Micron-nano scale in-situ nano indentation and scratching test system

Abstract

The invention relates to a micron-nano scale in-situ nano indentation and scratching test system which integrates driving, precise loading and signal detection, micron-nano scale mechanics performance testing, ultraprecise scratching processing and high resolution in-situ observing as one. The system is mainly composed of a precise positioning platform at X-axis and Y-axis directions, a precise linear positioning platform at Z-axis direction, a precise indentation driving unit, a load signal and displacement signal detection unit and a high resolution digital microscopic imaging system for observing and storing material deformation and damage conditions in the test process. The precise positioning platform at the X-axis and Y-axis directions is assembled on a base, the precise linear positioning platform at the Z-axis direction is assembled on a side plate, the precise indentation driving unit, a precise mechanical sensor for detecting the indentation material pressure of a diamond tool head and a precise displacement sensor for detecting the indentation depth of the diamond tool head to along the Z-axis direction are assembled on the precise linear positioning platform at the Z-axis direction, and the high resolution digital microscopic imaging system is assembled on a beam.

Description

technical field [0001] The invention relates to a precision automatic test and test system integrating drive, precise loading and detection, micro-nano level mechanical property test, ultra-precise scribing processing and in-situ observation, especially for the micro-mechanical property test of various specimens or materials The devices for nano-indentation / scratch experiment, in-situ nano-indentation / scratch experiment and micro-nano-scale in-situ diamond scribing processing belong to the precision testing equipment of optomechanical integration. Precision instruments are an important guarantee for promoting scientific and technological progress and social development. This invention is a special testing instrument for measuring the micromechanical performance parameters of various test pieces or materials. It can test and evaluate the mechanical properties and service behavior of precision components. The design and manufacturing process optimizes the process, improves its pe...

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Problems solved by technology

[0011] However, the above-mentioned test devices have shortcomings: the devices developed by M.A.Wall of LLNL and LBNL cannot test the mechanical parameters of materials because they cannot detect the loading force, and cannot study the influence of load on material deformation and damage; the devices of A.M.Minor and others have passed The relationship between the voltage applied to the piezoelectric element and its deformation is converted to obtain the loading force, resulting in complex testing and too many offline operations. There are also model errors and parameter errors in the conversion of loading force, which affects the reliability of the test results in terms of value. Reliability; there are special-purpose limitations in test devices based on MEMS technology

At present, the in-situ nanomechanical testing instruments of commercial products are only produced by the American Hysitron Company, which is very expensive and is also embargoed to my country; other in-situ nanomechanical testing has certain shortcomings or is limited by special purposes

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