119 results about "Elastic beam" patented technology

The invention relates to the technical field of sensors, and provides a six-dimensional force and torque force sensor and a preparation method thereof.The six-dimensional force sensor is of a disc-shaped structure and comprises an outer supporting ring, an inner mass block and eight elastic beams connected between the outer supporting ring and the inner mass block; wherein the eight elastic beams comprise a first elastic beam and a second elastic beam which are alternately arranged around the inner mass block, the first elastic beam is a straight beam, the second elastic beam is a special-shaped beam, and a strain gauge preset on the main surface of each elastic beam responds to the strain of the elastic beam to generate a measurement signal; and the force and / or the torque applied to the inner mass block or the outer support ring can be determined according to the measurement signal. Due to the fact that the different elastic beams are different in shape and structure, the strain gauges are preset on the elastic beams of different types and positions, and the bridging mode is set, the output of each Wheatstone bridge is only sensitive to the force or the moment of force in the changed direction and is not sensitive to the force or the moment of force applied in other directions, and the decoupling capacity of the sensor structure is improved to the maximum degree.

The invention discloses an MOMES accelerometer based on light intensity modulation, and belongs to the technical field of micro-electro-mechanical systems and inertial measurement. The MOMES accelerometer comprises a silicon-based base, a mass block, a fixed anchor point, an elastic beam assembly and a double-photoelectric detector. The mass block is hung on the silicon-based base through the elastic beam assembly and the fixed anchor point, the fixed anchor point is fixed on the surface of the silicon-based base, and the fixed anchor point is connected with the elastic beam assembly; the center of the mass block is provided with a light hole which completely penetrates through the thickness direction. And the double photoelectric detector is fixed on the surface of the silicon-based base and is positioned in a light projection area of the light hole. When the accelerometer is subjected to the action of external acceleration along the Y-axis direction, the rectangular mass block generates displacement relative to the silicon-based base, so that the light intensity distribution of a light spot projected by the light hole on the double photoelectric detector generates differential change; the accelerometer has the advantages of high sensitivity, strong anti-interference capability, good process compatibility and the like, and is suitable for high-precision inertial measurement.

The invention discloses a temperature self-compensation Wheatstone bridge structure, and relates to the field of Wheatstone bridges, at least one group of sub-strain gauges which are separated from adjacent arms, are mutually compatible and are attached to the same area of the same elastic beam exist in a four-arm resistor of the Wheatstone bridge structure; the temperature resistance change trends of the compatible sub strain gauges tend to be the same; wherein each group of compatible two sub-strain gauges are closely attached to each other so that the two sub-strain gauges are located in the same area of the same elastic beam, so that the two closely attached sub-strain gauges generate homodromous temperature resistance variation, resistance temperature drift caused by local temperature difference of different arms is counteracted, and temperature self-compensation is realized. According to the invention, temperature compensation can be carried out on the local temperature difference of the force sensor, so that the measurement accuracy of the six-dimensional force sensor is improved.

The invention provides a key and electronic equipment. Relates to the technical field of electronic equipment, and is used for solving the problem of low pressing force detection accuracy of a conventional key. The key comprises a key cap, an elastic beam, a pressure-sensitive feedback assembly, a sensor and a supporting structure. The key cap is provided with a pressing surface for a user to press. The elastic beam is connected with the keycap. The pressure-sensitive feedback assembly comprises a first magnet and a second magnet. The first magnet and the second beam body are oppositely arranged at an interval, and the second magnet is arranged on the elastic beam. The sensor is located on the elastic beam and used for sensing the deformation quantity of the elastic beam. The supporting structure is fixedly connected with the elastic beam and the first magnet. The connecting position of the supporting structure and the elastic beam is located between the sensor and the second magnet.

