55 results about "Capacitive displacement sensor" patented technology

The invention discloses a Bayesian learning and piezoelectric ceramic driving numerical control machine tool thermal error compensation system and method. According to the system, a distributed temperature sensor array is arranged in heat sensitive areas such as a machine tool spindle, a ball screw, a guide rail and a bearing seat, whole-field temperature information is collected in combination with a thermal infrared imager, and multi-source thermal field sensing is achieved; meanwhile, a laser interferometer and a capacitive displacement sensor are used for constructing a dynamic pose monitoring network. The intelligent decision-making unit integrates a Bayesian online learning engine, fuses a physical model and a data driving model, dynamically predicts a thermal error and generates a compensation instruction. And the piezoelectric execution mechanism carries out nonlinear pre-compensation on a driving signal through a three-section Prantl-Ishlinskii hysteresis inverse model according to the instruction, so that high-precision pose adjustment is realized. The thermal error compensation precision is remarkably improved, the adaptability of the system to complex working conditions is enhanced, the service life of equipment is prolonged, and the method is suitable for various numerical control machine tools.

The invention discloses a variable-direction capacitance displacement sensor based on a corrugated structure, which belongs to the field of displacement measurement and comprises a capacitor shell provided with a capacitor lower pole plate and a capacitor upper pole plate which are oppositely arranged. A movable electrode is arranged at the position, between the capacitor lower pole plate and the capacitor upper pole plate, of the capacitor shell through a corrugated mechanism, the capacitor shell is further provided with a self-adaptive mechanism capable of counteracting gravity interference of the movable electrode, and the corrugated mechanism is used for restraining unexpected angular displacement of the movable electrode. And the corrugated mechanism is matched with the self-adaptive mechanism to enable the sensor to be used in multiple directions, the corrugated mechanism comprises an annular frame fixed on the capacitor shell, and a corrugated sheet is arranged in the annular frame. According to the variable-direction capacitance displacement sensor based on the corrugated structure, inclination of the movable electrode can be restrained, the sensor adapts to multiple use directions, the problems of non-parallel errors and limited directions of a traditional sensor are solved, and the measurement precision, the linearity, the stability and the multifunctionality are improved.

The invention discloses an anti-magnetic suspension accelerometer device based on a quasi-zero stiffness structure and a measurement method, and belongs to the field of precise instruments and meters. The device comprises a support, an axial displacement platform, magnetic conductive soft iron, an upper-layer pyrolytic graphite sheet, a lower-layer thin bismuth wafer, a capacitance displacement sensor and a permanent magnet array, wherein an anti-magnetic suspension system, a magnetic rigidity regulation and control system and a displacement detection system are arranged in the support; the anti-magnetic suspension system is composed of an upper-layer pyrolytic graphite sheet, a lower-layer thin bismuth wafer and a permanent magnet array, the magnetization directions of an inner ring and an outer ring of the permanent magnet array are opposite, a suspension element is suspended by virtue of anti-magnetic force and gravity balance, and quasi-zero stiffness is realized through positive and negative stiffness offset; according to the regulation and control mode, the magnetic field of the air gap where the suspension element is located is adjusted by adjusting the distance between the magnetic conductive soft iron and the permanent magnet, and the magnitude and gradient of magnetic induction intensity in all directions are changed, so that the magnetic rigidity is regulated and controlled, and efficient and accurate regulation and control of the sensitivity and the measuring range of the anti-magnetic suspension accelerometer are achieved. Therefore, the application range of the anti-magnetic suspension accelerometer is expanded.

The invention discloses a gas static pressure bearing with self-detection capability. The gas static pressure bearing comprises a bearing body, a supporting body, a measuring circuit and a gas supply module, the bearing body is composed of a plurality of bearing blocks, each bearing block comprises a shell and a bearing face, and a supporting gas film is formed between the bearing face and the bearing body after gas is supplied. The bearing surface is divided into an inner layer structure and an outer layer structure which are bonded through an insulating material and connected with a measuring circuit. The inner and outer bearing surfaces and the bearing body form inner and outer capacitors respectively, and the outer capacitor is used for weakening the edge effect of the inner capacitor. And the two inner layer capacitors which are distributed oppositely and the bearing body form a capacitance displacement sensor with a differential structure. According to the bearing, non-contact suspension can be achieved through the bearing body structure, meanwhile, when the thickness of a bearing gas film changes, the change of the polar distance between the bearing face and the bearing body can be obtained by measuring the capacitance change of the inner layer capacitor, and in other words, the change of the thickness of the bearing gas film is automatically detected.

