74 results about "Elastic beam" patented technology

The invention relates to the technical field of sensors, and provides a six-dimensional force and torque force sensor and a preparation method thereof.The six-dimensional force sensor is of a disc-shaped structure and comprises an outer supporting ring, an inner mass block and eight elastic beams connected between the outer supporting ring and the inner mass block; wherein the eight elastic beams comprise a first elastic beam and a second elastic beam which are alternately arranged around the inner mass block, the first elastic beam is a straight beam, the second elastic beam is a special-shaped beam, and a strain gauge preset on the main surface of each elastic beam responds to the strain of the elastic beam to generate a measurement signal; and the force and / or the torque applied to the inner mass block or the outer support ring can be determined according to the measurement signal. Due to the fact that the different elastic beams are different in shape and structure, the strain gauges are preset on the elastic beams of different types and positions, and the bridging mode is set, the output of each Wheatstone bridge is only sensitive to the force or the moment of force in the changed direction and is not sensitive to the force or the moment of force applied in other directions, and the decoupling capacity of the sensor structure is improved to the maximum degree.

This utility model discloses a MEMS capacitive sensor, relating to the field of micro-motor technology. Anchor points and a fixed structure are fixedly arranged. Elastic beams and connecting beams are perpendicular to each other. The anchor points support the inner frame via the elastic beams, making the inner frame suspended. The inner frame, in turn, supports the mass frame via the connecting beams, making the mass fixed structure frame suspended. Movable comb teeth on the mass frame and fixed comb teeth on the fixed structure are spaced and interleaved to form a differential capacitor. The movable and fixed comb teeth use differential output, which can differentially eliminate the capacitance change caused by vibration or acceleration of non-detected axes, preventing signal output. This helps reduce the sensor's cross-axis sensitivity and improve sensor performance.

The invention belongs to the technical field of micro-electro-mechanical system processing, and discloses a system for a stretching test of a nano-film and a manufacturing method of the system. The system comprises a tensile on-sheet testing machine and a probe station, the tensile on-sheet testing machine comprises a main body frame, a probe loading structure, a dowel bar, a plurality of elastic beams, two deformation quantity scales, two pointers, a plurality of suspension folding beams and a plurality of anchor points; the two pointers are respectively used for marking the scales of the two deformation quantity scales; one end of each suspension folding beam is connected with the main body frame, and the other end is fixedly connected with an anchor point; one end of the dowel bar is connected with the main body frame, the other end of the dowel bar is connected with one end of the nano-film sample, and the other end of the nano-film sample is fixedly connected with an anchor point; the main body frame comprises a limiting shaft which is located between the two anchor points. According to the invention, the in-situ online stretching test of the nano-film can be directly realized on the silicon wafer, and the mechanical response characteristics of the deposited film in the device manufacturing process can be truly reflected.

The utility model provides an accelerometer with beams and anchor points on the outer side of a structure, a substrate layer is in an XY plane, and a device layer is located above the substrate layer; the movable mass block is located in the middle of the substrate layer and connected with an outer frame anchored to the substrate layer through anchor points through a first elastic beam unit, a second elastic beam unit, a third elastic beam unit and a fourth elastic beam unit. The first elastic beam unit and the third elastic beam unit are connected through a coupling beam unit which is parallel to the X axis and located on the upper side and the lower side of the movable mass block, and the second elastic beam unit and the fourth elastic beam unit are connected through a coupling beam unit. The detection capacitor structure is respectively connected with the movable mass block and the substrate layer in the middle area of the movable mass block; when the movable mass block moves in the X-axis direction, the capacitance value of the detection capacitor structure changes, so that acceleration detection is achieved, and the accelerometer which can have good dynamic output stability under the condition that the sensitivity of the accelerometer is large is provided.