The utility model relates to a pressure touch button and an electronic device thereof, comprising a body, two sides of the bottom of the body are provided with elastic beams which extend outwards and have elastic deformation, the elastic beams are connected with a strain sensing unit in the thickness direction, and the strain sensing unit comprises four strain sensing resistors which are arranged in a quadrilateral manner. When pressure is applied to the body, the pressure can be transmitted to the elastic beams from the body to cause deformation of the elastic beams, the elastic beams are arranged on the two sides of the bottom, so that the deformation of the two elastic beams is different due to the different acting positions of the applied pressure, and the values of the induction strain units installed on the elastic beams are different. Therefore, the functions of pressure identification and touch sensing are realized. Compared with the prior art, the pressure touch key and the electronic device thereof can achieve the purpose of being simple and compact in structure.

Provided are a button and an electronic device. The present application relates to the technical field of electronic devices, and aims to solve the problem of low accuracy of pressure detection in existing buttons. The button comprises a cap, an elastic beam, a pressure sensing feedback assembly, a sensor and a supporting structure. The cap is provided with a pressing surface that can be pressed by a user. The elastic beam is connected to the cap. The pressure sensing feedback assembly comprises a first magnet and a second magnet. The first magnet and a second beam body are arranged opposite each other and spaced apart, and the second magnet is arranged on the elastic beam. The sensor is located on the elastic beam and used for sensing a degree of deformation of the elastic beam. The supporting structure is fixedly connected to each of the elastic beam and the first magnet, wherein the joint of the supporting structure and the elastic beam is located between the sensor and the second magnet.

A cantilever type tension sensor with a probe structure relates to the technical field of force measuring structures and comprises a knife handle dynamometer, a knife head is detachably fixed at the head end of the knife handle dynamometer, a sensor signal leading-out wire is detachably fixed at the tail end of the knife handle dynamometer, and an elastomer beam is arranged on the knife handle dynamometer. And a metal resistance strain gauge connected with a sensor signal outgoing line is arranged on the elastomer beam. According to the utility model, the problem that the force value in the process cannot be detected and controlled in real time because the force value is controlled by the current of the motor or experience or displacement in the prior art is solved.

This utility model discloses a MEMS capacitive sensor, relating to the field of micro-motor technology. Anchor points and a fixed structure are fixedly arranged. Elastic beams and connecting beams are perpendicular to each other. The anchor points support the inner frame via the elastic beams, making the inner frame suspended. The inner frame, in turn, supports the mass frame via the connecting beams, making the mass fixed structure frame suspended. Movable comb teeth on the mass frame and fixed comb teeth on the fixed structure are spaced and interleaved to form a differential capacitor. The movable and fixed comb teeth use differential output, which can differentially eliminate the capacitance change caused by vibration or acceleration of non-detected axes, preventing signal output. This helps reduce the sensor's cross-axis sensitivity and improve sensor performance.

The invention belongs to the technical field of micro-electro-mechanical system processing, and discloses a system for a stretching test of a nano-film and a manufacturing method of the system. The system comprises a tensile on-sheet testing machine and a probe station, the tensile on-sheet testing machine comprises a main body frame, a probe loading structure, a dowel bar, a plurality of elastic beams, two deformation quantity scales, two pointers, a plurality of suspension folding beams and a plurality of anchor points; the two pointers are respectively used for marking the scales of the two deformation quantity scales; one end of each suspension folding beam is connected with the main body frame, and the other end is fixedly connected with an anchor point; one end of the dowel bar is connected with the main body frame, the other end of the dowel bar is connected with one end of the nano-film sample, and the other end of the nano-film sample is fixedly connected with an anchor point; the main body frame comprises a limiting shaft which is located between the two anchor points. According to the invention, the in-situ online stretching test of the nano-film can be directly realized on the silicon wafer, and the mechanical response characteristics of the deposited film in the device manufacturing process can be truly reflected.