The invention belongs to the technical field of detection devices, particularly relates to a detection device based on distribution uniformity of rollers of a planetary roller screw, and provides the following scheme: the detection device comprises a base; a rotary driving module, an optical detection module, a contact stress detection module, a high-precision capacitive displacement sensor array mechanism and a mobile detection mechanism are sequentially arranged at the top of the base, the rotary driving module comprises a servo motor, an encoder and an air bearing, and the servo motor is fixedly connected with a coupler; and the coupler is in transmission connection with the planetary roller screw. The three-dimensional scanning assembly reconstructs the surface appearance of the roller through the line laser transmitter and the area-array camera, the thin film pressure sensor is embedded into a nut raceway to collect contact pressure, the strain gauge array is pasted to a lead screw shaft neck to monitor deformation, and the multiple sensors work cooperatively to comprehensively evaluate the distribution state of the roller from the dimensions of optical tracks, mechanical response and the like. And the one-sidedness problem of a traditional single detection means is solved.

The present invention discloses a rail jaw surface test fixture and its application and a rail jaw surface test device based on the same, which belongs to the technical field of rail unevenness measuring devices. The rail jaw surface test fixture includes a slider, and a clamping block is provided at one end of the slider that fits with the top surface of the rail. When the slider moves along the rail, the clamping block is used to maintain the fit between the slider and the side of the rail; a sensor holder is provided at one end of the slider that fits with the side of the rail, and a seat hole is provided on the sensor holder for placing the sensor, and the seat hole is axially perpendicular to the rail jaw surface. In the rail jaw surface test device, a capacitive displacement sensor is installed in the seat hole. The rail jaw surface test fixture is used in the unevenness test of the rail jaw surface of a rocket sled, so as to achieve high-precision measurement in a small space of the rail jaw surface, and has the advantages of non-contact and no friction and wear, and meets the rail measurement requirements in the rocket sled field.

The application discloses a kind of capacitive displacement components and capacitive displacement sensors, it is related to displacement detection technical field, including rigid shell, first fixed electrode, second fixed electrode and movable electrode;Movable electrode and first fixed electrode between being equipped with several first polar plate groups, first polar plate group includes first fixed wave polar plate and first movable wave polar plate, first fixed wave polar plate is fixedly arranged on first fixed electrode, and first movable wave polar plate is fixedly arranged on the first side of movable electrode;Movable electrode and second fixed electrode between being equipped with several second polar plate groups, second polar plate group includes second fixed wave polar plate and second movable wave polar plate, second fixed wave polar plate is fixedly arranged on second fixed electrode, and second movable wave polar plate is fixedly arranged on the second side of movable electrode;Second movable wave polar plate and first movable wave polar plate are symmetrically arranged about movable electrode;The application can effectively improve unit volume capacitance.

The invention relates to a high-frequency combustion oscillation active control semi-physical experiment system and a working method thereof, and belongs to the technical field of combustion oscillation active control. According to the technical scheme, a double-valve-element fuel valve, a power amplifier, a high-frequency combustion oscillation model, a filter model, a fuel valve model, a flow pressure conversion model, an active controller model, a disturbance observer model, an analog quantity input / output module, a capacitance displacement sensor, a pressure sensor, a flow sensor, a current sensor and a hydraulic pump station are used as a basis; the real-time simulation machine and the upper computer form a semi-physical experiment system, the working condition of the double-valve-element fuel valve is changed by changing the oil supply pressure of the double-valve-element fuel valve, and the oscillation pressure mode is changed by changing the parameters of the high-frequency combustion oscillation model. Therefore, it is verified that the semi-physical experiment system can effectively suppress the multi-mode combustion oscillation under different working conditions. The experiment system is high in confidence coefficient and simple and safe to operate.

