Dispersion gas assembly for semiconductor

Abstract

The invention provides a dispersion gas assembly for a semiconductor, and belongs to the field of gas assembly connection, the assembly comprises a first joint unit and a second joint unit which can be axially butted and separated, and the first joint unit and the second joint unit are symmetrical in structure and respectively comprise a connecting sleeve and a built-in sealing assembly; a ventilation opening is formed in the butt joint end of the connecting sleeve, an annular plugging groove is formed in the circumferential inner wall, the sealing assembly is composed of a supporting ring for plugging, a plugging piston, a pushing abutting rod, a backward moving limiting ring and a plugging spring, the plugging piston slides in the plugging groove to control opening and closing of the ventilation opening, and the plugging spring provides reset elastic force. During butt joint, the pushing abutting rods on the two sides extrude each other, the blocking piston is driven to overcome the elastic force of the spring to move backwards, the ventilation opening communicates with the ventilation hole, and a gas channel is opened. According to the assembly, through the collaborative design of mechanical linkage and hydraulic sealing, reliable opening and efficient sealing of a gas passage during butt joint of joints are achieved, the gas leakage risk is effectively reduced, and the high-precision requirement for transmission of dispersion gas for semiconductors is met.

Description

Technical Field

[0001] This invention belongs to the field of dispersed gas component technology, and specifically relates to a dispersed gas component for semiconductors. Background Technology

[0002] In existing technologies, the stable and clean delivery of high-purity gases is crucial for ensuring the quality of key processes such as wafer growth, etching, and deposition in semiconductor manufacturing. The delivery of these gases is highly dependent on the absolute sealing and operational reliability of all connection points within the piping system. Even the slightest leak can not only waste precious gases but also lead to backflow of external contaminants, polluting the entire gas supply system and causing batch-specific product quality issues.

[0003] Currently, the most commonly used gas pipeline connection components in this field are fixed joints using flanges and bolts, relying on compression gaskets for sealing. However, the aforementioned existing technologies have significant limitations. Flange-bolted connections are bulky, and the installation and disassembly process is cumbersome and time-consuming. Furthermore, their static sealing gaskets are prone to creep relaxation under long-term use, temperature fluctuations, or mechanical vibrations, leading to a decrease in sealing force and a risk of leakage. Summary of the Invention

[0004] The purpose of this invention is to provide a diffused gas assembly for semiconductors, which aims to solve the problem in the prior art that it is impossible to achieve automatic activation during connection and dynamically enhance the sealing mechanism according to the connection state.

[0005] To achieve the above objectives, the present invention provides the following technical solution: A semiconductor diffused gas assembly includes a first connector unit and a second connector unit that can be axially connected and separated from each other, the first connector unit and the second connector unit being respectively used to connect to an external gas pipeline; The first connector unit and the second connector unit are symmetrical in structure, and both include a connecting sleeve and a sealing component disposed inside the connecting sleeve; The connecting sleeve has a vent opening at the mating end and an annular sealing groove on its inner circumference. The sealing assembly includes a sealing support ring, a sealing piston, a pushing rod, a rearward limiting ring, and a sealing spring. The sealing support ring is fixedly connected to the inner circumferential wall of the sealing groove, which communicates with the vent. The sealing piston is slidably connected within the sealing groove for sealing or opening the vent. The pushing rod is fixedly connected to the axial inner end of the sealing piston. The rearward limiting ring is fixedly connected to the sealing piston to limit its maximum rearward stroke. The sealing spring is disposed between the sealing piston and the sealing support ring, providing an elastic force to reset the sealing piston towards the mating end. When the first connector unit and the second connector unit are axially aligned and inserted into each other, the ends of the push rods on both sides contact each other and squeeze each other, jointly driving the sealing pistons on both sides to overcome the elastic force of their respective sealing springs and move backward until the backward movement limiting ring abuts against the sealing support ring. At this time, the vent opening is connected to the vent hole, and the gas passage is opened. The first connector unit and the second connector unit also include a hydraulic linkage sealing system for enhancing the sealing effect in the docking state. The hydraulic linkage sealing system includes a hydraulic groove opened inside the connecting sleeve, hydraulic oil disposed in the hydraulic groove, and a pressure-boosting sealing rubber disposed on the inner wall of the docking end of the connecting sleeve. A sliding extrusion plate is fixedly connected to the outer circumference of the sealing piston, and a hydraulic triggering mechanism that is linked to the sliding extrusion plate is slidably connected inside the connecting sleeve. When the sealing piston moves backward due to docking, the hydraulic triggering mechanism is driven by the sliding extrusion plate to compress the hydraulic oil in the hydraulic groove, causing the pressurized sealing rubber to expand under pressure and tightly fit the docking interface.

[0006] In a preferred embodiment of the present invention, the hydraulic triggering mechanism includes an inward sliding rod slidably connected to an extrusion groove opened in the connecting sleeve. One end of the inward sliding rod is fixedly connected to an extrusion ring that contacts the sliding extrusion plate, and the other end extends into the hydraulic groove and is fixedly connected to a pressure plate. A first return spring is also provided in the hydraulic groove. One end of the first return spring is connected to the pressure plate, and the other end is connected to the inner wall of the hydraulic groove.

