57 results about "Interconnection density" patented technology

Stacked devices and methods of fabrication are provided. Die-to-wafer (D2W) direct-bonding techniques join layers of dies of various physical sizes, form factors, and foundry nodes to a semiconductor wafer, to interposers, or to boards and panels, allowing mixing and matching of variegated dies in the fabrication of 3D stacked devices during wafer level packaging (WLP). Molding material fills in lateral spaces between dies to enable fan-out versions of 3D die stacks with fine pitch leads and capability of vertical through-vias throughout. Molding material is planarized to create direct-bonding surfaces between multiple layers of the variegated dies for high interconnect density and reduction of vertical height. Interposers with variegated dies on one or both sides can be created and bonded to wafers. Logic dies and image sensors from different fabrication nodes and different wafer sizes can be stacked during WLP, or logic dies and high bandwidth memory (HBM) of different geometries can be stacked during WLP.

Stacked devices and methods of fabrication are provided. Die-to-wafer (D2W) direct-bonding techniques join layers of dies of various physical sizes, form factors, and foundry nodes to a semiconductor wafer, to interposers, or to boards and panels, allowing mixing and matching of variegated dies in the fabrication of 3D stacked devices during wafer level packaging (WLP). Molding material fills in lateral spaces between dies to enable fan-out versions of 3D die stacks with fine pitch leads and capability of vertical through-vias throughout. Molding material is planarized to create direct-bonding surfaces between multiple layers of the variegated dies for high interconnect density and reduction of vertical height. Interposers with variegated dies on one or both sides can be created and bonded to wafers. Logic dies and image sensors from different fabrication nodes and different wafer sizes can be stacked during WLP, or logic dies and high bandwidth memory (HBM) of different geometries can be stacked during WLP.

The invention discloses a vehicle gauge chip integrated packaging manufacturing process based on an etching technology. The vehicle gauge chip integrated packaging manufacturing process comprises the following steps: step 1, designing and preparing a substrate; step 2, preprocessing the chip; step 3, chip mounting and interconnection are carried out; step 4, plastic packaging and molding; 5, heat dissipation and reinforcement are carried out; step 6, image rotation correction and defect detection; step 7, performing post-working procedures and testing; high-density interconnection such as TSV (through silicon vias), RDL (redistribution layer) and micro bumps is realized by using an etching technology, the interconnection density is remarkably improved, the RDL wiring layer manufactured by using the etching technology has the line width less than 2 microns, high-density interconnection on the surface of a chip is realized, the integration level is further improved, the micro-channel is manufactured in the plastic package layer by using the etching technology, and the packaging efficiency is improved. And the copper radiating fins are embedded, so that the radiating efficiency is effectively improved, the problem of local heat accumulation caused by integration of the power chip and the logic chip is solved, a gap between the chip and the radiating cover plate is filled with a thermal interface material with high thermal conductivity, and the thermal resistance is reduced.

A plurality of surface interconnects is disposed in a surface interconnect layer on a first surface of a substrate. The surface interconnects extend between a first area and a second area. In some examples, the first area may be configured to couple to an integrated circuit die and the second area may include package contacts. In the second area, a dielectric layer is disposed on the surface interconnect layer, a plurality of raised interconnects are disposed on the dielectric layer, and the raised interconnects are coupled to the surface interconnects through the dielectric layer. The raised interconnects may provide parallel paths for signals propagating through the surface interconnects between the first area and the second area. The raised interconnects may allow surface interconnects to be narrowed and disposed with increased density on the substrate without increasing resistance for signals propagating between the first area and the second area.

The present disclosure relates to ultra-high density, low profile edge card connectors. The present disclosure increases interconnect density by using a different technology approach than currently used in the industry (stamping and molding). By using a microelectromechanical system (MEMS) technology approach, better geometry and impedance control is achieved to reduce impedance discontinuities and feature sizes. In addition, the present disclosure also includes low connector insertion force, no contact wiping, and precise alignment mechanisms between the connector contacts and the connector contacts on the mating substrate.

