120 results about "Ion plating" patented technology

A vacuum induction melting (VIM) furnace and method of using. A VIM is configured for use with metal-containing carbon powders. In operation, the metal-containing carbon powders are formed into a pellet so as to minimize or eliminate ejection of material during introduction of the pellet into the VIM processor. The VIM processor may be substituted or used in combination with a vacuum arc melt processing apparatus, an electron beam melt furnace, an ion plating furnace, a plasma flame source, a smelter, a traditional metal-metal melt furnace, or any equivalent. Pelletizing can be accomplished through use of a press or through application of any pelletizing technique and / or use of any apparatus that is able to generate pellets that have sufficient mass to avoid ejection from a VIM processor.

This invention relates to a wear-resistant shovel blade for engineering machinery and its preparation method, belonging to the field of engineering machinery parts manufacturing technology. The specific preparation method involves: after rolling, quenching, and high-temperature tempering, the shovel blade material undergoes carburizing treatment using ion plating. Then, a W transition layer and a WTiTaB boride gradient coating with varying composition are prepared using magnetron sputtering. This invention combines the WTiTaB boride gradient coating, physical vapor deposition, and carburizing technology, which can mitigate the difference in physical properties between the boride coating and the substrate material of the shovel blade, improve the surface hardness and support of the substrate material, and result in high surface hardness, core toughness, and excellent tribological properties. Compared with traditional carburizing processes, the surface hardness is increased by nearly three times, the surface treatment time is shortened by more than 90%, and the wear rate is reduced by 78-83%.

This invention discloses a personalized and adaptable spot positioning and filter integration design method. Addressing the technical problems of uneven film thickness and poor film formation consistency in existing large-area coating processes, it constructs a dynamic-static synergistic coating control system by combining the dynamic motion mode of the coating target with the static positioning optimization of the substrate and the precise control of static parameters of the coating environment. Simultaneously, it introduces zoned coating compensation, real-time film thickness monitoring feedback, and dynamic trajectory adaptation strategies to achieve uniform deposition of coating materials on large-area substrate surfaces, effectively improving the film thickness consistency, film formation uniformity, and film performance stability of large-area coatings. This invention is convenient to operate, provides precise control, and is compatible with various coating processes such as magnetron sputtering, vacuum evaporation, and ion plating. It can be widely applied to large-area coating production in fields such as flat panel displays, photovoltaic glass, semiconductor wafers, and large-area optical devices.

The invention discloses a process gas intelligent control system and method for multi-arc ion plating equipment, and relates to the technical field of physical vapor deposition, the process gas intelligent control system comprises a data monitoring system, a data decision system, an instruction execution system and a learning optimization system; the data monitoring system is used for monitoring process monitoring parameters in the process cavity in real time and executing a cavity sealing performance test; the data decision-making system is in signal connection with the data monitoring system and is used for receiving and processing the process monitoring parameters obtained by the data monitoring system and generating a control instruction so as to adapt to the working conditions of equipment safety calibration, arc striking pre-charging and steady-state deposition; the instruction execution system is in signal connection with the data decision-making system and is used for receiving and executing a control instruction of the data decision-making system; the learning optimization system is in signal connection with the data monitoring system and the data decision system; and multi-mode intelligent switching of the process and rapid, stable and overshoot-free control of the vacuum degree are realized.

To stably form an insulating film of high quality in a reactive ion plating apparatus and method.SOLUTION: In the reactive ion plating apparatus 10, an evaporation material 24 stored in a crucible 20 is heated and evaporated by an electron gun 22. In addition, the ionization power Wd is supplied to the crucible 20 as an anode and the hot cathode filament 34 that emits thermoelectrons as a cathode. Accordingly, the plasma 100 is induced. Further, the reactive gas is introduced into the vacuum chamber 12 through the hollow anode 46, and the hollow anode power Wh is supplied to the hollow anode 46. Accordingly, the hollow anode plasma 200 is induced. A hollow anode filament 48 is provided at a gas discharge port of the hollow anode 46. The hollow anode filament 48 becomes a stable anode by being heated by Joule heat.SELECTED DRAWING: Figure 1

The invention discloses a tantalum-doped nitride coating and a preparation method thereof. The preparation method comprises the following steps: 1) pretreating the surface of a substrate; (2) an arc ion plating mode is adopted, and a CrN transition layer with the thickness of 0.15-0.3 mu m is obtained through deposition on the surface of the base body through a Cr target; and (3) depositing on the CrN transition layer by using a CrAlSi target and a Ta target in an arc ion plating manner to obtain the CrAlTaSiN coating with the thickness of 2-3mu m. The tantalum-doped nitride coating disclosed by the invention is beneficial to increasing the Vickers hardness of the coating, enhancing the binding force of the coating and a matrix, and improving the room-temperature and high-temperature friction resistance of the coating.

