; the main body frame comprises a limiting shaft which is located between the two anchor points. According to the invention, the in-situ online stretching test of the nano-film can be directly realized on the silicon wafer, and the mechanical response characteristics of the deposited film in the device manufacturing process can be truly reflected.

The utility model provides an accelerometer with beams and anchor points on the outer side of a structure, a substrate layer is in an XY plane, and a device layer is located above the substrate layer; the movable mass block is located in the middle of the substrate layer and connected with an outer frame anchored to the substrate layer through anchor points through a first elastic beam unit, a second elastic beam unit, a third elastic beam unit and a fourth elastic beam unit. The first elastic beam unit and the third elastic beam unit are connected through a coupling beam unit which is parallel to the X axis and located on the upper side and the lower side of the movable mass block, and the second elastic beam unit and the fourth elastic beam unit are connected through a coupling beam unit. The detection capacitor structure is respectively connected with the movable mass block and the substrate layer in the middle area of the movable mass block; when the movable mass block moves in the X-axis direction, the capacitance value of the detection capacitor structure changes, so that acceleration detection is achieved, and the accelerometer which can have good dynamic output stability under the condition that the sensitivity of the accelerometer is large is provided.

The invention provides a piezoelectric excitation out-of-phase vibration micro electric field sensitive structure, a sensor and a detection method. The sensor comprises the piezoelectric excitation out-of-phase vibration micro electric field sensitive structure, a substrate (6), an elastic beam (7), a piezoelectric driving unit (1) and a piezoelectric feedback unit (4), the piezoelectric excitation out-of-phase vibration micro electric field sensitive structure comprises an out-of-phase vibration unit (2) and a differential sensing unit (3). Induction electrodes of the differential induction units (3) are arranged on the substrate (6); the elastic beam (7) is connected with the substrate (6) and the out-phase vibration unit (2); the piezoelectric feedback unit (4) and the piezoelectric driving unit (1) at least comprise a piezoelectric material layer and two electrode layers, one end of the piezoelectric feedback unit (4) is fixed on the substrate (6), and the other end of the piezoelectric feedback unit (4) is connected with the elastic beam (7). According to the invention, differential detection can be realized, and crosstalk and environment common-mode noise in an alternating-current excitation signal can be effectively suppressed.

The present invention discloses a multi-stable stiffness-adjustable elastic mechanism, which includes an elastic component and a base component. The elastic component includes a first elastic beam, a second elastic beam and a moving block. Both the first elastic beam and the second elastic beam can generate elastic deformation. The first elastic beam and the second elastic beam are cross-fixed by the moving block. The first elastic beam is connected to the upper disc in the base component, and the second elastic beam is connected to the lower disc in the base component. The upper disc rotates relative to the lower disc, so that the second elastic beam and the first elastic beam are bent and deformed, and initial internal stress is generated inside the first elastic beam and the second elastic beam. Due to the isotropy of the material, the stiffness of the first elastic beam and the second elastic beam in the bending orthogonal direction changes. The stiffness of the elastic mechanism can be adjusted by reciprocating the moving block along the rotation axis direction of the upper disc. By changing the change of the bending angles of the first elastic beam and the second elastic beam, the stiffness change range can be controlled, and the adaptability of the elastic mechanism is improved.

The present invention discloses a microelectromechanical system gyroscope, belonging to the technical field of sensors. The gyroscope includes: a substrate, a mass block group, a driving component, and a detecting component; the mass block group includes four driving mass blocks, an anchor structure, a coupling elastic beam, and a plurality of Z-axis detecting mass blocks. The four driving mass blocks are symmetrically suspended on the substrate through the anchor structure in a centrosymmetric manner, and the four driving mass blocks are connected by the coupling elastic beam; a Z-axis detecting mass block is provided on each driving mass block. Among them, in the driving mode, the driving modes of two adjacent driving mass blocks are out of phase, and out-of-phase vibration can be achieved in the detecting modes of the X-axis, Y-axis, and Z-axis. Therefore, a mechanical differential effect can be achieved, effectively reducing the influence of factors such as external vibration and impact on the gyro performance, improving the anti-vibration characteristics, and thus improving the detection accuracy and stability of the gyroscope.

The invention discloses a small resonant piezoelectric stack pump which comprises a diaphragm pump and a piezoelectric driving mechanism. The piezoelectric driving mechanism comprises a reverse-phase amplification rod, a piezoelectric stack and an elastic beam. The anti-phase amplification rod is composed of a fixed beam, a vertical beam, a driving arm, a flexible hinge, a fixed flat plate and a boss. The piezoelectric stack is clamped and fixed on the power side of the reverse amplification rod through the fixed flat plate and the fixed beam; the diaphragm pump comprises a pump cavity, a one-way valve and an inlet and outlet flow channel and is fixed to the resistance side of a driving arm of the piezoelectric driving mechanism through an elastic beam and a screw. According to the invention, through adoption of the elastic beam, resonance driving of the piezoelectric stack in a relatively low frequency range can be realized, and the driving displacement of the piezoelectric stack is greatly improved; the working mode of the piezoelectric driving mechanism is a first-order resonance mode, and the piezoelectric driving mechanism has the advantages of being high in mechanical quality factor, high in driving performance, small in structure and good in working reliability.

