The invention relates to a
cantilever beam acceleration
transducer manufactured by micro-
machining on a single side of a single
silicon chip and a manufacturing method. The acceleration
transducer is characterized in that: an
accelerometer is manufactured by micro-mechanical single side
machining through the single
silicon chip, so that stress caused by the
bonding process of a plurality of chipsand different materials is avoided. In order to realize a single side-machined
cantilever beam sensitive structure, the
cantilever beam structure is released by transversely
etching the bottom of thecantilever beam by an anisotropic
corrosion method after deep structural
etching. The structure provides air squeeze-film damping and
mechanical overload protection in a sensitive direction, solves the problem of the absence of air squeeze-film damping in the vertical sensitive direction of the conventional structure and prevents parasitic
signal interference caused by structural
resonance in thevertical direction. The acceleration
transducer has the characteristics of particular suitability for measuring a high g value, simple structure, small size of the
chip and the like. Simultaneously, a single side process can use low-cost single throwing
silicon chips, is suitable for low-cost
mass manufacturing and has higher performance and wide application prospects.