[0007] In a preferred embodiment of the present invention, a fixed inner flange is fixedly connected to the outer circumferential surface of the connecting sleeve, and a fixed threaded hole is provided on the fixed inner flange; a fixed outer flange is also fixedly connected to the mating end of the connecting sleeve, and a bolt through hole corresponding to the position of the fixed threaded hole is provided on the fixed outer flange.

[0008] As a preferred embodiment of the present invention, the first connector unit and the second connector unit further include a secondary pressurization mechanism. The secondary pressurization mechanism includes a hydraulic pressurization groove that is opened at the bottom of the fixed threaded hole and communicates with the hydraulic groove, a pressurization piston that is slidably disposed in the hydraulic pressurization groove, and a second reset spring disposed between the bottom of the pressurization piston and the bottom wall of the hydraulic pressurization groove. When the fixing bolt passes through the bolt hole and is screwed into the fixing threaded hole, the end of the bolt presses the booster piston downward, compressing the second return spring, thereby further increasing the oil pressure in the hydraulic groove.

[0009] As a preferred embodiment of the present invention, the sealing support ring has a limiting groove on one end facing the sealing piston, and the corresponding end of the sealing piston is fixedly connected to a limiting slider that can slide within the limiting groove.

[0010] In a preferred embodiment of the present invention, both the limiting slider and the limiting groove have elliptical cross-sections, which are used to limit the circumferential rotation of the sealing piston.

[0011] As a preferred embodiment of the present invention, the limiting slider is fixedly connected to a forward limiting plate after sliding through the limiting groove, which is used to limit the maximum forward stroke of the sealing piston under the action of the sealing spring.

[0012] In a preferred embodiment of the present invention, the mating end of the connecting sleeve in the first connector unit is fixedly connected to a fixed threaded sleeve, and the inner wall of the mating end of the connecting sleeve in the second connector unit is provided with a fixed threaded groove that matches the fixed threaded sleeve. By screwing the fixed threaded sleeve into the fixed threaded groove, the initial axial connection and pre-tightening of the first connector unit and the second connector unit are achieved.

[0013] As a preferred embodiment of the present invention, the fixed outer flanges of the two connecting sleeves are staggered to ensure that they do not interfere with each other during rotation and docking.

[0014] As a preferred embodiment of the present invention, a connecting rotating sleeve for screwing operation is fixedly connected to the outer surface of both connecting sleeves.

[0015] Compared with the prior art, the beneficial effects of the present invention are: 1. Through a symmetrically arranged sealing assembly driven by push rods and sealing springs, this invention achieves automatic opening of the gas path during connection and instantaneous self-closure during disconnection. When the connectors are joined, the push rods on both sides press against each other, simultaneously pushing open the sealing piston, allowing the gas path to open; when the connectors are separated, the sealing piston instantly resets under the action of the sealing spring, tightly sealing the gas opening. This "connect-and-open, disconnect-and-seal" mechanism avoids leakage of process gases and intrusion of external contaminants during insertion and removal operations, ensuring the ultra-high cleanliness requirements of the gas delivery system for semiconductor processes.

[0016] 2. A hydraulic booster linkage sealing mechanism is adopted. The sliding extrusion plate pushes the inward slide rod to compress the hydraulic oil, causing the booster sealing rubber to expand under pressure and tightly adhere to the inner wall. Combined with the secondary boost triggered by the bolt locking, a uniform and strong sealing force is automatically applied to the mating interface.

[0017] 3. An integrated mechanical double-locking structure is used. Axial connection is achieved through a fixed threaded sleeve and threaded groove, while radial reinforcement is achieved through bolt holes and fixed threaded holes between the outer and inner flanges, ensuring the mechanical strength and vibration resistance of the connection. The flange locking action can be linked with a secondary hydraulic booster mechanism. Tightening the bolts drives the booster piston, providing a secondary pressurization to the hydraulic system, further increasing the sealing force from its initial value. Attached Figure Description

[0018] The accompanying drawings are provided to further illustrate the invention and form part of the specification. They are used in conjunction with embodiments of the invention to explain the invention and do not constitute a limitation thereof. In the drawings: Figure 1 This is a three-dimensional structural view of the present invention; Figure 2 This is a cross-sectional view of the first connector unit and the second connector unit after separation in this invention; Figure 3 This is a cross-sectional view of the first connector unit and the second connector unit after they are joined together in this invention; Figure 4 This is a cross-sectional view of the first connector unit in this invention; Figure 5 This is an exploded cross-sectional view of the first joint unit in this invention; Figure 6 For the present invention Figure 5 Enlarged view of point A in the middle; Figure 7 For the present invention Figure 5 Enlarged view of point B in the middle; Figure 8 For the present invention Figure 5 Enlarged view of point C in the middle.

