209 results about "Elastic beam" patented technology

Disclosed in the present invention is a stepped elastic beam for a six-axis force sensor. The stepped elastic beam comprises a central platform, a stepped main beam, a floating beam, rims, and strain gauges, wherein the central platform is connected to the floating beam on the outer side by means of the stepped main beam, and the rims at four corners are connected to the floating beam; 24 strain gauges are pasted to the stepped main beam to form six sets of Wheatstone bridges; and when the force / torque of a certain dimension acts on the center of the stepped elastic beam, the sensor deforms, and the resistance value of the strain gauge at a corresponding position is changed, such that an output voltage of a corresponding bridge is changed, and the numerical value of the force / torque of the dimension can be obtained by measuring the change of the voltage. A structure is simple, the sensitivity is high, and the inter-dimensional coupling is low.

The invention provides a piezoelectric self-feedback excitation type miniature electric field sensor, an electric field detection method and a sensor, and is applied to the technical field of electric field sensors. The piezoelectric self-feedback excitation type miniature electric field sensor comprises a substrate used for supporting a vibration pickup reference structure, a piezoelectric driving structure, a mutual shielding electric field sensing structure and an elastic beam; the piezoelectric driving structure is used for enabling the piezoelectric driving structure to deform under the condition that driving voltage is applied to the piezoelectric driving structure so as to enable the elastic beam to generate vibration; the mutual shielding electric field induction structure is used for responding to the vibration of the elastic beam, and the mutual shielding electric field induction structure outputs an induction current signal in a differential form so as to suppress common-mode noise and detect the amplitude intensity of a to-be-detected electric field; and the vibration pickup reference structure is used for responding to the vibration of the elastic beam and outputting a reference current signal so as to adjust the magnitude of the driving voltage and enable the output sensitivity of the piezoelectric self-feedback excitation type miniature electric field sensor to be a preset value.

The invention discloses a sheet type hinge moment balance structure with built-in bridge correction and a correction method, belongs to the technical field of aerospace force measurement tests, and aims to solve the problem that the precision of a sheet type hinge moment balance is affected by wing loaded deformation. The sheet type hinge moment balance comprises a fixed end, a transmission end and a model end, the transmission end and the transition end are located on the same side of the fixed end, the transmission end is connected with the fixed end, one end of the interference elimination measuring beam is connected with the transmission end, the other end of the interference elimination measuring beam is connected with the transition end, and one end of the measuring elastic beam is connected with the end, away from the fixed end, of the transition end. The other end of the measuring elastic beam is connected with the model end, the length direction of the measuring elastic beam is parallel to a flap pendulum shaft of a wing, a to-be-measured control surface is connected with the model end, the interference eliminating measuring beam can eliminate interference of wing load or installation internal stress of a fixed end on the balance, and accurate measurement of the sheet type hinge moment balance is achieved.

The invention relates to the technical field of sensors, and provides a six-dimensional force and torque force sensor and a preparation method thereof.The six-dimensional force sensor is of a disc-shaped structure and comprises an outer supporting ring, an inner mass block and eight elastic beams connected between the outer supporting ring and the inner mass block; wherein the eight elastic beams comprise a first elastic beam and a second elastic beam which are alternately arranged around the inner mass block, the first elastic beam is a straight beam, the second elastic beam is a special-shaped beam, and a strain gauge preset on the main surface of each elastic beam responds to the strain of the elastic beam to generate a measurement signal; and the force and / or the torque applied to the inner mass block or the outer support ring can be determined according to the measurement signal. Due to the fact that the different elastic beams are different in shape and structure, the strain gauges are preset on the elastic beams of different types and positions, and the bridging mode is set, the output of each Wheatstone bridge is only sensitive to the force or the moment of force in the changed direction and is not sensitive to the force or the moment of force applied in other directions, and the decoupling capacity of the sensor structure is improved to the maximum degree.

