221 results about "Ion plating" patented technology

The invention provides a lead-bismuth reactor nuclear sampler coating and a preparation method thereof.The preparation method comprises the steps that S3, according to the thickness of a CrAl coating, the bias voltage and target current of multi-arc ion plating equipment are adjusted, the bonding strength of the coating and a base body is optimized, and the target adhesive force reaches the scratch test critical load or above; s4, according to the bonding strength, the nitrogen flow and the air pressure are adjusted, a compact CrAl coating microstructure with the porosity lower than a porosity threshold value is generated, and the quality of the microstructure is detected and verified through a scanning electron microscope; s7, according to the thickness consistency, a screw rod or a pin shaft is selected as a base body part, a CrAl coating is deposited on the surface of the screw rod or the pin shaft to be matched with the sleeve cap, and the gap between the sleeve cap and the shaft part is controlled to be within a gap threshold value; and S10, according to hardness and wear resistance test results, the deposition time and bias voltage are adjusted, the performance of the CrAl coating and the performance of the TiN coating are optimized, and the requirements for long-term corrosion resistance and wear resistance in the lead-bismuth alloy environment are met. According to the invention, excellent performances of long-term corrosion resistance and wear resistance in a high-temperature lead-bismuth environment are realized, and the service life of parts is remarkably prolonged.

The invention discloses an AlCrN / TiSiN / AlCrTiSiON pre-oxidation multilayer composite coating and a preparation process thereof, belonging to the technical field of coatings. The bottom layer of the composite coating is an AlCrN transition layer, and an AlCrN / TiSiN nano multilayer film and a TiSiN high-hardness layer are sequentially stacked for 1-4 times on the transition layer; The outermost layer is a compact AlCrTiSiON pre-oxidation coating, wherein the AlCrTiSiON pre-oxidation coating has excellent wear resistance and heat resistance. The coating is prepared by adopting an arc ion plating technology. The invention prepares the pre-oxidation coating with high hardness, high wear resistance and high heat resistance through process design and optimization of coating structure and pre-oxidation layer process parameters.

The invention relates to the technical field of deposition of wear-resistant and corrosion-resistant coating materials on metal surfaces, in particular to a high-toughness CrNbZrNiSiBN high-entropy nitride coating and a preparation method thereof. A bonding layer formed by a Cr layer, a transition layer formed by a CrN layer and a functional layer coated with CrNbZrNiSiBN high-entropy nitride are sequentially arranged on the surface of a base material. And the total thickness of the coated functional layer is 2-10 microns. The method is completed by adopting an ion beam assisted arc ion plating technology, and the prepared composite coating has the advantages of relatively high hardness, relatively good toughness, wear resistance, corrosion resistance, high-temperature oxidation resistance and the like. The coating can be used for strengthening and protecting the surfaces of cutters, molds, aerospace, marine ship parts and the like.

The invention discloses an AlCrN / AlCrSiWN nano multilayer composite coating with ultrahigh hardness and a preparation process of the AlCrN / AlCrSiWN nano multilayer composite coating, and belongs to the technical field of material surface coatings. The composite coating comprises an AlCrN transition layer, an AlCrN / AlCrSiWN nano multilayer modulation coating and an AlCrSiWN functional layer which are sequentially deposited on a substrate, the AlCrN / AlCrSiWN nano multilayer modulation coating is formed by alternately overlapping AlCrN layers and AlCrSiWN layers, the modulation period is 5-200 nm, and the modulation ratio of the AlCrSiWN layers to the AlCrN layers is 1: (1.5-5). The coating is prepared by adopting an arc ion plating technology. According to the preparation method, the AlCrN / AlCrSiWN nano multilayer composite coating with ultrahigh hardness is prepared by alternately depositing the AlCrSiWN coating and the AlCrN coating, and the hardness and the toughness of the coating are synchronously improved.