The utility model provides an accelerometer with beams and anchor points on the outer side of a structure, a substrate layer is in an XY plane, and a device layer is located above the substrate layer; the movable mass block is located in the middle of the substrate layer and connected with an outer frame anchored to the substrate layer through anchor points through a first elastic beam unit, a second elastic beam unit, a third elastic beam unit and a fourth elastic beam unit. The first elastic beam unit and the third elastic beam unit are connected through a coupling beam unit which is parallel to the X axis and located on the upper side and the lower side of the movable mass block, and the second elastic beam unit and the fourth elastic beam unit are connected through a coupling beam unit. The detection capacitor structure is respectively connected with the movable mass block and the substrate layer in the middle area of the movable mass block; when the movable mass block moves in the X-axis direction, the capacitance value of the detection capacitor structure changes, so that acceleration detection is achieved, and the accelerometer which can have good dynamic output stability under the condition that the sensitivity of the accelerometer is large is provided.

The invention provides a piezoelectric excitation out-of-phase vibration micro electric field sensitive structure, a sensor and a detection method. The sensor comprises the piezoelectric excitation out-of-phase vibration micro electric field sensitive structure, a substrate (6), an elastic beam (7), a piezoelectric driving unit (1) and a piezoelectric feedback unit (4), the piezoelectric excitation out-of-phase vibration micro electric field sensitive structure comprises an out-of-phase vibration unit (2) and a differential sensing unit (3). Induction electrodes of the differential induction units (3) are arranged on the substrate (6); the elastic beam (7) is connected with the substrate (6) and the out-phase vibration unit (2); the piezoelectric feedback unit (4) and the piezoelectric driving unit (1) at least comprise a piezoelectric material layer and two electrode layers, one end of the piezoelectric feedback unit (4) is fixed on the substrate (6), and the other end of the piezoelectric feedback unit (4) is connected with the elastic beam (7). According to the invention, differential detection can be realized, and crosstalk and environment common-mode noise in an alternating-current excitation signal can be effectively suppressed.

The utility model relates to a feedback key with a balance structure, and when a user presses a key body, pressure is transmitted to a first elastic beam through the key body and a supporting piece in sequence. The first elastic beam has elasticity and can deform in a first deformation space between the first elastic beam and the key body and a second deformation space between the first elastic beam and the machine shell when being pressed. The two ends of the first elastic beam are both fixedly connected with the machine shell, when a user presses the edge area of the key body, due to the fact that the torque is at least partially balanced by the first elastic beam, the user still needs to apply relatively large pressure when pressing the edge area, and therefore when the user presses different positions of the key body, the user can still apply the relatively large pressure; and the pressure value of vibration feedback sent by the metal dome is kept in a relatively narrow range interval. In addition, due to the fact that the first elastic beam is fixedly arranged, shaking of the feedback key can be greatly reduced. The purpose of improving the feedback experience can be achieved.

The invention discloses a broadband piezoelectric energy harvesting system based on multi-frequency cooperative resonance and a power generation method. The system comprises a fixed support, a main resonance subsystem and at least two secondary resonance subsystems. The main resonance subsystem comprises a main elastic beam component and a first piezoelectric conversion element fixedly coupled to the main elastic beam component; each secondary resonance subsystem comprises a secondary elastic beam member and a second piezoelectric conversion element fixedly coupled to the secondary elastic beam member. The near end of the main resonance subsystem is connected to the fixed support through a fixed hinge; the near ends of the sub-resonance subsystems are connected to the fixed support in parallel through movable hinges. The far end of the secondary resonance subsystem can be selectively connected to the fixed support through a fixed hinge or a movable hinge. And the main resonance subsystem and each secondary resonance subsystem are independently configured with inherent frequencies to form a multi-frequency-point resonance structure. Through the main-secondary multi-frequency-point parallel cooperative resonance design, the system can effectively respond under wide-spectrum fluid excitation, and the working frequency band range of energy capture is remarkably widened.

