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Multilayer structure surface enhanced Raman scattering base and preparation method thereof

A surface-enhanced Raman, multi-layer structure technology, applied in the fields of nanoimprint technology and spectroscopy, can solve the problems of poor biocompatibility, weak ability to enhance Raman signal, etc., achieve low cost, improve enhancement factor, detection sensitivity Enhanced effect

Active Publication Date: 2014-02-12
WUXI IMPRINT NANO TECH
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Problems solved by technology

[0004] Metallic silver is the most effective metal for Raman signal enhancement, but its biocompatibility is poor
Gold is biocompatible, but its ability to enhance Raman signals is weaker than silver

Method used

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  • Multilayer structure surface enhanced Raman scattering base and preparation method thereof

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Embodiment Construction

[0032] The specific preparation process of this embodiment is as follows:

[0033] (1) Nanoimprint

[0034] a) Substrate preparation: take a suitable size quartz plate and use N 2 Blow off the surface dust;

[0035] b) Spin-coating double-layer glue on the quartz plate by spin-coating method:

[0036] Spin coating the lower layer of glue: the lower layer is about 160nm thick PMMA (3% PMMA, the speed of the homogenizer is 3000r / min, spin coating 40s);

[0037] Bake for about 5 minutes to remove organic solvents in PMMA;

[0038] Spin-coating upper layer glue: the upper layer is about 50nm thick UV glue (2.5% UV, spinning machine speed 3000r / min, spin coating 40s);

[0039] c) Fit the soft template prepared from the anodized aluminum template to the sample, and try to make sure that there are no bubbles between them;

[0040] d) UV curing: put the sample into the exposure device, pass N 2 5min to exhaust the O in the device 2 , Continue to access N 2 , In N 2 Use ultraviolet light in the atm...

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Abstract

The invention belongs to the technical field of nano-imprinting and spectra, and in particular relates to a multilayer structure surface enhanced Raman scattering base and a preparation method thereof. The surface enhanced Raman scattering base is simple in process, high in efficiency, high in enhancement factor and biocompatible. The base consists of a substrate and a periodic nano columnar structure which is positioned on the substrate, wherein the nano columnar structure is a multilayer structure; the multilayer structure consists of alternation layers and a gold layer; the alternation layers consist of silver and media; the gold layer is positioned on the topmost layer. A nano-imprinting technology is used as a core technology, and a reactive ion etching process, a metal evaporation process, a silicon dioxide plating process, a metal peeling process and the like are combined to prepare a multilayer nano structure, so that the technical problems that a silver structure base is not biocompatible and a gold structure base is low in enhancement factor are solved; on the basis of ensuring biocompatibility, the enhancement factor of the base is greatly improved, the detection is efficient and sensitive, and the base can be applied to biological detection after further treatment.

Description

Technical field [0001] The invention belongs to the field of nanoimprint technology and spectroscopy technology, and relates to a method for preparing a columnar multilayer structure with alternating metal layers / dielectric layers that can be used as a surface enhanced Raman scattering substrate. Background technique [0002] In recent years, Surface Enhanced Raman Scattering (SERS) is one of the most popular research fields. The tip effect of irregular nanoparticles, the nano-gap between the particles and the rough metal surface can greatly enhance the local electric field. Compared with conventional Raman scattering, the signal strength is greatly improved. Among them, the silver and gold nanostructures The research is the most extensive, so how to quickly and effectively prepare metal nanostructures with smaller spacing will become the key. At present, people mainly adopt spin-coating self-assembly and vapor deposition methods. The former is convenient and quick, but it is n...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/65
Inventor 张倩杨涛袁长胜
Owner WUXI IMPRINT NANO TECH
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