Composite treating method for nitriding surface of metal material after coating

A metal material, composite treatment technology, applied in metal material coating process, sputtering plating, ion implantation plating, etc. Performance and service life, etc., to achieve the effect of high bonding strength of film base and film compactness, reducing defect density and ensuring bonding strength of film base

Active Publication Date: 2014-05-21
INST OF METAL RESEARCH - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The ferrite layer is not only very low in hardness, but also has a certain degree of looseness, which will greatly reduce the film-base bonding st

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0037] (1) Workpiece pre-treatment: The workpiece is made of high-speed steel (grade W18Cr4V), the size of the workpiece is 20mm×10mm×10mm, and the size of the treated surface is 20mm×10mm. After degreasing, anhydrous alcohol ultrasonic cleaning and drying, the workpiece to be treated is placed on the sample stage in the ion nitriding / arc ion plating composite treatment equipment;

[0038] (2) Vacuuming and workpiece preheating: start the vacuuming system of the composite processing equipment, and wait until the vacuum degree of the vacuum chamber reaches 5×10 -3 At Pa, turn on the heater to heat the workpiece in the vacuum chamber to 400°C;

[0039] (3) Glow (or / and arc) cleaning: Introduce argon gas into the vacuum chamber, control the air pressure at 2.0Pa, turn on the bias power supply, and control the bias voltage at -800V, so that the gas will glow discharge, and the surface of the workpiece will be cleaned. Glow cleaning for 20 minutes; then adjust the argon gas pressu...

Embodiment 2

[0045] (1) Workpiece pre-treatment: The workpiece is made of high-speed steel (grade W6Mo5Cr4V2Al), the size of the workpiece is 20mm×10mm×10mm, and the size of the treated surface is 20mm×10mm. After degreasing, anhydrous alcohol ultrasonic cleaning and drying, the workpiece to be treated is placed on the sample stage in the ion nitriding / arc ion plating composite treatment equipment;

[0046] (2) Vacuuming and workpiece preheating: start the vacuuming system of the composite processing equipment, and wait until the vacuum degree of the vacuum chamber reaches 6×10 -3 At Pa, turn on the heater to heat the workpiece in the vacuum chamber to 430°C;

[0047] (3) Glow (or / and arc) cleaning: Introduce argon gas into the vacuum chamber, control the air pressure at 1.5Pa, turn on the bias power supply, and control the bias voltage at -750V, so that the gas will glow discharge, and the surface of the workpiece will be cleaned. Glow cleaning for 20 minutes; then adjust the argon gas p...

Embodiment 3

[0053] (1) Workpiece pretreatment: The workpiece is made of austenitic stainless steel (grade 0Cr19Ni9), the size of the workpiece is Φ30mm×10mm, and the size of the treated surface is Φ30mm×10mm. After degreasing, anhydrous alcohol ultrasonic cleaning and drying, the workpiece to be treated is placed on the sample stage in the ion nitriding / magnetron sputtering composite processing equipment;

[0054] (2) Vacuuming and workpiece preheating: start the vacuuming system of the composite processing equipment, and wait until the vacuum degree of the vacuum chamber reaches 5×10 -3 At Pa, turn on the heater to heat the workpiece in the vacuum chamber to 400°C;

[0055] (3) Glow cleaning: Introduce argon gas into the vacuum chamber, control the air pressure at 2.0Pa, turn on the bias power supply, and control the bias voltage at -800V to make the gas glow discharge, and perform glow cleaning on the surface of the workpiece for 20 minutes;

[0056] (4) Deposit thin film transition la...

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Abstract

The invention belongs to the field of material surface modification, and particularly relates to a composite treating method for nitriding the surface of a metal material after coating. The composite treating method is suitable for surface strengthening of tools, molds and metal accessories. The composite treating method comprises the following steps: firstly depositing a layer of nitride thin film on the surface of a metal material substrate by adopting magnetron sputtering or arc ion plating, wherein the thickness of the thin film is 0.1-50 micrometers; then carrying out ion nitriding treatment on the surface of the coating film by adopting an ion nitriding technology for 0.5-10 hours. Due to adoption of the composite treating method, the problem of low film-substrate bonding strength and the like caused by a black layer easily occurring in a composite treating process of coating after nitriding are solved. The workpiece obtained by adopting the coating-nitriding composite treating method of carrying out ion nitriding treatment after depositing a layer of thin film has the characteristics of high surface hardness, good wear resistance, high film-substrate binding force, reliable quality, stability and the like.

Description

Technical field: [0001] The invention belongs to the field of material surface modification, and specifically relates to a composite treatment method in which the surface of a metal material is first coated and then nitrided, and is suitable for surface strengthening of cutting tools, molds and metal parts. Background technique: [0002] As a thermochemical treatment process, nitriding treatment can generally improve the fatigue resistance, wear resistance and corrosion resistance of steel. However, the surface hardness of the workpiece after nitriding treatment is still low, which still cannot meet the growing demands of harsh application conditions. [0003] Hard coatings such as TiN prepared by physical vapor deposition (Physical Vapor Deposition, PVD) have become the most widely used surface coatings. Due to the advantages of high hardness, high adhesion strength, low friction coefficient and good chemical stability, TiN coating has been widely used in various fields, e...

Claims

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Application Information

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IPC IPC(8): C23C28/04C23C14/06C23C14/22C23C8/36
Inventor 赵彦辉于宝海肖金泉
Owner INST OF METAL RESEARCH - CHINESE ACAD OF SCI
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