The invention discloses modularized
chemical waste gas treatment equipment for a
semiconductor clean room, belongs to the field of
waste gas treatment, and aims to solve the problems that in response efficiency, manual replacement needs a series of processes such as shutdown, equipment disassembly, filter screen replacement and sealing debugging, the operation is tedious, time consumption is long, and the time window far exceeds the
waste gas switching time window, so that the process is forced to be interrupted, and the
waste gas is wasted. The modularized
chemical waste gas treatment equipment for the
semiconductor clean room comprises a negative pressure
machine, an
exhaust pipe communicated with the upper part of the negative pressure
machine and a gas inlet
pipe communicated with one end of the negative pressure
machine, and a highly
toxic gas detoxification filter screen is arranged on the inner side, far away from the negative pressure machine, of the gas inlet
pipe; waste gas components are analyzed in real time through the multi-component integrated gas sensor, and the controller drives the corresponding cylinders to accurately extend out of the corresponding special filter screens (such as highly toxic, acidic, alkaline and VOCs filter screens), so that full
automation and on-demand treatment in the filtering process are realized, manpower is saved, and the response speed and the working efficiency of waste gas treatment are improved.