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TiSiN+ZrSiN composite nanometer coated cutting tool and preparation method thereof

A nano-coating and cutting tool technology, which can be used in coatings, chemical instruments and methods, metal material coating processes, etc., and can solve problems such as high equipment requirements and complex methods and processes.

Inactive Publication Date: 2013-09-04
SHANDONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The Chinese patent "Patent No.: 200910044474.5" reports a multi-coated tool periodically deposited by physical vapor deposition and its preparation method. Each cycle of the coating includes a TiN layer to a TiSiN layer to a TiAlSiN layer to a TiSiN layer, and the coating Superimposed by multiple cycles; Chinese patent "Patent No.: 201010274510.X" reports a method for preparing nanostructured ZrSiN coatings on the surface of hard alloys, which uses DC magnetron and radio frequency magnetron co-sputtering in argon Deposit ZrSiN coating in an atmosphere of nitrogen and nitrogen; Chinese patent: "Patent No.: 200880018340.X" reports a surface-coated cutting tool, the coating is a composite ultra-multilayer film, and its structure can be divided into two layers. One large layer is composed of one or more A1 layers and B layers alternately, and the second largest layer is composed of one or more A2 layers and C layers alternately stacked, wherein the A1 layer and A2 layer are TiN, TiCN, TiAlN and TiAlCN respectively. One, the B layer and the C layer are respectively stacked alternately by one or more TiSiN or TiSiCN layers and AlCrN or AlCrCN layers. The method is complex and requires high equipment requirements

Method used

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  • TiSiN+ZrSiN composite nanometer coated cutting tool and preparation method thereof

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Embodiment 1

[0019] A TiSiN+ZrSiN composite nano-coating tool and its preparation method, the tool base material is YS8 hard alloy, the coating is a multi-layer structure, the surface of the tool is a ZrSiN layer, there is a TiZrSiN transition layer between the ZrSiN layer and the TiSiN layer, TiSiN There is a Ti transition layer between the layer and the substrate. The preparation method of TiSiN+ZrSiN composite nano-coating tool is the method of multi-arc ion plating + intermediate frequency magnetron sputtering co-deposition, and the specific preparation steps are as follows:

[0020] (1) Pretreatment: Polish the YS8 cemented carbide tool base material to the mirror surface, remove the surface contamination layer, put it in alcohol for ultrasonic cleaning for 15 minutes, and put it into the vacuum chamber of the coating machine after it is fully dried. The background vacuum of the vacuum chamber is 7.0×10- -3 Pa, heat to 250°C, keep warm for 30min;

[0021] (2) Ion cleaning: enter Ar g...

Embodiment 2

[0028] A TiSiN+ZrSiN composite nano-coating tool and its preparation method, the tool base material is W18Cr4V high-speed steel, the coating is a multi-layer structure, the surface of the tool is a ZrSiN layer, there is a TiZrSiN transition layer between the ZrSiN layer and the TiSiN layer, and a TiSiN layer There is a Ti transition layer between the substrate and the substrate. The preparation method of TiSiN+ZrSiN composite nano-coating tool is the method of multi-arc ion plating + intermediate frequency magnetron sputtering co-deposition, and the specific preparation steps are as follows:

[0029] (1) Pretreatment: Polish the W18Cr4V high-speed steel tool base material to the mirror surface, remove the surface contamination layer, put it in alcohol for ultrasonic cleaning for 15 minutes, and put it into the vacuum chamber of the coating machine after it is fully dried. The background vacuum of the vacuum chamber is 7.0×10 -3 Pa, heat to 200°C, keep warm for 30min;

[0030]...

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Abstract

The invention provides a TiSiN+ZrSiN composite nanometer coated cutting tool and a preparation method thereof and belongs to the field of mechanical machining. A base material of the coated cutting tool is a hard alloy or high-speed steel. The TiSiN+ZrSiN composite nanometer coated cutting tool is manufactured by adopting a multi-arc ion plating+intermediate frequency magnetron sputtering method. The TiSiN+ZrSiN composite nanometer coated cutting tool is of multilayered structure, a ZrSiN coating is formed on the surface of the cutting tool, a TiZrSiN transition coating is formed between the ZrSiN coating and a TiSiN coating, and a Ti transition coating is formed between the TiSiN coating and a substrate, wherein the atomic percentage of Si content in the TiSiN coating and the ZrSiN coating is 6%-10%. The TiSiN+ZrSiN composite nanometer coated cutting tool well combines the high hardness of the TiSiN coating and the low friction coefficient of the ZrSiN coating and has high hardness, good friction and wear property and excellent high-temperature oxidation resistance; and the bonding can be alleviated in the cutting process, and the wearing of the cutting tool is reduced, so that the service life of the cutting tool is prolonged. The coated cutting tool can be widely applied to drying machining and machining of difficult-to-machine materials.

Description

1. Technical field [0001] The invention belongs to the technical field of mechanical cutting tool manufacturing, and in particular relates to a TiSiN+ZrSiN composite nano-coating tool and a preparation method thereof. 2. Background technology [0002] As a kind of nano superhard coating, TiSiN film has high hardness, oxidation resistance and wear resistance, which are greatly improved compared with binary nitride coatings, and has been applied in cutting tools and molds. When the atomic percentage of Si is in the range of 6-10%, the hardness is the highest, but the friction coefficient is high (0.6-0.9), and it is easy to bond during cutting and other processes, and the energy loss is more. ZrSiN film grains are also at the nanoscale, and the friction coefficient is more sensitive to the Si content. When the Si content is in the range of 6-10 atomic percent, it has a lower friction coefficient (0.2-0.5), and it is resistant to high temperature oxidation and wear resistance. ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B32B9/04B32B15/04C23C14/35C23C14/06C23C14/32C23C14/14
Inventor 李士鹏邓建新
Owner SHANDONG UNIV
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