The invention provides a piezoelectric excitation out-of-phase vibration micro electric field sensitive structure, a sensor and a detection method. The sensor comprises the piezoelectric excitation out-of-phase vibration micro electric field sensitive structure, a substrate (6), an elastic beam (7), a piezoelectric driving unit (1) and a piezoelectric feedback unit (4), the piezoelectric excitation out-of-phase vibration micro electric field sensitive structure comprises an out-of-phase vibration unit (2) and a differential sensing unit (3). Induction electrodes of the differential induction units (3) are arranged on the substrate (6); the elastic beam (7) is connected with the substrate (6) and the out-phase vibration unit (2); the piezoelectric feedback unit (4) and the piezoelectric driving unit (1) at least comprise a piezoelectric material layer and two electrode layers, one end of the piezoelectric feedback unit (4) is fixed on the substrate (6), and the other end of the piezoelectric feedback unit (4) is connected with the elastic beam (7). According to the invention, differential detection can be realized, and crosstalk and environment common-mode noise in an alternating-current excitation signal can be effectively suppressed.

The utility model relates to a feedback key with a balance structure, and when a user presses a key body, pressure is transmitted to a first elastic beam through the key body and a supporting piece in sequence. The first elastic beam has elasticity and can deform in a first deformation space between the first elastic beam and the key body and a second deformation space between the first elastic beam and the machine shell when being pressed. The two ends of the first elastic beam are both fixedly connected with the machine shell, when a user presses the edge area of the key body, due to the fact that the torque is at least partially balanced by the first elastic beam, the user still needs to apply relatively large pressure when pressing the edge area, and therefore when the user presses different positions of the key body, the user can still apply the relatively large pressure; and the pressure value of vibration feedback sent by the metal dome is kept in a relatively narrow range interval. In addition, due to the fact that the first elastic beam is fixedly arranged, shaking of the feedback key can be greatly reduced. The purpose of improving the feedback experience can be achieved.

The application discloses a high-precision six-dimensional force sensor for a humanoid robot and relates to the technical field of six-dimensional force sensors.The high-precision six-dimensional force sensor comprises a shell, a switching inner ring arranged in the shell, a center body arranged in the switching inner ring, four groups of circumferentially distributed elastic beams connecting the switching inner ring with the shell, four groups of circumferentially distributed elastic beams connecting the center body with the switching inner ring, stress sheets arranged on the elastic beams, a force contact plate mounted on the top of the center body, a bottom plate mounted on the bottom of the center body and a circuit board mounted on the bottom of the switching inner ring.Through the arrangement of the two groups of elastic beams, the mutual rigidity switching between the shell, the center body and the switching inner ring can be realized by the sliding of the supporting rods, different elastic beams can participate in work, the switching between the "great force" and "micro operation" can be freely realized, and the sensing precision and sensing range of the force of the humanoid robot are greatly improved.

The invention provides an MEMS differential capacitive z-axis accelerometer without cross-axis interference and a preparation method thereof, and relates to the technical field of sensors, the accelerometer adopts two (111) crystal orientation silicon wafers to be bonded to form a sandwich structure, the accelerometer comprises a first silicon wafer provided with a first fixed electrode and a first cavity, and a second silicon wafer provided with a second fixed electrode and a second cavity, and a movable mass block, an elastic beam, a second cavity, a movable electrode and a second fixed electrode are integrated in the second silicon wafer. The areas of the upper fixed electrode and the lower fixed electrode are both larger than the area of the middle movable electrode, so that the effective sensing area is constant, and cross axis interference is eliminated from the structure source. The preparation method combines key processes of deep reactive ion etching, TMAH anisotropic wet etching and gold-gold thermocompression bonding. The method has the advantages of high sensitivity, excellent linearity and strong common-mode rejection capability, and is suitable for the field of inertial measurement with strict requirements on precision and stability.