The invention discloses an MOMES accelerometer based on light intensity modulation, and belongs to the technical field of micro-electro-mechanical systems and inertial measurement. The MOMES accelerometer comprises a silicon-based base, a mass block, a fixed anchor point, an elastic beam assembly and a double-photoelectric detector. The mass block is hung on the silicon-based base through the elastic beam assembly and the fixed anchor point, the fixed anchor point is fixed on the surface of the silicon-based base, and the fixed anchor point is connected with the elastic beam assembly; the center of the mass block is provided with a light hole which completely penetrates through the thickness direction. And the double photoelectric detector is fixed on the surface of the silicon-based base and is positioned in a light projection area of the light hole. When the accelerometer is subjected to the action of external acceleration along the Y-axis direction, the rectangular mass block generates displacement relative to the silicon-based base, so that the light intensity distribution of a light spot projected by the light hole on the double photoelectric detector generates differential change; the accelerometer has the advantages of high sensitivity, strong anti-interference capability, good process compatibility and the like, and is suitable for high-precision inertial measurement.

The invention discloses a temperature self-compensation Wheatstone bridge structure, and relates to the field of Wheatstone bridges, at least one group of sub-strain gauges which are separated from adjacent arms, are mutually compatible and are attached to the same area of the same elastic beam exist in a four-arm resistor of the Wheatstone bridge structure; the temperature resistance change trends of the compatible sub strain gauges tend to be the same; wherein each group of compatible two sub-strain gauges are closely attached to each other so that the two sub-strain gauges are located in the same area of the same elastic beam, so that the two closely attached sub-strain gauges generate homodromous temperature resistance variation, resistance temperature drift caused by local temperature difference of different arms is counteracted, and temperature self-compensation is realized. According to the invention, temperature compensation can be carried out on the local temperature difference of the force sensor, so that the measurement accuracy of the six-dimensional force sensor is improved.

To provide a connector capable of suppressing a contact failure due to heat.SOLUTION: In a receptacle connector 1, a pair of elastic beam part 11b each comprises: a first arm part 41 that is extended in a direction along a main surface so as to be opposite to an outer peripheral side surface of a side wall part 10b from one end as a connection end; and a second arm part 42 which is extended in a U-character shape while holding the side wall part 10b from the one end connected to the other end of the first arm part 41, and provided with a contact part 42a coming ingo elastic contact with a plug connector at a part along an inter peripheral side surface of the side wall part 10b. The pair of elastic beam parts 11b are arranged while holding the plug connector with the contact parts 42a of each of them. When holding the plug connector, both the arm parts 41 of the pair of elastic beam parts 11b are deformed in a direction separated from each other, and a tip end of the second arm part 42 come into contact with a receptacle housing.SELECTED DRAWING: Figure 3

The invention belongs to the field of agricultural automation equipment, and discloses a double-row leaf mustard harvesting header which comprises a rack, and a transmission device is fixed to the rack; the elastic collecting device is fixed at one end of the rack and comprises a collecting frame and two pairs of tensioning wheel belt sets fixed to the front portion and the rear portion of the collecting frame respectively, and a leaf mustard conveying channel is formed between the two pairs of tensioning wheel belt sets; the clamping and conveying device is arranged in the length direction of the rack and comprises a pair of conveying belts in butt joint with the elastic bundling device. The pair of conveying belts are matched to clamp the leaf mustard conveyed from the leaf mustard conveying channel, and the conveying belts are driven to operate through the transmission device; the adjustable cutting device is installed on the rack and located at the bottom of the clamping and conveying device, and comprises a sliding rail, a hydraulic motor arranged on the sliding rail, a cutting cutterhead fixed to the hydraulic motor, a lead screw lifting machine fixed to the bottom of the sliding rail and a driving motor arranged at the end of the lead screw lifting machine; the two elastic collecting devices and the two clamping and conveying devices are arranged in a matched mode and used for double-row leaf mustard harvesting. The double-row leaf mustard harvesting header is simple in structure, and the cutting position can be flexibly adjusted, so that the applicability is improved.

