Super-precision trans-scale in-situ nanometer indentation marking test system

Abstract

The invention relates to a super-precision trans-scale in-situ nanometer indentation marking test system which integrates driving, loading, detecting and micro-nanometer dynamic performance tests, super-precision marking processing and in-situ observation into a whole. The system mainly comprises an objective table, a regulation mechanism, a detection unit, a precise pressed-into driving unit, a detection unit of load signals and displacement signals and a high-resolution digital microscopic imaging system, wherein the objective table is precisely positioned along the directions of the X axis and the Y axis; the regulation mechanism and the precise pressed-into driving unit are in the direction of the Z axis and are assembled on a base; the high-resolution digital microscopic imaging system is used for observing the deforming and damaging conditions of the material in the storing and testing process; the objective table as well as the regulation mechanism and the precise pressed-into driving unit in the direction of the Z axis are assembled on a base; the high-resolution digital microscopic imaging system is arranged on the objective table; a precise dynamic sensor detecting the pressure of a diamond tool head pressed into a material and a sensor I detecting the precise displacement of the objective table in the directions of the X axis and the Y axis are arranged on the objective table; and a sensor II used for detecting the precise displacement of a diamond tool head in the direction of the Z axis of pressed-into depth is arranged on the base by a support I.

Description

technical field [0001] The invention relates to a high-performance comprehensive precision experimental testing system integrating driving, loading, detection, micro-nano mechanical performance testing, ultra-precision scribing processing and in-situ observation, especially related to the micromechanics of various test pieces or materials. The device for nano-indentation / scratch experiment, in-situ nano-indentation / scratch experiment and micro-nano-scale in-situ diamond scribing processing in the performance test is a precision scientific instrument integrating opto-mechanical and electrical integration. Precision instruments are the cornerstone and important guarantee for scientific and technological innovation and economic and social development. This invention is a special testing instrument for measuring and characterizing microscopic mechanical performance parameters of various test pieces or materials, and can be used in high-resolution digital microscopic imaging systems...

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