The utility model relates to a feedback key with a balance structure, and when a user presses a key body, pressure is transmitted to a first elastic beam through the key body and a supporting piece in sequence. The first elastic beam has elasticity and can deform in a first deformation space between the first elastic beam and the key body and a second deformation space between the first elastic beam and the machine shell when being pressed. The two ends of the first elastic beam are both fixedly connected with the machine shell, when a user presses the edge area of the key body, due to the fact that the torque is at least partially balanced by the first elastic beam, the user still needs to apply relatively large pressure when pressing the edge area, and therefore when the user presses different positions of the key body, the user can still apply the relatively large pressure; and the pressure value of vibration feedback sent by the metal dome is kept in a relatively narrow range interval. In addition, due to the fact that the first elastic beam is fixedly arranged, shaking of the feedback key can be greatly reduced. The purpose of improving the feedback experience can be achieved.

The invention discloses a broadband piezoelectric energy harvesting system based on multi-frequency cooperative resonance and a power generation method. The system comprises a fixed support, a main resonance subsystem and at least two secondary resonance subsystems. The main resonance subsystem comprises a main elastic beam component and a first piezoelectric conversion element fixedly coupled to the main elastic beam component; each secondary resonance subsystem comprises a secondary elastic beam member and a second piezoelectric conversion element fixedly coupled to the secondary elastic beam member. The near end of the main resonance subsystem is connected to the fixed support through a fixed hinge; the near ends of the sub-resonance subsystems are connected to the fixed support in parallel through movable hinges. The far end of the secondary resonance subsystem can be selectively connected to the fixed support through a fixed hinge or a movable hinge. And the main resonance subsystem and each secondary resonance subsystem are independently configured with inherent frequencies to form a multi-frequency-point resonance structure. Through the main-secondary multi-frequency-point parallel cooperative resonance design, the system can effectively respond under wide-spectrum fluid excitation, and the working frequency band range of energy capture is remarkably widened.

The application discloses a high-precision six-dimensional force sensor for a humanoid robot and relates to the technical field of six-dimensional force sensors.The high-precision six-dimensional force sensor comprises a shell, a switching inner ring arranged in the shell, a center body arranged in the switching inner ring, four groups of circumferentially distributed elastic beams connecting the switching inner ring with the shell, four groups of circumferentially distributed elastic beams connecting the center body with the switching inner ring, stress sheets arranged on the elastic beams, a force contact plate mounted on the top of the center body, a bottom plate mounted on the bottom of the center body and a circuit board mounted on the bottom of the switching inner ring.Through the arrangement of the two groups of elastic beams, the mutual rigidity switching between the shell, the center body and the switching inner ring can be realized by the sliding of the supporting rods, different elastic beams can participate in work, the switching between the "great force" and "micro operation" can be freely realized, and the sensing precision and sensing range of the force of the humanoid robot are greatly improved.

The invention discloses a method for measuring and calculating the displacement of a dry bulk cargo ship based on a bending moment-deflection equal ratio model. The method comprises the steps that S1, multi-source ship data used for measuring and calculating the displacement of the dry bulk cargo ship are acquired; s2, obtaining a ship longitudinal bending moment differential equation about a ship beam deflection function based on an elastic beam theory; S3, constructing a bending moment-deflection equal ratio model for correcting ship deflection to obtain ship section deflection distribution data; s4, taking the longitudinal bending moment distribution data and the corresponding ship section deflection distribution data as data samples to obtain a data sample set; s5, constructing a network comprehensive loss function with ship physical constraints and deflection offset supervision loss; a ship deflection prediction network model is obtained based on the multi-layer perceptron neural network; and S6, obtaining corrected ship deflection data according to the ship deflection prediction network model, and obtaining a corrected waterline according to the corrected ship deflection data so as to measure and calculate the displacement of the dry bulk ship. The problem that a traditional metering method is difficult to meet the high-precision transportation accounting requirement is solved.

The invention discloses a magnetic suction quick-change flexible spine endoscopic surgery actuator which comprises a driving mechanism and a quick-change mechanism. The driving mechanism comprises a linear feeding unit, a driving device is arranged on the linear feeding unit, a motion base is installed in the linear feeding unit, and the driving device drives the motion base to do linear motion through a transmission device; the front end of the moving base is connected with the quick-change butt joint unit; an instrument driving unit is arranged on the movement base; the instrument driving unit is a magnetic attraction driving unit; the quick-change mechanism comprises a transmission base, a guide rail sliding block structure is arranged on the transmission base, a driving wire tensioning transmission mechanism and / or an elastic beam transmission mechanism are / is arranged on the guide rail sliding block structure, and the driving wire tensioning transmission mechanism and the elastic beam transmission mechanism are connected with a magnetisable iron sheet through transmission connecting pieces. And the magnetisable iron sheet and the magnetic attraction driving unit are attracted.