[0019] In the diagram: 1. Connecting sleeve; 2. Sealing support ring; 3. Vent hole; 4. Limiting groove; 5. Limiting slider; 6. Sealing groove; 7. Vent opening; 8. Sealing piston; 9. Pushing rod; 10. Rearward limiting ring; 11. Sealing spring; 12. Forward limiting plate; 13. Fixed threaded groove; 14. Fixed threaded sleeve; 15. Hydraulic groove; 16. Extrusion groove; 17. Inward sliding rod; 18. Extrusion ring; 19. Pressure boosting plate; 20. First return spring; 21. Fixed inner flange; 22. Fixed outer flange; 23. Bolt through hole; 24. Fixed threaded hole; 25. Hydraulic pressure boosting groove; 26. Pressure boosting piston; 27. Second return spring; 28. Pressure boosting sealing rubber; 29. ​​Connecting rotating sleeve; 30. Sliding extrusion plate; 31. Spring groove. Detailed Implementation

[0020] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0021] Example 1: Please refer to Figures 1-8 The present invention provides the following technical solutions: A semiconductor diffused gas assembly, comprising: It includes a first connector unit and a second connector unit that can be axially connected and separated from each other, and the first connector unit and the second connector unit are respectively used to connect to an external gas pipeline; The first connector unit and the second connector unit are symmetrical in structure, and both include a connecting sleeve 1 and a sealing assembly disposed inside the connecting sleeve 1; The connecting sleeve 1 has a ventilation opening 7 at the mating end and an annular sealing groove 6 on its inner circumference wall. The sealing assembly includes a sealing support ring 2, a sealing piston 8, a pushing rod 9, a rearward limiting ring 10, and a sealing spring 11. The sealing support ring 2 is fixedly connected to the inner circumferential wall of the sealing groove 6, which communicates with the vent 3. The sealing piston 8 is slidably connected within the sealing groove 6 and is used to seal or open the vent 7. The pushing rod 9 is fixedly connected to the axial inner end of the sealing piston 8. The rearward limiting ring 10 is fixedly connected to the sealing piston 8 and is used to limit its maximum rearward stroke. The sealing spring 11 is disposed between the sealing piston 8 and the sealing support ring 2 and provides an elastic force to reset the sealing piston 8 to the mating end. When the first connector unit and the second connector unit are inserted axially and centered, the ends of the push rods 9 on both sides contact each other and squeeze each other, jointly driving the sealing pistons 8 on both sides to overcome the elastic force of their respective sealing springs 11 and move backward until the backward movement limiting ring 10 abuts against the sealing support ring 2. At this time, the vent opening 7 is connected to the vent hole 3, and the gas passage is opened.

[0022] In a specific embodiment of the present invention, each connecting sleeve 1 is provided with a set of self-closing sealing components to realize the automatic opening and closing of the gas passage. One end of the connecting sleeve 1 is provided with a vent opening 7 for the flow of process gas. Its inner wall is provided with an annular sealing groove 6. A sealing piston 8 is slidably installed in the sealing groove 6. Under normal conditions, the sealing piston 8 is pressed tightly against the inner end face of the vent opening 7 by the elastic force of the sealing spring 11, so as to completely seal the gas passage and prevent gas leakage or intrusion of external air. One side of the sealing piston 8 is fixedly connected to the push rod 9, and the other side is connected to the rearward limiting ring 10. The two ends of the sealing spring 11 are respectively connected between the sealing piston 8 and the sealing support ring 2 to provide a reset elastic force. The sealing support ring 2 is fixed to the inner wall of the sealing groove 6, and its end face is provided with a limiting groove 4. The limiting slider 5 on the sealing piston 8 is embedded in the limiting groove 4 and can slide along it to ensure the axial stability of the sealing piston 8 during the movement and prevent rotation or displacement. The vent hole 3 is opened on the sealing support ring 2. When the sealing piston 8 moves backward, it connects with the vent hole. The vent 7 is connected, forming a gas flow path. When the two connecting sleeves 1 are closed, the ends of the push rods 9 on both sides contact each other and continuously apply pressure, pushing their respective sealing pistons 8 to slide inward against the elastic force of the sealing spring 11, so that the vent 7 is aligned with the vent hole 3, and the gas can enter the semiconductor process equipment through the connecting channel between the two connecting sleeves. At this time, the rearward limiting ring 10 abuts against the end face of the sealing support ring 2, limiting the maximum stroke of the sealing piston 8 and preventing fatigue failure caused by excessive compression of the spring. When the connection is broken, the pressure between the push rods 9 is released, the sealing spring 11 is reset, and the sealing piston 8 is pushed to quickly return to the initial position, resealing the vent 7 and realizing the instantaneous self-closing function. This component uses a combination of mechanical pushing and spring reset to realize automatic opening and closing without external control. In the separated state, it effectively isolates the process gas from the external environment and avoids process abnormalities caused by gas fluctuations, contamination or mixing. It is particularly suitable for semiconductor manufacturing gas delivery systems with high purity and high cleanliness requirements, ensuring process stability and equipment safety.

