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DLC (diamond-like carbon)/TiAlN (titanium aluminium nitride)/CrN (chromium nitride)/Cr (chromium) multilayer superhard film coating and preparation method thereof

A multi-layer coating and DLC film technology, applied in the coating, metal material coating process, ion implantation plating, etc., can solve the problems of poor bearing capacity, high load, high-speed internal combustion engine, etc., and improve mechanical properties , comprehensive performance improvement, and the effect of improving the binding force

Inactive Publication Date: 2011-06-01
SHENZHEN GUANGDA NANO ENG
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005]At present, the surface coating technology of piston rings mostly adopts a single coating layer structure, and the thickness of the prepared film is too thin, generally only 3-5μm. Load, high-speed internal combustion engine demand

Method used

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  • DLC (diamond-like carbon)/TiAlN (titanium aluminium nitride)/CrN (chromium nitride)/Cr (chromium) multilayer superhard film coating and preparation method thereof
  • DLC (diamond-like carbon)/TiAlN (titanium aluminium nitride)/CrN (chromium nitride)/Cr (chromium) multilayer superhard film coating and preparation method thereof
  • DLC (diamond-like carbon)/TiAlN (titanium aluminium nitride)/CrN (chromium nitride)/Cr (chromium) multilayer superhard film coating and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0026] Such as figure 1 As shown, the method provided by the invention prepares a DLC / TiAlN / CrN / Cr multilayer superhard film coating on the substrate specifically comprises the following steps:

[0027] Step 1: A metal Cr layer with a thickness of 0.1-0.5 μm is prepared on the substrate; preferably, the vacuum degree is 4.0×10 -2 ~5.0×10 -4 Pa (Pa), the temperature is 50°C-200°C, the arc current is 50A-70A, and the negative bias is -150V--600V, the chromium arc target is sputtered for 5-15 minutes, and the deposition thickness is 0.1-0.5μm the Cr layer;

[0028] Step 2: On the Cr layer prepared in the above step 1, further prepare a CrN layer with a thickness of 0.1-0.5 μm; preferably, at a nitrogen pressure of 0.1-5Pa, a temperature of 50°C-200°C, and an arc current of 50A ~70A, under the condition of negative bias -150V~-600V, open the chromium arc target and sputter for 10~25 minutes, and deposit the CrN layer with a thickness of 0.1~0.5μm;

[0029] Step 3: On the CrN l...

Embodiment 2

[0039] Based on Example 1, the following steps can be used to prepare the DLC / TiAlN / CrN / Cr multilayer superhard film coating on the substrate:

[0040] Step 1: At a vacuum pressure of 7.0 x 10 -3 Pa, the temperature is 150°C, the arc current is 60A, and the negative bias is -300V, the chromium arc target is sputtered and deposited on the substrate for 11 minutes to obtain a Cr layer;

[0041] Step 2: further deposit a CrN layer on the Cr layer obtained in the above step 1; preferably, under the conditions of nitrogen pressure of 0.8Pa, temperature of 150°C, arc current of 60A, and negative bias of -300V, open the chromium Arc target sputtering is deposited on the Cr layer of the step 1 for 17 minutes to make the CrN layer;

[0042] Step 3: further prepare a TiAlN layer on the CrN layer prepared in the step 2; wherein, the preparation of the TiAlN layer preferably adopts the following steps:

[0043] Step 3.1: At a nitrogen pressure of 3.5Pa, a temperature of 150°C, an arc cu...

Embodiment 3

[0049] Based on Example 1, the following steps can be used to prepare the DLC / TiAlN / CrN / Cr multilayer superhard film coating on the substrate:

[0050] Step 1, step 2 and step 3 are respectively identical with this step 1, this step 2 and this step 3 in embodiment 2;

[0051] Step 4: Repeat step 1 to step 3 periodically to prepare the TiAlN / CrN / Cr multi-layer coating; preferably, repeat step 1 to step 3 periodically for 8 times; and

[0052] Step 5: Same as this step 5 in embodiment 2.

[0053] The thickness of the DLC / TiAlN / CrN / Cr multilayer superhard film coating prepared in this embodiment is 5.10 μm. The film mechanical properties were tested by nano-indentation method, and the hardness was found to be 40.0±0.3GPa.

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Abstract

The invention discloses a DLC (diamond-like carbon) / TiAlN (titanium aluminium nitride) / CrN (chromium nitride) / Cr (chromium) multilayer superhard film coating for the surface treatment of piston rings of automobile engines, and the multilayer superhard film coating is prepared by adopting a multi-arc ion plating technology and a magnetron sputtering technology. The thickness of the prepared multilayer superhard film coating is between 5 mu m and 20 mu m (micrometer), and the hardness of the coating is greater than 40GPa.

Description

technical field [0001] The invention relates to a multilayer superhard film coating and a preparation method thereof, in particular to a DLC / TiAlN / CrN / Cr multilayer superhard film coating and a preparation method thereof. Background technique [0002] Nowadays, automobile engines will develop towards high efficiency, high load, high speed and long life. Piston rings, as the core components of automobile engines, must meet the following conditions: (1) High hardness, good wear resistance, and extended Longer service life, lower maintenance cost; (2) Low friction coefficient, good lubrication performance, reduce friction, reduce power loss; (3) Good high temperature performance, good thermal conductivity, avoid overheating damage. At present, most of the piston ring materials are cast iron and special steel, and the structure of the piston ring has not changed much. To meet its high requirements for performance, the use of surface wear-resistant treatment technology is the ma...

Claims

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Application Information

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IPC IPC(8): C23C14/06C23C14/34
Inventor 韩培刚
Owner SHENZHEN GUANGDA NANO ENG
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