The invention discloses a super-lubricating and corrosion-resistant DLC (diamond-like carbon) protective coating and a preparation method thereof, and belongs to the technical field of protective coatings. The coating is prepared on a base body through magnetron sputtering and magnetic filtering arc ion plating processes, a multi-layer composite structure is formed by doping transition metal elements and non-metal elements, and the multi-layer composite structure comprises a cleaning modification layer, a gradient transition layer, a combination strengthening layer, a main functional layer and a surface lubricating layer. Through element doping, the internal stress of the DLC coating is effectively reduced, the surface lubricity is enhanced, the bonding strength of the coating and a matrix is improved, and meanwhile the high hardness and excellent wear resistance of the DLC coating are reserved. In addition, the preparation process is simple, is suitable for industrial production, and can be widely applied to surface protection in the fields of molds, automobiles, aerospace and the like.

A vacuum induction melting (VIM) furnace and method of using. A VIM is configured for use with metal-containing carbon powders. In operation, the metal-containing carbon powders are formed into a pellet so as to minimize or eliminate ejection of material during introduction of the pellet into the VIM processor. The VIM processor may be substituted or used in combination with a vacuum arc melt processing apparatus, an electron beam melt furnace, an ion plating furnace, a plasma flame source, a smelter, a traditional metal-metal melt furnace, or any equivalent. Pelletizing can be accomplished through use of a press or through application of any pelletizing technique and / or use of any apparatus that is able to generate pellets that have sufficient mass to avoid ejection from a VIM processor.

The invention discloses a preparation process of an ultra-high hardness AlCrN / AlCrSiWN nano multilayer composite coating, and belongs to the technical field of material surface coatings. The process is carried out by adopting an arc ion plating technology and specifically comprises the following steps: (1) respectively placing an AlCrSiW target and an AlCr target on corresponding cathode target positions; vacuumizing until the vacuum degree is 3.0 * 10 <-3 > Pa or above; (2) bombardment etching is carried out on the substrate; (3) depositing an AlCrN transition layer; (4) depositing an AlCrN / AlCrSiWN nano multi-layer modulation coating layer; and (5) depositing an AlCrSiWN functional layer. According to the preparation method, the AlCrSiWN coating and the AlCrN coating are alternately deposited, so that the AlCrN / AlCrSiWN nano multilayer composite coating with ultrahigh hardness is prepared, and the hardness and the toughness of the coating are synchronously improved. And a breakthrough solution is provided for meeting high-end requirements in the field of surface strengthening of precision cutters and molds.

The invention belongs to the technical field of biological implant materials, and discloses a medical titanium alloy implant surface modification method and application, and the medical titanium alloy implant surface modification method comprises the following steps: grinding and polishing a titanium alloy surface, and then carrying out ultrasonic cleaning and drying in ethanol; the titanium alloy is placed in multi-arc ion plating equipment, high-purity tantalum serves as a target material, and a tantalum coating is deposited on the surface of the titanium alloy; the surface of the titanium alloy is coated with photoresist, and then a micropore array is formed in the surface of the tantalum coating through the photoetching technology; the titanium alloy is placed in the electrolyte, a Ti plate serves as a cathode, a Ta plate serves as an anode, and hydroxyapatite is deposited in a porous structure through electrochemical deposition; and removing the photoresist to expose the tantalum coating, ultrasonically cleaning with deionized water, and drying. The titanium alloy implant provided by the invention has excellent corrosion resistance, biocompatibility and mechanical properties, and makes up for the deficiency of a single material, so that the titanium alloy implant subjected to surface modification has wider application.

This invention relates to a wear-resistant shovel blade for engineering machinery and its preparation method, belonging to the field of engineering machinery parts manufacturing technology. The specific preparation method involves: after rolling, quenching, and high-temperature tempering, the shovel blade material undergoes carburizing treatment using ion plating. Then, a W transition layer and a WTiTaB boride gradient coating with varying composition are prepared using magnetron sputtering. This invention combines the WTiTaB boride gradient coating, physical vapor deposition, and carburizing technology, which can mitigate the difference in physical properties between the boride coating and the substrate material of the shovel blade, improve the surface hardness and support of the substrate material, and result in high surface hardness, core toughness, and excellent tribological properties. Compared with traditional carburizing processes, the surface hardness is increased by nearly three times, the surface treatment time is shortened by more than 90%, and the wear rate is reduced by 78-83%.