The invention provides a key and electronic equipment. Relates to the technical field of electronic equipment, and is used for solving the problem of low pressing force detection accuracy of a conventional key. The key comprises a key cap, an elastic beam, a pressure-sensitive feedback assembly, a sensor and a supporting structure. The key cap is provided with a pressing surface for a user to press. The elastic beam is connected with the keycap. The pressure-sensitive feedback assembly comprises a first magnet and a second magnet. The first magnet and the second beam body are oppositely arranged at an interval, and the second magnet is arranged on the elastic beam. The sensor is located on the elastic beam and used for sensing the deformation quantity of the elastic beam. The supporting structure is fixedly connected with the elastic beam and the first magnet. The connecting position of the supporting structure and the elastic beam is located between the sensor and the second magnet.

The invention belongs to the field of agricultural automation equipment, and discloses a leaf mustard harvesting and laying machine which comprises a rack, the rack comprises a supporting plate and a mounting frame connected to one end of the supporting plate, and a walking chassis is arranged at the bottoms of the supporting plate and the mounting frame; the elastic collecting device comprises a collecting frame and two pairs of tensioning wheel belt sets fixed to the collecting frame, and a leaf mustard conveying channel is formed between the two pairs of tensioning wheel belt sets. The clamping and conveying device comprises a pair of conveying belts which are in butt joint with the elastic collecting device; the cutting device is installed at the bottom of the clamping and conveying device, the turnover mechanism is fixed to the installation frame and comprises a pair of circular ring rotating discs, the circular ring rotating discs are provided with elastic clamping rods, and the distance between the elastic clamping rods is adjustable; and the elastic binding device and the clamping and conveying device are obliquely arranged at the end part of the mounting frame. The brassica juncea harvesting and laying machine is simple in structure and capable of laying brassica juncea.

The utility model relates to a pressure touch button and an electronic device thereof, comprising a body, two sides of the bottom of the body are provided with elastic beams which extend outwards and have elastic deformation, the elastic beams are connected with a strain sensing unit in the thickness direction, and the strain sensing unit comprises four strain sensing resistors which are arranged in a quadrilateral manner. When pressure is applied to the body, the pressure can be transmitted to the elastic beams from the body to cause deformation of the elastic beams, the elastic beams are arranged on the two sides of the bottom, so that the deformation of the two elastic beams is different due to the different acting positions of the applied pressure, and the values of the induction strain units installed on the elastic beams are different. Therefore, the functions of pressure identification and touch sensing are realized. Compared with the prior art, the pressure touch key and the electronic device thereof can achieve the purpose of being simple and compact in structure.

The invention discloses a rigidity-adjustable semi-elastic beam-slab connecting structure and a mounting method, and aims to solve the problems that the rigidity of an existing beam-slab connecting device is not easy to adjust and the existing beam-slab connecting device is difficult to disassemble in the using process. The connecting structure comprises a base pedestal made of high-strength steel, a positioning steel sleeve, a high-heat-resistance rubber layer wrapping the connecting piece, shape memory alloy embedded in the rubber layer, a temperature control module, a magnetic force control module, a high-strength bolt and a magneto-rheological shock absorber providing accurate braking force, wherein the magneto-rheological shock absorber is arranged at the top of the trapezoidal connecting piece; and the bridge deck is in contact with the upper bridge deck. A position is reserved on the base pedestal, and all the parts are sequentially installed according to the steps. The device has the advantages of being detachable, adjustable in rigidity, excellent in damping effect, easy and convenient to install and the like, solves the problems that in the using process of an existing beam and slab connecting device, the rigidity is not easy to adjust, and the device is difficult to detach, and is suitable for engineering structures such as bridges and buildings needing to be rapidly detached and controllable in rigidity.

The invention discloses an overlapping structure comb tooth capacitance type Z-axis acceleration sensitive chip and a manufacturing method thereof, and belongs to the technical field of MEMS sensors. The sensitive chip is formed by overlapping a comb tooth capacitor layer and an elastic beam structure layer, and the comb tooth capacitor layer and the elastic beam structure layer are bonded together through an oxide layer. In addition to the advantage of small damping coefficient, the comb capacitor has the following three advantages: 1, the structure of overlapping the comb capacitor and the elastic beam does not need to occupy extra chip area, which is beneficial to microminiaturization and can reduce chip cost at the same time; secondly, the comb capacitor and the elastic beam are overlapped, so that the elastic beam is prevented from occupying the space for distributing the comb teeth around the mass block when the comb capacitor and the elastic beam are placed in a plane, the number of the comb teeth is greatly increased, and the capacitance of the comb structure is effectively increased; and thirdly, the elastic beams can be symmetrically distributed around the mass block due to the overlapping structure, and the cross coupling influence in the X-axis direction and the Y-axis direction is remarkably reduced.

