Six-axle acceleration sensor with dual E-shaped circular membranes and cross beam structure

A technology of acceleration sensor and cross beam, which is applied in the direction of multi-dimensional acceleration measurement and acceleration measurement using inertial force, etc., can solve the problem of not being able to obtain contact force information, and achieve the effect of overcoming strong coupling

Inactive Publication Date: 2003-02-12
HEFEI INST OF INTELLIGENT MACHINERY CHINESE ACAD OF SCI
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Problems solved by technology

[0006] For the manipulative intelligent robot based on force feedback compliant control, the force measurement during the control process is realized through the six-axis force sensor installed on the mechanical wrist, and the additiona

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  • Six-axle acceleration sensor with dual E-shaped circular membranes and cross beam structure
  • Six-axle acceleration sensor with dual E-shaped circular membranes and cross beam structure
  • Six-axle acceleration sensor with dual E-shaped circular membranes and cross beam structure

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specific Embodiment approach

[0064] Specific embodiments: the present invention adopts the thick film process, and uses the screen printing technology to print the force sensitive resistor paste and the conductor paste on the specific position of the ceramic substrate of the E-shaped circular diaphragm and the cross beam, and forms 24 thick plates after sintering. The membrane strain resistance constitutes six groups of bridges for obtaining six-dimensional acceleration information respectively.

[0065] In order to realize the measurement of small range and high sensitivity, the thickness of the E-type circular diaphragm is 0.2-0.4mm, and the thickness of the cross beam is 0.2-0.4mm. When metal is used as the elastic body, the upper and lower E-shaped circular membranes and the middle cross beam can be processed into an integrated structure, and the three-dimensional linear acceleration and three-dimensional angular acceleration information can be realized by pasting the strain gauge resistance according ...

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Abstract

A 6D acceleration sensor for measuring three axial accelerations and angular accelerations in 3D space coordinate system features that the thick-film technology is used, the dual E-shaped circular ceramic membranes and cross beam are used as sensitive elastic substance, and the force-sensitive thick-film resistors are sintered on the ceramic substance for bridging. It can be used for the robot.

Description

technical field [0001] The invention relates to the field of robot sensors such as humanoid robots, multi-fingered dexterous hands, robot compliance control, and virtual reality technology, and in particular to an integrated sensor structure capable of simultaneously realizing six-axis acceleration information sensitivity, and realizing three-axis A six-axis acceleration sensor with a double E-type circular diaphragm cross-beam structure with independent acquisition methods for linear acceleration and three-axis angular acceleration information. Background technique [0002] Along with the development of robot technology, since the beginning of the 1980s, countries have started research on various sensors for robots, and there is no report on the products and research of small-scale integrated six-axis acceleration sensors. From a structural point of view, in recent years, American AD and JR3 companies have produced miniaturized three-dimensional acceleration sensors. Genera...

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Application Information

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IPC IPC(8): G01P15/12G01P15/18
Inventor 戈瑜吴仲城葛运建申飞马军汪小龙卞亦文钱朋安钱敏
Owner HEFEI INST OF INTELLIGENT MACHINERY CHINESE ACAD OF SCI
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