Provided in the present application are a chip packaging structure, a manufacturing method therefor, and an electronic device. The chip packaging structure comprises a carrier plate, a plastic packaging structure and an interconnection layer. A die comprises a substrate and a wiring layer arranged on the substrate, the surface of the wiring layer facing the interconnection layer and the surface of a filling portion facing the interconnection layer being located in the same plane. The wiring layer comprises a first connection portion, and the interconnection layer comprises a first wire, the first connection portions in two adjacent dies being connected via the first wire. In this way, the first wire in the interconnection layer can interconnect the dies, so as to achieve communication between the dies. In addition, the wiring layer of the die is directly connected to the interconnection layer, that is, connecting the wiring layer and the interconnection layer does not need solder balls as in the prior art, such that it is unnecessary to take into account the limitation of solder balls when setting the density of wiring in the interconnection layer, and the wiring density can be set to the maximum extent according to an actual condition. Thus, the density of wiring in the interconnection layer can be effectively increased, thereby improving the interconnection density of the chip packaging structure.

The invention discloses a three-dimensional packaging structure with an embedded interconnection silicon bridge and a packaging method, and relates to the field of semiconductors. The three-dimensional packaging structure comprises a substrate, and pin bonding pads are arranged on the periphery of the substrate; the interconnection silicon bridge is adhered to the center of the substrate; the conductive column is formed above the pin bonding pad and electrically connected with the pin bonding pad, a packaging layer is further arranged above the substrate, the interconnected silicon bridge and the conductive column are wrapped by the packaging layer, and the upper end face of the conductive column is flush with the upper end face of the packaging layer; the chips are inversely arranged above the packaging layer, part of pins of the multiple chips are electrically connected with the interconnection silicon bridges, the other part of pins of the multiple chips are electrically connected with the conductive columns, interconnection between the chips is achieved through the interconnection silicon bridges, the interconnection density is effectively improved, and then data flow in a system is smoother; a communication channel is formed among a plurality of chips, so that seamless data transmission among the chips is realized, the cooperative capability is improved, the chips with various different functions can be matched conveniently, and the calculation performance and the energy efficiency ratio are improved.

The utility model discloses a chip packaging structure and an electronic device. The chip packaging structure comprises a first substrate; the second substrate and the first substrate are arranged in parallel in a spaced mode; the second substrate is arranged on the first substrate, the resistor connecting piece is arranged on the first substrate, and the resistor connecting piece extends towards the second substrate, so that the first substrate and the second substrate are electrically connected with each other. According to the chip packaging structure provided by the utility model, the first substrate and the second substrate are interconnected by adopting the resistor connecting piece as a transmission medium, so that the first substrate and the second substrate are interconnected together. Compared with a solder ball in the prior art, the resistor connecting piece does not occupy too much space in the horizontal direction, the interconnection density of chip lamination packaging is increased, meanwhile, the ball mounting process is saved, the process is simple, and the cost is low.

The invention discloses a PoP packaging structure containing a silicon bridge. The PoP packaging structure comprises a first packaging body and a second packaging body which are arranged in a stacked mode. The first packaging body comprises a first interconnection substrate and a first integrated circuit layer which are stacked; the second packaging body comprises a second interconnection substrate, and a second integrated circuit layer and a silicon bridge which are interconnected on the second interconnection substrate; the first interconnection substrate, the second interconnection substrate and the silicon bridge are vertically and electrically connected through a through hole. The technical problems that in the prior art, due to the fact that a three-dimensional PoP package lamination depends on large-size solder balls or conductive columns to achieve supporting and interconnection, interconnection density improvement is limited, the technology is complex, the heat dissipation efficiency is low, and structural miniaturization is insufficient are effectively solved.

Stacked devices and methods of fabrication are provided. Die-to-wafer (D2W) direct-bonding techniques join layers of dies of various physical sizes, form factors, and foundry nodes to a semiconductor wafer, to interposers, or to boards and panels, allowing mixing and matching of variegated dies in the fabrication of 3D stacked devices during wafer level packaging (WLP). Molding material fills in lateral spaces between dies to enable fan-out versions of 3D die stacks with fine pitch leads and capability of vertical through-vias throughout. Molding material is planarized to create direct-bonding surfaces between multiple layers of the variegated dies for high interconnect density and reduction of vertical height. Interposers with variegated dies on one or both sides can be created and bonded to wafers. Logic dies and image sensors from different fabrication nodes and different wafer sizes can be stacked during WLP, or logic dies and high bandwidth memory (HBM) of different geometries can be stacked during WLP.

