The invention relates to a super-precision trans-scale in-situ nanometer indentation marking test
system which integrates driving, loading, detecting and micro-nanometer dynamic performance tests, supThe invention relates to a super-precision trans-scale in-situ nanometer indentation marking test
system which integrates driving, loading, detecting and micro-nanometer dynamic performance tests, super-precision marking
processing and in-situ observation into a whole. The
system mainly comprises an objective table, a regulation mechanism, a detection unit, a precise pressed-into driving unit, a der-precision marking
processing and in-situ observation into a whole. The system mainly comprises an objective table, a regulation mechanism, a detection unit, a precise pressed-into driving unit, a detection unit of load signals and displacement signals and a high-resolution digital
microscopic imaging system, wherein the objective table is precisely positioned along the directions of the X axisetection unit of load signals and displacement signals and a high-resolution digital
microscopic imaging system, wherein the objective table is precisely positioned along the directions of the X axisand the Y axis; the regulation mechanism and the precise pressed-into driving unit are in the direction of the Z axis and are assembled on a base; the high-resolution digital
microscopic imaging systeand the Y axis; the regulation mechanism and the precise pressed-into driving unit are in the direction of the Z axis and are assembled on a base; the high-resolution digital microscopic imaging system is used for observing the deforming and damaging conditions of the material in the storing and testing process; the objective table as well as the regulation mechanism and the precise pressed-into dm is used for observing the deforming and damaging conditions of the material in the storing and testing process; the objective table as well as the regulation mechanism and the precise pressed-into driving unit in the direction of the Z axis are assembled on a base; the high-resolution digital microscopic imaging system is arranged on the objective table; a precise dynamic sensor detecting the prriving unit in the direction of the Z axis are assembled on a base; the high-resolution digital microscopic imaging system is arranged on the objective table; a precise dynamic sensor detecting the pressure of
a diamond tool head pressed into a material and a sensor I detecting the precise displacement of the objective table in the directions of the X axis and the Y axis are arranged on the objectessure of
a diamond tool head pressed into a material and a sensor I detecting the precise displacement of the objective table in the directions of the X axis and the Y axis are arranged on the objective table; and a sensor II used for detecting the precise displacement of
a diamond tool head in the direction of the Z axis of pressed-into depth is arranged on the base by a support I.ive table; and a sensor II used for detecting the precise displacement of a
diamond tool head in the direction of the Z axis of pressed-into depth is arranged on the base by a support I.