5245 results about "Retaining ring" patented technology

A receptacle-supporting puck includes spring-biased fingers arranged about a vertical axis, each finger having a contact surface to contact a receptacle seated in the puck. A supporting disc of the puck includes a disc sidewall projecting from a base and defining a pocket for seating a receptacle, first cavities in the base extending toward the vertical axis, and a puck passageway extending through opposed portions of the disc sidewall transversely to and offset from the vertical axis. Each finger is rotatably coupled to the supporting disc at a corresponding first cavity. A synchronization disc is positioned in the pocket, and each of the fingers is coupled to the synchronization disc such that the contact surfaces of the fingers move synchronously toward and away from the vertical axis. A retaining ring couples the fingers, the supporting disc, and the synchronization disc together.

A closing cap for a container having a lateral wall and a transversal wall positioned at one end of the lateral wall, a separating line being provided on the lateral wall to define a retaining ring that is configured to internally engage with a stop ring of a neck of the container as to remain anchored to the neck, and a closing element removably engageable with the neck, so as to open or close the container. The separating line is circumferentially interrupted to define in the lateral wall a joining zone in which the retaining ring and the closing element are joined. The cap additionally includes an inner thread structure positioned on the inside of the lateral wall for engaging with an outer thread structure of the neck and removably coupling the closing element to the neck of the container.

A cap for a container comprises a side wall extending about an axis and a transversal wall arranged at an end of the side wall.A separation line is provided on the side wall for defining:a retaining ring intended to remain anchored to a neck of the container, anda closure element which can removably engage the neck, so as to open or close the container.The separation line extends about the axis and is circumferentially interrupted so as to leave a joining portion between the retaining ring and the closing element.The cap further has an incision line which extends transversally to the axis between the separation line and a free edge of the retaining ring, so that between the separation line and the incision line two connecting bands are defined, the connecting bands joining the retaining ring to the joining portion. The connecting bands have a radial thickness measured in a radial direction and a height measured parallel to the axis. The ratio between the height and the radial thickness of the connecting bands is greater than, or equal to, 1.4 and is less than, or equal to, 6.5.

A floating joint and retainer connection structure includes a hollow fixed retainer having one closed side formed with a through opening and radially extended sliding slot pairs; an adaptor joint having a pipe connecting and a joining section connected to the retainer and a male coupler, respectively; a first sliding member having an opening fitted on the pipe connecting section, a first slide movably engaged with the sliding slots, and a front guiding recess; a second sliding member having a bore fitted on the pipe connecting section and shaped for slidably engaging with the guiding recess; and a retaining ring fitted on the pipe connecting section and attached to the second sliding member to limit the first and second sliding members from moving axially. With the first and second sliding members, the adaptor joint can translate to correct a radial fit tolerance and be conveniently assembled to the fixed retainer.

The invention relates to the technical field of water treatment equipment, and particularly discloses intelligent dynamic water-saving two-stage reverse osmosis water treatment equipment which comprises a treatment pipe, the two ends of the treatment pipe are fixedly connected between two sections of water conveying pipes in a sealed mode through bolts, and the outer surface of the treatment pipe is fixedly sleeved with a baffle ring. According to the intelligent dynamic water-saving two-stage reverse osmosis water treatment equipment, along with continuous upward movement of a driving rod, a sealing disc is driven to move upwards along a sliding rod, so that the water pressure of a cavity above the sealing disc is increased, a reverse extrusion force is generated on a filter plate, and impurities blocked at the filter plate generate a reverse extrusion force; after the filtering disc is dredged, the pressure disc and the sealing disc are reset under the action of elastic force to enable the filtering disc to work again, so that the filtering disc is automatically dredged after the filtering disc is blocked in the water treatment process, and the working time of equipment is greatly prolonged; the problem of insufficient water treatment efficiency caused by frequent cleaning of equipment is avoided.