The invention belongs to the technical field of capacitive displacement sensors, and particularly relates to a capacitive displacement sensor automatic assembling device which comprises a table body, two sets of step feeding modules are arranged on the left side of the top of the table body, and a clip feeding module is arranged on the rear side of the top of the table body located on the right sides of the step feeding modules. And an assembling module is arranged at the top of the table body located on the front side of the cartridge holder feeding module, an industrial robot is arranged at the top of the table body located on the right side between the cartridge holder feeding module and the assembling module, and a tool clamp module is arranged at the top of the table body located on the front side of the industrial robot. Through the arrangement of the step feeding module, the clip feeding module, the assembly module, the industrial robot and the tool clamp module, the problems that the efficiency is low and the assembly precision is affected due to the fact that current capacitive displacement sensor assembly mainly depends on manual operation can be solved, the sensor production efficiency can be greatly improved, the cost is reduced, and the production efficiency is improved. And good economic benefits and social benefits are realized.

The invention discloses a real-time self-driven wireless sensor based on a friction nano-generator. The real-time self-driven wireless sensor comprises the friction nano-generator, a discharging device, a sliding capacitive displacement sensor, an inductance coil and a receiving circuit, the sliding capacitive displacement sensor and the inductance coil form a parallel LC resonance circuit, and the friction nano generator supplies power to the LC resonance circuit through the discharge device; the sliding capacitive displacement sensor comprises an upper conductive flat plate and a lower conductive flat plate which are oppositely arranged, and at least one dielectric material layer located between the upper conductive flat plate and the lower conductive flat plate; the upper conductive flat plate is connected with a to-be-measured structure, the lower conductive flat plate is connected with the fixed end, and when the two conductive flat plates relatively displace, capacitance formed by the two conductive flat plates changes, so that the resonant frequency of the LC resonant circuit changes, and a mapping relation exists between the resonant frequency and displacement; the LC resonance circuit wirelessly transmits a resonance signal carrying displacement information, and the receiving circuit receives the resonance signal and analyzes the frequency to obtain the displacement information.

The invention provides a cold air thruster of a microsatellite. The cold air thruster is integrated with a valve assembly, a piezoelectric actuator, an elastic mechanism, a capacitance displacement sensor, a flow sensor and a control unit. The valve assembly is driven by the executing mechanism, the gap between the disc-shaped diaphragm and the valve port is accurately regulated and controlled, and fine adjustment of gas flow and thrust is achieved. And the piezoelectric ceramic and elastic design of the actuating mechanism ensures that the valve is normally opened and quickly responded. The sensor system optimizes the control accuracy through feedback of a capacitance sensor and a flow sensor. The double-closed-loop control strategy adjusts driving voltage based on displacement and flow information, improves dynamic response and reduces control noise. The shell assembly provides comprehensive protection. The problems that in the prior art, thrust control precision is low, dynamic response performance is poor, and control noise is large can be effectively solved.

The invention relates to a micro-displacement scanning platform driven by piezoelectricity. The micro-displacement scanning platform comprises a base, a load platform installed on the base in a sliding adjustment mode, a piezoelectric actuator assembly installed on the base and used in cooperation with the load platform, and a capacitance displacement sensor mechanism. The piezoelectric actuator mechanism comprises a supporting frame arranged between the base and the load platform in a connected mode and a piezoelectric actuator assembly installed in cooperation with the supporting frame, and the piezoelectric actuator assembly drives the supporting frame to deform so as to drive the load platform to move in the length direction of the base. The capacitance displacement sensor mechanism is used for measuring and feeding back the moving distance of the load platform; according to the piezoelectric-driven micro-displacement scanning platform in the technical scheme, the load platform is integrated on the base, and meanwhile, the piezoelectric actuator assembly and the capacitive displacement sensor mechanism which are matched with the load platform for use are integrally mounted on the base, so that the load platform is ensured to be accurately and reliably adjusted, and the whole structure of the device is compact; and high-precision dynamic positioning can be realized.

