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80results about How to "Improve interconnect density" patented technology

Spatially-arranged chemical processing station

The present invention discloses a station, e.g., for IC fabrication with a flexible configuration. It consists of an array of processing chambers, which are grouped into processing modules and arranged in a two-dimensional fashion, in vertical levels and horizontal rows, and is capable of operating independent of each other. Each processing chamber can perform electroless deposition and other related processing steps sequentially on a wafer with more than one processing fluid without having to remove it from the chamber. The system is served by a single common industrial robot, which may have a random to access to all the working chambers and cells of the storage unit for transporting wafers between the wafer cassettes and inlet / outlets ports of any of the chemical processing chambers. The station occupies a service-room floor space and a clean-room floor space. The processing modules and the main chemical management unit connected to the local chemical supply unit occupy a service-room floor space, while the robot and the wafer storage cassettes are located in a clean room. Thus, in distinction to the known cluster-tool machines, the station of the invention makes it possible to transfer part of the units from the expensive clean-room area to less-expensive service area.
Owner:LAM RES CORP

Wafer-level chip size encapsulation technology for GaAs (gallium arsenide) CCD (Charge Coupled Device) image sensor

The invention relates to a wafer-level chip size encapsulation technology for a GaAs (gallium arsenide) CCD (Charge Coupled Device) image sensor. The technology is characterized by comprising the following steps of: (1) firstly bonding a glass wafer and a GaAs wafer through a resin adhesive so as to protect the active surface of a chip and improve the strength of a chip wafer; (2) manufacturing a trapezoidal-slot structure by a wet corrosion or physical method so as to reduce the lining thickness of a chip interconnection area; (3) manufacturing vertical interconnected through holes by a dry etching technology so as to expose a pad on the active surface of the chip; (4) sputtering seed-layer metal and electroplating, and manufacturing a hole metalizing and RDL layer to realize circuit interconnection from the active surface to the back surface of the chip; (5) manufacturing a passivation layer, a UBM layer and raised points; and (6) finally scribing to form an independent encapsulation chip. As the trapezoidal-slot structure on the back realizes thickness reduction only in the area with the pad, the cost is effectively lowered; and through the interconnection of the vertical through holes, the encapsulation interconnection density can be improved, and the signal transmission path is shortened.
Owner:SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI

Wafer level packaging method and packaging structure for image sensor

InactiveCN103855173AOvercoming the problem of poor reliabilityOvercome costsRadiation controlled devicesMetal interconnectEngineering
The invention provides a wafer level packaging method and packaging structure for an image sensor. The packaging method comprises the steps that a first passivation layer is formed on the active face of a sensing wafer; at least one metal fan-out electrode is deposited on the first passivation layer; the active face of the sensing wafer and a transparent substrate are bonded; a second passivation layer is deposited on the back face of the sensing wafer, and a grooving mark is carved on the second passivation layer; grooves are formed in the grooving mark; a third passivation layer is manufactured on the back face of the sensing wafer; through holes penetrating through the metal fan-out electrodes are formed in the bottoms of the grooves; metal interconnecting wires are manufactured to guide the metal fan-out electrodes out to the back face of the third passivation layer through the through holes; a fourth passivation layer completely covering the metal interconnecting wires is manufactured; an opening is etched in the fourth passivation layer to expose one ends of the metal interconnecting wires; a UBM layer and soldering tin protrusions are manufactured on the fourth passivation layer. The wafer level packaging method and packaging structure are high in reliability, low in cost, small in signal delay and high in interconnecting density.
Owner:SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI

Solid-state hot-compression low-temperature bonding method using nickel micro needle cones

The invention provides a solid-state hot-compression low-temperature bonding method using nickel micro needle cones. A layer of metallic nickel featured by being bestrewed with needle cones is manufactured on one side of a to-be-bonded welding spot, and welding flux is used on the other side of the to-be-bonded welding spot. A colligator is used for being aligned with the electrically interconnected welding spot, the welding spot is heated to a certain temperature not higher than the solder cap melting point, and a bonding pressing force is exerted and maintained for some time so that inlay bonding of needle cones and welding flux at the position of the interconnection point is achieved. A thin layer of precious metal is electroplated on the layer of nickel micro needle cones to prevent the surface from being oxidized prior to bonding. After bonding is finished, the welding spot is placed at a certain temperature for heat treatment for some time to achieve diffusion reaction and remove holes. The solid-state hot-compression low-temperature bonding method using nickel micro needle cones is capable of overcoming some defects in the prior art in novel encapsulation technology application, avoids thermal damage caused to components by reflow soldering process temperature, and resolves the problems of welding flux spreading in molten welding and solid-liquid phase fast reaction.
Owner:SHANGHAI JIAO TONG UNIV