The embodiment of the utility model provides a polishing head and polishing equipment. The polishing head comprises a base, a polishing head and a driving device, the retaining ring is arranged below the base; the polishing head gas film is arranged on the base, is arranged on the inner side of the retaining ring and is used for fixedly holding the wafer; the retaining ring gas film is arranged on the inner side of the retaining ring and is arranged between the retaining ring and the polishing head gas film, the retaining ring gas film is in contact with the edge of the wafer when the retaining ring gas film is pressurized and expanded so as to apply acting force to the edge of the wafer, and the acting force forms radial clamping force and axial downward pressure on the edge of the wafer. Radial clamping force and axial downward pressure are applied to the edge of the wafer through the retaining ring gas film, the wafer can be clamped through the radial clamping force, the wafer is prevented from moving in the polishing process, and the risk of wafer sliding is reduced; the axial downward pressure can apply pressing force to the edge of the wafer in the wafer polishing process, the polishing effect of the edge of the wafer can be controlled more accurately, and the polishing consistency of the surface of the whole wafer is guaranteed.

The invention provides a polishing head, a polishing system and a control method of the polishing system. The polishing head comprises a retaining ring and a back film, the retaining ring and the back film are both installed on the body, the retaining ring surrounds the periphery of the back film, the polishing head further comprises a shape compensation plate, the shape compensation plate is installed on the bottom face of the back film and comprises a plurality of control point positions, and a wafer fixing cavity is formed between the shape compensation plate and the retaining ring. The shape compensation plate is used for being electrically connected with a deformation controller, and the deformation controller can control at least one control point to stimulate the shape compensation plate, so that the shape compensation plate deforms at the local part where the control point is located. The polishing system is provided with the polishing head, the invention further provides a working method of the polishing system, the polishing head can ensure the flatness of the wafer during polishing, the polishing thickness of the wafer is uniform, and the product yield is improved.

The invention provides a magnetic separation device for waste treatment, which belongs to the technical field of solid waste treatment, and comprises a rack, a magnetic separation cylinder, a blanking plate, a material through hole, a material retaining ring plate, a blanking hopper and a blanking port, a material receiving hopper is further arranged below the discharging opening in a swinging mode in the front-back direction, a discharging channel is formed between a front side surrounding plate of the material receiving hopper and the magnetic separation barrel, connecting plates are further arranged on the sides, close to the discharging channel, of the left side end and the right side end of the material receiving hopper in a sliding mode in the left-right direction, and a plurality of material stirring claws matched with the magnetic separation barrel are vertically arranged on the connecting plates. And a driving module for driving the connecting plate to do reciprocating rectilinear motion is arranged on the rack. According to the magnetic separation device for waste treatment, solid waste can be spread and distributed on the magnetic separation cylinder, the separation treatment path of the solid waste can be prolonged, and therefore sufficient magnetic separation treatment of the solid waste is achieved.

The utility model discloses a quick tool changer of a numerically controlled lathe, which comprises a shell, a skirt is fixed below the shell, a mounting screw penetrates through the upper part of the skirt, a mounting rack is fixed on the inner side of the shell, a driving motor is mounted on the inner side of the mounting rack, a retainer is fixed above the mounting rack, and the retainer is fixed on the outer side of the shell. A retaining ring is fixed to the upper end of the retaining frame, an air cylinder is installed above the installation frame, and a piston rod is arranged above the air cylinder. According to the quick tool changing magazine of the numerical control lathe, the air cylinder, the piston rod, the limiting block, the limiting ring and the limiting holes are used in cooperation, the piston rod and the limiting block are driven to move upwards by turning on a switch of the air cylinder in the using process of the quick tool changing magazine, and the air cylinder switch is turned off when the limiting block is inserted into the corresponding limiting hole of the limiting ring; the cutter disc of the device can be fixed and limited, and the cutter disc is prevented from rotating during cutter changing, so that cutter changing deviation caused by cutter changing is avoided, and cutter changing failure is avoided.