This invention discloses a personalized and adaptable spot positioning and filter integration design method. Addressing the technical problems of uneven film thickness and poor film formation consistency in existing large-area coating processes, it constructs a dynamic-static synergistic coating control system by combining the dynamic motion mode of the coating target with the static positioning optimization of the substrate and the precise control of static parameters of the coating environment. Simultaneously, it introduces zoned coating compensation, real-time film thickness monitoring feedback, and dynamic trajectory adaptation strategies to achieve uniform deposition of coating materials on large-area substrate surfaces, effectively improving the film thickness consistency, film formation uniformity, and film performance stability of large-area coatings. This invention is convenient to operate, provides precise control, and is compatible with various coating processes such as magnetron sputtering, vacuum evaporation, and ion plating. It can be widely applied to large-area coating production in fields such as flat panel displays, photovoltaic glass, semiconductor wafers, and large-area optical devices.

The invention discloses a process gas intelligent control system and method for multi-arc ion plating equipment, and relates to the technical field of physical vapor deposition, the process gas intelligent control system comprises a data monitoring system, a data decision system, an instruction execution system and a learning optimization system; the data monitoring system is used for monitoring process monitoring parameters in the process cavity in real time and executing a cavity sealing performance test; the data decision-making system is in signal connection with the data monitoring system and is used for receiving and processing the process monitoring parameters obtained by the data monitoring system and generating a control instruction so as to adapt to the working conditions of equipment safety calibration, arc striking pre-charging and steady-state deposition; the instruction execution system is in signal connection with the data decision-making system and is used for receiving and executing a control instruction of the data decision-making system; the learning optimization system is in signal connection with the data monitoring system and the data decision system; and multi-mode intelligent switching of the process and rapid, stable and overshoot-free control of the vacuum degree are realized.

To stably form an insulating film of high quality in a reactive ion plating apparatus and method.SOLUTION: In the reactive ion plating apparatus 10, an evaporation material 24 stored in a crucible 20 is heated and evaporated by an electron gun 22. In addition, the ionization power Wd is supplied to the crucible 20 as an anode and the hot cathode filament 34 that emits thermoelectrons as a cathode. Accordingly, the plasma 100 is induced. Further, the reactive gas is introduced into the vacuum chamber 12 through the hollow anode 46, and the hollow anode power Wh is supplied to the hollow anode 46. Accordingly, the hollow anode plasma 200 is induced. A hollow anode filament 48 is provided at a gas discharge port of the hollow anode 46. The hollow anode filament 48 becomes a stable anode by being heated by Joule heat.SELECTED DRAWING: Figure 1

The invention discloses a tantalum-doped nitride coating and a preparation method thereof. The preparation method comprises the following steps: 1) pretreating the surface of a substrate; (2) an arc ion plating mode is adopted, and a CrN transition layer with the thickness of 0.15-0.3 mu m is obtained through deposition on the surface of the base body through a Cr target; and (3) depositing on the CrN transition layer by using a CrAlSi target and a Ta target in an arc ion plating manner to obtain the CrAlTaSiN coating with the thickness of 2-3mu m. The tantalum-doped nitride coating disclosed by the invention is beneficial to increasing the Vickers hardness of the coating, enhancing the binding force of the coating and a matrix, and improving the room-temperature and high-temperature friction resistance of the coating.

The invention discloses a nitrogen-doped diamond-like coating, a preparation method of the nitrogen-doped diamond-like coating and a stirring head for friction stir welding, and belongs to the technical field of stirring heads for friction stir welding and diamond-like coatings of the stirring heads. The preparation method comprises the following steps that a stirring head for friction stir welding serves as a base body, the base body is sequentially subjected to grinding and polishing treatment, ultrasonic cleaning, drying treatment and ion source cleaning, and the pretreated base body is obtained; a carbon target is adopted as a reaction target material for arc ion plating, bias voltage is applied to the pretreated substrate during arc ion plating, arc current is set, filtering current is adjusted, and deposition is carried out; and during deposition, nitrogen is introduced in a pulse mode, and the nitrogen-doped diamond-like coating is prepared. According to the method, the technical problems that a film layer is insufficient in binding force and easy to fall off in a physical vapor deposition process can be solved, and the technical problems that the hardness of the film layer is low, the temperature in the film forming process is high, the friction coefficient is complex to adjust and the thermal stability is poor when the diamond-like carbon coating applied to the stirring head of friction stir welding is prepared by adopting a chemical vapor deposition process are solved.