The application provides a high-precision current sampling, fault diagnosis and protection system for a vacuum ion coating power supply, comprising: an original perception module, which acquires a multi-channel original data set; a data purification module, which performs time alignment, compensation and correction on the multi-channel original data set to obtain a purified data set; a target current module, which acquires a target current data set by using a frequency band decomposition model; a state feature module, which constructs a state feature set based on the target current set; a fault judgment module, which performs fault level division and protection trigger judgment on the fault diagnosis result to obtain a final fault judgment result; and a protection execution module, which performs graded protection operation according to the final fault judgment result. The application can obtain full-band current reproduction, accurately distinguish switch noise and arc precursor, greatly reduce false touch, and thus realize accurate fault diagnosis and graded ladder protection.

The invention belongs to the technical field of high-temperature protective coatings, and particularly relates to a method for rapidly generating a pre-oxidation layer on the surface of an MCrAlY coating. The method comprises the following steps: firstly, preparing an MCrAlY coating on a high-temperature alloy matrix by adopting a multi-arc ion plating technology, and sequentially carrying out vacuum heat treatment, sand blasting treatment and laser scanning treatment on the coating; according to the MCrAlY prepared through the method, a compact and continuous pre-oxidation layer with Al2O3 as the main component phase can be rapidly generated on the surface of the MCrAlY, the effects of resisting oxidation, enhancing the binding force between coatings and achieving good covering protection are achieved, meanwhile, the adopted ultraviolet laser basically has no damage to the coatings, a base body and an interface below the coating, and the coating quality is improved. The research of quickly generating a compact and continuous Al2O3 pre-oxidation layer on the surface of a high-temperature protective coating such as MCrAlY and the like is realized.

The invention provides a method for preparing a kitchen knife by utilizing arc ion plating. The kitchen knife with ultrahigh sharpness can be obtained. The method comprises the steps that a kitchen knife body base material with a blade part is placed in an arc ion plating chamber provided with an arc generation device, and ion etching treatment is conducted on the surfaces of the two sides of the blade part; depositing a bonding layer material on the surface subjected to the ion etching treatment by using arc ion plating; and depositing a wear-resistant layer material on the deposited bonding layer material using arc ion plating, or sequentially depositing one or more transition layer materials on the deposited bonding layer material and subsequently depositing the wear-resistant layer material. The invention also provides a wear resistant kitchen knife having ultra-high initial sharpness and ultra-high sharpness retention.

The invention provides an amorphous-nanocrystalline composite structure high-entropy nitride film and a preparation method thereof, and relates to the technical field of film materials. A multi-arc ion plating technology and a high-power pulse magnetron sputtering technology are adopted, and the (Ti / TiN...) / (nc-HEAN / a-Si3N4) multi-layer nano composite structure high-entropy film is prepared by regulating and controlling the composition proportion and the structure. The nano-multilayer structure has the advantages that the crack deflects at an interface, the tip of the crack at the interface is passivated, and microcrack initiation and propagation caused by stress concentration are prevented. The nanocrystalline nc-HEAN high-entropy nitride is embedded in the amorphous a-Si3N4, so that a nanocrystalline / amorphous multiphase composite structure is formed. By means of a nano multilayer structure and a nanocrystalline / amorphous multiphase composite structure, the multilayer nano composite high-entropy nitride film with high hardness / high toughness is prepared so as to meet the high-performance application requirements of the modern industrial technology on cutters and grinding tools.

The utility model discloses a multi-arc ion plating device with high stability, which relates to the technical field of multi-arc ion plating, and comprises a box body, a clamping plate is arranged in the box body, a clamping groove is arranged on the clamping plate, the bottom wall of the clamping groove is connected with a bottom plate, the top surface of the clamping plate is provided with a pull rod, the pull rod is connected with a connecting rod, and the connecting rod is connected with the clamping plate. One end of the connecting rod is connected with a clamping groove, the other end of the connecting rod is connected with a limiting block, the top surface of the limiting block is connected with a spring, the other end of the spring is connected with the inner top wall of the clamping groove, the spring sleeves the pull rod, a clamping block is clamped between the limiting block and the bottom plate, and a base material is arranged at the other end of the clamping block. According to the utility model, the clamping block is clamped between the limiting block and the bottom plate, so that the mounting stability of the base material and the coating uniformity of the device are improved.