The invention discloses a rigidity distribution optimization method based on an elastic beam driving bionic fish body, and belongs to the field of underwater bionic robots. According to the method, the problem that the swimming performance of the bionic fish body is poor due to the fact that an existing method cannot achieve overall rigidity distribution optimization of the bionic fish body is solved. According to the method, a parameter vector composed of a characteristic size, an elastic modulus, a Poisson's ratio and a damping parameter is selected as an optimization variable, and a center line movement track is calculated through an elastic beam deformation track, a rigid fish head track, a tail peduncle track, a tail fin track and a middle beam deformation track on the two sides of a bionic fish body; the parameter vectors are iteratively searched and updated according to the midline motion trail and the rigidity distribution scheme, so that the optimization range is expanded from the tail to the whole bionic fish body, the flexibility and continuity of the full length of the fish body are realized, the obtained rigidity distribution optimization result is closer to the swimming mechanism of real fish, and the swimming performance of the bionic fish body is improved. The method can be applied to rigidity distribution optimization of the elastic beam driven bionic fish body.

This utility model relates to a six-dimensional torque sensor system. Through integrated circuit design and packaging within the six-dimensional torque sensor, high-precision and highly sensitive deformation sensing and electrical signal conversion output are achieved via strain gauges on the elastic beams of the main frame structure. After specific measurement using a half-bridge differential Wheatstone bridge, the measured signal is amplified, filtered, and converted from digital to analog data by an ADC chip before being sent to a lower-level computer. The lower-level computer then reads the acquired sensor measurement signal, forming a high-precision circuit design specifically matched to the six-dimensional torque sensor. The coordinated installation of the strain gauges, half-bridge differential Wheatstone bridge, and ADC chip makes it less susceptible to environmental factors and effectively suppresses noise interference while achieving high signal gain, effectively realizing the measurement output function of the six-dimensional torque sensor.

This invention discloses a high-sensitivity frequency-modulated gyroscope, belonging to the field of microelectromechanical systems (MEMS). Specifically, it includes a driving mass structure, a detection frame structure, an elastic beam structure, a lever coupling structure, a lever amplification structure, a support anchor point, a double-ended fixed resonant beam structure, a resonant beam driving structure, a driving mode driving electrode, a driving mode detection electrode, a detection mode feedback electrode, a double-ended fixed resonant beam driving electrode, and a comb-tooth pair structure. The high-sensitivity frequency-modulated gyroscope structure employed in this invention not only widens the frequency difference between the driving mode and the co-directional interference mode, reducing interference signals, but also achieves digital signal output, exhibiting strong anti-interference capabilities and avoiding quantization noise. Simultaneously, the lever amplification structure amplifies the Coriolis force experienced by the gyroscope's detection mode, increasing the useful signal. These advantages improve the gyroscope's signal-to-noise ratio and sensitivity, contributing to improved gyroscope accuracy.

The application provides a roll-to-roll micro-contact printing positioning mechanism, which comprises a two-degree-of-freedom positioning platform installed on a table top of an optical vibration isolation platform and a support provided with a stamping roller; the two-degree-of-freedom positioning platform comprises two symmetrical support structures which are used for installing a printing roller 7 and adjusting the displacement of the printing roller and the stamping force of the printing roller, a voice coil motor 3 for driving the printing roller to move in the vertical direction or the horizontal direction is arranged at the two support structures of the platform, and the platform is fixedly connected with the printing roller through a center carrier 2002; the carrier is formed with a plurality of flexible parallelogram mechanisms 2001 which are uniformly arranged at the periphery and are connected with the voice coil motor to form a transmission mechanism; the plurality of flexible parallelogram mechanisms of the transmission mechanism are combined into a transmission structure capable of providing two-directional freedom through superposition of elastic beams and in a single-stage series connection mode; and the application can realize higher resolution and quality of a printed image through the characteristics of high-precision positioning, large stroke range and uniform contact force of the mechanism.

The application provides a vertical resonant MEMS electric field sensor based on GIS-SOI-GOS, which is composed of GIS layer, SOI layer and GOS layer. The GIS layer comprises an upper driving electrode, an insulating ring, conductive silicon, a plurality of through holes and a groove on a glass layer, and the upper driving electrode is insulated from the conductive silicon through the insulating ring. The SOI layer is composed of a device layer, a buried oxygen layer and a substrate layer, the device layer is provided with a lower driving electrode, a shielding electrode, an induction electrode, an elastic beam and an anchor point, and the buried oxygen layer and the substrate layer are etched to have a hollow window, which together with the groove on the glass layer below the GIS provides a vertical vibration space for a movable structure. The GOS layer comprises an electric field induction cover plate and a glass layer provided with a window, and is used to establish an electric field induction channel. The application realizes integrated wafer-level preparation of a sensitive structure and vacuum packaging of the vertical resonant MEMS electric field sensor, and has the characteristics of high electric field induction efficiency, high quality factor, low driving voltage and the like.