The application discloses a high-precision six-dimensional force sensor for a humanoid robot and relates to the technical field of six-dimensional force sensors.The high-precision six-dimensional force sensor comprises a shell, a switching inner ring arranged in the shell, a center body arranged in the switching inner ring, four groups of circumferentially distributed elastic beams connecting the switching inner ring with the shell, four groups of circumferentially distributed elastic beams connecting the center body with the switching inner ring, stress sheets arranged on the elastic beams, a force contact plate mounted on the top of the center body, a bottom plate mounted on the bottom of the center body and a circuit board mounted on the bottom of the switching inner ring.Through the arrangement of the two groups of elastic beams, the mutual rigidity switching between the shell, the center body and the switching inner ring can be realized by the sliding of the supporting rods, different elastic beams can participate in work, the switching between the "great force" and "micro operation" can be freely realized, and the sensing precision and sensing range of the force of the humanoid robot are greatly improved.

The invention provides an MEMS differential capacitive z-axis accelerometer without cross-axis interference and a preparation method thereof, and relates to the technical field of sensors, the accelerometer adopts two (111) crystal orientation silicon wafers to be bonded to form a sandwich structure, the accelerometer comprises a first silicon wafer provided with a first fixed electrode and a first cavity, and a second silicon wafer provided with a second fixed electrode and a second cavity, and a movable mass block, an elastic beam, a second cavity, a movable electrode and a second fixed electrode are integrated in the second silicon wafer. The areas of the upper fixed electrode and the lower fixed electrode are both larger than the area of the middle movable electrode, so that the effective sensing area is constant, and cross axis interference is eliminated from the structure source. The preparation method combines key processes of deep reactive ion etching, TMAH anisotropic wet etching and gold-gold thermocompression bonding. The method has the advantages of high sensitivity, excellent linearity and strong common-mode rejection capability, and is suitable for the field of inertial measurement with strict requirements on precision and stability.

The invention discloses a rigidity distribution optimization method based on an elastic beam driving bionic fish body, and belongs to the field of underwater bionic robots. According to the method, the problem that the swimming performance of the bionic fish body is poor due to the fact that an existing method cannot achieve overall rigidity distribution optimization of the bionic fish body is solved. According to the method, a parameter vector composed of a characteristic size, an elastic modulus, a Poisson's ratio and a damping parameter is selected as an optimization variable, and a center line movement track is calculated through an elastic beam deformation track, a rigid fish head track, a tail peduncle track, a tail fin track and a middle beam deformation track on the two sides of a bionic fish body; the parameter vectors are iteratively searched and updated according to the midline motion trail and the rigidity distribution scheme, so that the optimization range is expanded from the tail to the whole bionic fish body, the flexibility and continuity of the full length of the fish body are realized, the obtained rigidity distribution optimization result is closer to the swimming mechanism of real fish, and the swimming performance of the bionic fish body is improved. The method can be applied to rigidity distribution optimization of the elastic beam driven bionic fish body.

The application discloses a MOMES accelerometer based on light intensity modulation and belongs to the technical field of micro-electro-mechanical systems and inertial measurement. The MOMES accelerometer comprises a silicon base, a mass block, fixed anchor points, an elastic beam assembly and double photodetectors. The mass block is suspended on the silicon base through the elastic beam assembly and the fixed anchor points, the fixed anchor points are fixed on the surface of the silicon base, and the fixed anchor points are connected with the elastic beam assembly. The center of the mass block is provided with a light-transmitting hole penetrating through the thickness direction. The double photodetectors are fixed on the surface of the silicon base and located in the light projection area of the light-transmitting hole. When the accelerometer is subjected to external acceleration along the Y-axis direction, the rectangular mass block generates displacement relative to the silicon base, so that the light intensity distribution of the light spot projected by the light-transmitting hole on the double photodetectors is differentially changed. The accelerometer has the advantages of high sensitivity, strong anti-interference capability and good process compatibility and is suitable for high-precision inertial measurement.

