Cutting tool comprising multilayer coating
A cutting tool and multi-layer coating technology, applied in the field of cutting tools, can solve problems such as insufficient temperature resistance, and achieve the effects of reducing thermal conductivity, high hardness value, and good high-temperature properties
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example 1
[0026] Layer A: TiAlN
[0027] PVD Process: Arc Vapor Deposition (Arc-PVD)
[0028] Target: Ti / Al (33 / 67 atomic percent), circular source (63mm diameter)
[0029] Deposition: temperature: 500°C; evaporator current: 65 amps;
[0030] 3.2Pa nitrogen pressure, 50V substrate bias voltage
[0031] Layer B: Si 3 N 4
[0032] PVD process: double magnetron sputtering
[0033] Target: rectangular silicon source (80cm×20cm)
[0034] Deposition: Temperature: 500°C; 6W / cm 2 ; 200 sccm of nitrogen;
[0035] 0.5Pa argon pressure; 90V substrate bias voltage
[0036] Structural X-ray, amorphous
[0037] Bonding Character: Covalent according to XPS analysis
[0038] Layer sequence: bulk / 2.5 μm TiAlN / 0.6 μm Si 3 N 4
example 2
[0045] The TiAlN layer and the silicon nitride layer B were deposited with the same PVD process and the same parameters as in Example 1.
[0046] Layer sequence: bulk / 2.5 μm TiAlN / 0.6 μm Si 3 N 4 / 0.3μm TiAlN / 0.1μm Si 3 N 4 / 0.3μm TiAlN / 0.1μm Si 3 N 4 .
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