Six-axle acceleration sensor with dual E-shaped circular membranes and cross beam structure
A technology of acceleration sensor and cross beam, which is applied in the direction of multi-dimensional acceleration measurement and acceleration measurement using inertial force, etc., can solve the problem of not being able to obtain contact force information, achieve the effect of obtaining angular acceleration information and overcoming strong coupling problems
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[0064] Specific embodiments: the present invention adopts the thick film process, and uses the screen printing technology to print the force sensitive resistor paste and the conductor paste on the specific position of the ceramic substrate of the E-shaped circular diaphragm and the cross beam, and forms 24 thick plates after sintering. The membrane strain resistance constitutes six groups of bridges for obtaining six-dimensional acceleration information respectively.
[0065] In order to realize the measurement of small range and high sensitivity, the thickness of the E-type circular diaphragm is 0.2-0.4mm, and the thickness of the cross beam is 0.2-0.4mm. When metal is used as the elastic body, the upper and lower E-shaped circular membranes and the middle cross beam can be processed into an integrated structure, and the three-dimensional linear acceleration and three-dimensional angular acceleration information can be realized by pasting the strain gauge resistance according ...
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