Reconfigurable microwave low-pass filter containing MEMS switch and its manufacturing method

A low-pass filter and switch technology, which is applied in the field of micro-mechanical systems and microwave crossover, can solve the problems of large filter insertion loss, unfavorable IC process integration, and large size, and achieve low insertion loss, low power consumption, and small size Effect

Inactive Publication Date: 2009-05-13
EAST CHINA NORMAL UNIVERSITY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003]Traditional reconfigurable microwave low-pass filters are based on coaxial lines or microstrip lines, and are fabricated on printed circuit boards (PCBs). Integrated with IC technology, in addition, traditional reconfigurable microwave low-pass filters ge

Method used

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  • Reconfigurable microwave low-pass filter containing MEMS switch and its manufacturing method
  • Reconfigurable microwave low-pass filter containing MEMS switch and its manufacturing method
  • Reconfigurable microwave low-pass filter containing MEMS switch and its manufacturing method

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Embodiment 1

[0055] The low-pass filter involved in this embodiment has exactly the same structure as the low-pass filter described in "Summary of the Invention", and details are not repeated here. The 3dB cut-off frequencies of the filter before and after reconstruction are 21GHz and 12GHz, respectively.

[0056] The working principle of this embodiment.

[0057] The reconfigurable low-pass filter obtains reconfigurable functions by turning off and on five MEMS switches, such as figure 1 As shown, before reconfiguration, one end of the 30V voltage is applied to the first ground wire 50 and the second ground wire 51, and the other end is applied to the first bias pad 40 and the third bias pad 42, then due to the electrostatic effect of the first The MEMS membrane bridge 30, the third MEMS membrane bridge 32 and the fifth MEMS membrane bridge 34 are closed, the second MEMS membrane bridge 31 and the fourth MEMS membrane bridge 33 are opened, ignoring the parasitic effect of opening the MEM...

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Abstract

The invention relates to a reconfigurable microwave low-pass filter containing an MEMS switch and the preparation thereof. The filter is an integrated circuit which is produced on a substrate of a high-resistance silicon wafer, an inductive reactance element is composed of a CPW ground wire and a signal wire; on one hand, the MEMS switch constitutes a capacitive reactance element, on the other hand, the MEMS switch leads the frequency of the filter to be adjustable by changing the length of the coplanar waveguide by the switching-on and off. The filter takes the high-resistance silicon wafer as the substrate, uses the process which is compatible with the IC process to evaporate a titanium layer and a gold layer by thermal oxidation, carry out the positive photoresist lithography, the electroplating and the negative photoresist lithography, corrode the gold layer and the titanium layer, remove a negative photoresist, lead a silicon nitride film to grow, remove the silicon nitride film,evaporate and deposit an aluminum-silicon alloy film, corrode the aluminum-silicon alloy film to form a bridge film, remove a sacrificial layer, and the like, for the preparation, and the filter has the advantages of compact and simple structure, small size, good isolation, low insertion loss, low power consumption of a control circuit, high working frequency, compatibility with the traditional IC process and low cost, and is applicable to mass production.

Description

technical field [0001] The invention relates to a reconfigurable microwave low-pass filter containing a MEMS (micro-electro-mechanical) switch and its preparation, belonging to the technical field of micro-mechanical systems and microwave intersections. Background technique [0002] Reconfigurable microwave low-pass filter is one of the important components in microwave wireless communication system. It can significantly reduce the size of the multi-band analog receiving front-end subsystem, suppress strong signal interference and realize multi-band conversion, especially in the millimeter wave band, which can better reflect its high performance quality. [0003] Traditional reconfigurable microwave low-pass filters are based on coaxial lines or microstrip lines, and are fabricated on printed circuit boards (PCBs). Filters generally use PIN diode switches and FET switches to adjust the filter frequency, and these switches require a large number of bias circuits, which makes...

Claims

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Application Information

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IPC IPC(8): H01P1/20H01P11/00B81C1/00B81B7/02
Inventor 欧阳炜霞郭兴龙赖宗声张永华王超刘蕾
Owner EAST CHINA NORMAL UNIVERSITY
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