The invention provides a termite on-line monitoring, trapping and killing integrated device which comprises a clamping sleeve and a pointed cone, a protection assembly is installed at the top of the clamping sleeve and comprises a top plate and a baffle ring, an inducing assembly is installed on the clamping sleeve and comprises a trapping and killing agent and a support, and the termite on-line monitoring, trapping and killing integrated device is characterized in that a monitoring assembly is installed on the top plate, and the monitoring assembly is connected with the baffle ring. The monitoring assembly comprises a motor and a monitor, the inner side of the clamping sleeve is provided with a communication assembly, the communication assembly comprises an inner ring and a through opening, the termite online monitoring and trapping integrated device can utilize air to carry smell emitted by a trapping and killing agent to blow out the smell towards the ground through the through opening, and the trapping range of termites is widened; the electromagnet attracts the inner ring downwards through magnetic force, mutual sealing work is conducted through the inner ring and the clamping sleeve, underground water is effectively prevented from entering the inner side of the clamping sleeve, then the trapping and killing agent is prevented from being soaked by water, the trapping and killing effects of the trapping and killing agent on the termites are guaranteed, and the device is suitable for online monitoring, trapping and killing work of the termites.

The utility model discloses a chemical mechanical polishing and planarization system, which at least comprises a polishing head. A plurality of air holes are formed in the lower surface of the hard disc, and a third air cavity communicated with the air holes is formed in the hard disc; at least part of the elastic unit is of an annular structure, the elastic unit is connected with the polishing head body and the hard disc, and a second air cavity is defined by the polishing head body, the elastic unit and the hard disc; a retaining ring; when the third air cavity is in a negative pressure state, the lower surface of the hard disc can make contact with and adsorb the wafer substrate, and the pressure in the second air cavity is controllable, so that the elastic unit is driven to flexibly move, the hard disc and the wafer substrate are assisted to float, and chemical mechanical polishing of the wafer substrate is achieved. The hard drive in the hard disc solves the problem that when the flexible film drives the wafer substrate to polish, the flexible film is pulled to cause fracture or elastic modulus change under the severe polishing condition, and the service life of the flexible piece is prolonged.

The invention relates to the technical field of coating testing devices, and particularly discloses an induction cooker glass ceramic functional coating testing device which comprises a base and a detection box located on the base, a detection cavity is formed in the detection box, a testing table is arranged in the detection cavity, and the testing table comprises a testing execution mechanism and a testing placement seat; the test execution mechanism comprises a friction disc, an electromagnetic coil is arranged in the friction disc, and a groove which is spirally distributed is formed in the bottom of the friction disc; the test placement seat comprises a loading table of which the middle of the top is provided with a to-be-tested coating panel in a position corresponding to the friction disc, the periphery of the top of the loading table is provided with a convex check ring, the upper part of the convex check ring is provided with a nozzle corresponding to the to-be-tested coating panel, and the nozzle is communicated with a storage tank arranged at the bottom of the loading table through a pressurizing pipeline; a magnetorheological abrasive is stored in the storage tank; the device has the advantages of high test precision and real test simulation.

The invention discloses an integrated joint motor module and a robot. The joint motor module comprises an output mechanism used for outputting rotation power; the speed reduction and sensing mechanism is used for improving torque output and detecting output torque; the power mechanism is used for providing power; the control mechanism is used for controlling the power mechanism to work according to the position information, the rotating speed information and the output torque; the power mechanism comprises a motor rotor, a motor stator, a rotating shaft, a stator shell cover, a first bearing, a bearing pressing ring and an axial elastic deformation piece. The bearing pressing ring is arranged between the first bearing and the stator shell cover, and the axial elastic deformation piece is arranged between the bearing pressing ring and the stator shell cover; the control mechanism comprises an encoder rotor, an encoder stator and a driver. According to the motor module, the axial elastic deformation piece is arranged between the bearing pressing ring of the power mechanism and the stator shell cover, so that the relative position between the encoder rotor and the encoder stator below the stator shell cover is stable, and the size of the motor module is reduced.

