The invention belongs to the field of chemical product purification, and particularly relates to a preparation device and method of electronic grade
triethyl borate. The method specifically comprises the following steps: S1, adding
ethanol and
boric acid into a reactor for reaction to obtain a product, enabling the product to enter a product collecting tank, then enabling the product to enter a product separating
tower from the product collecting tank to separate
ethanol in the product to obtain a crude product
triethyl borate, and enabling the
ethanol to enter an ethanol recycling tank for recycling; and S2, dehydrating the crude product
triethyl borate in the step S1, feeding the dehydrated crude product triethyl borate into a crude product collecting tank, feeding the dehydrated crude product triethyl borate into a light component removal
tower to remove light components, feeding the dehydrated crude product triethyl borate into a heavy component removal
tower to remove heavy components, and feeding electronic-grade triethyl borate into a product tank. Raw materials react to prepare a crude product, the crude product is collected and then introduced into a separation tower, ethanol is dehydrated and recycled at the top, and a triethyl borate crude product at the bottom is also dehydrated. After the crude product is subjected to primary
filtration, impurities are removed through a light component removal tower and a heavy component removal tower to obtain a high-purity product, and after the product is subjected to secondary fine
filtration, the electronic-grade high-purity standard is achieved, and the high-end application requirement is met.