This utility model relates to a six-dimensional torque sensor system. Through integrated circuit design and packaging within the six-dimensional torque sensor, high-precision and highly sensitive deformation sensing and electrical signal conversion output are achieved via strain gauges on the elastic beams of the main frame structure. After specific measurement using a half-bridge differential Wheatstone bridge, the measured signal is amplified, filtered, and converted from digital to analog data by an ADC chip before being sent to a lower-level computer. The lower-level computer then reads the acquired sensor measurement signal, forming a high-precision circuit design specifically matched to the six-dimensional torque sensor. The coordinated installation of the strain gauges, half-bridge differential Wheatstone bridge, and ADC chip makes it less susceptible to environmental factors and effectively suppresses noise interference while achieving high signal gain, effectively realizing the measurement output function of the six-dimensional torque sensor.

This invention discloses a high-sensitivity frequency-modulated gyroscope, belonging to the field of microelectromechanical systems (MEMS). Specifically, it includes a driving mass structure, a detection frame structure, an elastic beam structure, a lever coupling structure, a lever amplification structure, a support anchor point, a double-ended fixed resonant beam structure, a resonant beam driving structure, a driving mode driving electrode, a driving mode detection electrode, a detection mode feedback electrode, a double-ended fixed resonant beam driving electrode, and a comb-tooth pair structure. The high-sensitivity frequency-modulated gyroscope structure employed in this invention not only widens the frequency difference between the driving mode and the co-directional interference mode, reducing interference signals, but also achieves digital signal output, exhibiting strong anti-interference capabilities and avoiding quantization noise. Simultaneously, the lever amplification structure amplifies the Coriolis force experienced by the gyroscope's detection mode, increasing the useful signal. These advantages improve the gyroscope's signal-to-noise ratio and sensitivity, contributing to improved gyroscope accuracy.

The invention relates to the technical field of rocket final assembly, and discloses a tool platform for a rocket final assembly platform simulation operation test, the tool platform comprises a support structure, a first elastic beam, a second elastic beam, a first placement rack, a second placement rack, a driving mechanism, a self-locking assembly and a self-adaptive support assembly, the support structure is horizontally arranged on the ground; the first elastic beam is arranged above the supporting structure and is perpendicular to the supporting structure; the second elastic beam is arranged above the supporting structure; real-time monitoring can be achieved, active locking of the driving machine is achieved, falling accidents are reduced, and complete protection of monitoring early warning, instant locking and buffering force unloading is formed; and through the self-adaptive supporting assembly with double springs, the supporting structure is self-adaptive, automatically matched with horizontal force of different magnitudes and self-adaptively balanced with the horizontal force, unbalance loading of the first elastic beam and the second elastic beam is avoided, and the deformation and fracture risks are effectively reduced.

The application provides a roll-to-roll micro-contact printing positioning mechanism, which comprises a two-degree-of-freedom positioning platform installed on a table top of an optical vibration isolation platform and a support provided with a stamping roller; the two-degree-of-freedom positioning platform comprises two symmetrical support structures which are used for installing a printing roller 7 and adjusting the displacement of the printing roller and the stamping force of the printing roller, a voice coil motor 3 for driving the printing roller to move in the vertical direction or the horizontal direction is arranged at the two support structures of the platform, and the platform is fixedly connected with the printing roller through a center carrier 2002; the carrier is formed with a plurality of flexible parallelogram mechanisms 2001 which are uniformly arranged at the periphery and are connected with the voice coil motor to form a transmission mechanism; the plurality of flexible parallelogram mechanisms of the transmission mechanism are combined into a transmission structure capable of providing two-directional freedom through superposition of elastic beams and in a single-stage series connection mode; and the application can realize higher resolution and quality of a printed image through the characteristics of high-precision positioning, large stroke range and uniform contact force of the mechanism.