The utility model discloses an electric wire winding device, and belongs to the field of electric wire winding devices, the electric wire winding device comprises a base, a supplement block is fixedly mounted on one side of the base, a mounting frame is fixedly mounted at the bottom end of the base, and a supporting plate is fixedly mounted at the top of the side, away from the supplement block, of the base; a winding rod is rotatably mounted on the inner side of the supporting plate, a second baffle ring fixedly sleeves the side wall of the winding rod, a winding pipe slidably sleeves the side wall of the winding rod, limiting plates are fixedly mounted at the two ends of the winding pipe, and a second gear motor is fixedly mounted on the side, away from the winding rod, of the supporting plate; and one end of the winding rod penetrates through the supporting plate and is fixedly connected with the end of an output shaft of the second gear motor, and a moving plate is slidably mounted at the top ends of the base and the supplementing block. Through the arrangement of the guide assembly, the electric wire winding device plays a role in guiding the electric wire, the electric wire can be conveniently and uniformly wound on the winding pipe, the winding effect of the electric wire can be improved, and the winding efficiency of equipment can be improved.

The polishing head comprises a shell, a carrier, a retaining ring and an elastic film assembly, the shell is used for being connected to the lower portion of a rotary driving part, the carrier is connected to the lower portion of the shell and provided with a containing cavity with a downward opening, the retaining ring is connected to the lower end face of the carrier, and the elastic film assembly is connected to the lower end face of the carrier. The elastic membrane assembly is arranged in the containing cavity, a buffering cushion ring is arranged at the bottom of the elastic membrane assembly, and the buffering cushion ring is arranged close to the outer ring of the elastic membrane assembly. According to the polishing head for the square silicon wafer, the incircle area of the square silicon wafer is ground through the middle area of the elastic film assembly, meanwhile, the buffering cushion ring close to the outer ring of the elastic film assembly abuts against the upper portion of the corner area of the square silicon wafer, effective buffering on the corner area is formed, and the polishing effect is improved. The problem that stress concentration is generated in the corner area in the grinding process is avoided, the grinding structure of the corner area is optimized, synchronous grinding of the inscribed circle area and the corner area is achieved, and the grinding quality of the square silicon wafer is guaranteed.

The utility model discloses a three-in-one washing and filtering dryer which comprises a cylinder body, a filter cylinder is fixedly installed in the middle of the cylinder body, roller frames are arranged on the left side and the right side of the outer surface of the lower end of the cylinder body, limiting water retaining rings are fixedly installed at the left end and the right end of an inner cavity of the cylinder body, and a discharging and drying assembly penetrates through the interior of the cylinder body. And a water washing assembly is arranged on one side of the discharging and drying assembly, one end of the water washing assembly extends into the barrel, and an air guide pipe is arranged above the filter cartridge. According to the three-in-one washing, filtering and drying device disclosed by the utility model, the roller frame, the cylinder body and the filter cylinder are arranged, so that filtering is conveniently carried out after feeding is carried out by the dibutyltin oxide feeding pipe, the washing assembly is arranged, so that materials fed into the filter cylinder by the dibutyltin oxide feeding pipe are conveniently washed, and the discharging and drying assembly is arranged, so that the filtering efficiency is improved. And the washed products can be conveniently discharged, and heating and drying treatment is carried out during discharging.

The invention provides a dynamic waterproof sealed charging connection device, and the device comprises a charging socket which comprises a socket housing for plugging a charging gun and a charging interface which is located in the socket housing and is used for electrically connecting the charging gun, and the lower part, adjacent to the charging interface, of the socket housing is provided with a lock hole; the water receiving tank is arranged below the socket shell, the upper part of the water receiving tank is hermetically connected with the socket shell and surrounds the lock hole, and the lower part of the water receiving tank is provided with a sealing hole corresponding to the lock hole; the electronic lock is arranged below the water receiving tank, the electronic lock comprises a lock shell and a locking rod capable of moving up and down relative to the lock shell, the locking rod can sequentially penetrate through the sealing hole and the lock hole to enter the socket shell, and the locking rod is connected with the sealing hole in a sealed mode; and the water retaining ring is positioned below the socket shell and is sleeved on the locking rod in a sealing manner, so that a good waterproof connection effect is realized. The invention also provides charging equipment using the charging connection device.