[0023] Please refer to the details. Figure 4 and Figure 8 The limiting slider 5 and the limiting groove 4 both have elliptical cross-sections, which are used to limit the circumferential rotation of the sealing piston 8. After the limiting slider 5 slides through the limiting groove 4, it is fixedly connected to the forward limiting plate 12, which is used to limit the maximum forward stroke of the sealing piston 8 under the action of the sealing spring 11.

[0024] In this embodiment: to further improve the stability of the sealing piston 8 during movement and prevent circumferential rotation during sliding, which could lead to misalignment of the vent hole 3, both the limiting slider 5 and the limiting groove 4 are designed as elliptical structures. This shape has directional limiting characteristics, restricting the degree of freedom in the circumferential direction, ensuring that the sealing piston 8 can only slide linearly along the axial direction and cannot rotate. This ensures that the vent hole 3 and the vent opening 7 are precisely aligned when docked and opened, maintaining the unobstructed flow of gas. The major axis of the elliptical structure is consistent with the piston's movement direction, providing sufficient sliding stroke space, while the minor axis forms a radial limit, enhancing guiding rigidity. A forward limiting plate 12 is fixedly connected to the side end of the 5 facing the opening of the sealing groove 6. When the forward limiting plate 12 abuts against the outer end face of the limiting slide 4, it can effectively prevent the sealing piston 8 from moving too far forward under the action of the sealing spring 11 and disengaging from the sealing groove 6, thus playing an axial limiting role. This ensures that the sealing piston 8 is always within the preset working range, improving the operational reliability and service life of the component. When the connecting sleeve 1 is separated, this limiting structure keeps the sealing piston 8 stably sealing the vent opening 7. During the docking process, it guides the piston to move smoothly backward, achieving fast, accurate, and reliable air passage on / off control. It is suitable for semiconductor process environments with high frequency of insertion and removal and high cleanliness requirements.

[0025] Please refer to the details. Figure 2 and Figure 4 The connecting sleeve 1 in the first connector unit is fixedly connected to a fixed threaded sleeve 14 at its mating end. The inner wall of the connecting sleeve 1 in the second connector unit is provided with a fixed threaded groove 13 that matches the fixed threaded sleeve 14. The initial axial connection and pre-tightening of the first connector unit and the second connector unit are achieved by screwing the fixed threaded sleeve 14 and the fixed threaded groove 13 together.

[0026] In this embodiment: In the above-mentioned semiconductor diffused gas assembly, to achieve reliable connection and sealing pre-tightening between the two connecting sleeves 1, a fixed threaded sleeve 14 is fixedly connected to one side end of one of the connecting sleeves 1. The fixed threaded sleeve 14 has an external thread on its outer periphery, and a matching fixed threaded groove 13 is opened on the inner wall around the vent opening 7 of the other connecting sleeve 1. When the two connecting sleeves 1 are axially aligned, the fixed threaded sleeve 14 is screwed into the fixed threaded groove 13 by rotation, forming a threaded connection structure. This threaded connection method not only achieves mechanical locking between the two components, but also prevents accidents caused by vibration or airflow impact. During the separation and tightening process, axial pressure is continuously applied, causing the push rods 9 on both sides to fully contact and squeeze each other. This pushes the sealing piston 8 to move backward against the elastic force of the sealing spring 11, ensuring that the vent hole 3 and the vent opening 7 are completely aligned and maintain a stable connection, thus improving the reliability of gas flow. In addition, the progressive locking force provided by the threaded connection helps to evenly compress the sealing area, enhance the sealing performance at the interface, and prevent micro-leakage. This structure is easy to operate and has a firm connection. It is suitable for gas delivery systems of semiconductor equipment that require frequent disassembly and assembly and have extremely high requirements for airtightness, ensuring the continuity and safety of gas transmission during the process.

[0027] Please refer to the details. Figure 3 , Figure 6 and Figure 7 The first joint unit and the second joint unit also include a hydraulic linkage sealing system for enhancing the sealing effect in the docking state. The hydraulic linkage sealing system includes a hydraulic groove 15 opened inside the connecting sleeve 1, hydraulic oil disposed in the hydraulic groove 15, and a pressure-boosting sealing rubber 28 disposed on the inner wall of the docking end of the connecting sleeve 1.

[0028] In this embodiment: In the above-mentioned semiconductor diffused gas assembly, to further improve the sealing reliability of the connection interface and prevent leakage or contamination of high-purity process gas during transmission, annular hydraulic grooves 15 are provided inside both connecting sleeves 1. The grooves are filled with incompressible hydraulic oil to form a closed hydraulic transmission system. A pressure-boosting sealing rubber 28 is provided on the inner wall area of ​​the hydraulic groove 15 near the connection end face. The pressure-boosting sealing rubber 28 is initially retracted and embedded in the groove. When the two connecting sleeves 1 are axially connected and threaded, the connection end faces are in contact with each other. At this time, the end structure of the other connecting sleeve 1 presses the pressure-boosting sealing rubber 28 on this side, causing it to deform under force and expand outward. At the same time, this pressure is transmitted through the hydraulic groove. The hydraulic oil within 15 is evenly transmitted, causing the entire annularly distributed pressure-increasing sealing rubber 28 to expand synchronously under pressure, tightly adhering to the inner wall of the connecting sleeve 1 and the mating end face, forming an enhanced sealing barrier. This structure utilizes the hydraulic transmission principle to achieve a uniform distribution of sealing force, effectively compensating for machining errors and assembly deviations, ensuring consistent and reliable airtightness throughout the entire circumferential direction. The pressure-increasing sealing rubber 28 can still maintain good resilience and sealing performance under high pressure conditions, making it suitable for high-temperature, high-cleanliness semiconductor process environments. This design achieves a pressure-increasing sealing mechanism when the connection is closed, significantly improving the interface sealing level, preventing gas leakage or intrusion of external air due to tiny gaps, and ensuring the pure and stable delivery of process gases.

