The invention provides a device and a method for improving
screen printing precise alignment by using a contact photoetching
machine. The method comprises the following steps: when photoetching, inserting a positioning jig frame provided with a
screen printing mask image into the contact photoetching
machine, adjusting brightness through an auxiliary spacer, setting
compressed air to upwards move a spacer bearing platform, realizing X-Y-Z photoetching pre-positioning through sensor induction, aligning the
screen printing image with a
silicon wafer image on the spacer bearing platform through a microscopical alignment
system, putting printing paint on a silk screen, and printing the image with a scraper blade, and when the spacer bearing platform moves downwards to the original position, taking the
silicon wafer out. The device and the method have the following advantages that: the screen printing alignment precision is improved to + / -3 mum of the microelectronic technology from 10 to 15 mum of the common
thick film technology;
coating and alignment of substrates of a plurality of
layers of stacked
silicon wafers, which have different thicknesses, are realized; and application range is obviously widened. The device has simple structure, method and operation, is easily integrated and popularized, and realizes the substitution of a contact photoetching
mask plate with the screen printing
mask image.