The invention provides a method for manufacturing a nanometer
silicon through hole in a
silicon wafer with an IC device and a packaging structure, and relates to the technical field of semiconductors, and the method comprises the steps: obtaining a first
silicon wafer, arranging an IC device on a first surface of the first silicon
wafer through the execution of an IC technology, and forming an IC device layer; preparing a
metal pad on the surface of the IC device layer; depositing and growing a
dielectric layer on the IC device layer by using a
dielectric layer material; preparing a first through hole in the growth
dielectric layer, wherein the first through hole is located above the
metal pad and is connected with the upper surface of the
metal pad; preparing a first metal layer on the surface of the growth
dielectric layer; a second through hole is formed in the second surface of the first silicon wafer, penetrates through the first silicon wafer and the IC device layer, is located below the metal pad and is connected with the lower surface of the metal pad; and preparing a second metal layer on the second surface to obtain the through-silicon-via structure.