The invention provides an MEMS differential capacitive z-axis accelerometer without cross-axis interference and a preparation method thereof, and relates to the technical field of sensors, the accelerometer adopts two (111) crystal orientation silicon wafers to be bonded to form a sandwich structure, the accelerometer comprises a first silicon wafer provided with a first fixed electrode and a first cavity, and a second silicon wafer provided with a second fixed electrode and a second cavity, and a movable mass block, an elastic beam, a second cavity, a movable electrode and a second fixed electrode are integrated in the second silicon wafer. The areas of the upper fixed electrode and the lower fixed electrode are both larger than the area of the middle movable electrode, so that the effective sensing area is constant, and cross axis interference is eliminated from the structure source. The preparation method combines key processes of deep reactive ion etching, TMAH anisotropic wet etching and gold-gold thermocompression bonding. The method has the advantages of high sensitivity, excellent linearity and strong common-mode rejection capability, and is suitable for the field of inertial measurement with strict requirements on precision and stability.

The invention discloses a rigidity distribution optimization method based on an elastic beam driving bionic fish body, and belongs to the field of underwater bionic robots. According to the method, the problem that the swimming performance of the bionic fish body is poor due to the fact that an existing method cannot achieve overall rigidity distribution optimization of the bionic fish body is solved. According to the method, a parameter vector composed of a characteristic size, an elastic modulus, a Poisson's ratio and a damping parameter is selected as an optimization variable, and a center line movement track is calculated through an elastic beam deformation track, a rigid fish head track, a tail peduncle track, a tail fin track and a middle beam deformation track on the two sides of a bionic fish body; the parameter vectors are iteratively searched and updated according to the midline motion trail and the rigidity distribution scheme, so that the optimization range is expanded from the tail to the whole bionic fish body, the flexibility and continuity of the full length of the fish body are realized, the obtained rigidity distribution optimization result is closer to the swimming mechanism of real fish, and the swimming performance of the bionic fish body is improved. The method can be applied to rigidity distribution optimization of the elastic beam driven bionic fish body.

The present application provides a nanoscale leveling, deviation rectifying and alignment device and a semiconductor defect detection system, relating to the technical field of semiconductor detection. In the present application, a plurality of lifting mechanisms are respectively drivingly connected to different positions of a carrier plate, and a lifting mechanism is constituted by a piezoelectric ceramic actuator, a base, an output member and two opposite connecting members. The base and the output member are relatively arranged between the two connecting members. Elastic beams are connected between each connecting member and the base and between each connecting member and the output member. The piezoelectric ceramic actuator is arranged between the base and the output member. By driving the two connecting members to move in the horizontal direction through the piezoelectric ceramic actuator, the output member is driven to move in the vertical direction through the elastic beams, and further the part of the carrier plate connected to the output member is driven to move in the vertical direction. By controlling the displacement amounts of the output members in each lifting mechanism, leveling and deviation rectifying of the wafer on the carrier plate can be achieved. Thus, the present application can achieve high-precision and high-stability leveling and deviation rectifying operations.

The application discloses a MOMES accelerometer based on light intensity modulation and belongs to the technical field of micro-electro-mechanical systems and inertial measurement. The MOMES accelerometer comprises a silicon base, a mass block, fixed anchor points, an elastic beam assembly and double photodetectors. The mass block is suspended on the silicon base through the elastic beam assembly and the fixed anchor points, the fixed anchor points are fixed on the surface of the silicon base, and the fixed anchor points are connected with the elastic beam assembly. The center of the mass block is provided with a light-transmitting hole penetrating through the thickness direction. The double photodetectors are fixed on the surface of the silicon base and located in the light projection area of the light-transmitting hole. When the accelerometer is subjected to external acceleration along the Y-axis direction, the rectangular mass block generates displacement relative to the silicon base, so that the light intensity distribution of the light spot projected by the light-transmitting hole on the double photodetectors is differentially changed. The accelerometer has the advantages of high sensitivity, strong anti-interference capability and good process compatibility and is suitable for high-precision inertial measurement.

This utility model relates to a six-dimensional torque sensor system. Through integrated circuit design and packaging within the six-dimensional torque sensor, high-precision and highly sensitive deformation sensing and electrical signal conversion output are achieved via strain gauges on the elastic beams of the main frame structure. After specific measurement using a half-bridge differential Wheatstone bridge, the measured signal is amplified, filtered, and converted from digital to analog data by an ADC chip before being sent to a lower-level computer. The lower-level computer then reads the acquired sensor measurement signal, forming a high-precision circuit design specifically matched to the six-dimensional torque sensor. The coordinated installation of the strain gauges, half-bridge differential Wheatstone bridge, and ADC chip makes it less susceptible to environmental factors and effectively suppresses noise interference while achieving high signal gain, effectively realizing the measurement output function of the six-dimensional torque sensor.