The invention provides a dispersion gas
assembly for a
semiconductor, and belongs to the field of gas
assembly connection, the
assembly comprises a first joint unit and a second joint unit which can be axially butted and separated, and the first joint unit and the second joint unit are symmetrical in structure and respectively comprise a connecting sleeve and a built-in sealing assembly; a ventilation opening is formed in the
butt joint end of the connecting sleeve, an annular plugging groove is formed in the circumferential inner wall, the sealing assembly is composed of a supporting ring for plugging, a plugging
piston, a pushing abutting rod, a backward moving limiting ring and a plugging spring, the plugging
piston slides in the plugging groove to control opening and closing of the ventilation opening, and the plugging spring provides reset elastic force. During
butt joint, the pushing abutting rods on the two sides extrude each other, the blocking
piston is driven to overcome the elastic force of the spring to move backwards, the ventilation opening communicates with the ventilation hole, and a gas channel is opened. According to the assembly, through the
collaborative design of mechanical linkage and hydraulic sealing, reliable opening and efficient sealing of a gas passage during
butt joint of joints are achieved, the gas leakage risk is effectively reduced, and the high-precision requirement for transmission of dispersion gas for semiconductors is met.