The utility model provides a capacitive vibration sensor, a sealed cavity is formed in the capacitive vibration sensor, and an elastic beam and a movable structure are arranged in the sealed cavity; the fixed end of the movable structure is connected to the tail end of the elastic beam, and the free end, opposite to the fixed end, of the movable structure is suspended in the sealing cavity; an upper groove is formed above the free end of the movable structure, and / or a lower groove is formed below the free end of the movable structure. According to the capacitive vibration sensor, the air flowing space in the sealing cavity, especially the air flowing space near the free end of the movable structure, can be increased by adding the upper groove and / or the lower groove, so that the air damping under high frequency is reduced, and the measurement bandwidth of the capacitive vibration sensor can be increased.

The invention relates to a cantilever beam type capacitance MEMS acceleration sensor. The cantilever beam type capacitance MEMS acceleration sensor comprises an upper wafer layer, a middle wafer layer and a lower wafer layer which are arranged in sequence, the middle wafer layer is used for forming a movable mass block, a fixed electrode and an anchor point; the number of the anchor point is one, the anchor point is located at the first end of the movable mass block, and the anchor point is connected with the first end of the movable mass block through an elastic beam; a differential capacitor group is formed between the movable mass block and the fixed electrode along one or more directions, so that the acceleration in one or more directions can be measured; the upper wafer layer and the lower wafer layer are respectively connected with the middle wafer layer from two sides, and the fixed electrode and the anchor point are connected with the upper wafer layer and / or the lower wafer layer. According to the invention, the requirement of multi-axis detection is met, and the area utilization rate and the working reliability of the movable mass block are improved at the same time.

Provided are a button and an electronic device. The present application relates to the technical field of electronic devices, and aims to solve the problem of low accuracy of pressure detection in existing buttons. The button comprises a cap, an elastic beam, a pressure sensing feedback assembly, a sensor and a supporting structure. The cap is provided with a pressing surface that can be pressed by a user. The elastic beam is connected to the cap. The pressure sensing feedback assembly comprises a first magnet and a second magnet. The first magnet and a second beam body are arranged opposite each other and spaced apart, and the second magnet is arranged on the elastic beam. The sensor is located on the elastic beam and used for sensing a degree of deformation of the elastic beam. The supporting structure is fixedly connected to each of the elastic beam and the first magnet, wherein the joint of the supporting structure and the elastic beam is located between the sensor and the second magnet.

The invention relates to a galloping energy collecting device, in particular to a deformable galloping energy collecting device. The problem that a traditional galloping energy collecting device is low in energy collecting efficiency is solved. A deformable galloping energy collecting device comprises a fixed support, an energy conversion mechanism and a locking mechanism. The fixing support comprises a main supporting rod arranged longitudinally, an inclined face clamping base, two mounting bolts and two mounting nuts. The energy conversion mechanism comprises a square column-shaped blunt end body, a plane clamping seat, an elastic beam, a piezoelectric composite fiber material sheet, four rotating shafts, four pairs of rotating discs, four pairs of rotating arms, four wing-shaped bodies, four convex shafts and four gears; the locking mechanism comprises a T-shaped supporting beam, two clamping columns, two pairs of clamping pieces, two elastic wind receiving pieces, two cantilever beams, two pairs of clamping blocks and four locking pieces. The device is suitable for galloping energy collection.