The invention relates to a three-dimensional heterogeneous integrated interface structure based on hybrid bonding and a stress buffer layer, and belongs to the technical field of semiconductor packaging. The interface structure sequentially comprises a copper-copper bonding layer, a polymer micro bump array, a carbon nanotube vertical interconnection bundle, a bonding interface layer, a stress self-adaptive buffer layer, a topological optimization power grid and a substrate from top to bottom, wherein an embedded coaxial interconnection structure and a graphene electromagnetic isolation wall are arranged in the topological optimization power grid. Wherein the stress self-adaptive buffer layer is formed by manufacturing polymer micro-lattices on the surface of the bonding interface layer, filling the micro-lattices with a mixture of negative thermal expansion ceramic particles and epoxy resin, and embedding shape memory alloy micro-springs. And the chip is bonded with the interface structure through the copper-copper bonding layer. The device has the advantages of being high in interconnection density, good in mechanical reliability and excellent in signal integrity, and high-performance three-dimensional heterogeneous integration can be achieved.

The invention provides a three-dimensional chip packaging structure and a manufacturing method, and relates to the technical field of integrated circuit manufacturing. The display device at least comprises a first substrate; the second substrate is arranged on the first substrate, and an accommodating space is formed between the second substrate and the first substrate; and the chip stacking structure is arranged in the accommodating space between the first substrate and the second substrate, and the chip stacking structure is electrically connected with the second substrate and the first substrate. According to the invention, the integrated three-dimensional integration of multiple chips can be realized, the integration level of the transistor and the function unit is obviously improved, the interconnection density and the space utilization rate are optimized, the problems of insufficient interconnection density, bottleneck of electrical interconnection performance and the like of the traditional packaging are solved, and the packaging efficiency is improved. The chip size is reduced, the data transmission rate and the overall efficiency of the system are effectively improved, and high-speed and low-delay data interaction is achieved.

The invention provides a photoelectric co-packaging structure and a preparation method thereof, and the method comprises the steps: a device layer in a provided silicon optical wafer at least comprises a device region which is provided with an optical port and a first bonding pad; a leading-out column penetrating through a device area is formed, a first interconnection layer electrically connected with a first bonding pad and the leading-out column is formed on the face, away from a substrate layer, of a device layer, then an electric chip is bonded to the face, away from the device area, of the first interconnection layer, and a second bonding pad exposed out of the electric chip is electrically connected with the first interconnection layer. The substrate layer is removed to expose the leading-out columns and electrically connected with the second interconnection layer through the leading-out columns, the silicon optical wafer is divided to obtain a chip structure comprising a single device area and a light outlet exposed on the side wall, and after the face, away from the device area, of the second interconnection layer is electrically connected with the substrate, the optical fiber array is optically interconnected with the light outlet. The obtained photoelectric co-packaging structure is high in interconnection density, low in interconnection loss, small in size and high in reliability, the production efficiency is improved, and the production cost is effectively reduced.

The invention provides a packaging structure and a forming method thereof, a bridging chip in a wiring insertion layer is in bonding connection with a chip packaging assembly through a first organic interconnection layer and a second organic interconnection layer, and the first organic interconnection layer and the second organic interconnection layer are bonded to form an organic hybrid bonding structure. The bridging chip does not need to be connected with the chip packaging assembly through soldering tin, so that the reliability problem of the packaging structure caused by defects (cavities or cracks) of welding points does not exist, and the packaging structure provided by the invention has good reliability; moreover, the interconnection density of the bridging chip and the devices in the chip packaging assembly can be improved, the denser I / O interconnection is realized, the transmission density is improved, and the delay is reduced.

The invention discloses a multi-mode interference type on-chip waveguide crossing device, which comprises a central multi-mode interference part in a prism shape, the central multi-mode interference part comprises N connecting side surfaces and N interval side surfaces, one interval side surface is arranged between every two connecting side surfaces, and the N connecting side surfaces directly face each other in pairs; n waveguide parts, wherein each waveguide part is fused on a corresponding connection side surface; wherein N is an even number greater than or equal to 6. According to the invention, by increasing the number of ports of the crossed waveguide, flexible routing and exchange of more optical signals can be realized, and the interconnection density and the data throughput capacity of the on-chip waveguide crossing device are remarkably improved. Meanwhile, the high-order cross structure of the on-chip waveguide cross device is beneficial to reducing the total number of cross units required on a chip, reducing the overall insertion loss and crosstalk accumulation, and optimizing the layout area and the power consumption efficiency.