Radio frequency module three-dimensional stacking structure and manufacturing method thereof

The invention discloses a radio frequency module three-dimensional stacking structure and a manufacturing method thereof. The radio frequency module three-dimensional stacking structure comprises a glass cap layer, a glass carrier layer, a glass transfer frame layer, a silicon-based carrier layer, a ceramic packaging layer and radio frequency chips. The glass carrier layer, the glass transfer frame layer and the silicon-based carrier layer are all provided with through holes and interconnection lines; the glass cap layer, the glass carrier layer, the glass transfer frame layer, the silicon-based carrier layer and the ceramic packaging layer are stacked and interconnected in sequence from top to bottom; and the radio frequency chips are located on the upper surface of the silicon-based carrier layer and the upper surface of the glass carrier layer, and are connected with circuit bonding pads on the carrier layer through lead structures. Through combination and stacking of high-density substrates made of various materials, the radio frequency module is better in performance and higher in density, and the integration process is simple, flexible, better in reliability and the like.
Owner:SOUTHWEST CHINA RES INST OF ELECTRONICS EQUIP

Aluminum-substrate-based three-dimensional lamination chip packaging structure and preparation method thereof

The invention discloses an aluminum-substrate-based three-dimensional lamination chip packaging structure and a preparation method thereof. The structure comprises at least two layers of functionalized aluminum substrates, chips, aluminum-based dams, epoxy resin base bodies, a side metalized interconnection layer, and a signal leading-out layer. The functionalized aluminum substrates arranged in parallel have two opposite first surfaces and second surfaces. Chips are pasted on the second surfaces. The aluminum-based dams are pasted on the first surfaces. The epoxy resin base bodies are arranged between the functionalized aluminum substrates and the aluminum-based dams. The side metalized interconnection layer and the signal leading-out layer are arranged at the outer sides of the packaging structure in an encircling mode. The functionalized aluminum substrates contain aluminum-buried interconnection layers and through holes; and the chips and the aluminum-buried interconnection layers are electrically connected. Besides, the method includes the steps of preparation of functionalized aluminum substrates, preparation of through holes of the functionalized aluminum substrates, packaging of a multi-chip module, preparation of a signal leading-out layer; packaging of a three-dimensional lamination layer, and preparation of a side metalized interconnection layer. According to the invention, the packaging efficiency and interaction density are improved; and the size of the three-dimensional lamination chip packaging is effectively reduced.
Owner:SHANGHAI SPACEFLIGHT ELECTRONICS & COMM EQUIP RES INST

Multifunctional base plate based on PCB technology and manufacturing method thereof

The invention discloses a multifunctional base plate based on the PCB technology and a manufacturing method thereof. The multifunctional base plate comprises a multilevel interconnection base plate, a glass base plate and an optical waveguide layer. An upper-layer graph is etched on the upper surface of the glass base plate, and a del-shaped reflector is arranged in the optical waveguide layer. A lower-layer graph is etched on the lower surface of the optical waveguide layer, and the upper-layer graph and the lower-layer graph are communicated with a transmission channel of the multilevel interconnection base plate through through holes vertically formed in the glass base plate, the multilevel interconnection base plate, and the optical waveguide layer in an embedded mode. The manufacturing method includes the steps of pressing the glass base plate and the optical waveguide layer, cutting the reflector, manufacturing the through holes, hole plating copper and face copper, etching the graphs and bonding pads and installing devices. The multifunctional base plate based on the PCB technology and the manufacturing method thereof can solve the problem of low losses of high-frequency transmission, so that the optical interconnection transmission capacity is high, the interconnection density is high, and the anti-electromagnetic interference capability is high; the multifunctional base plate based on the PCB technology and the manufacturing method thereof are suitable for millimeter wave interconnection, the manufacturing technology is simple, cost is low, and the multifunctional base plate based on the PCB technology and the manufacturing method thereof are also suitable for application with the sealing requirement.
Owner:NAT CENT FOR ADVANCED PACKAGING
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