A
wafer cleaning equipment protection cover bottom disc convenient for drainage comprises a
wafer protection cover bottom disc, six bottom disc bolt mounting holes are arranged on the
wafer protection cover bottom disc, a positioning pin is arranged on the side of the bottom disc bolt mounting hole at the upper right of the wafer protection cover bottom disc, a
welding positioning line is arranged in the middle of the wafer protection cover bottom disc, a
waist groove drainage port is arranged in the middle of the two bottom disc bolt mounting holes at the upper left of the wafer protection cover bottom disc, and a
flange interface is arranged on the periphery of the
waist groove drainage port. The
welding positioning line arranged on the protection cover bottom disc replaces the deepened
welding notch, the
processing process is more convenient, the
processing time and cost are saved, and the auxiliary welding function can be achieved. The
processing technology is improved, the inclined
waist groove drainage port replaces the traditional straight drainage port, the hole of the drainage port does not need to pass through the top of the protection cover, the efficiency of drainage is improved, and the protection cover is more beautiful and integral.