A vector vibration feeder, comprising: an internal vibration body (20) and an external vibration body (30). A plurality of elastic beams (40) are connected between the internal vibration body (20) and the external vibration body (30); the plurality of elastic beams (40) are arranged radially around the central axis of the internal vibration body (20), and are arranged at intervals in the central axis direction; the plurality of elastic beams (40) are configured to allow the internal vibration body (20) and the external vibration body (30) to perform relative translational motion along the central axis and perform relative rotational motion about the central axis, and also jointly suppress the relative radial motion or tilting motion of the internal vibration body (20) and the external vibration body (30); and the center of mass of the internal vibration body (20) and the center of mass of the external vibration body (30) are both located on the central axis.

A system is directed to robotic gaits. The system includes a robotic gait and an actuator. The robotic gait includes an intermediate body including a first end and an opposite second end, an end effector at the first end of the intermediate body and a point of rotation positioned at the second end of the intermediate body, and a moment arm extending transversely from the second end of the intermediate body. The robotic gait also includes two elastic beams each coupled to the point of rotation at an inner end, the intermediate body being free to rotate around the point of rotation, each of the two elastic beams extending from the point of rotation and fixed at an outer end opposite the inner end. The actuator is configured to provide a reciprocating input to the moment arm at a distance on the moment arm from the point of rotation.

The application relates to the field of electronic sensors and provides a tunnel magnetoresistance accelerometer, which comprises a supporting structure, a mass block, a coil, an elastic beam and four tunnel magnetoresistance elements. The mass block is connected with the elastic beam and is suspended on the supporting structure. The coil is arranged on the surface of the mass block. The four tunnel magnetoresistance elements are arranged on the surface of the supporting structure and are symmetrically distributed around the mass block. The straight line where two tunnel magnetoresistance elements are located is parallel to the X direction, and the straight line where the other two tunnel magnetoresistance elements are located is parallel to the Y direction. The mass block can move under the action of acceleration in the X direction, the Y direction or the Z direction to drive the coil to move. Every two tunnel magnetoresistance elements in the four tunnel magnetoresistance elements constitute a differential magnetic field detection structure, which can sense the magnetic field change generated under the change of the movement state of the coil, and high-precision detection of single-axis, double-axis (X and Y) or three-axis (X, Y and Z) acceleration can be realized by measuring the magnetic field change value.

The application belongs to the technical field of strain type multi-dimensional force sensor, and discloses a six-dimensional force sensor with four L-shaped elastic beam structures and a strain gauge arrangement method, aiming to solve the core problems of strain dispersion, low sensitivity, serious inter-dimension coupling and large mechanical hysteresis of the existing six-dimensional force sensor. The elastic body is an integral structure, and the core includes an outer circular ring, a central loading platform and four L-shaped elastic beams connecting the two, the four L-shaped elastic beams are distributed at equal intervals of 90 degrees along the circumference of the outer circular ring, and the beam body is mainly subjected to directional bending deformation when loaded, so that a stable strain concentration area can be formed; 12 strain gauges are accurately attached to the maximum bending strain area of the beam body based on finite element simulation, and cooperate with the half-bridge double-working-piece Wheatstone bridge to realize six-dimensional force / torque measurement. The application can effectively reduce the inter-dimension coupling error and mechanical hysteresis, improve the measurement sensitivity and long-term stability, and is suitable for high-precision six-dimensional force measurement scenes such as industrial robot precision assembly, aerospace measurement and control, medical minimally invasive surgery and the like.