The application discloses a method for depositing nitride film on the surface of a glass bottle and belongs to the technical field of glass preparation. The method comprises the following steps: S1, plasma etching pretreatment, performing plasma etching on the inner surface of the glass bottle; S2, gradient transition layer deposition, depositing a nitride gradient transition layer on the pretreated surface by adopting a magnetron sputtering-ion plating technology; S3, functional layer deposition, depositing a nitride functional layer on the gradient transition layer; and S4, plasma post-treatment, performing plasma treatment on the deposited functional layer. The system process of the plasma etching pretreatment, the gradient transition layer deposition, the functional layer deposition and the plasma post-treatment effectively enhances the bonding force between the film layer and the glass substrate, alleviates the internal stress caused by the difference in the thermal expansion coefficient, and obtains the nitride functional layer which is compact in structure and few in defects.

The utility model relates to vacuum ion coating pretreatment equipment technical field, especially vacuum ion coating pretreatment equipment, including device body, device body is provided with connecting mechanism, connecting mechanism contains setting exhaust component on device body upper section, device body lower section is provided with connecting component, device body middle section is provided with cooling assembly. Cooling assembly through the combination of cooling fan and cooling fin, can quickly send away the heat generated by equipment operation, effectively reduce the device body internal temperature, the fixed connection of slide holder and exhaust hood can move with exhaust hood, slide on the fixed slide rod, realize the flexible heat dissipation to device different area. The cooperation of collocation fixed rod, limit spring and L shape frame guarantees the stability when heat dissipation part moves, avoids the influence equipment performance and workpiece pretreatment effect because of temperature is too high, prolongs equipment life, guarantees the continuous and stable development of pretreatment work.

The application provides a preparation method of a 5G ceramic dielectric filter material, and the method comprises the following steps: S1, performing sand blasting or polishing treatment on the surface of a ceramic base, then immersing the treated ceramic base into an organic solvent for ultrasonic cleaning, and drying the cleaned ceramic base; S2, by means of high-energy pulse ion implantation, using a first metal target, implanting first metal ions onto the surface of the ceramic base treated in step S1 to form a transition layer; S3, by means of magnetic filter cathode vacuum arc deposition, using a second metal target, depositing a second metal on the transition layer prepared in step S2 to form a connecting layer; S4, by means of multi-arc ion plating, using a third metal target, depositing a third metal on the connecting layer prepared in step S3 to form a surface metal layer, and obtaining a filter film layer material. The preparation method of the film layer material obtains a high-metalized silver layer with high compactness, low roughness and uniform thickness, so that the bonding force between the base ceramic layer and the metal film silver layer is good, and the insertion loss is low.

The multi-arc ion plating auxiliary tool comprises a supporting rod, a main rotating disc, a supporting disc, a shielding disc and a piece loading rod, the main rotating disc and the supporting disc are coaxially and correspondingly fixed to the two ends of the supporting rod, the main rotating disc can rotate in the circumferential direction of the supporting rod, the auxiliary rotating disc is rotationally installed on the end face, facing the supporting disc, of the main rotating disc, and the auxiliary rotating disc can be driven by the main rotating disc to rotate in the circumferential direction of the axis of the auxiliary rotating disc. The shielding discs are arranged between the main rotating disc and the supporting disc at equal intervals in the axis direction of the supporting rod. One end of the loading rod is rotationally connected to the auxiliary rotating disc, the other end of the loading rod sequentially penetrates through the shielding disc and then is rotationally connected to the supporting disc, and the loading rod is rotationally connected with the shielding disc. The utility model further provides multi-arc ion plating equipment. According to the utility model, the compatibility of multi-target sharing is provided, the installation is simple, the use is convenient, the coating uniformity is ensured, the application range is further widened, the process precision is ensured, the production efficiency is improved, and the production cost is reduced.