[0029] Please refer to the details. Figures 1-8 A sliding extrusion plate 30 is fixedly connected to the outer circumference of the sealing piston 8. A hydraulic triggering mechanism that is linked to the sliding extrusion plate 30 is slidably connected inside the connecting sleeve 1. When the sealing piston 8 moves backward due to docking, the hydraulic triggering mechanism is driven by the sliding extrusion plate 30 to compress the hydraulic oil in the hydraulic groove 15, causing the pressurized sealing rubber 28 to expand under pressure and tightly fit the docking interface. The hydraulic triggering mechanism includes an inward sliding rod 17 slidably connected to the extrusion groove 16 opened inside the connecting sleeve 1. One end of the inward sliding rod 17 is fixedly connected to an extrusion ring 18 that contacts the sliding extrusion plate 30, and the other end extends into the hydraulic groove 15 and is fixedly connected to a pressure plate 19. A first return spring 20 is also provided inside the hydraulic groove 15. One end of the first return spring 20 is connected to the pressure plate 19, and the other end is connected to the inner wall of the hydraulic groove 15.

[0030] In this embodiment: Under normal conditions, the first return spring 20 is in a free state, and the outer end of the inward sliding rod 17 is located in the extrusion groove 16 near the connection end face. When the two connecting sleeves 1 are connected and push the sealing piston 8 to move backward, the sliding extrusion plate 30 on the sealing piston 8 moves synchronously and presses the trigger component in the hydraulic system, or directly / indirectly acts on the outer end of the inward sliding rod 17, causing it to slide into the hydraulic groove 15, driving the pressure plate 19 to compress the hydraulic oil, thereby increasing the pressure in the hydraulic groove 15. This pressure is evenly transmitted to the pressure-boosting sealing rubber 28 through the hydraulic oil, causing it to expand and tightly adhere to the connection interface, thereby achieving enhanced sealing. The first return spring 20 is compressed and stores energy when the inward sliding rod 17 is pressed inward. When the connection is broken and the pressure is released, the first return spring 20 returns to its original length, pushing the pressure plate 19 and the inward sliding rod 17 to reset, so that the hydraulic system returns to its initial state and prepares for the next connection. This structure converts the mechanical docking action into a hydraulic pressure boosting signal, realizing dynamic adaptive improvement of sealing performance, and ensuring the absolute sealing and long-term stability of the connection part during the high-purity gas transportation process. A sliding extrusion plate 30 is fixedly connected to the outer circumference of the sealing piston 8. The sliding extrusion plate 30 has an annular boss structure. When the two connecting sleeves 1 are closed, the push rod 9 is pressed and pushes the sealing piston 8 backward. The sliding extrusion plate 30 moves synchronously and directly presses against the end face of the extrusion ring 18, applying axial pressure. This forces the inward sliding rod 17 to overcome the elastic force of the first return spring 20 and slide into the hydraulic groove 15, driving the pressure booster plate 19 to compress the hydraulic oil, increasing the oil pressure in the hydraulic groove 15. The pressure is then transmitted to the pressure booster seal. Rubber 28 expands outward and fits tightly against the connection interface to form a high-strength dynamic seal. This linkage structure directly converts the opening stroke of the sealing piston 8 into a hydraulic boosting action without the need for an additional drive source. It is responsive and reliable. When the connection is broken, the sealing spring 11 pushes the sealing piston 8 to reset, the sliding extrusion plate 30 disengages from the extrusion ring 18, the first reset spring 20 releases its stored energy, and pushes the booster plate 19 and the inward sliding rod 17 back to their original positions. The hydraulic pressure is released, and the booster sealing rubber 28 returns to its original state, completing one sealing cycle.

[0031] Please refer to the details. Figure 2 , Figure 3 and Figure 7 The connecting sleeve 1 is fixedly connected to a fixed inner flange 21 on its outer circumference, and the fixed inner flange 21 is provided with a fixed threaded hole 24; the connecting sleeve 1 is also fixedly connected to a fixed outer flange 22, and the fixed outer flange 22 is provided with a bolt through hole 23 corresponding to the position of the fixed threaded hole 24.