A flexible six-axis force / torque sensing device, system and method based on U-shaped micro / nano fibers. The device comprises a flexible elastomer (1), a first U-shaped micro / nano fiber (2-1), a second U-shaped micro / nano fiber (2-2), a third U-shaped micro / nano fiber (2-3) and a fourth U-shaped micro / nano fiber (2-4), wherein the flexible elastomer (1) comprises a floating beam (1-1) on the edge thereof, a boss (1-2) in the center, and a first elastic beam (1-3), a second elastic beam (1-4), a third elastic beam (1-5) and a fourth elastic beam (1-6), which are between the boss (1-2) and the floating beam (1-1); the first U-shaped micro / nano fiber (2-1) and the second U-shaped micro / nano fiber (2-2) are respectively embedded in the lengthwise directions thereof into the first elastic beam (1-3) and the second elastic beam (1-4); the third U-shaped micro / nano fiber (2-3) and the fourth U-shaped micro / nano fiber (2-4) are respectively embedded in the directions of the widths thereof into the third elastic beam (1-5) and the fourth elastic beam (1-6); the first U-shaped micro / nano fiber (2-1) and the second U-shaped micro / nano fiber (2-2) are parallel to a surface of the flexible elastomer (1); and the third U-shaped micro / nano fiber (2-3) and the fourth U-shaped micro / nano fiber (2-4) are perpendicular to the surface of the flexible elastomer (1).

The present disclosure relates to a semiconductor switching device with a pressure system. A semiconductor switching device (1) comprises a gate ring (5) and a gate connector element (6) for contacting the gate ring (5) and comprises a pressure system (7) for pressing the gate connector element (6) onto the gate ring (5), the pressure system (7) comprising an insulation ring (11) and a plurality of elastic beams (12) arranged circumferentially on the insulation ring (11), wherein the insulation ring (11) comprises a plurality of support portions (16, 17) for supporting end portions (14, 15) of the elastic beams (12).

The invention discloses a three-axis capacitive accelerometer based on a staggered double-seesaw structure, and belongs to the field of micro-electro-mechanical systems. The accelerometer is structurally characterized by comprising a mass block (1), a snakelike elastic beam (2), a movable comb tooth electrode (3) and a fixed comb tooth electrode (4) which are used for detecting the acceleration of an X axis, a movable comb tooth electrode (5) and a fixed comb tooth electrode (6) which are used for detecting the acceleration of a Y axis, a movable comb tooth electrode (7) and a fixed comb tooth electrode (8) which are used for detecting the acceleration of a Z axis, a staggered double-seesaw (9) and a torsion beam (10). And the staggered double-seesaw (9) drives the movable comb-tooth electrode (7) to generate angular displacement relative to the fixed comb-tooth electrode (8) under Z-axis acceleration, so that the opposite area and capacitance between the movable comb-tooth electrode (7) and the fixed comb-tooth electrode (8) are changed. And the high-sensitivity detection of the Z-axis acceleration is realized by detecting the change of the capacitance. According to the staggered double-seesaw (9) structure, the symmetry of the mass block (1) is improved, and the interference of cross shafts is reduced.

The invention relates to the technical field of wind tunnel resistance balance elements, in particular to a large-load-ratio and low-interference resistance balance element which comprises a fixed supporting end, and the left side end face of the fixed supporting end is used for being fixedly connected with a supporting device. The right side end surface of the load applying end is used for applying a load; and the entity area is located between the fixed supporting end and the loading end and comprises a plurality of elastic beams, connecting rod bodies and nodes which are connected with one another, and strain gauges used for sensing the deformation degree of the elastic beams are arranged on the elastic beams. The outer contour of the resistance balance element is rectangular; the whole resistance balance element is of an up-and-down symmetrical structure. The entity region is obtained through a topological optimization method with stress constraint. In the topological optimization method with stress constraint, the minimization of the overall flexibility of the structure is taken as a design target, the global equivalent maximum stress based on P norm aggregation is taken as a first constraint, the longitudinal average stress of the elastic beam under an axial load is taken as a second constraint, and the longitudinal average stress of the elastic beam under a longitudinal load is taken as a third constraint.