The invention discloses a composite structure of a stainless steel bipolar plate and a coating and a preparation method, and belongs to the technical field of fuel cells. The composite structure comprises a stainless steel bipolar plate, a tantalum transition layer located on the surface of the stainless steel bipolar plate, a gradient tantalum carbide transition layer located on the surface of the tantalum transition layer, and a graphite-like amorphous carbon layer located on the surface of a third transition layer, wherein the gradient tantalum carbide transition layer comprises a first transition layer, a second transition layer and a third transition layer which are sequentially stacked and are in gradient distribution with gradually increased carbon content, and the first transition layer is positioned on the surface of the tantalum transition layer; a tantalum / gradient tantalum carbide coating with good thermal expansion coefficient matching property with stainless steel and a carbon layer is adopted as a transition layer, and a graphite-like amorphous carbon layer is prepared on the surface of the transition layer by adopting a rotating magnetic field assisted arc ion plating process; and the high-quality composite coating which can be firmly combined with the stainless steel substrate and can efficiently prevent corrosion of a corrosive medium to the stainless steel substrate is obtained.

This invention discloses a multi-arc source cathode arc ion plating apparatus, comprising an electromagnetic shielding device, a metal ion blocking and recovery device, a partitioning isolation mechanism, and a robotic arm. The electromagnetic shielding device includes a first metal plate; the metal ion blocking and recovery device includes a second metal plate; the partitioning isolation mechanism includes a partition that divides a vacuum chamber into a waiting area and a working area; the robotic arm is mounted above the vacuum chamber; a current-carrying coil is wound around the outer side of the lower end of a magnetic tube, and the upper end of the magnetic tube extends into the working area of ​​the vacuum chamber and connects to the inside of the target material. The two parts of the magnetic tube are isolated by the first and second metal plates, respectively. During target refining, the product to be plated is stored in the waiting area; after target refining, the robotic arm transfers the product to be plated to the target material in the working area. This invention also discloses a multi-arc source cathode arc ion plating method based on the above apparatus. This invention improves deposition efficiency and deposition stability, and achieves the technical effect of simultaneous deposition of multiple products.

The invention provides a surface treatment method for a valve plate base body and a valve plate. The method comprises the steps that a valve plate base body is subjected to polishing, ultrasonic cleaning and drying treatment; the cleaned valve plate is placed in a vacuum ion nitriding furnace to be subjected to nitriding treatment under the treatment conditions that a vacuum pump is started for air exhaust, after the pressure value in the furnace reaches a first specified value, high pressure is started, argon is introduced, the vacuum degree of a furnace cavity is kept at a second specified value, the surface layer starts to be heated through high-energy ion bombardment, and the surface layer is heated; after the temperature of the workpiece reaches 480-510 DEG C, nitrogen is introduced, the volume ratio of nitrogen to argon is set to be 1: 6, the air pressure is adjusted to 300-500 Pa, and heat preservation is conducted for 6-8 h; and the valve plate subjected to nitriding treatment is transferred to multi-arc ion plating equipment for coating deposition, and the treatment conditions of coating deposition are as follows: nitride is selected as a deposition material, the substrate temperature is kept at 450 DEG C in the deposition process, the target current is controlled to be 120-150 A, the vacuum degree is 2-3 Pa, and the deposition time is 60-90 min.

The invention discloses a composite matt coating structure of a shading ring and a spin coating-ion plating multi-step film forming preparation process of the composite matt coating structure. The composite matt coating structure sequentially comprises a carrier base film, a functional spin coating layer and an ion plating blackening layer from inside to outside. Wherein the functionalized spin-coating layer is composed of polymer resin, shading filler and a functional additive containing an organic metal compound and an active functional group, plasma bombardment activation is carried out in the ion plating process, the functional additive is subjected to an in-situ reaction, and an interface transition layer with components changing in a gradient mode is formed between the functionalized spin-coating layer and the ion plating blackening layer. Through the design of the interface transition layer, the problems that the organic / inorganic layer is weak in binding force and nanoparticles are prone to agglomeration are solved, the extinction performance, the weather resistance and the structural stability of the coating are remarkably improved, and the coating is suitable for high-end optical systems such as optical lenses and optical waveguide devices.

The application relates to a device for improving the deposition rate of a magnetic filtering arc ion plating, which comprises a filter, the filter is composed of multiple head-to-tail connected pipe sections, the pipe sections are straight pipe sections, and the number of the pipe sections is greater than or equal to 3. The above scheme provided by the application can effectively filter out micro-particles in plasma by changing the structure of the filter, is suitable for filtering and purifying plasma of various metal, alloy and graphite cathode target materials, and the resistance of the plasma in the magnetic filter is reduced when the plasma travels in the magnetic filter, so that the deposition rate is improved.