The application provides a high-precision current sampling, fault diagnosis and protection system for a vacuum ion coating power supply, comprising: an original perception module, which acquires a multi-channel original data set; a data purification module, which performs time alignment, compensation and correction on the multi-channel original data set to obtain a purified data set; a target current module, which acquires a target current data set by using a frequency band decomposition model; a state feature module, which constructs a state feature set based on the target current set; a fault judgment module, which performs fault level division and protection trigger judgment on the fault diagnosis result to obtain a final fault judgment result; and a protection execution module, which performs graded protection operation according to the final fault judgment result. The application can obtain full-band current reproduction, accurately distinguish switch noise and arc precursor, greatly reduce false touch, and thus realize accurate fault diagnosis and graded ladder protection.

The utility model discloses an ion plating arc striking device, which relates to the technical field of ion plating and comprises a vacuum box, an arc striking assembly comprises a mounting frame, an adjusting push rod is fixedly mounted at the left end of the rear side of the mounting frame, and the output end of the adjusting push rod penetrates through a rear side plate of the mounting frame and is fixedly connected with a mounting block. A sliding rail is fixedly connected to the right side in the mounting frame, a T-shaped sliding groove is formed in the left end of the front side of the sliding rail, a T-shaped sliding plate is slidably connected into the T-shaped sliding groove, connecting plates are fixedly connected to the front end and the rear end of the left side of the T-shaped sliding plate, telescopic rods are fixedly connected to the centers of the inner sides of the connecting plates, and baffles are fixedly connected to the tail ends of the telescopic rods. The surface of the telescopic rod is sleeved with a spring. According to the utility model, the mounting block, the fastening bolt, the sliding rail, the T-shaped sliding groove, the T-shaped sliding plate, the fixing plate, the fixing bolt, the connecting plate, the baffle plate and the spring are arranged, so that the target material and the arc striking needle can be conveniently detached, replaced and fixed, and the time spent on replacement work is reduced.

The invention belongs to the technical field of high-temperature protective coatings, and particularly relates to a method for rapidly generating a pre-oxidation layer on the surface of an MCrAlY coating. The method comprises the following steps: firstly, preparing an MCrAlY coating on a high-temperature alloy matrix by adopting a multi-arc ion plating technology, and sequentially carrying out vacuum heat treatment, sand blasting treatment and laser scanning treatment on the coating; according to the MCrAlY prepared through the method, a compact and continuous pre-oxidation layer with Al2O3 as the main component phase can be rapidly generated on the surface of the MCrAlY, the effects of resisting oxidation, enhancing the binding force between coatings and achieving good covering protection are achieved, meanwhile, the adopted ultraviolet laser basically has no damage to the coatings, a base body and an interface below the coating, and the coating quality is improved. The research of quickly generating a compact and continuous Al2O3 pre-oxidation layer on the surface of a high-temperature protective coating such as MCrAlY and the like is realized.

The invention relates to a preparation method of a high-hardness ultra-smooth TiN coating, which comprises the following steps: putting a workpiece into a vacuum chamber, vacuumizing the vacuum chamber, and then introducing Ar to carry out ion cleaning on the surface of the workpiece; sequentially depositing a Cr layer and a Ti layer on the surface of the workpiece by adopting a radio frequency sputtering technology; a TiN layer is prepared on the surface of a workpiece by adopting a pure ion plating technology, when pure ion plating is carried out, mixed gas of Ar and N is introduced into a vacuum chamber, auxiliary ionization is carried out on the mixed gas in the vacuum chamber, negative bias voltage is applied to the workpiece, the ionization rate of a Ti target is improved by adopting a radio-frequency pulse power supply, and an ion beam is filtered by using a bent pipe magnetic filter. According to the TiN coating prepared through the method, the hardness can be stably higher than 3000 HV, the binding force on a high-speed steel base material is larger than 50 N, and the binding force with the base material is remarkably improved; the N content in the prepared TiN coating is larger than 45%, the ionization degree is very high, compactness is good, and the surface roughness Ra is smaller than 10 nm.