The invention discloses an integral matrix type force transducer and a measuring method, the force transducer comprises a base mechanism, a thermal compensation mechanism, an elastic beam mechanism and a load mechanism, the base mechanism comprises a titanium alloy substrate and a honeycomb buffer layer, the honeycomb buffer layer is installed on the titanium alloy substrate, and the thermal compensation mechanism is installed on the base mechanism. A shear force dispersion unit is arranged between the titanium alloy substrate and the honeycomb buffer layer; the thermal compensation mechanism comprises a carbon fiber layer, a PZT piezoelectric layer and an invar alloy layer. According to the invention, through the innovative mechanical structure design, the measurement precision and the temperature adaptability of the whole matrix type force transducer are significantly improved; aiming at the problem of stress concentration, local stress of a load acting point is dispersed through dual effects of the base mechanism and the elastic beam mechanism, and nonlinear response of the strain gauges is eliminated; in order to solve the problem of thermal compensation failure, the thermal compensation mechanism breaks through the limitation of the consistency of thermal expansion coefficients of a traditional overall metal matrix through material isomerism and active deformation compensation.

The application provides a vertical resonant MEMS electric field sensor based on GIS-SOI-GOS, which is composed of GIS layer, SOI layer and GOS layer. The GIS layer comprises an upper driving electrode, an insulating ring, conductive silicon, a plurality of through holes and a groove on a glass layer, and the upper driving electrode is insulated from the conductive silicon through the insulating ring. The SOI layer is composed of a device layer, a buried oxygen layer and a substrate layer, the device layer is provided with a lower driving electrode, a shielding electrode, an induction electrode, an elastic beam and an anchor point, and the buried oxygen layer and the substrate layer are etched to have a hollow window, which together with the groove on the glass layer below the GIS provides a vertical vibration space for a movable structure. The GOS layer comprises an electric field induction cover plate and a glass layer provided with a window, and is used to establish an electric field induction channel. The application realizes integrated wafer-level preparation of a sensitive structure and vacuum packaging of the vertical resonant MEMS electric field sensor, and has the characteristics of high electric field induction efficiency, high quality factor, low driving voltage and the like.

A vector vibration feeder, comprising: an internal vibration body (20) and an external vibration body (30). A plurality of elastic beams (40) are connected between the internal vibration body (20) and the external vibration body (30); the plurality of elastic beams (40) are arranged radially around the central axis of the internal vibration body (20), and are arranged at intervals in the central axis direction; the plurality of elastic beams (40) are configured to allow the internal vibration body (20) and the external vibration body (30) to perform relative translational motion along the central axis and perform relative rotational motion about the central axis, and also jointly suppress the relative radial motion or tilting motion of the internal vibration body (20) and the external vibration body (30); and the center of mass of the internal vibration body (20) and the center of mass of the external vibration body (30) are both located on the central axis.

The present disclosure relates to a wafer buffer and a method of supporting a wafer wherein the wafer buffer for use in a wafer carrier includes an elastic beam including: a first arm extending from a frame of the wafer buffer in a first direction; and a second arm extending from the first arm in a second direction; and a wafer contact located at an end of the second arm opposite to where the second arm is bonded to the first arm. During normal conditions, the wafer buffer may contact a substrate within the wafer carrier only at the wafer contacts. The substrate may also contact a secondary contact point on the second arm when an impact event occurs. The wafer contact may be a v-shaped trench wafer contact. The wafer contact may include a contact surface having a convex surface configured to contact the substrate at the convex surface.

A system is directed to robotic gaits. The system includes a robotic gait and an actuator. The robotic gait includes an intermediate body including a first end and an opposite second end, an end effector at the first end of the intermediate body and a point of rotation positioned at the second end of the intermediate body, and a moment arm extending transversely from the second end of the intermediate body. The robotic gait also includes two elastic beams each coupled to the point of rotation at an inner end, the intermediate body being free to rotate around the point of rotation, each of the two elastic beams extending from the point of rotation and fixed at an outer end opposite the inner end. The actuator is configured to provide a reciprocating input to the moment arm at a distance on the moment arm from the point of rotation.

