The invention relates to the technical field of materials for integrated circuits, in particular to a
lanthanum target material and a preparation method thereof.The method comprises the steps that a micro-lubricating-oil-based
cutting fluid is adopted for conducting tooth turning on the
welding face of a
lanthanum target blank, and then a back
gold layer with the thickness of at least 0.5
micrometer is formed on the
welding face in a
sputtering plating mode; the rotating speed of the gear turning
machining is 50-100 r / min, the feeding speed is 0.1-0.5 mm / r, and the
cutting depth is 0.1-0.5 mm; the
welding face of the back plate is subjected to tooth turning
machining, and a back
gold layer is plated on the welding face in a
sputtering mode; and a middle layer is placed between the
lanthanum target blank and the back
gold layer of the back plate, vacuum
diffusion welding is conducted for 1-4 h, and the lanthanum target material is subjected to aftertreatment. The problem of oxidation of the welding surface of the high-activity lanthanum target can be effectively solved, high-quality welding of the lanthanum
target surface and the back plate is achieved, the welding rate and the welding strength of the target material are greatly improved, the surface of the target material is free of
ablation marks, and the target material can be stored for a long time and better meets the requirements of a sputter
coating process.