The multi-mode piezoelectric actuator based on the double-stator structure comprises a base, a guide rail and a piezoelectric driving module are arranged on the base, and the guide rail is connected with a sliding block in a sliding mode; the piezoelectric driving module comprises a stator frame, and one end of the stator frame is integrally provided with a displacement transmission structure. The stator frame at the opposite end of the displacement transmission structure is in threaded connection with a piezoelectric stack pre-pressing bolt, the piezoelectric stack pre-pressing bolt extends into the stator frame and is in compression joint with the piezoelectric stack, and the piezoelectric stack is in compression joint with the inner surface of the displacement transmission side wall; the polarization direction of the piezoelectric stack is parallel to the sliding block; the piezoelectric driving modules are arranged in pairs, a triangular elastic beam is integrally connected between the outer surfaces of the two displacement transmission side walls, the triangular elastic beam is fixedly connected with a driving foot, and the driving foot faces the sliding block and is used for driving the sliding block to do linear motion along the guide rail. The problems of contradiction between high precision and large stroke, a rollback phenomenon and the like of a piezoelectric actuator are solved, macro / micro continuous driving and nano-scale positioning can be achieved, and the micro / micro continuous driving and nano-scale positioning can be achieved only through one set of actuator.

A cantilever type tension sensor with a probe structure relates to the technical field of force measuring structures and comprises a knife handle dynamometer, a knife head is detachably fixed at the head end of the knife handle dynamometer, a sensor signal leading-out wire is detachably fixed at the tail end of the knife handle dynamometer, and an elastomer beam is arranged on the knife handle dynamometer. And a metal resistance strain gauge connected with a sensor signal outgoing line is arranged on the elastomer beam. According to the utility model, the problem that the force value in the process cannot be detected and controlled in real time because the force value is controlled by the current of the motor or experience or displacement in the prior art is solved.

The invention discloses a flexible six-dimensional force / moment sensing device, system and method based on a U-shaped micro-nano optical fiber, and the device comprises a flexible elastomer, a first U-shaped micro-nano optical fiber, a second U-shaped micro-nano optical fiber, a third U-shaped micro-nano optical fiber and a fourth U-shaped micro-nano optical fiber. The flexible elastic body comprises a floating beam on the edge, a boss in the center, and a first elastic beam, a second elastic beam, a third elastic beam and a fourth elastic beam which are arranged between the boss and the floating beam, and the first U-shaped micro-nano optical fiber and the second U-shaped micro-nano optical fiber are embedded into the first elastic beam and the second elastic beam in the length direction respectively; the third U-shaped micro-nano optical fiber and the fourth U-shaped micro-nano optical fiber are embedded into the third elastic beam and the fourth elastic beam respectively in the width direction, the first U-shaped micro-nano optical fiber and the second U-shaped micro-nano optical fiber are parallel to the surface of the flexible elastomer, and the third U-shaped micro-nano optical fiber and the fourth U-shaped micro-nano optical fiber are perpendicular to the surface of the flexible elastomer. The six-dimensional force / torque sensor is high in sensitivity and can realize six-dimensional force / torque sensing.

This utility model discloses a MEMS capacitive sensor, relating to the field of micro-motor technology. Anchor points and a fixed structure are fixedly arranged. Elastic beams and connecting beams are perpendicular to each other. The anchor points support the inner frame via the elastic beams, making the inner frame suspended. The inner frame, in turn, supports the mass frame via the connecting beams, making the mass fixed structure frame suspended. Movable comb teeth on the mass frame and fixed comb teeth on the fixed structure are spaced and interleaved to form a differential capacitor. The movable and fixed comb teeth use differential output, which can differentially eliminate the capacitance change caused by vibration or acceleration of non-detected axes, preventing signal output. This helps reduce the sensor's cross-axis sensitivity and improve sensor performance.

The invention belongs to the technical field of micro-electro-mechanical system processing, and discloses a system for a stretching test of a nano-film and a manufacturing method of the system. The system comprises a tensile on-sheet testing machine and a probe station, the tensile on-sheet testing machine comprises a main body frame, a probe loading structure, a dowel bar, a plurality of elastic beams, two deformation quantity scales, two pointers, a plurality of suspension folding beams and a plurality of anchor points; the two pointers are respectively used for marking the scales of the two deformation quantity scales; one end of each suspension folding beam is connected with the main body frame, and the other end is fixedly connected with an anchor point; one end of the dowel bar is connected with the main body frame, the other end of the dowel bar is connected with one end of the nano-film sample, and the other end of the nano-film sample is fixedly connected with an anchor point; the main body frame comprises a limiting shaft which is located between the two anchor points. According to the invention, the in-situ online stretching test of the nano-film can be directly realized on the silicon wafer, and the mechanical response characteristics of the deposited film in the device manufacturing process can be truly reflected.