The invention provides a bearing head for wafer processing and chemical mechanical polishing equipment. The bearing head comprises a bearing head main body; the retaining ring is arranged on one side, facing the wafer, of the bearing head main body, and the wafer is limited in the retaining ring; and an anti-slip sheet mechanism at least partially disposed in the retaining ring, the anti-slip sheet mechanism being configured to be axially retractable to retract into the retaining ring when the retaining ring abuts against the polishing unit and to protrude from the retaining ring when the retaining ring is axially separated from the polishing unit, the anti-slip sheet mechanism being made of a corrosion resistant material. According to the technical scheme, the wafer is effectively prevented from sliding out, the risk that the wafer is broken is reduced, and the effectiveness of the anti-slip sheet mechanism is guaranteed.

The invention provides a steering wheel electric adjusting tubular column assembling and testing system. The steering wheel electric adjusting tubular column assembling system comprises a positioning mechanism, a bearing feeding mechanism, a check ring feeding device, a check ring distributing device and a press fitting mechanism. And the carrying robot is used for clamping the upper tubular column casing conveyed out from the interior of the equipment box body. And the positioning mechanism is used for positioning and pressing the upper tubular column casing. The bearing feeding mechanism is used for feeding the top bearing and conveying the top bearing to the positioning mechanism for fine positioning. The check ring feeding device is used for automatically feeding check rings. The check ring distributing device conveys check rings conveyed out of the check ring feeding device to the check ring distributing device for distributing. And the press-fitting mechanism is used for carrying out press-fitting operation on the conveyed opposite-vertex bearing and the retainer ring. Through cooperation of all the mechanisms, automation of assembly of the adjusting pipe column can be achieved, the time interval of component installation is shortened, the press-fitting process is rapid and coherent, and the large-scale and high-efficiency production requirements of the automobile manufacturing industry are met.

The invention discloses a new energy cable for power transmission, and relates to the technical field of cables, the new energy cable for power transmission comprises an anti-corrosion sleeve, a neck bush is installed in the anti-corrosion sleeve, a conductor is arranged in the neck bush, a sealing and butt joint mechanism is arranged on the outer side of the anti-corrosion sleeve, and the sealing and butt joint mechanism comprises a reinforcing ring sleeve. The device is scientific and reasonable in structure and safe and convenient to use, a sealing and butt joint mechanism is arranged, a positioning buckle is driven to move to the outer side of the reinforcing ring sleeve through traction of a traction baffle ring, and through cooperation of a positioning shaft seat, an anti-deviation supporting rod and an opening and closing sliding block, the anti-deviation supporting rod is fixed to the outer side of the anti-deviation supporting rod, and the anti-deviation supporting rod is fixed to the outer side of the anti-deviation supporting rod. The two positioning buckles are attached together in a sliding mode to form an annular buckle, the annular buckle is connected into the reinforcing ring sleeve in a sleeved mode, the splicing inserting rod is embedded into the positioning groove, and then the sealing buckle is pulled to move through cooperation of the limiting rotating cylinder, the telescopic sleeve rod and the positioning shaft base.

