The invention belongs to the technical field of semiconductors, and discloses a
silicon optical
chip packaging method which comprises the specific steps of S1,
cutting, S2, temporary bonding, S3,
plastic packaging, S4,
grinding, S5, de-bonding, S6,
coating, S7,
exposure, S8, development, S9, through hole drilling, S10,
sputtering, S11, pattern transfer, S12, pattern
electroplating, S13, film stripping, S14, differential
etching, S15, secondary fan-out of a circuit, S16, resistance
welding, S17, surface treatment, S18,
electrical testing, S19,
cutting and S20, flip-
chip bonding. And S21, implanting solder balls. According to the fan-out packaging technology, interlayer
copper interconnection and surface circuit reconstruction are directly achieved on the
silicon optical
chip, the
signal transmission distance is remarkably shortened, the packaging density is improved, and the limitation of a traditional
wire bonding technology is overcome; meanwhile, according to the board-level fan-out packaging method, the
processing efficiency and the makeup
utilization rate are further improved, the fan-out design of a circuit with a larger area is supported, and the cost
advantage and the superiority of technical
adaptation are shown.