The invention discloses a large-stroke-high-frequency-response cascade cross-scale cutter servo device and a control method. The large-stroke-high-frequency-response cascade cross-scale cutter servo device comprises a cutter mounting platform, a flexible guide mechanism, a capacitive displacement sensor, a piezoelectric actuator, an upper cover plate, a lower cover plate, a measuring baffle, a left side plate, an amplification output block, a pre-tightening wedge block, a base body and the like. The flexible guide mechanism is composed of flexible hinges, installed in the base body and symmetrically distributed, the two piezoelectric actuators are embedded into the flexible guide mechanism and arranged at the front end and the middle of the flexible guide mechanism respectively, and the large piezoelectric actuator adopts a lever displacement amplification mechanism for transmission of a thick platform. A bridge type displacement amplification mechanism is adopted for transmission of the small piezoelectric actuator to be used for a fine platform, a cutter installing platform is installed at the position of a cutter holder at the front end of the flexible guide mechanism, an upper cover plate and a lower cover plate are used for installing capacitive displacement sensors and fixing the flexible guide mechanism respectively, and the capacitive displacement sensors are arranged in the middle of a base body of the flexible guide mechanism and on the rear side of the base body respectively.

The application discloses a kind of capacitive displacement sensor calibration device and method, belong to metrological testing technical field, comprising: host computer is started linear displacement table by controller module and carries out the linear motion required in calibration work, multiple degrees of freedom error and displacement value generated by linear motion are measured simultaneously using optical measurement module, and are transmitted to host computer by data acquisition module, host computer is adjusted by controller module and is located in the multiple degrees of freedom microstage pose of linear displacement table bottom to compensate multiple degrees of freedom error in linear motion, realizes to capacitive displacement sensor calibration.The application effectively breaks through the bottleneck that traditional capacitive displacement sensor calibration technique precision is limited, measurement and compensation function are integrated, eliminate multiple degrees of freedom error coupling influence, can satisfy the calibration demand of high-precision capacitive displacement sensor.

The application discloses a topological optimization biaxial decoupling cutter servo device and a design method thereof, which comprises a compliant mechanism platform, a piezoelectric stack one, a piezoelectric stack two, a diamond cutter, a measuring baffle, a capacitive displacement sensor one, a capacitive displacement sensor two and an upper cover plate, the piezoelectric stack one and the piezoelectric stack two are pre-tightened to the compliant mechanism platform, the diamond cutter is installed on a cutter seat platform, the compliant mechanism platform further comprises a topological compliant mechanism, an input guide mechanism one, an input guide mechanism two and an output guide mechanism, the output guide mechanism is located at the front end of the compliant mechanism platform, and the rear end of the topological compliant mechanism is connected with the front ends of the input guide mechanism one and the input guide mechanism two. The topological optimization method is adopted to design the compliant mechanism, the optimal mechanism configuration-parameter design can be sought under the premise of meeting a series of constraint conditions in the case of given design domains and specified input and output actions, and therefore the mechanism performance is optimal.

The application discloses a kind of capacitive displacement sensors, it is related to sensor technical field, including shell, first polar plate, second polar plate and flexible hinge rod;Two first polar plate are parallel and aligned arrangement;Second polar plate is arranged between two first polar plate;Flexible hinge rod includes semi-flexible hinge and the first connecting rod and second connecting rod located in the two sides of semi-flexible hinge, first connecting rod is fixedly connected with the second end of second polar plate, second connecting rod is hinged with shell, on the side opposite to shell and second polar plate still hinged with counterweight structure, when first polar plate is in horizontal state, counterweight structure makes second polar plate in no-load state in horizontal state, when first polar plate is in vertical state, second polar plate in no-load state is in natural state of drooping;Through the above two aspects, keep the consistency of the measurement reference of sensor under different working conditions, guarantee the repeatability and stability of measurement result, to better meet the high-precision displacement measurement scene demand.

