The invention discloses a
dielectric film testing method based on
ellipsometry and
ultraviolet visible spectrum mutual calibration, which comprises the following steps: firstly, fitting an
ellipsometry spectrum to obtain initial values of a
refractive index and an
extinction coefficient, comparing with a normal
extinction coefficient dispersion model, and determining an abnormal
wave band; secondly, fitting the transmitted spectrum, and intercepting the
refractive index and
extinction coefficient of the transmitted spectrum corresponding to the abnormal
wave band of the ellipsometer; then calculating
a weighting factor and a translation factor, and calibrating a
refractive index and an extinction coefficient of a transmission spectrum in an abnormal
wave band; and finally, correcting the ellipsometric spectrum of the abnormal wave band, and re-fitting to obtain the calibrated refractive index and extinction coefficient. According to the
dielectric film testing method based on
ellipsometry and
ultraviolet visible spectrum mutual calibration, the result of the
ultraviolet visible spectrum is applied to internally mark the ellipsometry spectrum of a specific wave band, accurate fitting of the refractive index and the thickness is achieved, and therefore the
dielectric film detection precision is improved.