36 results about "Capacitive displacement sensor" patented technology

The invention discloses an anti-magnetic suspension accelerometer device based on a quasi-zero stiffness structure and a measurement method, and belongs to the field of precise instruments and meters. The device comprises a support, an axial displacement platform, magnetic conductive soft iron, an upper-layer pyrolytic graphite sheet, a lower-layer thin bismuth wafer, a capacitance displacement sensor and a permanent magnet array, wherein an anti-magnetic suspension system, a magnetic rigidity regulation and control system and a displacement detection system are arranged in the support; the anti-magnetic suspension system is composed of an upper-layer pyrolytic graphite sheet, a lower-layer thin bismuth wafer and a permanent magnet array, the magnetization directions of an inner ring and an outer ring of the permanent magnet array are opposite, a suspension element is suspended by virtue of anti-magnetic force and gravity balance, and quasi-zero stiffness is realized through positive and negative stiffness offset; according to the regulation and control mode, the magnetic field of the air gap where the suspension element is located is adjusted by adjusting the distance between the magnetic conductive soft iron and the permanent magnet, and the magnitude and gradient of magnetic induction intensity in all directions are changed, so that the magnetic rigidity is regulated and controlled, and efficient and accurate regulation and control of the sensitivity and the measuring range of the anti-magnetic suspension accelerometer are achieved. Therefore, the application range of the anti-magnetic suspension accelerometer is expanded.

The invention belongs to the technical field of detection devices, particularly relates to a detection device based on distribution uniformity of rollers of a planetary roller screw, and provides the following scheme: the detection device comprises a base; a rotary driving module, an optical detection module, a contact stress detection module, a high-precision capacitive displacement sensor array mechanism and a mobile detection mechanism are sequentially arranged at the top of the base, the rotary driving module comprises a servo motor, an encoder and an air bearing, and the servo motor is fixedly connected with a coupler; and the coupler is in transmission connection with the planetary roller screw. The three-dimensional scanning assembly reconstructs the surface appearance of the roller through the line laser transmitter and the area-array camera, the thin film pressure sensor is embedded into a nut raceway to collect contact pressure, the strain gauge array is pasted to a lead screw shaft neck to monitor deformation, and the multiple sensors work cooperatively to comprehensively evaluate the distribution state of the roller from the dimensions of optical tracks, mechanical response and the like. And the one-sidedness problem of a traditional single detection means is solved.

The application discloses a kind of capacitive displacement components and capacitive displacement sensors, it is related to displacement detection technical field, including rigid shell, first fixed electrode, second fixed electrode and movable electrode;Movable electrode and first fixed electrode between being equipped with several first polar plate groups, first polar plate group includes first fixed wave polar plate and first movable wave polar plate, first fixed wave polar plate is fixedly arranged on first fixed electrode, and first movable wave polar plate is fixedly arranged on the first side of movable electrode;Movable electrode and second fixed electrode between being equipped with several second polar plate groups, second polar plate group includes second fixed wave polar plate and second movable wave polar plate, second fixed wave polar plate is fixedly arranged on second fixed electrode, and second movable wave polar plate is fixedly arranged on the second side of movable electrode;Second movable wave polar plate and first movable wave polar plate are symmetrically arranged about movable electrode;The application can effectively improve unit volume capacitance.

The invention discloses a real-time self-driven wireless sensor based on a friction nano-generator. The real-time self-driven wireless sensor comprises the friction nano-generator, a discharging device, a sliding capacitive displacement sensor, an inductance coil and a receiving circuit, the sliding capacitive displacement sensor and the inductance coil form a parallel LC resonance circuit, and the friction nano generator supplies power to the LC resonance circuit through the discharge device; the sliding capacitive displacement sensor comprises an upper conductive flat plate and a lower conductive flat plate which are oppositely arranged, and at least one dielectric material layer located between the upper conductive flat plate and the lower conductive flat plate; the upper conductive flat plate is connected with a to-be-measured structure, the lower conductive flat plate is connected with the fixed end, and when the two conductive flat plates relatively displace, capacitance formed by the two conductive flat plates changes, so that the resonant frequency of the LC resonant circuit changes, and a mapping relation exists between the resonant frequency and displacement; the LC resonance circuit wirelessly transmits a resonance signal carrying displacement information, and the receiving circuit receives the resonance signal and analyzes the frequency to obtain the displacement information.

The invention provides a cold air thruster of a microsatellite. The cold air thruster is integrated with a valve assembly, a piezoelectric actuator, an elastic mechanism, a capacitance displacement sensor, a flow sensor and a control unit. The valve assembly is driven by the executing mechanism, the gap between the disc-shaped diaphragm and the valve port is accurately regulated and controlled, and fine adjustment of gas flow and thrust is achieved. And the piezoelectric ceramic and elastic design of the actuating mechanism ensures that the valve is normally opened and quickly responded. The sensor system optimizes the control accuracy through feedback of a capacitance sensor and a flow sensor. The double-closed-loop control strategy adjusts driving voltage based on displacement and flow information, improves dynamic response and reduces control noise. The shell assembly provides comprehensive protection. The problems that in the prior art, thrust control precision is low, dynamic response performance is poor, and control noise is large can be effectively solved.

