4 results about "Capacitive displacement sensor" patented technology

The application discloses a kind of capacitive displacement sensor calibration device and method, belong to metrological testing technical field, comprising: host computer is started linear displacement table by controller module and carries out the linear motion required in calibration work, multiple degrees of freedom error and displacement value generated by linear motion are measured simultaneously using optical measurement module, and are transmitted to host computer by data acquisition module, host computer is adjusted by controller module and is located in the multiple degrees of freedom microstage pose of linear displacement table bottom to compensate multiple degrees of freedom error in linear motion, realizes to capacitive displacement sensor calibration.The application effectively breaks through the bottleneck that traditional capacitive displacement sensor calibration technique precision is limited, measurement and compensation function are integrated, eliminate multiple degrees of freedom error coupling influence, can satisfy the calibration demand of high-precision capacitive displacement sensor.

The application discloses a kind of capacitive displacement sensors, it is related to sensor technical field, including shell, first polar plate, second polar plate and flexible hinge rod;Two first polar plate are parallel and aligned arrangement;Second polar plate is arranged between two first polar plate;Flexible hinge rod includes semi-flexible hinge and the first connecting rod and second connecting rod located in the two sides of semi-flexible hinge, first connecting rod is fixedly connected with the second end of second polar plate, second connecting rod is hinged with shell, on the side opposite to shell and second polar plate still hinged with counterweight structure, when first polar plate is in horizontal state, counterweight structure makes second polar plate in no-load state in horizontal state, when first polar plate is in vertical state, second polar plate in no-load state is in natural state of drooping;Through the above two aspects, keep the consistency of the measurement reference of sensor under different working conditions, guarantee the repeatability and stability of measurement result, to better meet the high-precision displacement measurement scene demand.

A steam turbine rotor bending measurement apparatus, comprising measurement units, a data collector (3), a Bluetooth unit (4), and a display unit (5). Each measurement unit comprises a magnetic support (1) and a capacitive displacement sensor (2), the capacitive displacement sensor (2) is mounted on the magnetic support (1), and a measurement surface of the capacitive displacement sensor (2) is in contact with a measurement sub-position (7) of a certain measurement point of a steam turbine rotor (6); the data collector (3) is connected to the capacitive displacement sensor (2); the data collector (3) is in signal connection with the display unit (5) by means of the Bluetooth unit (4), and the Bluetooth unit (4) is used for transmitting a displacement signal to the display unit (5); a plurality of measurement units are distributed in the axial direction of the steam turbine rotor (6), and each measurement unit corresponds to one measurement point of the steam turbine rotor (6); and a plurality of measurement sub-positions (7) are uniformly distributed in the circumferential direction of the steam turbine rotor (6). The above solution not only improves the measurement efficiency, but also improves the measurement accuracy.

The application discloses a compact structural glue-free capacitive displacement sensor and an assembling method thereof, and belongs to the technical field of precise geometric quantity measurement. The compact structural glue-free capacitive displacement sensor comprises a measuring electrode, three coaxial electric wires, an insulating film layer, a shell, a shell bottom cover and a protection ring. The shell is provided with the shell bottom cover at one end. The inner and outer surfaces of the protection ring are covered with the insulating film layer. The protection ring is arranged in the other end of the shell. The measuring electrode is arranged in the protection ring. The measuring electrode is connected with the three coaxial electric wires at one end. The other end of the three coaxial electric wires is sequentially arranged through the protection ring and the shell and is arranged out of the shell bottom cover. The interference fit is adopted between the shell and the protection ring and between the protection ring and the measuring electrode. The problem of the reduction of the measurement precision caused by the separation of the connection due to the long-term use of the adhesive in the prior art is solved. The practicability and the detection precision are improved.