The present application relates to a kind of underground mine tunnel operation unmanned aerial vehicle with circumferential-top double-stage buffer mechanism, it is related to tunnel unmanned aerial vehicle technical field, comprising: frame assembly;Power system;Intelligent obstacle avoidance and three-dimensional scanning system, realize tunnel environment perception, autonomous obstacle avoidance and three-dimensional data acquisition by laser radar and binocular camera;Radial anti-collision buffer mechanism, as first-stage buffer mechanism, accepts radial impact and realizes gradual energy dissipation;Circumferential anti-collision buffer mechanism, as second-stage buffer mechanism, accepts circumferential impact and realizes adaptive rotation energy absorption;Top cross sliding energy absorption mechanism, by cross elastic beam, ball slide and self-resetting component, top vertical impact is converted into horizontal sliding energy.The present application constructs the multiple safety protection system of active obstacle avoidance and passive buffer combination, significantly improves the survival ability and operation reliability of unmanned aerial vehicle in complex collision environment of tunnel.

This invention belongs to the field of mechanical analysis technology and provides a method and system for elastic beam deformation analysis based on fourth-order nonlinear differential equations. The method includes: obtaining the stress-strain relationship and lateral displacement function of the elastic beam; constructing a fourth-order nonlinear mechanical response function of the elastic beam based on the obtained stress-strain relationship and lateral displacement function; solving the constructed fourth-order nonlinear mechanical response function to identify the local buckling location and higher-order shear effects of the elastic beam; taking the minimum weight of the elastic beam as the objective function, considering the displacement and stress constraints of the elastic beam, performing sensitivity analysis of the elastic beam based on the obtained local buckling location and higher-order shear effects, adjusting the nonlinear coefficient of the elastic beam, and completing the elastic beam deformation analysis based on fourth-order nonlinear differential equations.

The invention discloses a suspended moxibustion support system, and belongs to the technical field of traditional Chinese medicine medical instruments. The core of the system is to accurately identify and solve the inherent stability problem of the arched elastic beam during bearing, that is, the arched elastic beam can generate horizontal thrust for driving the supporting units at the two ends to be away from each other. Therefore, the invention provides a targeted lateral restraint device. The device is connected or constrained with the supporting unit and / or the elastic beam assembly to provide constraint counter force pointing to the interior of the system to directly resist the horizontal thrust, and therefore a stable structure is constructed on the premise of not depending on a traditional heavy balance weight. The basic principle uniformly covers a plurality of implementation modes such as a flexible connecting belt, a balancing weight and a limiting frame. According to the invention, ultra-light weight, high stability, rapid deployment and accurate positioning without damage to the stability of the system are cooperatively realized.

The utility model provides an accelerometer with beams and anchor points on the inner side of a structure. The accelerometer comprises a substrate layer and a device layer. The plane where the substrate layer is located is an XY plane; the movable mass block is connected with the upper frame and the lower frame through a first elastic beam unit, a second elastic beam unit, a third elastic beam unit and a fourth elastic beam unit. The upper frame and the lower frame are connected with the substrate layer through the first anchor point and the second anchor point; the first elastic beam unit and the third elastic beam unit are connected through a first coupling beam unit parallel to the X axis, and the second elastic beam unit and the fourth elastic beam unit are connected through a second coupling beam unit parallel to the X axis. The detection capacitor structure is connected between the substrate layer and the movable mass block; when the movable mass block moves in the X-axis direction, the capacitance value of the detection capacitor structure changes, so that acceleration detection is achieved, and the accelerometer which can have good dynamic output stability under the condition that the sensitivity of the accelerometer is large is provided.

This inter-cell member unit comprises a plurality of inter-cell members each disposed between two adjacent battery cells in a first direction on a prescribed plane in a cell stack comprising a plurality of battery cells arranged in one row or a plurality of rows along the first direction. The inter-cell members each extend along a second direction orthogonal to the first direction on the prescribed plane, and protrude from the cell stack. Each of the end portions of the inter-cell members in the second direction: abuts or is connected to a frame part that is disposed outside the cell stack in the second direction and that extends along the first direction; or has a gap between the end portion and the frame part. The inter-cell members each include an elastic beam part having elasticity that allows deformation in the first direction with expansion and contraction of the battery cells, and also having strength in the second direction that is higher than that of the frame part.

