The invention discloses a heat dissipation
structure based on combination of vertical
interconnection of a glass substrate
chip and a
liquid metal shielding case, the structure is mainly composed of a glass substrate (1), a heat source
chip (2), the
liquid metal shielding case (3), a
metal heat conduction rod (4), a micro-channel (5) and a TGV through hole (8), and the TGV refers to a three-dimensional
interconnection (TGV) technology based on glass through hole manufacturing. A heat dissipation
structure based on combination of glass substrate
chip vertical
interconnection and a
liquid metal shielding cover is mainly characterized in that a heat source chip (2) is vertically interconnected on a glass substrate (1) through a TGV technology, the liquid
metal shielding cover (3) is installed on the heat source chip (2), and heat conduction
silicone grease needs to be filled between the heat source chip and the liquid
metal shielding cover to reduce
heat resistance. A cavity for containing liquid metal (3) is formed in the liquid metal shielding cover, electromagnetic signals can be shielded, efficient heat dissipation of the heat source chip (2) can be achieved, the metal heat conduction rods (4) are machined through the metalized TGV through holes, effective
heat transfer can be conducted on the liquid metal, heat exchange media in the micro-channels (5) in the glass substrate can conduct convective heat exchange on the metal heat conduction rods, and the heat conduction efficiency of the heat source chip (2) is improved. Heat generated by the heat source chip (2) is effectively conducted. The temperature of the heat source chip can be obviously reduced, the low heat dissipation efficiency caused by the low heat
conductivity of the glass substrate is improved, the main heat conduction process comprises the heat source chip (2), the liquid metal shielding cover (3), the metal heat conduction rod (4), the internal heat exchange medium of the micro-channel (5) and the outside, the temperature distribution of the structure in the vertical direction is effectively improved, and the heat dissipation efficiency is improved. The heat dissipation limit of the structure is improved, and the service life of the chip is prolonged. The heat dissipation structure is compact in structure, space-saving and good in heat dissipation capability, is an efficient heat dissipation structure, and has a better application prospect in the heat dissipation field of high-heating chips.