The invention discloses a TiAlN / CrAlSiN nano multilayer
composite coating based on a Cr layer and a preparation method, the preparation method adopts an arc
ion plating technology to deposit the
coating, and the preparation method comprises the following process steps: S1, workpiece surface pretreatment; s2, vacuumizing and heating by a
vacuum coating machine; s3,
etching the surface of the workpiece; s4, depositing a Cr layer; s5, depositing an AlTiN layer; s6,
nitrogen is introduced, TiAlN / CrAlSiN nanometer multiple
layers are alternately deposited, and the operation is periodically and alternately repeated for 50-100 times; and S7, a CrAlSiN layer is deposited, a CrAlSi target is started, the target current ranges from 80 A to 400 A,
nitrogen is introduced, the
cavity pressure ranges from 3 Pa to 4 Pa, the workpiece bias
voltage ranges from-100 V to-150 V, and the deposition time ranges from 2 h to 5 h. In the step S6, when the TiAlN layer is deposited, a TiAl target is started, the target current ranges from 80 A to 400 A, the workpiece bias
voltage ranges from-30 V to-150 V, the
cavity pressure ranges from 1.5 Pa to 4.5 Pa, and the deposition time ranges from 5 s to 30 s; when the CrAlSiN layer is deposited, a CrAlSi target is started, the target current ranges from 80 A to 400 A, the
cavity pressure ranges from 1.5 Pa to 4.5 Pa, the workpiece bias
voltage ranges from-30 V to-150 V, and the deposition time ranges from 5 s to 30 s. The method can be widely applied to the technical field of
surface engineering and coatings.