The invention discloses an AlCrSiWN / Mo nano-composite coating with high hardness and high wear resistance and a preparation process of the AlCrSiWN / Mo nano-composite coating, and belongs to the technical field of coatings. The nano-composite coating is formed by doping Mo element in an AlCrSiWN high-hardness coating by adopting an arc ion plating technology, and the thickness of the nano-composite coating is 3-4 microns. The preparation process of the coating comprises the steps that an AlCrN transition layer of a columnar crystal structure is prepared firstly, then an AlCrSiW target and a CrMo target are started at the same time, the AlCrSiWN / Mo nano-composite coating with the high hardness and the self-lubricating performance is obtained by regulating and controlling the evaporation current of the CrMo target to be 122-150 A and utilizing the synergistic effect of the self-lubricating characteristic of the Mo element and the high hardness characteristic of the AlCrSiWN coating, and the self-lubricating performance of the AlCrSiWN / Mo nano-composite coating is improved while the high hardness of the coating is kept. The toughness and the self-lubricating performance of the coating are improved, and the friction coefficient is reduced while crack propagation is inhibited.

The invention discloses a long-life thermal barrier coating system based on interface Pt-Hf synergistic modification, the long-life thermal barrier coating system comprises a high-temperature alloy matrix, a metal bonding layer and a ceramic thermal insulation layer from bottom to top, and the metal bonding layer is a NiCoCrAlY alloy layer synergistically modified by Pt and Hf; the preparation method comprises the following steps: prearranging the Pt layer and the alloy layer on the surface of the high-temperature alloy matrix by adopting a chemical plating method and a multi-arc ion plating method, performing vacuum diffusion heat treatment to form the metal bonding layer, and depositing the ceramic layer by adopting an electron beam physical vapor deposition method. According to the thermal barrier coating system, the precious metal Pt and the active element Hf are synergistically modified in a specific spatial position, and accurate regulation and control of electron beam physical vapor deposition process parameters are combined, so that the oxidation resistance of the thermal barrier coating is improved, and the TGO quality is improved; and the thermal barrier coating system with excellent high-temperature oxidation resistance, thermal shock resistance and interface stability and long service life is obtained, and is suitable for the field of hot end parts of aero-engines, gas turbines and the like.

The embodiment of the invention provides a eutectic high-entropy alloy, a preparation method thereof and a casting target material. The eutectic high-entropy alloy comprises the following components in atomic percent: 14 to 19.5 at% of Al, 16 to 19 at% of Co, 16 to 19 at% of Cr, 13 to 17 at% of Fe, 0.01 to 0.1 at% of Y, 0.01 to 0.1 at% of Hf and the balance of Ni. Therefore, the eutectic high-entropy alloy has excellent oxidation resistance at a high temperature, a generated oxidation film is uniform and compact, the bonding state is good, the toughness is also considered, the eutectic high-entropy alloy is particularly suitable for preparing a casting target material for a high-oxidation-resistance coating through vacuum arc ion plating, and the oxidation resistance requirement of a superhigh-temperature metal bonding layer coating can be met.

The application discloses a water-based paint for PET plastic and a preparation method thereof. The water-based paint for PET plastic comprises component A and component B. The component A is composed of silicone-modified hydroxyl acrylic resin, polycarbonate polyol, oxalic acid-based polyester polyol, succinic acid / isophthalic acid-based polyester polyol, maleic rosin polyethylene glycol ester, pigment, UV absorber, hindered amine light stabilizer, coupling agent, wetting agent, leveling agent, rheological aid, defoaming agent, accelerator, auxiliary solvent and deionized water. The component B is composed of hexamethylene diisocyanate, isophorone diisocyanate and dilution solvent. The water-based paint provided by the application is sprayed on the surface of a PET bottle, and after being dried into a film, the water-based paint has good adhesion to the PET bottle, is convenient for subsequent printing, electroplating or ion plating, and can effectively improve the water boiling resistance of the PET bottle.

The invention discloses a high-performance metal bipolar plate and a preparation method thereof.The metal bipolar plate comprises a metal substrate and a functional coating covering the metal substrate, the functional coating comprises a transition layer close to the metal substrate and a composite surface layer covering the transition layer, and a plurality of bowl-shaped pits are distributed in the composite surface layer; the pits are filled with hydrophobic coating blocks, the transition layer is composed of two elements of Ti and N, and the composite surface layer is composed of three elements of Nb, Cr and C; the deposition process of the functional coating is pulsed bias arc ion plating; according to the metal bipolar plate prepared by the method disclosed by the invention, the metal bipolar plate has excellent conductivity, corrosion resistance and hydrophobicity at the same time.