The invention relates to a micro-displacement scanning platform driven by piezoelectricity. The micro-displacement scanning platform comprises a base, a load platform installed on the base in a sliding adjustment mode, a piezoelectric actuator assembly installed on the base and used in cooperation with the load platform, and a capacitance displacement sensor mechanism. The piezoelectric actuator mechanism comprises a supporting frame arranged between the base and the load platform in a connected mode and a piezoelectric actuator assembly installed in cooperation with the supporting frame, and the piezoelectric actuator assembly drives the supporting frame to deform so as to drive the load platform to move in the length direction of the base. The capacitance displacement sensor mechanism is used for measuring and feeding back the moving distance of the load platform; according to the piezoelectric-driven micro-displacement scanning platform in the technical scheme, the load platform is integrated on the base, and meanwhile, the piezoelectric actuator assembly and the capacitive displacement sensor mechanism which are matched with the load platform for use are integrally mounted on the base, so that the load platform is ensured to be accurately and reliably adjusted, and the whole structure of the device is compact; and high-precision dynamic positioning can be realized.

The invention discloses a large-stroke-high-frequency-response cascade cross-scale cutter servo device and a control method. The large-stroke-high-frequency-response cascade cross-scale cutter servo device comprises a cutter mounting platform, a flexible guide mechanism, a capacitive displacement sensor, a piezoelectric actuator, an upper cover plate, a lower cover plate, a measuring baffle, a left side plate, an amplification output block, a pre-tightening wedge block, a base body and the like. The flexible guide mechanism is composed of flexible hinges, installed in the base body and symmetrically distributed, the two piezoelectric actuators are embedded into the flexible guide mechanism and arranged at the front end and the middle of the flexible guide mechanism respectively, and the large piezoelectric actuator adopts a lever displacement amplification mechanism for transmission of a thick platform. A bridge type displacement amplification mechanism is adopted for transmission of the small piezoelectric actuator to be used for a fine platform, a cutter installing platform is installed at the position of a cutter holder at the front end of the flexible guide mechanism, an upper cover plate and a lower cover plate are used for installing capacitive displacement sensors and fixing the flexible guide mechanism respectively, and the capacitive displacement sensors are arranged in the middle of a base body of the flexible guide mechanism and on the rear side of the base body respectively.

The application discloses a kind of capacitive displacement sensor calibration device and method, belong to metrological testing technical field, comprising: host computer is started linear displacement table by controller module and carries out the linear motion required in calibration work, multiple degrees of freedom error and displacement value generated by linear motion are measured simultaneously using optical measurement module, and are transmitted to host computer by data acquisition module, host computer is adjusted by controller module and is located in the multiple degrees of freedom microstage pose of linear displacement table bottom to compensate multiple degrees of freedom error in linear motion, realizes to capacitive displacement sensor calibration.The application effectively breaks through the bottleneck that traditional capacitive displacement sensor calibration technique precision is limited, measurement and compensation function are integrated, eliminate multiple degrees of freedom error coupling influence, can satisfy the calibration demand of high-precision capacitive displacement sensor.

The application discloses a kind of capacitive displacement sensors, it is related to sensor technical field, including shell, first polar plate, second polar plate and flexible hinge rod;Two first polar plate are parallel and aligned arrangement;Second polar plate is arranged between two first polar plate;Flexible hinge rod includes semi-flexible hinge and the first connecting rod and second connecting rod located in the two sides of semi-flexible hinge, first connecting rod is fixedly connected with the second end of second polar plate, second connecting rod is hinged with shell, on the side opposite to shell and second polar plate still hinged with counterweight structure, when first polar plate is in horizontal state, counterweight structure makes second polar plate in no-load state in horizontal state, when first polar plate is in vertical state, second polar plate in no-load state is in natural state of drooping;Through the above two aspects, keep the consistency of the measurement reference of sensor under different working conditions, guarantee the repeatability and stability of measurement result, to better meet the high-precision displacement measurement scene demand.

The invention discloses a high-precision capacitive displacement sensor based on double ADC switch proportional demodulation. According to the high-precision capacitance displacement sensor based on double-ADC switch proportional demodulation, the analog front-end circuit is used, a refined circuit model is established, modulation noise can be reduced, and the capacitance resolution of analog modulation can be improved; by using the double-ADC switch proportion measurement circuit, secondary alternate acquisition and reconstruction of modulation signals and carrier signals can be realized, so that gain fluctuation caused by carrier generation modules such as ADCs and DACs is inhibited; by using the digital quadrature demodulation circuit, the phase error introduced in the demodulation process can be reduced or eliminated; the bad influence of the DAC carrier gain and the ADC gain on the finally output baseband signal is small, the included phase error introduced in the demodulation process is small, and high-precision displacement detection can be achieved. The displacement sensor is widely applied to the technical field of displacement sensors.

