High-hardness AlCrN nanocomposite coating and preparation process thereof
A preparation process and high hardness technology, applied in the direction of metal material coating process, coating, ion implantation plating, etc., can solve the problems of reducing the mechanical properties such as hardness and elastic modulus of the coating, and achieve good wear resistance, High hardness and toughness, good repeatability
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Embodiment 1
[0018] In this example, an AlCrN nanocomposite coating is deposited on a polished high-speed steel sheet, and the sample size is 25×30×1 mm. The substrates were ultrasonically cleaned in acetone, alcohol, and distilled water for 20 min each, and then cleaned with high-purity N 2 Dry it, and then place it on the sample rack facing the target in the AIP-650 arc ion coating machine. The target materials are pure metal Cr and Al (99.99 wt. %) respectively, and the working gas and reaction gas are respectively high-purity Ar and N 2 (The purity is 99.999%).
[0019] First, the background vacuum of the vacuum chamber is evacuated to 1.0×10 -3 Below Pa; turn on the heating system, raise the temperature to 400 ℃, and then pass Ar gas 60 sccm in the vacuum chamber until the pressure in the coating chamber reaches 1 Pa, apply a negative bias of -800 V, and glow clean for 20 minutes. Turn on 4 pure Cr targets (the target current is selected as 80 A) to bombard and clean the surface o...
Embodiment 2
[0022] In this example, an AlCrN nanocomposite coating is deposited on a polished cemented carbide substrate YG8, and the sample size is 19×19×2 mm. The substrates were ultrasonically cleaned in acetone, alcohol, and distilled water for 20 min each, and then cleaned with high-purity N 2 Dry it, and then place it on the sample rack facing the target in the domestic AIP-650 arc ion coating machine. The target material is made of pure metal Cr and Al (both with a purity of wt. 99.9%), and the working gas and reaction gas are respectively made of Ar and N. 2 (The purity is 99.999%).
[0023] First, the background vacuum of the vacuum chamber is evacuated to 1.0×10 -3 Below Pa. Turn on the heating system, raise the temperature to 450 °C, and then pass 90 sccm of Ar gas into the vacuum chamber until the pressure in the coating chamber reaches 1 Pa, apply a negative bias voltage of -700 V, and glow clean for 20 minutes. Turn on four pure Cr targets (the target current is selecte...
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