The preparation method of the TSV vertical interconnection structure comprises the following steps: firstly, providing a plurality of substrates, wherein each substrate comprises a first surface and a second surface which are oppositely arranged; forming a thin film layer on the first surfaces of the plurality of substrates, wherein the thin film layer comprises a first insulating layer and a bonding layer; and etching from the surfaces of the plurality of thin film layers along the thickness direction of the substrate to form through holes. And then forming metal columns in the through holes to obtain the bonding substrate. And finally, bonding the plurality of bonding substrates, so that the metal columns of different bonding substrates are vertically conducted. According to the TSV vertical interconnection structure, a high-precision and high-aspect-ratio TSV structure can be realized, and the etching process difficulty is reduced. And through repeated stacking, the TSV structure with any depth-to-width ratio can be realized. The interconnection density and the bandwidth are improved, the power consumption and the delay are reduced, and the method is suitable for the application fields of high-performance calculation, memories, sensors and the like.

To bond multiple dies together at a fine pitch required to achieve a desired interconnect density.SOLUTION: A microelectronic assembly 100 includes: a first layer having dies 114-1 and 114-2 surrounded by an insulating material 133; a second layer on the first layer having conductive paths 196 through a dielectric material, the conductive paths 196 including a conductive trace and a conductive via having an inverted-trapezoid shape; and a third layer on the second layer having a glass layer and a conductive through-glass via (TGV 110), wherein the conductive TGV 110 is electrically coupled to the conductive paths 196, and the dies 114-1 and 114-2 are electrically coupled to the conductive TGV 110 by the conductive paths 196.SELECTED DRAWING: Figure 1A

The utility model provides a three-dimensional stacked high-density packaging structure based on a multi-core particle local interconnection bridge, which at least comprises a substrate, a first chip layer, a second chip layer and an interconnection bridge, a plurality of solder balls are arranged on the substrate, a plurality of core particles of the first chip layer are bonded and packaged with the substrate through the solder balls, and the first chip layer and the second chip layer are bonded and packaged through the interconnection bridge. The second chip layer is arranged above the first chip layer, the interconnection bridge is arranged between the second chip layer and the first chip layer, core particles of the second chip layer and corresponding core particles of the first chip layer are packaged in a bonding mode through solder balls, meanwhile, high-density interconnection is formed through the interconnection bridge, and the line width / line distance of the interconnection layer is smaller than 10 microns / microns. According to the utility model, the interconnection density is effectively improved, the packaging size is obviously reduced, and compared with the prior art, the problem of mismatch of thermal expansion coefficients can be improved.

The embodiment of the invention provides a fan-out type system-in-package method and a fan-out type system-in-package structure. The fan-out type system-in-package method comprises the following steps: forming at least one rewiring layer on a temporary carrier; forming a plurality of conductive columns on the first surface of the rewiring layer; mounting a plurality of first chips on the first surface of the rewiring layer; forming a first plastic package layer wrapping the conductive columns and the first chip; cutting the first plastic package layer, and then removing the temporary carrier to form a plurality of independent intermediate package bodies; mounting a plurality of second chips on the second surface of the rewiring layer; forming a second plastic package layer wrapping the second chip; and thinning the first plastic packaging layer to expose the first chip and the conductive columns. According to the method, the rewiring layer is used for replacing a packaging substrate, so that the material cost is reduced, and the interconnection density is greatly improved; the signal transmission path is shortened, the signal loss is reduced, the packaging structure is more suitable for high-frequency application, and meanwhile, the packaging thickness is reduced after a packaging substrate is cancelled; the re-wiring layer is firstly formed and then the chip is mounted, so that the chip is not wasted and the cost is saved.

Disclosed is a back-to-back three-dimensional stacked fan-out packaging structure and a preparation method thereof, and also a packaging module utilizing the packaging structure and a preparation method thereof. The solution provided by the present invention does not require chip TSV stacking, and the stacked chips may be electrically connected in the shortest vertical interconnection manner, thereby ensuring a high interconnection density and transmission performance while reducing packaging costs and improving packaging yield.