[0032] In this embodiment: Fixed inner flanges 21 are fixedly connected to the outer circumferential surfaces of both connecting sleeves 1. Multiple fixed threaded holes 24 are evenly distributed on the upper end face of each fixed inner flange 21. Simultaneously, a fixed outer flange 22 is fixedly connected to one side end of each connecting sleeve 1. The two fixed outer flanges 22 are staggered in their initial installation state to ensure no interference or collision occurs during rotational docking. Bolt through holes 23 corresponding to the positions of the fixed threaded holes 24 are provided on the end face of each fixed outer flange 22. After the two connecting sleeves 1 are axially docked via threaded connection, the rotation... Rotate one of the components or the entire structure to precisely align the bolt holes 23 on the outer flanges 22 on both sides with the threaded holes 24 on the inner flanges 21 on the corresponding sides. Then, pass the fixing bolts through the bolt holes 23 and screw them into the threaded holes 24 to achieve rigid locking between the flanges. This double flange structure avoids assembly conflicts through circumferential misalignment design and achieves secondary mechanical reinforcement by using the cooperation between the bolt holes 23 and the threaded holes. It effectively prevents loosening of the connection under vibration, thermal expansion and contraction or high pressure conditions, and significantly improves the reliability of the overall connection and the ability to maintain the sealing preload.

[0033] Please refer to the details. Figure 4 and Figure 7 The first connector unit and the second connector unit further include a secondary pressurization mechanism. The secondary pressurization mechanism includes a hydraulic pressurization groove 25 opened at the bottom of the fixed threaded hole 24 and connected to the hydraulic groove 15, a pressurization piston 26 slidably disposed in the hydraulic pressurization groove 25, and a second return spring 27 disposed between the bottom of the pressurization piston 26 and the bottom wall of the hydraulic pressurization groove 25.

[0034] In this embodiment: a hydraulic boosting groove 25 is provided on the inner wall below the fixing threaded hole 24 of the fixed inner flange 21. The hydraulic boosting groove 25 extends downward and communicates with the hydraulic groove 15 inside the connecting sleeve 1 to form a pressure transmission channel. A boosting piston 26 is slidably installed inside the hydraulic boosting groove 25, and its outer circumference is sealed with the groove wall. The lower end of the boosting piston 26 is connected to the bottom inner wall of the hydraulic boosting groove 25 through a second return spring 27. Under normal conditions, the second return spring 27 pushes the boosting piston 26 to the upper position, closing or partially closing the communication path between the hydraulic boosting groove 25 and the hydraulic groove 15 to prevent hydraulic oil leakage or pressure loss. When the two connecting sleeves 1 are docked and rotated... When the outer flange 22 is locked, as the fixing bolt passes through the bolt hole 23 and is screwed into the fixing threaded hole 24, the end of the bolt continuously presses down on the booster piston 26, causing it to overcome the elastic force of the second return spring 27 and move downward, fully opening the hydraulic booster groove 25 channel. At the same time, the hydraulic system is further compressed, causing the hydraulic oil pressure to rise. This pressure is superimposed with the hydraulic pressure generated by the sliding extrusion plate 30 pushing the extrusion ring 18, and together they act on the booster sealing rubber 28, causing it to fully expand and tightly fit the connection interface, achieving a double booster seal. After the bolt is removed, the second return spring 27 releases its elastic force, pushing the booster piston 26 to return to its original position, closing the hydraulic channel and preparing for the next seal.

[0035] Please refer to the details. Figure 2 , Figure 4 and Figure 7 When the fixing bolt passes through the bolt hole 23 and is screwed into the fixing threaded hole 24, the end of the bolt presses the pressure boosting piston 26 downward, compressing the second return spring 27, thereby further increasing the oil pressure in the hydraulic groove 15, and the pressure boosting sealing rubber 28 abuts against the inner wall of one side of the connecting sleeve 1.

[0036] In this embodiment: when the two connecting sleeves 1 are docked and locked, the pressure in the hydraulic groove 15 is synchronously increased through a dual linkage mechanism: on the one hand, the sealing piston 8 moves backward, causing the sliding extrusion plate 30 to press the extrusion ring 18, pushing the inward sliding rod 17 and the pressure boosting plate 19 to compress the hydraulic oil; on the other hand, when the fixing bolt is screwed into the fixing threaded hole 24, the pressure boosting piston 26 is pressed down, overcoming the elastic force of the second return spring 27, opening the hydraulic pressure boosting groove 25 channel, so that the hydraulic groove 15 is connected to the hydraulic pressure boosting groove 25, and at the same time, pressure continues to be applied to the axis of the pressure boosting plate 19. Under the combined action of pushing and pressurizing piston 26 downward, the hydraulic oil pressure in hydraulic groove 15 increases significantly. This pressure is evenly transmitted to the annularly arranged pressurizing sealing rubber 28 through the closed oil circuit. After being pressed, the pressurizing sealing rubber 28 undergoes elastic deformation and expands radially outward. Its outer edge tightly abuts against the inner wall of one side of the connecting sleeve 1, while its end face tightly abuts the mating end face, forming a multi-level sealing barrier. This expansion action effectively fills the tiny gaps in the connection part, compensates for processing and assembly errors, significantly improves the airtightness of the interface, and prevents leakage of high-purity process gas or intrusion of external contaminants.