The invention discloses a combined type six-degree-of-freedom lens unstressed supporting and adjusting device, which relates to the technical field of precise optical adjustment and comprises a six-degree-of-freedom adjusting module and an unstressed supporting module. The six-degree-of-freedom adjusting module is composed of a base, a lower triangle and six flexible motion supporting legs based on an improved Scott-Russell mechanism, nanoscale displacement adjustment is achieved through driving of a piezoelectric actuator and a lever mechanism, and six-degree-of-freedom high-precision pose adjustment of the lens is completed in cooperation with closed-loop control of a capacitance displacement sensor. The stress-free supporting module adopts an integrated design of three groups of supporting arms with flexible hinges and a lens frame, precise positioning is realized through cooperation of a lens cushion block and a pressing block, and the influence of assembly stress and thermal deformation is effectively eliminated. According to the invention, the upper and lower structures work cooperatively, the nano-scale regulation capability and the environmental stability are realized, and the photoetching imaging quality is improved.

The invention discloses a high-precision capacitive displacement sensor based on double ADC switch proportional demodulation. According to the high-precision capacitance displacement sensor based on double-ADC switch proportional demodulation, the analog front-end circuit is used, a refined circuit model is established, modulation noise can be reduced, and the capacitance resolution of analog modulation can be improved; by using the double-ADC switch proportion measurement circuit, secondary alternate acquisition and reconstruction of modulation signals and carrier signals can be realized, so that gain fluctuation caused by carrier generation modules such as ADCs and DACs is inhibited; by using the digital quadrature demodulation circuit, the phase error introduced in the demodulation process can be reduced or eliminated; the bad influence of the DAC carrier gain and the ADC gain on the finally output baseband signal is small, the included phase error introduced in the demodulation process is small, and high-precision displacement detection can be achieved. The displacement sensor is widely applied to the technical field of displacement sensors.

The utility model provides an anti-shake device for a lifting appliance of an electromagnetic bridge crane, which comprises an upper fixing mechanism fixed on a main beam of the electromagnetic bridge crane and a lower moving mechanism arranged on the electromagnetic lifting appliance, and in a free state, the lower moving mechanism is positioned right below the upper fixing mechanism; the lower moving mechanism comprises a lower base detachably connected with the electromagnetic lifting appliance, and a guide cone is arranged on the upper surface of the lower base; the upper fixing mechanism comprises an upper base detachably connected with a main beam of the electromagnetic bridge crane, a guide cylinder allowing the guide cone to be inserted is arranged on the lower portion of the upper base, and the length value of the guide cylinder is larger than that of the guide cone. And a capacitive displacement sensor is arranged in the guide cylinder and is used for measuring the distance value between the capacitive displacement sensor and the guide cone in the vertical direction. The device can timely and effectively control the swing amplitude of the bridge crane lifting appliance and can prevent the electromagnetic lifting appliance from rushing to the top in the lifting process.

A steam turbine rotor bending measurement apparatus, comprising measurement units, a data collector (3), a Bluetooth unit (4), and a display unit (5). Each measurement unit comprises a magnetic support (1) and a capacitive displacement sensor (2), the capacitive displacement sensor (2) is mounted on the magnetic support (1), and a measurement surface of the capacitive displacement sensor (2) is in contact with a measurement sub-position (7) of a certain measurement point of a steam turbine rotor (6); the data collector (3) is connected to the capacitive displacement sensor (2); the data collector (3) is in signal connection with the display unit (5) by means of the Bluetooth unit (4), and the Bluetooth unit (4) is used for transmitting a displacement signal to the display unit (5); a plurality of measurement units are distributed in the axial direction of the steam turbine rotor (6), and each measurement unit corresponds to one measurement point of the steam turbine rotor (6); and a plurality of measurement sub-positions (7) are uniformly distributed in the circumferential direction of the steam turbine rotor (6). The above solution not only improves the measurement efficiency, but also improves the measurement accuracy.

The invention provides a capacitive displacement sensor. The first grid plate comprises a plurality of emission electrode arrays which are arranged in parallel and arranged in a staggered manner; each emission electrode array comprises a plurality of emission electrodes which are arranged at a first pitch period along a dislocation direction; the dislocation distance between any two emission electrode arrays is smaller than the first pitch; and the second grid plate comprises a reflecting electrode arranged in a net shape, and the reflecting electrode stretches across the plurality of emitting electrode arrays. Through staggered arrangement of the emission electrode arrays, the pitch limited by the manufacturing process is dispersed into staggered intervals among the emission electrode arrays, so that the physical limitation of the traditional pitch is broken through, and the capacitive displacement sensor can realize displacement measurement with higher precision under the same manufacturing process condition. And the second grid plate adopts a net-shaped reflecting electrode structure which not only reduces the signal transmission resistance, but also enhances the capacitance coupling effect.