The invention provides a chip packaging structure, a manufacturing method thereof and electronic equipment, the chip packaging structure comprises a carrier plate, a plastic packaging structure and an interconnection layer, a bare chip comprises a substrate and a wiring layer arranged on the substrate, and the surface, facing the interconnection layer, of the wiring layer and the surface, facing the interconnection layer, of a filling part are located in the same plane; the wiring layer comprises a first connecting part, the interconnection layer comprises a first wire, and the first connecting parts of two adjacent bare chips are connected through the first wire. Thus, interconnection between the bare chips can be realized through the first wires in the interconnection layer, so that communication between the bare chips is realized. Moreover, the wiring layer and the interconnection layer of the bare chip are directly connected, that is, the wiring layer and the interconnection layer do not need to be connected through a solder ball like the prior art, so that the limitation of the solder ball does not need to be considered when the wiring density in the interconnection layer is set, and the wiring density can be set to the maximum extent according to the actual situation. Therefore, the wiring density in the interconnection layer can be effectively increased, and the interconnection density of the chip packaging structure is improved.

The embodiment of the invention discloses a chip packaging structure, a preparation method thereof and electronic equipment, and relates to the technical field of semiconductors. The chip packaging structure comprises a first substrate, a first chip electrically connected to the first substrate, a plurality of second chips stacked on the first chip, switching structures located on the plurality of second chips, lead bonding areas connected with the second chips and first leads of the first substrate, the second lead is connected with the lead bonding area of the second chip and the switching structure; and the third lead is connected with the first substrate and the switching structure. And along the thickness direction of the first substrate, the lead bonding areas of the two adjacent second chips are arranged in a staggered manner. By arranging the switching structure, the second lead and the third lead and adopting the leads (such as the first lead, the second lead and the third lead) to realize interconnection between the first chip and the second chip, the setting area of I / O in the second chip can be increased, the number of I / O in the second chip can be increased, the interconnection density is effectively improved, and the bandwidth performance is improved.

The invention discloses a circuit board and a manufacturing method thereof, and electronic equipment, and the circuit board comprises at least two core boards which are arranged in a laminated manner, and an interconnection board is arranged between every two adjacent core boards; wherein a first embedding part and a second embedding part are arranged on the two opposite sides, facing the two adjacent core plates connected with the interconnection plate, of the interconnection plate respectively, the two adjacent core plates are provided with a third embedding part and a fourth embedding part corresponding to the first embedding part and the second embedding part respectively, the first embedding part is embedded in the third embedding part, and the second embedding part is embedded in the fourth embedding part. And the two adjacent core plates are connected. According to the mode, the circuit board effectively realizes embedded connection between different core boards through the interconnection board, the interconnection density is remarkably improved, the lamination frequency can be effectively reduced, the technological process is simplified, and the reliability is relatively high, so that the production efficiency and the product quality can be effectively improved.

Techniques and mechanisms for high interconnect density communication with an interposer. In some embodiments, an interposer comprises a substrate and portions disposed thereon, wherein respective inorganic dielectrics of said portions adjoin each other at a material interface, which extends to each of the substrate and a first side of the interposer. A first hardware interface of the interposer spans the material interface at the first side, wherein a first one of said portions comprises first interconnects which couple the first hardware interface to a second hardware interface at the first side. A second one of said portions includes second interconnects which couple one of first hardware interface or the second hardware interface to a third hardware interface at another side of the interposer. In another embodiment, a metallization pitch feature of the first hardware interface is smaller than a corresponding metallization pitch feature of the second hardware interface.

An integrated circuit package provides a high bandwidth interconnect between wafers using a very high density interconnect using a silicon bridge or a multi-layer flex between wafers. In some embodiments, more than one wafer may be mounted and connected with a rigid silicon bridge onto a common substrate. This common substrate can be matched, with respect to their coefficients of thermal expansion (CTE), to the silicon wafer. The CTE matched substrate can reduce the thermal mechanical stress on the wafers and the rigid silicon bridge interconnect. In some embodiments, a thinned silicon bridge is utilized to interconnect wafers which are mounted on separate glass substrates. The thinned bridge would allow for mechanical compliance between the wafers. In some embodiments, the wafers can be mounted onto separate glass substrates and attached with a fine pitch multi-layer flex structure which provides compliance between the wafers.

