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AlTiSiN-AlCrSiN nanocrystalline-amorphous multilayer composite superhard toughness coating material and manufacturing method

A multi-layer composite, nanocrystalline technology, applied in coating, metal material coating process, vacuum evaporation plating and other directions, can solve the problems of the influence of coating cutting performance, etc., to improve surface quality, superior temperature resistance and wear resistance. , Overcome the effect of insufficient temperature resistance and wear resistance

Inactive Publication Date: 2014-12-17
WUHAN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

In addition, there are many factors affecting the machinability of the coating. The cutting material, coating composition and processing cooling conditions will have a great impact on the machinability of the coating.

Method used

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  • AlTiSiN-AlCrSiN nanocrystalline-amorphous multilayer composite superhard toughness coating material and manufacturing method
  • AlTiSiN-AlCrSiN nanocrystalline-amorphous multilayer composite superhard toughness coating material and manufacturing method
  • AlTiSiN-AlCrSiN nanocrystalline-amorphous multilayer composite superhard toughness coating material and manufacturing method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0042] Example 1: At 100°C and in an argon atmosphere, high-speed steel and hard alloy tools and molds are etched by arc plasma, and then a transition metal with a thickness of 5 nanometers is deposited under the conditions of 0.02-0.2Pa and -800V to -1000V Cr bonding layer; Deposit a 10nm thick CrN layer at 0.1Pa, -20V; deposit a 1500nm AlCrSiN / CrN hardened layer at 0.5Pa pressure, -50V bias; deposit at 0.5 pressure, -50V bias 500nm AlTiSiN / CrN support layer; finally, 0.2 micron AlTiSiN-AlCrSiN multilayer coating is deposited under the condition of 0.5Pa pressure and -20V bias. 3 N 4 The thickness of the amorphous layer is 0.1 nm. The diameter of AlCrN nanocrystals in the AlCrSiN layer is 15 nm, and the Si 3 N 4 The thickness of the amorphous layer is 0.1 nm. The silicon content in the AlTiSiN and AlCrSiN layers is 1 at.%; the total thickness of the coating is 2.205 microns. After the preparation, it is naturally cooled to obtain an AlTiSiN-AlCrSiN nanocrystalline-amorpho...

Embodiment 2

[0043]Embodiment 2: at 450 ℃, under argon atmosphere, high-speed steel and cemented carbide cutting tool and mold are through arc plasma etching, at 0.2Pa, the transition metal Cr binding layer of 200 nanometers is deposited under the condition of -1000V; Deposit a 300nm thick CrN layer at 2.3Pa and -300V; deposit a 200nm AlCrSiN / CrN hardened layer at 8Pa pressure and -300V bias; deposit a 1500nm AlTiSiN / CrN support at 8Pa pressure and -300V bias layer; finally, a 10-micron AlTiSiN-AlCrSiN multilayer coating is deposited under the condition of 10Pa pressure and -300V bias. 3 N 4 The thickness of the amorphous layer is 2 nm. The diameter of AlCrN nanocrystals in the AlCrSiN layer is 5 nm, and the Si 3 N 4 The thickness of the amorphous layer is 2 nm. The silicon content in the AlTiSiN and AlCrSiN layers is 15 at.%; the total thickness of the coating is 12.1 microns. After the preparation is completed, it is cooled naturally to obtain an AlTiSiN-AlCrSiN nanocrystalline-amorp...

Embodiment 3

[0044] Embodiment 3: Under 350 ℃, argon atmosphere, high-speed steel and cemented carbide cutting tool and mold are etched through arc light plasma, at 0.1Pa, the transition metal Cr binding layer of 100 nanometers is deposited under the condition of -800V; Deposit 100nm thick CrN layer under 1.5Pa, -100V condition; deposit 500nm AlCrSiN / CrN hardened layer under 0.5Pa pressure, -100V bias condition; deposit 1000nm AlTiSiN / CrN under 0.5 pressure, -100V bias condition Support layer; finally, 5 micron AlTiSiN-AlCrSiN multi-layer coating is deposited under the condition of 3Pa pressure and -20V bias. The diameter of AlTiN nanocrystal in the AlTiSiN layer in the above coating is 10 nanometers, Si 3 N 4 The thickness of the amorphous layer is 1 nm. The diameter of AlCrN nanocrystals in the AlCrSiN layer is 10 nm, and the Si 3 N 4 The thickness of the amorphous layer is 1 nm. The silicon content in the AlTiSiN and AlCrSiN layers is 5 at.%; the total thickness of the coating is 6....

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Abstract

The invention discloses an AlTiSiN-AlCrSiN nanocrystalline-amorphous multilayer composite superhard toughness coating material. The material is composed of a bonding layer, a transition layer, a supporting layer and a high-temperature toughness wear-resisting layer. The manufacturing method comprises the steps that an arc source is adopted to perform etching cleaning on a chemically-cleaned base body, and then an arc ion plating method is adopted to enable the bonding layer, the transition layer, a hardening layer, the supporting layer and a super-toughness high-temperature-resisting wear-resisting layer to be sequentially deposited. The superhard characteristics and high-temperature-resisting characteristics of a nanocrystalline-amorphous composite structure are fully utilized, and AlTiSiN nanocrystalline coating materials and AlCrSiN nanocrystalline coating materials are combined to build the nanocrystalline-amorphous multilayer coating material. The coating structure is reasonable in design, composition gradual change exists, meanwhile, the hardness gradient gradual change is achieved, and the manufactured AlTiSiN-AlCrSiN coating has the good bonding force with a base body. The AlTiSiN-AlCrSiN coating has the good hardness and excellent temperature-resisting and wear-resisting performance, the problem that a base body coating is poor in temperature resistance and wear resistance is solved well, the use performance of the base body is greatly improved, and the good industrial application prospect is achieved.

Description

technical field [0001] The invention relates to an AlTiSiN-AlCrSiN nanocrystalline-amorphous multilayer composite superhard and tough coating material and a preparation method, belonging to the technical field of coating materials. Background technique [0002] With the sharp increase in the use of difficult-to-machine materials such as high-strength steel, high-temperature alloys, and composite materials, as well as the extensive use of high-speed cutting, dry cutting, and micro-lubricated cutting processes, higher technical requirements are placed on cutting tools. In actual cutting applications, the temperature in the cutting area is often higher than the thermal decomposition temperature of TiN, TiCN, TiAlN and other tool coatings with a hardness of 20-30GPa, which leads to serious oxidation wear and failure of the tool [1] . Plating super-hard nano-coating materials on the surface of metal cutting tools is in line with the high technical requirements of modern manufact...

Claims

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Application Information

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IPC IPC(8): C23C14/32C23C14/06C23C14/16C23C14/02
Inventor 杨兵万强陈燕鸣丁辉
Owner WUHAN UNIV
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