The invention provides a method for preparing a kitchen knife by utilizing arc ion plating. The kitchen knife with ultrahigh sharpness can be obtained. The method comprises the steps that a kitchen knife body base material with a blade part is placed in an arc ion plating chamber provided with an arc generation device, and ion etching treatment is conducted on the surfaces of the two sides of the blade part; depositing a bonding layer material on the surface subjected to the ion etching treatment by using arc ion plating; and depositing a wear-resistant layer material on the deposited bonding layer material using arc ion plating, or sequentially depositing one or more transition layer materials on the deposited bonding layer material and subsequently depositing the wear-resistant layer material. The invention also provides a wear resistant kitchen knife having ultra-high initial sharpness and ultra-high sharpness retention.

The present invention belongs to the field of surface engineering technology, and specifically relates to an oxide-based gradient multi-phase nanocomposite coating and a preparation method thereof. The composite coating includes a Cr-Al-Si layer, a Cr-Al-Si-N layer, and an xAl2O3-yCr2O3-zSiO2-kY2O3-iEr2O3 layer arranged in sequence. The xAl2O3-yCr2O3-zSiO2-kY2O3-iEr2O3 layer is a nano multi-phase composite layer composed of Al2O3, Cr2O3, SiO2, Y2O3, and Er2O3 phases, and the molar ratio between each phase is x:y:z:k:i, where 0 < x, y, z, k, i < 0.4, and x + y + z + k + i = 1. This coating is obtained by using pulsed multi-arc ion plating and radio frequency magnetron sputtering for the corresponding coatings respectively in a vacuum environment. The coating of the present invention has the characteristics of high bonding strength, high hardness, high hydrogen resistance factor, high solar absorptance, and low solar emittance, with excellent performance, and can greatly improve the problem of performance deterioration of the base material caused by hydrogen permeation.

The invention provides an amorphous-nanocrystalline composite structure high-entropy nitride film and a preparation method thereof, and relates to the technical field of film materials. A multi-arc ion plating technology and a high-power pulse magnetron sputtering technology are adopted, and the (Ti / TiN...) / (nc-HEAN / a-Si3N4) multi-layer nano composite structure high-entropy film is prepared by regulating and controlling the composition proportion and the structure. The nano-multilayer structure has the advantages that the crack deflects at an interface, the tip of the crack at the interface is passivated, and microcrack initiation and propagation caused by stress concentration are prevented. The nanocrystalline nc-HEAN high-entropy nitride is embedded in the amorphous a-Si3N4, so that a nanocrystalline / amorphous multiphase composite structure is formed. By means of a nano multilayer structure and a nanocrystalline / amorphous multiphase composite structure, the multilayer nano composite high-entropy nitride film with high hardness / high toughness is prepared so as to meet the high-performance application requirements of the modern industrial technology on cutters and grinding tools.

The utility model discloses a multi-arc ion plating device with high stability, which relates to the technical field of multi-arc ion plating, and comprises a box body, a clamping plate is arranged in the box body, a clamping groove is arranged on the clamping plate, the bottom wall of the clamping groove is connected with a bottom plate, the top surface of the clamping plate is provided with a pull rod, the pull rod is connected with a connecting rod, and the connecting rod is connected with the clamping plate. One end of the connecting rod is connected with a clamping groove, the other end of the connecting rod is connected with a limiting block, the top surface of the limiting block is connected with a spring, the other end of the spring is connected with the inner top wall of the clamping groove, the spring sleeves the pull rod, a clamping block is clamped between the limiting block and the bottom plate, and a base material is arranged at the other end of the clamping block. According to the utility model, the clamping block is clamped between the limiting block and the bottom plate, so that the mounting stability of the base material and the coating uniformity of the device are improved.

