Super-precision trans-scale in-situ nanometer indentation marking test system
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- JILIN UNIV
- Publication Date
- 2009-09-02
Smart Images
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Abstract
Description
technical field
[0001] The invention relates to a high-performance comprehensive precision experimental testing system integrating driving, loading, detection, micro-nano mechanical performance testing, ultra-precision scribing processing and in-situ observation, especially related to the micromechanics of various test pieces or materials. The device for nano-indentation / scratch experiment, in-situ nano-indentation / scratch experiment and micro-nano-scale in-situ diamond scribing processing in the performance test is a precision scientific instrument integrating opto-mechanical and electrical integration. Precision instruments are the cornerstone and important guarantee for scientific and technological innovation and economic and social development. This invention is a special testing instrument for measuring and characterizing microscopic mechanical performance parameters of various test pieces or materials, and can be used in high-resolution digital microscopic imaging systems...