The invention provides a double-sided conduction AMB
ceramic substrate and a manufacturing method thereof, and belongs to the technical field of
ceramic substrates for power modules. The manufacturing method comprises the following steps:
punching holes in a
ceramic substrate; filling conductive
metal slurry into the holes by using a
screen printing machine and
sintering at high temperature;
brazing materials are printed on the two faces of the ceramic; the
copper layer and the ceramic layer are laminated and then subjected to vacuum
brazing; manufacturing a circuit;
etching the solder layer of the AMB line groove to
expose the ceramic; performing surface treatment;
laser cutting; and conducting test and inspection. Two-sided conduction is realized through
metal slurry hole filling and a high-temperature
sintering process, the problem that conduction of an upper
copper layer and a lower
copper layer of a traditional AMB
ceramic substrate cannot be realized is solved, the assembling size of a
power module is reduced, the three-dimensional integration requirement of a high-end module is met, meanwhile, the technological process is reasonable, and the production cost is reduced.