The application discloses a method for depositing nitride film on the surface of a glass bottle and belongs to the technical field of glass preparation. The method comprises the following steps: S1, plasma etching pretreatment, performing plasma etching on the inner surface of the glass bottle; S2, gradient transition layer deposition, depositing a nitride gradient transition layer on the pretreated surface by adopting a magnetron sputtering-ion plating technology; S3, functional layer deposition, depositing a nitride functional layer on the gradient transition layer; and S4, plasma post-treatment, performing plasma treatment on the deposited functional layer. The system process of the plasma etching pretreatment, the gradient transition layer deposition, the functional layer deposition and the plasma post-treatment effectively enhances the bonding force between the film layer and the glass substrate, alleviates the internal stress caused by the difference in the thermal expansion coefficient, and obtains the nitride functional layer which is compact in structure and few in defects.

The invention belongs to the technical field of ion plating, and particularly relates to a strip-shaped planar magnetic control cathode with high target material utilization rate, which comprises a strip-shaped target material, a back plate, inner magnetic steel and outer magnetic steel, the strip-shaped target material is fixed on the back plate, and the outer magnetic steel is arranged on one side, back to the strip-shaped target material, of the back plate and comprises at least one N-S magnetic pole pair; the inner magnetic steel is completely embedded in the back plate, and each inner magnetic steel is correspondingly arranged between the N-pole outer magnetic steel and the S-pole outer magnetic steel of the N-S magnetic pole pair; each N-S magnetic pole pair generates a first parallel magnetic field B1 on the surface of the strip-shaped target material, the inner magnetic steel located between the N-S magnetic pole pairs generates a second parallel magnetic field B2 on the surface of the strip-shaped target material, the direction of the second parallel magnetic field B2 is opposite to that of the first parallel magnetic field B1, and B1 is larger than B2. The inner magnetic steel with a specific magnetic field design is embedded in the back plate, and the effect that the parallel magnetic field of the etching surface is reduced along with the increase of the etching depth is achieved by embedding the inner magnetic steel, so that the target material is uniformly etched, and the utilization rate of the target material is improved.

The invention relates to the field of vacuum coating, and discloses a pulse power supply for multi-arc ion plating, which comprises a direct-current power supply, a direct-current power supply matched power switch device and a plurality of low-power pulse power supplies, and the plurality of low-power pulse power supplies are connected in parallel to form a modularized multi-arc ion plating pulse plasma power supply. The low-power pulse power supply is realized by matching a direct-current power supply with a power switch device for chopping or directly selects the low-power pulse power supply or a combination of the two. By controlling the magnitude of the output current, the output frequency, the output pulse width and the output phase between the power supplies of each pulse power supply, abundant and diversified output waveforms can be formed, the output characteristics of the pulse power supply can be flexibly adjusted through the design that different waveforms are output through multi-module combination and are superposed, and in the multi-arc ion plating process, the production efficiency is greatly improved. By accurately controlling the output of each module, accurate regulation and control of the processes of ion generation, acceleration, bombardment and the like can be realized.

The invention discloses a coating method of multi-arc ion plating equipment and an arc source device of the multi-arc ion plating equipment, and relates to the technical field of coating, the multi-arc ion plating equipment comprises a vacuum cavity, and a rotatable sample table and vertically arranged arc source units are arranged in the vacuum cavity; the arc source unit comprises a cathode target material, an arc striking assembly and a dynamic magnetic field adjusting module. The cathode target materials are vertically arranged, and the included angle between the centers of the adjacent target materials is 30-45 degrees; the dynamic magnetic field adjusting module comprises a permanent magnet and an electromagnetic coil set, the magnetic field intensity (0-500 Gs) and the direction are adjusted in real time through a PLC, and the movement speed (10-50 cm / s) of an arc light spot is controlled. According to the invention, a coordinated control system integrates linkage adjustment functions of arc current (50-200 A), gas flow (Ar: 50-200 sccm, N2: 100-1000 sccm) and substrate bias voltage (-50--500 V), compared with annular staggered arrangement equipment, the occupied space is smaller, 3-4 groups of arc sources can be arranged, and the coating efficiency is improved.