An acceleration sensor (100), comprising a frame (110), a mass block (180), elastic beams (130) and varistors (140). The frame (110) has an inner space; the mass block (180) is located in the inner space; each elastic beam (130) comprises at least a first elastic section and a second elastic section, which are connected end to end, the first elastic section being arranged at an angle to the second elastic section; one end of each elastic beam (130) is fixed on the frame (110), and the other end of the elastic beam (130) is fixed to the mass block (180); and several varistors (140) are arranged on the elastic beams (130), and are grouped to form three Wheatstone bridge circuits (161, 162, 163). The elastic beams (130) are bent in multiple sections, such that the plane utilization rate is greater; the arrangement of the varistors (140) realizes the measurement of triaxial acceleration by means of the single mass block; and after the several varistors (140) are arranged on the elastic beams (130), the several varistors (140) are prone to being located in a stress concentration area, such that a corresponding relationship between a resistance value change of the varistors (140) due to stress and an acceleration change of the mass block (180) is more precise, thereby improving the sensitivity and precision of the acceleration sensor (100).

The invention provides an MEMS gyroscope, the MEMS gyroscope comprises a substrate, a device layer, a driving structure, a driving electrode structure, a detection structure, a detection beam and a detection electrode unit, the device layer is fixed on the substrate and comprises a plurality of structure units which are mutually connected and arranged in an array; the driving structure is located in the structure unit and comprises a mass body, a driving frame, an elastic beam, a first folding beam, a first combination beam, a second combination beam and a third combination beam. The driving electrode structure is located in the structural unit and comprises a first capacitor, a second capacitor and a third capacitor; the detection structure is located in the structural unit and comprises a detection frame and a movable electrode frame; the detection beam is located in the structural unit and connected with the movable electrode frame, and the cross endpoint is connected with the mass body; the plurality of detection electrode units are located in the internal area of the detection frame and comprise a fourth capacitor, a fifth capacitor, a sixth capacitor and a seventh capacitor which are arranged in an array. According to the MEMS gyroscope disclosed by the invention, the mechanical sensitivity is improved.

The utility model provides an accelerometer with beams and anchor points on the outer side of a structure, a substrate layer is in an XY plane, and a device layer is located above the substrate layer; the movable mass block is located in the middle of the substrate layer and connected with an outer frame anchored to the substrate layer through anchor points through a first elastic beam unit, a second elastic beam unit, a third elastic beam unit and a fourth elastic beam unit. The first elastic beam unit and the third elastic beam unit are connected through a coupling beam unit which is parallel to the X axis and located on the upper side and the lower side of the movable mass block, and the second elastic beam unit and the fourth elastic beam unit are connected through a coupling beam unit. The detection capacitor structure is respectively connected with the movable mass block and the substrate layer in the middle area of the movable mass block; when the movable mass block moves in the X-axis direction, the capacitance value of the detection capacitor structure changes, so that acceleration detection is achieved, and the accelerometer which can have good dynamic output stability under the condition that the sensitivity of the accelerometer is large is provided.

The invention provides a piezoelectric excitation out-of-phase vibration micro electric field sensitive structure, a sensor and a detection method. The sensor comprises the piezoelectric excitation out-of-phase vibration micro electric field sensitive structure, a substrate (6), an elastic beam (7), a piezoelectric driving unit (1) and a piezoelectric feedback unit (4), the piezoelectric excitation out-of-phase vibration micro electric field sensitive structure comprises an out-of-phase vibration unit (2) and a differential sensing unit (3). Induction electrodes of the differential induction units (3) are arranged on the substrate (6); the elastic beam (7) is connected with the substrate (6) and the out-phase vibration unit (2); the piezoelectric feedback unit (4) and the piezoelectric driving unit (1) at least comprise a piezoelectric material layer and two electrode layers, one end of the piezoelectric feedback unit (4) is fixed on the substrate (6), and the other end of the piezoelectric feedback unit (4) is connected with the elastic beam (7). According to the invention, differential detection can be realized, and crosstalk and environment common-mode noise in an alternating-current excitation signal can be effectively suppressed.

