Patents
Literature
1 results about "Titanium aluminium nitride" patented technology
Efficacy Topic
Property
Owner
Technical Advancement
Application Domain
Technology Topic
Technology Field Word
Patent Country/Region
Patent Type
Patent Status
Application Year
Inventor
Titanium aluminium nitride (TiAlN) or aluminium titanium nitride (AlTiN; for aluminium contents higher than 50%) stands for a group of metastable hard coatings consisting of nitrogen and the metallic elements aluminium and titanium.
Elastic wave devices, filters, and multiplexers
The present invention provides elastic wave devices, filters, and multiplexers capable of improving power handling. [Solution] The elastic wave device comprises a piezoelectric layer 15, a first layer 31 provided on the piezoelectric layer 15 which is a titanium aluminum nitride layer, a chromium aluminum nitride layer, a chromium nitride layer, a diamond-like carbon layer, or a titanium carbide nitride layer, and a second layer 32 provided on the first layer 31 which is a metal layer formed of a metal with a lower electrical resistivity than the first layer 31, and includes a pair of comb-shaped electrodes 22 including electrode fingers 23.
Owner:TAIYO YUDEN KK