The present disclosure provides a modal localization inductive micro electric field sensor and a detection method thereof. The sensor comprises a substrate, a resonator array arranged on the substrate through a support structure, an inductive structure arranged on both sides of the resonator array, the inductive structure comprising a movable structure and a fixed structure, the fixed structure being fixed on the substrate through the support structure, and the movable structure being supported by an elastic beam, a driving electrode arranged on one side of at least one resonator for driving the resonator array to drive the movable structure to vibrate, a perturbation electrode arranged on one side of the elastic beam for applying a voltage perturbation to make the resonator array generate a modal localization phenomenon, and a detection cover plate arranged above the resonator array and the inductive structure, one side of the detection cover plate close to the perturbation electrode being used for shielding the to-be-detected electric field above the inductive structure close to the perturbation electrode, and the other side of the detection cover plate being used for introducing the to-be-detected electric field above the inductive structure away from the perturbation electrode.

The application relates to the field of electronic sensors and provides a tunnel magnetoresistance accelerometer, which comprises a supporting structure, a mass block, a coil, an elastic beam and four tunnel magnetoresistance elements. The mass block is connected with the elastic beam and is suspended on the supporting structure. The coil is arranged on the surface of the mass block. The four tunnel magnetoresistance elements are arranged on the surface of the supporting structure and are symmetrically distributed around the mass block. The straight line where two tunnel magnetoresistance elements are located is parallel to the X direction, and the straight line where the other two tunnel magnetoresistance elements are located is parallel to the Y direction. The mass block can move under the action of acceleration in the X direction, the Y direction or the Z direction to drive the coil to move. Every two tunnel magnetoresistance elements in the four tunnel magnetoresistance elements constitute a differential magnetic field detection structure, which can sense the magnetic field change generated under the change of the movement state of the coil, and high-precision detection of single-axis, double-axis (X and Y) or three-axis (X, Y and Z) acceleration can be realized by measuring the magnetic field change value.

The application belongs to the technical field of strain type multi-dimensional force sensor, and discloses a six-dimensional force sensor with four L-shaped elastic beam structures and a strain gauge arrangement method, aiming to solve the core problems of strain dispersion, low sensitivity, serious inter-dimension coupling and large mechanical hysteresis of the existing six-dimensional force sensor. The elastic body is an integral structure, and the core includes an outer circular ring, a central loading platform and four L-shaped elastic beams connecting the two, the four L-shaped elastic beams are distributed at equal intervals of 90 degrees along the circumference of the outer circular ring, and the beam body is mainly subjected to directional bending deformation when loaded, so that a stable strain concentration area can be formed; 12 strain gauges are accurately attached to the maximum bending strain area of the beam body based on finite element simulation, and cooperate with the half-bridge double-working-piece Wheatstone bridge to realize six-dimensional force / torque measurement. The application can effectively reduce the inter-dimension coupling error and mechanical hysteresis, improve the measurement sensitivity and long-term stability, and is suitable for high-precision six-dimensional force measurement scenes such as industrial robot precision assembly, aerospace measurement and control, medical minimally invasive surgery and the like.

The present invention relates to a method, system, device and medium for simulating Rayleigh surface waves of a high-speed railway earthquake source, and belongs to the technical field of numerical simulation of earthquake waves. A high-speed train is a moving line source in a fixed direction. Based on the train moving load model, the loads applied by the four pairs of axles of each carriage to the sleepers under the track are taken as point sources, and the moving line source is decomposed into a superposition of a series of point sources. Considering the elastic effect of the track rails, a time function of the high-speed railway earthquake source is constructed based on the Euler-Bernoulli elastic beam theory. Considering the absorption and attenuation of seismic waves by the underground medium, the staggered grid finite difference method is used to solve the Kelvin viscoelastic wave equation, and at the same time, considering the free surface boundary, the wave field of the earthquake Rayleigh surface wave excited by the high-speed railway moving earthquake source is numerically simulated. It provides the basis and data for the subsequent waveform inversion based on the high-speed railway earthquake source and the inversion of the high-speed railway earthquake source surface wave dispersion curve.