The invention relates to a 
cantilever beam acceleration 
transducer manufactured by micro-
machining on a single side of a single 
silicon chip and a manufacturing method. The acceleration 
transducer is characterized in that: an 
accelerometer is manufactured by micro-mechanical single side 
machining through the single 
silicon chip, so that stress caused by the 
bonding process of a plurality of chips and different materials is avoided. In order to realize a single side-machined 
cantilever beam sensitive structure, the 
cantilever beam structure is released by transversely 
etching the bottom of the cantilever beam by an anisotropic 
corrosion method after deep structural 
etching. The structure provides air squeeze-film damping and 
mechanical overload protection in a sensitive direction, solves the problem of the absence of air squeeze-film damping in the vertical sensitive direction of the conventional structure and prevents parasitic 
signal interference caused by structural 
resonance in the vertical direction. The acceleration 
transducer has the characteristics of particular suitability for measuring a high g value, simple structure, small size of the 
chip and the like. Simultaneously, a single side process can use low-cost single throwing 
silicon chips, is suitable for low-cost 
mass manufacturing and has higher performance and wide application prospects.