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192 results about "Squeeze film" patented technology

Cantilever beam acceleration transducer manufactured by micro-machining on single side of single silicon chip and method

The invention relates to a cantilever beam acceleration transducer manufactured by micro-machining on a single side of a single silicon chip and a manufacturing method. The acceleration transducer is characterized in that: an accelerometer is manufactured by micro-mechanical single side machining through the single silicon chip, so that stress caused by the bonding process of a plurality of chipsand different materials is avoided. In order to realize a single side-machined cantilever beam sensitive structure, the cantilever beam structure is released by transversely etching the bottom of thecantilever beam by an anisotropic corrosion method after deep structural etching. The structure provides air squeeze-film damping and mechanical overload protection in a sensitive direction, solves the problem of the absence of air squeeze-film damping in the vertical sensitive direction of the conventional structure and prevents parasitic signal interference caused by structural resonance in thevertical direction. The acceleration transducer has the characteristics of particular suitability for measuring a high g value, simple structure, small size of the chip and the like. Simultaneously, a single side process can use low-cost single throwing silicon chips, is suitable for low-cost mass manufacturing and has higher performance and wide application prospects.
Owner:SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI

Touch reproduction device and touch reproduction method based on bi-directional frictional force control

ActiveCN104063054AWide friction coefficient control rangeRich friction levelInput/output for user-computer interactionGraph readingElectricityCommunication interface
The invention discloses a touch reproduction device based on the bi-directional frictional force control. The device comprises a touch reproduction module, a piezoelectric ceramic stimulation module, a central control module, an electrode array stimulation module, a finger position detecting module and a communication interface module, wherein the touch reproduction module comprises a rigid touch panel, a piezoelectric ceramic array module and an electrode array module; the piezoelectric ceramic array module is arranged on the lower surface of the rigid touch panel; the electrode array module is embedded into the inner part of the rigid touch panel, and a wider, finer, and more flexible touch reproduction module is realized. The invention further discloses a touch reproduction method based on the bi-directional frictional force control. According to the method, through touching the rigid touch panel by a finger, the air squeeze film effect is achieved between the finger and the rigid touch panel, and the electro-vibration effect is achieved between the finger and the electrode array module; the bi-directional friction force coefficient adjusting and friction force coefficient fine tuning are implemented, and further the touch reproduction based on the friction force control is realized.
Owner:NANJING UNIV OF AERONAUTICS & ASTRONAUTICS

Micro machine differential capacitance accelerometer with symmetrical structure

The invention relates to a micro machine differential capacitance accelerometer with a symmetrical structure, which is connected with a movable silicon structure component through an anchoring area along the upper direction and the lower direction. Elastic supporting beams of the silicon structure component are divided into an upper layer and a lower layer and distributed between a movable mass block and a fixedly supported frame as well as connected with the movable mass block and the fixedly supported frame; and the round angle transition is adopted at joints of the movable mass block and the fixedly supported frame as well as the beams; both the upper surface and the lower surface of the movable mass block are provided with gas flow guide grooves; and an electrode cover plate can be made of a silicon material. The gas flow guide grooves distributed on both the upper surface and the lower surface of the mass block are beneficial to regulating the squeeze-film damping effect of the accelerometer so as to structurally improve the dynamic characteristic of the surface separated capacitance detection accelerometer. A plurality of the elastic supporting beams of the accelerometer are made of single crystal silicon materials with a single doping concentration, thereby eliminating thermal inconsistency stress caused by adopting different materials and the thermal inconsistency stress caused by different single crystal silicon doping concentrations.
Owner:安徽云芯微系统科技有限公司

Pneumatic turbine driven double rotor test bench

The invention discloses a pneumatic turbine driven test bench. The pneumatic turbine driven test bench comprises a rotor system, a power system, a lubrication system, a test system and a safety system. An intermediate bearing is arranged between an inner rotor and an outer rotor; the outer rotor is driven by a pneumatic turbine; a control system is a feedback control system; compressed air drivesthe pneumatic turbine mounted on the outer rotor to rotate. After the compressed air provided by an air compressor enters a pressure stabilizing box, the compressed air flows through a pressure regulating valve and then flows out of a nozzle to impact the pneumatic turbine to drive the pneumatic turbine to rotate; the rotation speed of the outer rotor is detected by a rotation speed transmitter, and then the rotation speed is fed back to a rotation speed controller; the compressed gas flow is adjusted by controlling the opening of the pressure regulating valve to control the rotation speed ofthe outer rotor. In a supporting structure, squirrel cage elastic supports and elastic ring squeeze film dampers are combined, so that the stability of the rotors can be improved. The pneumatic turbine driven test bench can be used for the experimental study of the dynamic characteristics of the double rotor-support system with the coupling of the inner and outer rotors and the simulation and research of the rotor system vibration faults.
Owner:BEIJING UNIV OF CHEM TECH

Capacitative pressure sensor

A pressure sensor (30) for sensing fluid pressure in harsh environments such as the air pressure in a tire by providing a chamber (58) partially defined by a flexible membrane (50). The flexible membrane (50) is at least partially formed from conductive material, and the chamber (58) contains a fluid at a reference pressure. The flexible membrane (50) deflects from any pressure difference between the reference pressure and the fluid pressure. A conductive layer (36) within the chamber spaced from the flexible membrane (50) and, associated circuitry (34) incorporating the flexible membrane (50) and the conductive layer (36). The conductive layer (36) and the flexible membrane (50) form capacitor electrodes and the deflection of the flexible membrane (50) changes the capacitance which the associated circuitry (34) converts into an output signal indicative of the fluid pressure. The conductive layer (36) is arranged so that fluid can be displaced from between the plates of the capacitor by the deflection of the flexible membrane (50).Venting the fluid between the electrodes to the other side of the fixed electrode, while keeping the chamber sealed, avoids the extreme fluid pressure that cause the squeeze film damping.
Owner:PRECISION MECHATRONICS
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