The invention relates to the technical field of driving control of symmetrical
vacuum pressure control valves, in particular to a zero-point-free zero returning method of a double-position
synchronous motor for a symmetrical
vacuum pressure control valve, which is suitable for scenes needing high-precision
pressure control, such as
semiconductor manufacturing,
vacuum coating, precision vacuum detection and the like. The problems that in the prior art, the vacuum sealing performance is damaged by depending on a special sensor, cost is high, abrasion of a sealing ring is aggravated due to zero point fixation, and double-shaft synchronization precision and
load distribution are disjointed are solved. According to the method, the position where the sealing ring reaches the sealing pre-tightening force serves as a dynamic non-fixed zero point, an additional zero point sensor or a collision sensor or a horizontal sensor is not needed, the current-torque
coupling characteristic of a motor is utilized, and full-process
automatic control is achieved through a high-precision Hall
current sensor and an incremental
encoder. The method comprises the following specific steps: initializing motor parameters, establishing a T = K * I mapping relation, calibrating a current overload threshold value, calibrating a current detection module, synchronously starting and operating double motor shafts, identifying a collision state based on current detection, locking and verifying a zero returning position, and judging zero point uniqueness based on torque uniformity. The double-shaft zero returning repetition precision is high, zero point uniqueness judgment fits the actual working condition, uneven abrasion of the sealing ring can be reduced, the service life of the sealing ring and the maintenance period of the valve are prolonged, meanwhile, the equipment manufacturing cost and the maintenance difficulty are reduced, and the vacuum sealing stability and the
pressure control precision of the symmetric
vacuum pressure control valve are effectively improved.