The application discloses a hydrogen-doped natural gas environment fatigue test device based on vacuum multi-arc ion plating, which comprises a fatigue testing machine, a high-pressure gas environment box filled with high-pressure hydrogen-doped natural gas and a pressure detection mechanism arranged in the high-pressure gas environment box; the upper end and the lower end of the high-pressure gas environment box are respectively in sealing connection with the upper stretching rod and the lower stretching rod of the fatigue testing machine, and the upper part and the lower part of a sample are respectively in fixed connection with the upper stretching rod and the lower stretching rod; a sealable rotating door is arranged on one side of the high-pressure gas environment box; the pressure detection mechanism comprises a horizontal supporting plate, a vertical baffle arranged on the left side of the horizontal supporting plate, a vertical rod arranged on the lower surface of the horizontal supporting plate on the right side of the vertical baffle, an L-shaped rod in rotation connection with the lower end of the vertical rod and a strain gauge arranged on the side surface of the vertical baffle on the lower left of the L-shaped rod. The application has the characteristics that the fatigue crack propagation rate of a sample in a hydrogen-doped natural gas environment can be stably detected.

The invention discloses a preparation method of a tungsten oxide thin film used in an electronic component, and belongs to the technical field of thin film materials. The film is mainly prepared by using an ion beam deposition system. And feeding the substrate into an ion plating deposition system, and plating a tungsten oxide film in the process of changing the plating process parameters. The method is easy and convenient to operate and high in controllability, and the prepared film is stable in performance and completely meets the performance requirements of electronic components or electrochromic composite film layers and the like.

The application belongs to the technical field of coating processing, and particularly relates to a composite coating equipment for surface protection of electric power fittings. The existing workpiece clamping device is too simple, is not suitable for high-precision machining in conceptual design, affects the coating effect, and is complicated in operation every time the workpiece is taken and placed, which is not conducive to improving the machining speed. The present application provides the following scheme, which comprises a first shell, a second shell is rotatably arranged on one side of the first shell, and two groups of magnetron sputtering and ion plating for coating the extension pipe are arranged on the first shell. In the application, the placing rack is detachably arranged with the base, and is used in cooperation with the vehicle body, so that the extension pipe can be clamped outside the first shell, and the first rotating shaft can be lifted and moved by pulling the L-shaped rotating plate, so that all the extension pipes can be fixed at the same time, the clamping is convenient, and the placing rack can be recycled, thereby improving the coating efficiency.

The invention discloses a multi-arc ion composite hard coating vacuum coating machine device, and relates to the technical field of vacuum coating, the multi-arc ion composite hard coating vacuum coating machine device comprises a coating machine body and a coating machine cabin door mounted on the front side of the coating machine body, and an electric arc radioactive source is fixedly mounted on the inner wall of the front side of the coating machine cabin door; electric heating wires and arc ion plating devices are mounted in the coating machine body and the coating machine bin door, arc striking needles are arranged on the arc ion plating devices, and an anode receiving end is fixedly mounted on the inner wall of the rear side of the coating machine body. According to the invention, six groups of arc ion plating devices and arc striking needles are arranged on the six inner walls of the coating machine body and the coating machine cabin door, so that multiple combinations can be formed by every two arc ion plating devices and arc striking needles in one group, and the applicability and the use effect of coating are improved; and the anode receiving end can reduce the adhesion of the diamond powder on the arc ion plating device, so that the labor force required for cleaning can be reduced.

The surface treatment method of the bearing base body comprises the steps that the bearing base body is placed in a cavity, the cavity is controlled to be in a first vacuum degree, and a Cr layer is deposited on the surface of the bearing base body through magnetron sputtering ion plating; keeping the chamber at the first vacuum degree, and depositing a CrC layer on the Cr layer; and reducing the first vacuum degree to enable the chamber to be in a second vacuum degree, and depositing a Cr / Ag / DLC composite layer on the CrC layer. According to the method, multiple layers of protective films are formed on the surface of the bearing substrate, and the protective films have a relatively strong inhibition effect on viruses and germs, so that the carrier and carrier inclusions can be protected and the stable chemical performance of the carrier and the carrier inclusions can be ensured when the protective films are applied to carriers such as a tray.