Micro mechanical capacitance type acceleration transducer, and fabricating method

A technology of an acceleration sensor and a manufacturing method, which is applied in the direction of measuring acceleration, velocity/acceleration/impact measurement, instruments, etc., can solve the problems of increasing the difficulty and complexity of manufacturing process, increasing the complexity of manufacturing process, difficulty in controlling the size and shape, and the like, The layout design is simple, the manufacturing cost is reduced, and the sensitivity is changed.
CN1959417AActive Publication Date: 2007-05-09SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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Patent Information

Authority / Receiving Office
CN ยท China
Current Assignee / Owner
SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
Publication Date
2007-05-09

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Abstract

A method for preparing acceleration transducer of micromechanical capacity type includes forming rectangular mass block with no lobe compensation on single crystal silicon pellet by utilizing aeolotropic corrosion technique based on elastic beams being alternatively distributed at top and bottom surfaces of active mass block, forming straight elastic beam at two said surfaces of mass block, applying silicon-silicon bond technique to realize bond of three-layers silicon pellet, depositing lead wire pad of top electrode and active electrode and realizing electric signal isolation between two said electrodes.
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Description

technical field

[0001] The present invention relates to a micro-mechanical capacitive acceleration sensor and its manufacturing method. More precisely, the present invention uses silicon anisotropic corrosion as the key technology to manufacture the structure and manufacturing method of the micro-mechanical capacitive acceleration sensor. It belongs to the field of microelectromechanical systems. Background technique

[0002] Silicon micro-accelerometers are very important micro-inertial devices that can be used in automobiles, robots, and various guidance and measurement and control systems. According to the sensitive principle, micromachined acceleration sensors can be roughly divided into: piezoresistive, piezoelectric, thick film strain gauge, electromagnetic, thermocouple, resonator and capacitive. Among them, the capacitive acceleration sensor can be divided into force balance type and non-force balance type. The movable mass forms a movable electrode of the variable...

Claims

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