[0037] Please refer to the details. Figure 1 Both of the outer surfaces of the two connecting sleeves 1 are fixedly connected with connecting rotating sleeves 29 for screwing operations.

[0038] In this embodiment: To facilitate the alignment, tightening and disassembly of the two connecting sleeves 1 by operators or automated equipment, a connecting rotating sleeve 29 is fixedly connected to the outer surface of each of the two connecting sleeves 1. The connecting rotating sleeve 29 is an annular sleeve structure, fixed to the outer periphery of the connecting sleeve 1, and has anti-slip texture or concave-convex structure on its outer surface to increase friction and facilitate manual gripping or clamping with tools.

[0039] Example 2: Another aspect of the present invention provides a method of using a semiconductor diffused gas assembly, comprising: S1. Align the mating ends of the first connector unit and the second connector unit axially, so that the fixed threaded sleeve 14 is inserted into the fixed threaded groove 13 on the opposite side. Rotate the connecting rotating sleeve 29 to gradually engage the threads. This process completes the initial axial alignment of the two components.

[0040] S2. During the tightening process, the end faces of the push rods 9 on both sides contact and press against each other, jointly pushing the sealing pistons 8 on both sides to compress their respective sealing springs 11 and slide backward. When the rearward limiting ring 10 abuts against the sealing support ring 2, the piston stops moving backward. At this time, the vent opening 7 is completely aligned with the vent hole 3, and the gas passage is opened. At the same time, the rearward movement of the sealing piston 8 drives the sliding extrusion plate 30 on it to move synchronously. The sliding extrusion plate 30 presses the extrusion ring 18, pushing the inward sliding rod 17 and the pressure plate 19 to move into the hydraulic groove 15, compressing the first return spring 20 and squeezing the hydraulic oil. The hydraulic oil pressure rises sharply, forcing the pressure-boosting sealing rubber 28 to expand outward and fit tightly against the mating interface and the inner wall of the second joint unit, forming the first dynamic, self-adaptive strong seal.

[0041] S3. After the initial connection is completed, rotate the assembly so that the bolt holes 23 on the outer flanges 22 of the two joint units are aligned with the threaded holes 24 on the inner flanges 21 of the opposite side. Insert the fixing bolts and tighten them. During this process, as the bolts are screwed into the threaded holes 24, their ends press down on the booster piston 26, causing it to move downwards against the force of the second return spring 27. The downward movement of the booster piston 26 further compresses the oil in the hydraulic system, resulting in a second significant increase in pressure within the hydraulic groove 15. This pressure is transmitted to the booster sealing rubber 28 through the hydraulic oil, further enhancing its sealing force on top of the initial expansion, thus forming a reliable final seal.

[0042] S4. When the first connector unit and the second connector unit need to be disconnected, use a tool to remove the fixing bolts connecting the two fixed outer flanges 22. As the bolts are removed, the pressure on the booster piston 26 is released, the second return spring 27 pushes it to return to its original position, the secondary boosting effect of the hydraulic system is released, and the sealing force drops back to the first-level sealing level.

[0043] S5. Reverse rotation of the connecting sleeve 29 causes the fixed threaded sleeve 14 to unscrew from the fixed threaded groove 13. The two connecting sleeves 1 begin to separate axially. At the instant the axial pressure between the pushing rods 9 is released, the sealing springs 11 on both sides rapidly release energy, pushing their respective sealing pistons 8 forward at high speed to reset. Their front ends re-seal the vent opening 7, achieving instantaneous and automatic closure of the air passage and effectively preventing gas leakage. Simultaneously, the reset of the sealing pistons 8 causes the sliding extrusion plate 30 to disengage from the pressure on the extrusion ring 18. The first reset spring 20 then pushes the pressure boosting plate 19 and the inward sliding rod 17 to reset, and the pressure in the hydraulic system is rapidly released. The pressure-boosting sealing rubber 28 contracts under its own elasticity, returning to its original shape and disengaging from the tight contact with the mating interface.

[0044] Finally, it should be noted that the above are merely preferred embodiments of the present invention and are not intended to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A semiconductor diffused gas assembly, characterized in that: It includes a first connector unit and a second connector unit that can be axially connected and separated from each other, and the first connector unit and the second connector unit are respectively used to connect to an external gas pipeline; The first connector unit and the second connector unit are symmetrical in structure, and both include a connecting sleeve (1) and a sealing component disposed inside the connecting sleeve (1); The connecting sleeve (1) has a ventilation opening (7) at the mating end and an annular sealing groove (6) on its inner circumference wall. The sealing assembly includes a sealing support ring (2), a sealing piston (8), a push rod (9), a rearward limiting ring (10), and a sealing spring (11). The sealing support ring (2) is fixedly connected to the inner circumferential wall of the sealing groove (6), and the sealing groove (6) communicates with the vent (3). The sealing piston (8) is slidably connected in the sealing groove (6) and is used to seal or open the vent (7). The push rod (9) is fixedly connected to the axial inner end of the sealing piston (8). The rearward limiting ring (10) is fixedly connected to the sealing piston (8) and is used to limit its maximum rearward stroke. The sealing spring (11) is disposed between the sealing piston (8) and the sealing support ring (2) and provides an elastic force to reset the sealing piston (8) to the mating end. When the first connector unit and the second connector unit are inserted axially and centered, the ends of the push rods (9) on both sides come into contact with each other and squeeze each other, jointly driving the sealing pistons (8) on both sides to overcome the elastic force of their respective sealing springs (11) and move backward until the backward limiting ring (10) abuts against the sealing support ring (2). At this time, the ventilation opening (7) is connected to the ventilation hole (3), and the gas passage is opened.