The invention provides a main shaft structure which comprises a pipeline disc, a rear end seat, a shaft core, a water retaining ring and a rear shaft core end cover, the rear end seat is located on the periphery of at least part of a shaft section of the shaft core, the pipeline disc and the rear end seat are arranged at intervals in the axial direction, and the water retaining ring is further arranged between the pipeline disc and the rear end seat. At least part of the structure of the water retaining ring is located on the periphery of at least part of the structure of the shaft core, the rear shaft core end cover is arranged at the axial upper end of the shaft core, a containing cavity is formed in the upper end of the rear shaft core end cover, a water outlet hole is formed in the water retaining ring, and the water outlet hole is located below the containing cavity and can be communicated with the containing cavity. Water in the containing cavity can be discharged out of the main shaft structure through the water outlet hole. Water can be effectively prevented from entering the motor at the lower end of the spindle structure, the waterproof sealing effect on the motor of the spindle structure is achieved, and the problem that in the prior art, water easily enters the motor of an electric spindle, and potential safety hazards are caused is solved.

Bottom-loading bone anchor assemblies and components thereof are disclosed that have a reduced profile and can be utilized with bone screws of various size. Bone anchor assemblies of the present disclosure can include a receiver member, a drag retaining ring, and a shank. The retaining ring and shank can be inserted proximally into a bore of the receiver member. The drag ring can have a base and a walled portion extending proximally therefrom. The drag retaining ring can be disposed in a groove of the receiver member with the base forming a seat for the shank head that can hold the shank within the receiver. The walled portion of the drag retaining ring can impart a drag force on the shank head seated in the base to prevent unintended movement between the shank and the receiver member.

According to the oil mist removing device and method for the continuous annealing line temper mill, the temper mill comprises a supporting roller, supporting bearing seats are arranged on the two sides of the supporting roller, bearing sealing devices are arranged on the two sides of bearings on the bearing seats, and the oil mist removing device for the temper mill comprises a wool felt ring, an oil retainer ring and an oil mist removing system. Wherein the wool felt ring is sleeved on the outer side of the bearing sealing device at the joint of the supporting bearing seat and the supporting roller; the oil retainer is arranged on the outer side of the bearing, the top of the wool felt ring covers the joint of the bearing and the supporting roller, a gap is reserved between the oil retainer and the roller surface of the supporting roller, and an oil pumping air hole is formed in the oil retainer; the oil mist removal system comprises an oil gas pumping hose, a first pipeline, a main pipeline, a filter, a fan, a motor and an exhaust port, the oil gas pumping holes are connected with the first pipeline through the oil gas pumping hose, the first pipeline is connected with the main pipeline after being converged, the filter, the fan and the exhaust port are sequentially arranged on the main pipeline from upstream to downstream, and the motor is connected with the fan. According to the method, the overall occurrence probability of plate surface oil spots can be reduced, and the plate surface quality is obviously improved.

The invention provides a shell assembly and electronic equipment. The shell assembly comprises an outer decoration part, an inner decoration part, a first sealing glue layer, a shell and a second sealing glue layer. The inner decorating part comprises an inner ring sealing ring, a baffle ring and an outer ring sealing ring. The annular inner wall of the through hole of the shell comprises an embedded annular part close to the center of the through hole and an exposed annular part far away from the center of the through hole and connected with the embedded annular part. The outer ring sealing ring comprises a first outer sealing interval ring, the first outer sealing interval ring extends to the exposed annular part of the shell, the second sealing glue layer comprises a first interval glue layer, and the first interval glue layer is connected between the first outer sealing interval ring of the outer ring sealing ring and the exposed annular part in a sealing mode. By extending the first outer sealing interval ring of the inner decorating part to the exposed annular part of the shell, an extended mounting space can be provided for a large-size camera, so that the mounting requirement of the large-size camera of an ultrathin waterproof mobile phone is met.

The invention discloses a chemical mechanical polishing and planarization system, which at least comprises a polishing head, and the polishing head comprises a polishing head body; a plurality of air holes are formed in the lower surface of the hard disc, and a third air cavity communicated with the air holes is formed in the hard disc; at least part of the elastic unit is of an annular structure, the elastic unit is connected with the polishing head body and the hard disc, and a second air cavity is defined by the polishing head body, the elastic unit and the hard disc; the retaining ring is positioned below the polishing head body; when the third air cavity is in a negative pressure state, the lower surface of the hard disc can make contact with and adsorb the wafer substrate, and the pressure in the second air cavity is controllable, so that the elastic unit is driven to flexibly move, the hard disc and the wafer substrate are assisted to float, and chemical mechanical polishing of the wafer substrate is achieved. According to the hard drive in the hard disc, the problem that when the flexible film drives the wafer substrate to be polished, under the severe polishing condition, the flexible film is pulled to cause fracture or elastic modulus change is solved, and the service life of the flexible piece is prolonged.