The present invention discloses a multi-stable stiffness-adjustable elastic mechanism, which includes an elastic component and a base component. The elastic component includes a first elastic beam, a second elastic beam and a moving block. Both the first elastic beam and the second elastic beam can generate elastic deformation. The first elastic beam and the second elastic beam are cross-fixed by the moving block. The first elastic beam is connected to the upper disc in the base component, and the second elastic beam is connected to the lower disc in the base component. The upper disc rotates relative to the lower disc, so that the second elastic beam and the first elastic beam are bent and deformed, and initial internal stress is generated inside the first elastic beam and the second elastic beam. Due to the isotropy of the material, the stiffness of the first elastic beam and the second elastic beam in the bending orthogonal direction changes. The stiffness of the elastic mechanism can be adjusted by reciprocating the moving block along the rotation axis direction of the upper disc. By changing the change of the bending angles of the first elastic beam and the second elastic beam, the stiffness change range can be controlled, and the adaptability of the elastic mechanism is improved.

The present invention discloses a microelectromechanical system gyroscope, belonging to the technical field of sensors. The gyroscope includes: a substrate, a mass block group, a driving component, and a detecting component; the mass block group includes four driving mass blocks, an anchor structure, a coupling elastic beam, and a plurality of Z-axis detecting mass blocks. The four driving mass blocks are symmetrically suspended on the substrate through the anchor structure in a centrosymmetric manner, and the four driving mass blocks are connected by the coupling elastic beam; a Z-axis detecting mass block is provided on each driving mass block. Among them, in the driving mode, the driving modes of two adjacent driving mass blocks are out of phase, and out-of-phase vibration can be achieved in the detecting modes of the X-axis, Y-axis, and Z-axis. Therefore, a mechanical differential effect can be achieved, effectively reducing the influence of factors such as external vibration and impact on the gyro performance, improving the anti-vibration characteristics, and thus improving the detection accuracy and stability of the gyroscope.

The invention discloses a small resonant piezoelectric stack pump which comprises a diaphragm pump and a piezoelectric driving mechanism. The piezoelectric driving mechanism comprises a reverse-phase amplification rod, a piezoelectric stack and an elastic beam. The anti-phase amplification rod is composed of a fixed beam, a vertical beam, a driving arm, a flexible hinge, a fixed flat plate and a boss. The piezoelectric stack is clamped and fixed on the power side of the reverse amplification rod through the fixed flat plate and the fixed beam; the diaphragm pump comprises a pump cavity, a one-way valve and an inlet and outlet flow channel and is fixed to the resistance side of a driving arm of the piezoelectric driving mechanism through an elastic beam and a screw. According to the invention, through adoption of the elastic beam, resonance driving of the piezoelectric stack in a relatively low frequency range can be realized, and the driving displacement of the piezoelectric stack is greatly improved; the working mode of the piezoelectric driving mechanism is a first-order resonance mode, and the piezoelectric driving mechanism has the advantages of being high in mechanical quality factor, high in driving performance, small in structure and good in working reliability.

The utility model relates to a feedback key with a balance structure, and when a user presses a key body, pressure is transmitted to a first elastic beam through the key body and a supporting piece in sequence. The first elastic beam has elasticity and can deform in a first deformation space between the first elastic beam and the key body and a second deformation space between the first elastic beam and the machine shell when being pressed. The two ends of the first elastic beam are both fixedly connected with the machine shell, when a user presses the edge area of the key body, due to the fact that the torque is at least partially balanced by the first elastic beam, the user still needs to apply relatively large pressure when pressing the edge area, and therefore when the user presses different positions of the key body, the user can still apply the relatively large pressure; and the pressure value of vibration feedback sent by the metal dome is kept in a relatively narrow range interval. In addition, due to the fact that the first elastic beam is fixedly arranged, shaking of the feedback key can be greatly reduced. The purpose of improving the feedback experience can be achieved.