The utility model relates to vacuum ion coating pretreatment equipment technical field, especially vacuum ion coating pretreatment equipment, including device body, device body is provided with connecting mechanism, connecting mechanism contains setting exhaust component on device body upper section, device body lower section is provided with connecting component, device body middle section is provided with cooling assembly. Cooling assembly through the combination of cooling fan and cooling fin, can quickly send away the heat generated by equipment operation, effectively reduce the device body internal temperature, the fixed connection of slide holder and exhaust hood can move with exhaust hood, slide on the fixed slide rod, realize the flexible heat dissipation to device different area. The cooperation of collocation fixed rod, limit spring and L shape frame guarantees the stability when heat dissipation part moves, avoids the influence equipment performance and workpiece pretreatment effect because of temperature is too high, prolongs equipment life, guarantees the continuous and stable development of pretreatment work.

The application provides a preparation method of a 5G ceramic dielectric filter material, and the method comprises the following steps: S1, performing sand blasting or polishing treatment on the surface of a ceramic base, then immersing the treated ceramic base into an organic solvent for ultrasonic cleaning, and drying the cleaned ceramic base; S2, by means of high-energy pulse ion implantation, using a first metal target, implanting first metal ions onto the surface of the ceramic base treated in step S1 to form a transition layer; S3, by means of magnetic filter cathode vacuum arc deposition, using a second metal target, depositing a second metal on the transition layer prepared in step S2 to form a connecting layer; S4, by means of multi-arc ion plating, using a third metal target, depositing a third metal on the connecting layer prepared in step S3 to form a surface metal layer, and obtaining a filter film layer material. The preparation method of the film layer material obtains a high-metalized silver layer with high compactness, low roughness and uniform thickness, so that the bonding force between the base ceramic layer and the metal film silver layer is good, and the insertion loss is low.

The application discloses an ion beam steady flow device, which comprises an arc power supply, a cathode assembly and a trigger assembly, wherein the positive pole of the arc power supply is grounded; the cathode assembly comprises a cathode target material and a target material seat, and a permanent magnet is arranged at the target material seat; the trigger assembly comprises a trigger electrode, a trigger pin and an auxiliary anode plate. The arc power supply applies voltage to the target material seat and the trigger electrode, so that the trigger pin is in contact with the cathode target material to form a short circuit, an electric arc is formed instantaneously, a plasma is formed in the electric arc, and the electric arc spot moves on the surface of the cathode target material; the auxiliary anode plate is grounded, and when the electric arc spot moves to the edge of the cathode target material, the electric arc spot returns to the center of the cathode target material due to the fact that the potential of the auxiliary anode plate is higher than that of the cathode target material, so that the electric arc spot is prevented from falling on the side surface of the cathode target material and causing arc extinction. The application further provides an arc ion plating device comprising the ion beam steady flow device, so that the ion beam stability is improved, and the arc ion plating quality is improved.

The multi-arc ion plating auxiliary tool comprises a supporting rod, a main rotating disc, a supporting disc, a shielding disc and a piece loading rod, the main rotating disc and the supporting disc are coaxially and correspondingly fixed to the two ends of the supporting rod, the main rotating disc can rotate in the circumferential direction of the supporting rod, the auxiliary rotating disc is rotationally installed on the end face, facing the supporting disc, of the main rotating disc, and the auxiliary rotating disc can be driven by the main rotating disc to rotate in the circumferential direction of the axis of the auxiliary rotating disc. The shielding discs are arranged between the main rotating disc and the supporting disc at equal intervals in the axis direction of the supporting rod. One end of the loading rod is rotationally connected to the auxiliary rotating disc, the other end of the loading rod sequentially penetrates through the shielding disc and then is rotationally connected to the supporting disc, and the loading rod is rotationally connected with the shielding disc. The utility model further provides multi-arc ion plating equipment. According to the utility model, the compatibility of multi-target sharing is provided, the installation is simple, the use is convenient, the coating uniformity is ensured, the application range is further widened, the process precision is ensured, the production efficiency is improved, and the production cost is reduced.