The invention relates to the field of automobile part detection equipment, in particular to automobile part air tightness detection equipment which comprises an arc-surface supporting mounting cover, a plurality of columnar supporting legs are arranged on the outer side of the arc-surface supporting mounting cover at equal angles, supporting gaskets are arranged at the outer ends of the columnar supporting legs, and a supporting mounting disc is arranged at an opening of the arc-surface supporting mounting cover. A conical surface material blocking ring is arranged on the edge of the supporting and mounting disc; an electrically-driven material guiding gate is rotationally arranged at the bottom of the cambered surface supporting and mounting cover; a supporting mounting column is vertically arranged in the center of the supporting mounting disc, so that airtightness detection operation of the automobile parts can be stably realized, and airtightness detection of different strengths can be adapted; two-stage amplification of air pressure can be realized, the sensitivity of air tightness detection is improved, the detection precision of automobile parts is improved, meanwhile, the detection duration is greatly shortened without a direct removal mechanism, the detection quality and efficiency of the automobile part air tightness detection equipment are remarkably improved, and the automobile part air tightness detection equipment is suitable for large-scale use.

The invention provides a combustion-supporting air preheating device for an annealing furnace, and relates to the technical field of air preheating combustion-supporting equipment, the combustion-supporting air preheating device comprises a preheating box, and a plurality of rows of preheating pipes are fixedly connected in the preheating box; a threaded propeller shaft is rotationally arranged in the preheating box and close to the leeward side of the preheating pipe, and a longitudinal guide shaft is welded in parallel in the preheating box and close to the threaded propeller shaft; the preheating pipe is sleeved with a retaining ring in a sliding mode, a gear ring is rotationally installed on the retaining ring, a retaining ring is welded to the gear ring, a small annular steel wire brush and a large annular steel wire brush are fixed to the inner circumference and the outer circumference of the retaining ring respectively, and brush wires on the annular steel wire brush on the inner side are evenly distributed on the inner circumference of a supporting ring of the retaining ring. Brush wires on the annular steel wire brush on the outer side are uniformly distributed on the periphery of a supporting ring of the annular steel wire brush; according to the preheating device, the trouble that the preheating device needs to be greatly disassembled to expose the preheating pipe, and then the preheating pipe can be cleaned can be omitted, and operation and use are easy, convenient and efficient.

The invention provides an electrostatic chuck structure for semiconductor processing, which comprises a base, an adsorption electrode layer and a ceramic dielectric layer, and is characterized in that the adsorption electrode layer is arranged between the base and the ceramic dielectric layer; the check ring is fixedly mounted on the top edge of the ceramic dielectric layer; the air chamber is arranged in the ceramic dielectric layer, a plurality of air outlet holes are formed in the top of the air chamber in a communicating mode, the air outlet holes are evenly distributed in the top face of the ceramic dielectric layer, the air outlet holes are each connected with a boss in a matched mode, the bosses extend to the position above the ceramic dielectric layer, and the bosses are used for bearing a wafer; and the lifting mechanism is connected with the boss. Through the air chamber and the plurality of uniformly distributed air outlet holes arranged on the ceramic dielectric layer, after the wafer is subjected to electrostatic adsorption, air for heat dissipation and cooling is introduced into the air chamber through the air inlet pipe, the air is shunted to the plurality of air outlet holes from the air chamber, and blowing is directly provided for the bottom surface of the wafer through the air outlet holes, so that the heat dissipation effect is guaranteed.