The invention relates to the technical field of MEMS radiator
processing, in particular to a
processing method of an MEMS radiator, which comprises the following steps of: 1, manufacturing an air inlet grid opening, a gas
advection bin body, a vibration upper opening binding ring, a piezoelectric vibrator, a flexible circuit board, a vibrator amplification layer, a gas beam dense hole layer and an
impact platform according to the size; 2, the flexible circuit board and the piezoelectric vibrator form a circuit piezoelectric vibrator through
reflow soldering; 3, the air inlet
advection bin body, the vibration upper opening binding ring, the circuit piezoelectric vibrator, the vibrator amplification layer, the air beam dense hole layer and the
impact platform are assembled from top to bottom. According to the
machining method of the MEMS radiator, firstly,
solder paste is printed on a flexible circuit board steel mesh to lead
welding spots, the flexible circuit board steel mesh and the piezoelectric vibrator are placed into a clamp together to be fixed, and then the flexible circuit board steel mesh is welded to the piezoelectric vibrator; the circuit piezoelectric vibrator prepared by the method is reliable and durable, and
welding spots are not easy to fall off, so that the piezoelectric vibrator can have better stability in high-frequency vibration.