The invention discloses a six-degree-of-freedom capacitive sensor displacement measurement method, a sensor comprises a receiving end polar plate and a transmitting end polar plate which are mounted between measured equipment, and a capacitance measurement gap is formed between the receiving end polar plate and the transmitting end polar plate; the sensor comprises eight capacitive sensors, namely four variable-area capacitive displacement sensors and four variable-distance capacitive displacement sensors; the measuring method comprises the following steps: detecting translation displacements along an X axis and a Y axis and a rotation angle around a Z axis through four variable-area capacitance displacement sensors; the translation displacement along the Z axis and the rotation angles around the X axis and the Y axis are detected through the four variable-distance capacitive displacement sensors; and according to the capacitance variation of the eight capacitance sensors, the six-degree-of-freedom pose parameters of the measured object in the space are solved.

This invention discloses a highly adaptable capacitive displacement sensor and its usage method, relating to the field of capacitive displacement sensor technology. The sensor includes a housing, a reference electrode assembly, a movable electrode, a lever, a connector, and a locking mechanism. The lever is rotatably mounted on the housing about a first axis perpendicular to the direction of movement of the movable electrode during operation. The connector connects the lever and the movable electrode. The connector is an elastic element, creating a flexible connection between the lever and the movable electrode. The locking mechanism selectively locks the lever to a first working position or a second working position corresponding to different sensor placement postures. When the lever is locked to different working positions, the connector guides the movable electrode, ensuring it is positioned at a preset measurement zero point regardless of the sensor's placement posture. This invention improves the sensor's adaptability while maintaining its miniaturization.

A capacitive displacement sensor system with interdigitated combs, includes capacitive detection in a direction perpendicular to the surfaces of the combs facing one another, the combs being subjected to a sinusoidal movement in the direction, comprising: a device for converting the capacitance delivered by the sensor into a voltage; an analog / digital converter configured to digitize the voltage delivered by the conversion device, and supply a digitized signal; and a control unit comprising: a harmonic estimator configured to estimate the amplitudes of the harmonics of order less than or equal to a maximum order based on the digitized signal and a reference angle corresponding to the instantaneous angle of the input angular frequency; and a signal reconstruction module for reconstructing the signal from the amplitudes and the reference angle that are supplied by the harmonic estimator and from the digitized signal delivered by the analog / digital converter.

The present invention discloses a method and system for compensating for spindle eccentricity error of a circular grating encoder. The method utilizes the principle of evenly arranging capacitive displacement sensors to obtain the instantaneous vector of the spindle axis displacement, establishes a three-point error separation model, separates the roundness error of a standard sphere from the radial rotation error of the spindle, and thereby obtains an accurate radial rotation error of the spindle. A high-precision autocollimator is used to calibrate the circular grating encoder, and the average of multiple measurements is used as the system error to perform angle compensation on the circular grating encoder. Through angle compensation, the circular grating encoder achieves an angular measurement accuracy of ±1.62″ after eliminating the system error, which is two arc seconds higher than the nominal accuracy of ±2.79″. The present invention can effectively eliminate the influence of spindle installation eccentricity on the angular measurement accuracy of the circular grating, and is of great significance for improving the angular measurement accuracy of the circular grating encoder.

The invention discloses a high-adaptability capacitive displacement sensor and a use method thereof, and relates to the technical field of capacitive displacement sensors, and the sensor comprises a housing, a reference polar plate assembly, a movable electrode, a swing rod, a connecting piece and a locking mechanism. The swing rod is rotatably arranged on the shell around a first axis, the first axis is perpendicular to the moving direction of the movable electrode during working, and the connecting piece is connected between the swing rod and the movable electrode; the connecting piece is an elastic piece, so that flexible connection is formed between the swing rod and the movable electrode, and the locking mechanism is used for selectively locking the swing rod at a first working position or a second working position corresponding to different placement postures of the sensor; when the swing rod is locked at different working positions, the movable electrode is guided through the connecting piece, so that the movable electrode can be positioned at a preset measurement zero point under different placement postures of the sensor. On the basis of keeping the miniaturization of the sensor, the adaptability of the sensor is improved.