Embodiments of the present application disclose a semiconductor structure and a manufacturing method thereof. The semiconductor structure includes: a substrate; a gate structure located on the substrate; an interconnect structure, the interconnect structure including a first structure and a second structure, the second structure protruding from the first structure; wherein, the first structure is connected to the substrate, and the second structure is connected to the top of the gate structure. The interconnect structure of the present application is in contact with the substrate and the gate structure, which can reduce the occupied volume of the interconnect structure, increase the interconnect density, and improve the interconnect process window.

This invention belongs to the field of advanced packaging technology, specifically relating to a multi-chip optical interconnect architecture and manufacturing method. The manufacturing method includes the following steps: S1, depositing a hard mask on the substrate surface; S2, spin-coating photoresist on the hard mask, pre-baking, alignment exposure, development, and post-baking to transfer the lower layer pattern onto the hard mask, followed by photoresist removal and cleaning; S3, manufacturing a surface ion-exchange optical waveguide; S4, printing matrix electrodes and their circuitry on the substrate surface to achieve a controllable electric field and form the lower layer optical waveguide; S5, depositing, photolithography, and etching on the substrate surface to form the upper layer optical waveguide; S6, mounting a photonic integrated chip and an arrayed waveguide grating router on the substrate surface and aligning and coupling them with the upper and lower layer optical waveguides; S7, depositing a cladding layer on the substrate surface and polishing to expose the upper surface of the photonic integrated chip. This invention effectively reduces optical path crossings and increases interconnect density, thereby achieving high-bandwidth, low-loss optical interconnects between multiple chips on a single chip.

The embodiment of the utility model discloses a packaging module and a packaging circuit, the packaging module comprises at least two assemblies and at least one connector used for realizing interconnection of the assemblies through corresponding connecting lines, and the assemblies are chips or functional modules. Therefore, according to the embodiment of the utility model, the interconnection between the chips, between the functional modules or between the chips and the functional modules can be realized through the connector, the transmission distance between the components is shortened, the loss is reduced, and meanwhile, as the transmission distance between the components is shortened and the required driving is reduced, the design of the interconnection interface can be simplified, and the cost is reduced. Therefore, the size of the interconnection interface can be reduced, and the interconnection density is improved.

The application provides an optical communication receiving assembly and a preparation method thereof, and aims to solve the technical problem that the integration density, structural reliability and optical integrity are difficult to be optimized simultaneously in the packaging of an optical receiving module. The scheme realizes high-density vertical interconnection of a photodetector array and a receiving circuit through hybrid bonding, and forms a sealed cavity by coffer bonding a transparent cover plate after the micro-lens array is manufactured, so that the micro-lens array is in a physical isolation state all the time, and damage to the optical structure is effectively avoided. Meanwhile, low parasitic and short-path signal vertical extraction is realized through a first TSV column. Through the collaborative design of hybrid bonding, cavity protection and TSV vertical interconnection, the application improves the integration density, reduces the parasitic parameters, reduces the packaging size, and improves the structural integrity and optical stability in the process, effectively solving the problems of low interconnection density, large packaging size, fragile structure and easy damage to optical performance in the background art.

This application discloses a three-dimensional packaging structure and its formation method. The three-dimensional packaging structure includes: a substrate, the substrate having opposing first and second surfaces, an electronic component mounted on the first surface of the substrate and electrically connected to the substrate; a first molding compound layer located on the first surface of the substrate covering the electronic component; a semiconductor chip mounted on the second surface of the substrate and electrically connected to the substrate; an adapter plate having opposing third and fourth surfaces, the third surface of the adapter plate being mounted on the second surface of the substrate surrounding the semiconductor chip, and the adapter plate being electrically connected to the substrate; a second molding compound layer located on the second surface of the substrate covering the semiconductor chip and the adapter plate, the surface of the second molding compound layer away from the substrate exposing the fourth surface of the adapter plate; and a plurality of first solder bumps located on the fourth surface of the adapter plate being electrically connected to the adapter plate. Increasing the device interconnection density of the solder bumps effectively reduces the warpage of the three-dimensional packaging structure and improves the stability of the three-dimensional packaging structure.