The application discloses a variable stiffness rotary joint based on a cross-section crimping elastic beam, and the crimping elastic beam is driven to convert between a flat cross-section and a circular cross-section through mechanical transmission, the wide-range adjustment of the stiffness of the joint is realized by the significant change of the inertia moment of the cross-section, the parasitic displacement in the adjustment process is avoided, and the self-locking characteristic of the worm gear is used to realize the power loss-free stiffness maintenance. The application realizes a variable stiffness joint with the advantages of compact structure, large adjustment range, no parasitic displacement and self-locking maintenance capacity.

The invention discloses a dose adjusting sound production mechanism and a pen type injector, and relates to the technical field of medical instruments, the dose adjusting sound production mechanism comprises a pen body, a dose drum and an elastic piece, the pen body comprises an outer cylinder and a center cylinder, and the dose drum is suitable for rotating relative to the pen body corresponding to a rotation axis during dose setting and dose driving-out; the elastic piece is circumferentially limited between the dosage drum and the fixing positions through at least two fixing positions to form elastic beams, impact teeth are arranged on the inner surface of at least one elastic beam, and the impact teeth act on the fixing teeth under the elastic action of the elastic piece; the dose drum drives the elastic piece to rotate synchronously, so that the impact teeth periodically cross the radial highest positions of the fixed teeth and then impact the recesses between the fixed teeth, prompt sound is generated during mutual impact, and when the single injection dose is adjusted through the dose drum, the sound is made to play a prompt role; as the two ends of the elastic beam are limited by the dosage drum, the impact teeth can be ensured to impact more sufficiently, and clearer prompt sound can be made.

The invention provides a six-dimensional force sensor anti-overload structure, a six-dimensional force sensor and a design method, the six-dimensional force sensor anti-overload structure comprises an elastic body integrally formed by an outer frame body, an elastic beam and a center body, and is characterized in that the outer frame body is provided with a mounting hole, and the center body is correspondingly provided with a limiting round hole; accurate axial gaps and radial gaps are formed between the limiting stoppers inserted into the mounting holes from the outer sides and the inner walls of the limiting round holes. When the sensor works normally, the gap allows the elastic beam to deform freely. When overload is borne, the limiters make contact with the hole wall in time, further deformation of the elastic beam is effectively limited, and therefore the strain gauges are prevented from being damaged, and the elastic body is prevented from plastic deformation. According to the invention, the size of the gap is flexibly adjusted through the replaceable limiter, so that the anti-overload capability is optimized; the structure is compact, the main body design is not changed, comprehensive protection can be provided in all possible deformation directions of the sensor, the reliability of the six-dimensional force sensor in the fields of robots, precision measurement and the like is remarkably improved, and the service life of the six-dimensional force sensor is remarkably prolonged.

The invention relates to the technical field of fluid control, in particular to a micro pump and a fluid control module, the micro pump comprises a shell, an actuator, an elastic supporting part and a limiting part, and the shell is provided with a fluid cavity; the actuator is accommodated in the fluid cavity; the actuator comprises a vibration plate and a piezoelectric plate which are arranged in a stacked mode, the elastic supporting part corresponds to the opening part and comprises a connecting part and an elastic beam, the limiting part protrudes from the inner wall of the fluid cavity and is arranged opposite to the elastic supporting part with a gap therebetween, and the limiting part covers part or all of the first elastic beam forming the elastic supporting part; thus, deformation of the elastic beams is limited within an elastic deformation range, and the situation that the first elastic beam is plastically deformed due to the fact that tensile stress exceeding a yield point caused by excessive displacement of the actuator under the action of inertia force acts on the first elastic beam, and the static position of the actuator changes relative to the design state is avoided. Therefore, the risks of faults, performance degradation and failure of the micro pump are caused.