The application discloses a piezoelectric driving six-freedom-degree compliant positioning system, which comprises an industrial computer, the industrial computer is electrically connected with a piezoelectric ceramic controller, the piezoelectric ceramic controller is electrically connected with a plurality of piezoelectric ceramic actuators, the plurality of piezoelectric ceramic actuators are arranged at the bottom of a six-freedom-degree compliant positioning platform, four side edges of the six-freedom-degree compliant positioning platform are provided with driving branch chains, a displacement detection block is fixed at the centroid of the upper surface of the compliant positioning platform, a plurality of capacitive displacement sensors are equidistantly arranged on the surface of the displacement detection block and are parallel to a reserved gap. The compliant positioning platform adopts modularization and symmetrical design, the mechanism is simple and compact, the capacitive displacement sensors and the inclination sensors are simple and easy to use, the closed-loop control positioning is accurate, and the piezoelectric driving six-freedom-degree compliant positioning system is suitable for different application occasions.

The invention discloses a capacitive displacement assembly and a capacitive displacement sensor, and relates to the technical field of displacement detection, and the capacitive displacement assembly comprises a rigid housing, a first fixed electrode, a second fixed electrode, and a movable electrode. A plurality of first polar plate groups are arranged between the movable electrode and the first fixed electrode, each first polar plate group comprises a first fixed wave polar plate and a first movable wave polar plate, the first fixed wave polar plates are fixedly arranged on the first fixed electrode, and the first movable wave polar plates are fixedly arranged on the first side surface of the movable electrode; a plurality of second polar plate groups are arranged between the movable electrode and the second fixed electrode, each second polar plate group comprises a second fixed wave polar plate and a second movable wave polar plate, the second fixed wave polar plates are fixedly arranged on the second fixed electrode, and the second movable wave polar plates are fixedly arranged on the second side surface of the movable electrode; the second movable wave polar plate and the first movable wave polar plate are symmetrically arranged relative to the movable electrode; according to the invention, the volume value per unit volume can be effectively improved.

The invention relates to a steel wire diameter on-line monitoring system and method, and belongs to the technical field of precision on-line measurement and process control in the industrial automation field, and the method comprises the following steps: S1, amplifying the transverse swing of a smooth wire through a lever mechanism to generate amplified displacement; the transverse swing is caused by the diameter change of the smooth silk; s2, detecting the amplified displacement by adopting a capacitive displacement sensor to generate real-time diameter data; the real-time diameter data is obtained through conversion according to a preset lever amplification factor; s3, filtering the real-time diameter data to generate a diameter monitoring value; s4, judging whether the diameter monitoring value exceeds a preset tolerance range or not; s5, if the judgment result is yes, triggering an alarm or sending a control signal; and if the judgment result is no, the steps from S1 to S4 are continued to be executed, and the surface integrity of the smooth silk product is effectively guaranteed.

The invention belongs to the technical field of precise instruments, and particularly relates to an anti-crosstalk multi-axis nanoscale displacement table and a control method and application thereof. The displacement table comprises an objective table, a base, a bottom cover plate and four groups of piezoelectric ceramic actuators symmetrically distributed at four corners of the base; and each group of actuators is integrated with a four-connecting-rod five-hinge shell and a piezoelectric ceramic driving unit, and is connected with the objective table through a limiting flexible hinge. The output displacement of the four groups of actuators is cooperatively controlled, so that differential deformation of the limiting flexible hinge is generated, and the objective table is driven to realize Z-direction translation and deflection composite motion around the X / Y axis. The three sets of capacitive displacement sensors monitor pose changes in real time, and nanoscale positioning is achieved in combination with a closed-loop control algorithm. The design significantly reduces multi-axis motion crosstalk, is suitable for precise collimation and focusing of an optical system, and has the advantages of high positioning precision and fast dynamic response.