2. The semiconductor dispersion gas assembly according to claim 1, characterized in that: The first joint unit and the second joint unit also include a hydraulic linkage sealing system for enhancing the sealing effect in the docking state. The hydraulic linkage sealing system includes a hydraulic groove (15) opened inside the connecting sleeve (1), hydraulic oil disposed in the hydraulic groove (15), and a pressure-boosting sealing rubber (28) disposed on the inner wall of the docking end of the connecting sleeve (1). A sliding extrusion plate (30) is fixedly connected to the outer circumference of the sealing piston (8), and a hydraulic triggering mechanism that is linked to the sliding extrusion plate (30) is slidably connected inside the connecting sleeve (1); when the sealing piston (8) moves backward due to docking, the hydraulic triggering mechanism is driven by the sliding extrusion plate (30) to compress the hydraulic oil in the hydraulic groove (15), so that the pressurized sealing rubber (28) is compressed and expands and tightly fits the docking interface; the hydraulic triggering mechanism includes a sliding connection An inward sliding rod (17) is provided in the extrusion groove (16) inside the connecting sleeve (1). One end of the inward sliding rod (17) is fixedly connected to an extrusion ring (18) that contacts the sliding extrusion plate (30), and the other end extends into the hydraulic groove (15) and is fixedly connected to a pressure plate (19). A first return spring (20) is also provided in the hydraulic groove (15). One end of the first return spring (20) is connected to the pressure plate (19), and the other end is connected to the inner wall of the hydraulic groove (15).

3. A semiconductor dispersion gas assembly according to claim 2, characterized in that: The connecting sleeve (1) is fixedly connected to a fixed inner flange (21) on its outer circumference. The fixed inner flange (21) is provided with a fixed threaded hole (24). The connecting sleeve (1) is also fixedly connected to a fixed outer flange (22). The fixed outer flange (22) is provided with a bolt through hole (23) corresponding to the position of the fixed threaded hole (24).

4. A semiconductor dispersion gas assembly according to claim 3, characterized in that: The first connector unit and the second connector unit further include a secondary pressurization mechanism. The secondary pressurization mechanism includes a hydraulic pressurization groove (25) opened at the bottom of the fixed threaded hole (24) and connected to the hydraulic groove (15), a pressurization piston (26) slidably disposed in the hydraulic pressurization groove (25), and a second return spring (27) disposed between the bottom of the pressurization piston (26) and the bottom wall of the hydraulic pressurization groove (25). When the fixing bolt passes through the bolt hole (23) and is screwed into the fixing threaded hole (24), the end of the bolt presses the booster piston (26) downward, compressing the second return spring (27), thereby continuing to increase the oil pressure in the hydraulic groove (15).

5. A semiconductor dispersion gas assembly according to claim 1, characterized in that: The sealing support ring (2) has a limiting groove (4) on one side of the sealing piston (8), and the corresponding end of the sealing piston (8) is fixedly connected to a limiting slider (5) that can slide in the limiting groove (4).

6. A semiconductor dispersion gas assembly according to claim 5, characterized in that: The cross-sections of the limiting slider (5) and the limiting groove (4) are both elliptical, used to limit the circumferential rotation of the sealing piston (8).

7. A semiconductor dispersion gas assembly according to claim 6, characterized in that: The limiting slider (5) slides through the limiting groove (4) and is then fixedly connected to a forward limiting plate (12) to limit the maximum forward stroke of the sealing piston (8) under the action of the sealing spring (11).

8. A semiconductor dispersion gas assembly according to claim 1, characterized in that: The connecting sleeve (1) in the first connector unit is fixedly connected to a fixed threaded sleeve (14) at its mating end. The inner wall of the connecting sleeve (1) in the second connector unit is provided with a fixed threaded groove (13) that matches the fixed threaded sleeve (14). The initial axial connection and pre-tightening of the first connector unit and the second connector unit are achieved by screwing the fixed threaded sleeve (14) and the fixed threaded groove (13).

9. A semiconductor dispersion gas assembly according to claim 3, characterized in that: The fixed outer flanges (22) of the two connecting sleeves (1) are staggered to ensure that they do not interfere with each other during rotation and docking.

10. A semiconductor dispersion gas assembly according to claim 1, characterized in that: Both of the connecting sleeves (1) have a connecting rotating sleeve (29) fixedly connected to their outer surfaces for screwing operations.

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