A steam turbine rotor bending measurement apparatus, comprising measurement units, a data collector (3), a Bluetooth unit (4), and a display unit (5). Each measurement unit comprises a magnetic support (1) and a capacitive displacement sensor (2), the capacitive displacement sensor (2) is mounted on the magnetic support (1), and a measurement surface of the capacitive displacement sensor (2) is in contact with a measurement sub-position (7) of a certain measurement point of a steam turbine rotor (6); the data collector (3) is connected to the capacitive displacement sensor (2); the data collector (3) is in signal connection with the display unit (5) by means of the Bluetooth unit (4), and the Bluetooth unit (4) is used for transmitting a displacement signal to the display unit (5); a plurality of measurement units are distributed in the axial direction of the steam turbine rotor (6), and each measurement unit corresponds to one measurement point of the steam turbine rotor (6); and a plurality of measurement sub-positions (7) are uniformly distributed in the circumferential direction of the steam turbine rotor (6). The above solution not only improves the measurement efficiency, but also improves the measurement accuracy.

The invention provides a capacitive displacement sensor. The first grid plate comprises a plurality of emission electrode arrays which are arranged in parallel and arranged in a staggered manner; each emission electrode array comprises a plurality of emission electrodes which are arranged at a first pitch period along a dislocation direction; the dislocation distance between any two emission electrode arrays is smaller than the first pitch; and the second grid plate comprises a reflecting electrode arranged in a net shape, and the reflecting electrode stretches across the plurality of emitting electrode arrays. Through staggered arrangement of the emission electrode arrays, the pitch limited by the manufacturing process is dispersed into staggered intervals among the emission electrode arrays, so that the physical limitation of the traditional pitch is broken through, and the capacitive displacement sensor can realize displacement measurement with higher precision under the same manufacturing process condition. And the second grid plate adopts a net-shaped reflecting electrode structure which not only reduces the signal transmission resistance, but also enhances the capacitance coupling effect.

The invention discloses a six-degree-of-freedom capacitive sensor displacement measurement method, a sensor comprises a receiving end polar plate and a transmitting end polar plate which are mounted between measured equipment, and a capacitance measurement gap is formed between the receiving end polar plate and the transmitting end polar plate; the sensor comprises eight capacitive sensors, namely four variable-area capacitive displacement sensors and four variable-distance capacitive displacement sensors; the measuring method comprises the following steps: detecting translation displacements along an X axis and a Y axis and a rotation angle around a Z axis through four variable-area capacitance displacement sensors; the translation displacement along the Z axis and the rotation angles around the X axis and the Y axis are detected through the four variable-distance capacitive displacement sensors; and according to the capacitance variation of the eight capacitance sensors, the six-degree-of-freedom pose parameters of the measured object in the space are solved.

This invention discloses a highly adaptable capacitive displacement sensor and its usage method, relating to the field of capacitive displacement sensor technology. The sensor includes a housing, a reference electrode assembly, a movable electrode, a lever, a connector, and a locking mechanism. The lever is rotatably mounted on the housing about a first axis perpendicular to the direction of movement of the movable electrode during operation. The connector connects the lever and the movable electrode. The connector is an elastic element, creating a flexible connection between the lever and the movable electrode. The locking mechanism selectively locks the lever to a first working position or a second working position corresponding to different sensor placement postures. When the lever is locked to different working positions, the connector guides the movable electrode, ensuring it is positioned at a preset measurement zero point regardless of the sensor's placement posture. This invention improves the sensor's adaptability while maintaining its miniaturization.

The invention discloses a high-adaptability capacitive displacement sensor and a use method thereof, and relates to the technical field of capacitive displacement sensors, and the sensor comprises a housing, a reference polar plate assembly, a movable electrode, a swing rod, a connecting piece and a locking mechanism. The swing rod is rotatably arranged on the shell around a first axis, the first axis is perpendicular to the moving direction of the movable electrode during working, and the connecting piece is connected between the swing rod and the movable electrode; the connecting piece is an elastic piece, so that flexible connection is formed between the swing rod and the movable electrode, and the locking mechanism is used for selectively locking the swing rod at a first working position or a second working position corresponding to different placement postures of the sensor; when the swing rod is locked at different working positions, the movable electrode is guided through the connecting piece, so that the movable electrode can be positioned at a preset measurement zero point under different placement postures of the sensor. On the basis of keeping the miniaturization of the sensor, the adaptability of the sensor is improved.

The application discloses a piezoelectric driving six-freedom-degree compliant positioning system, which comprises an industrial computer, the industrial computer is electrically connected with a piezoelectric ceramic controller, the piezoelectric ceramic controller is electrically connected with a plurality of piezoelectric ceramic actuators, the plurality of piezoelectric ceramic actuators are arranged at the bottom of a six-freedom-degree compliant positioning platform, four side edges of the six-freedom-degree compliant positioning platform are provided with driving branch chains, a displacement detection block is fixed at the centroid of the upper surface of the compliant positioning platform, a plurality of capacitive displacement sensors are equidistantly arranged on the surface of the displacement detection block and are parallel to a reserved gap. The compliant positioning platform adopts modularization and symmetrical design, the mechanism is simple and compact, the capacitive displacement sensors and the inclination sensors are simple and easy to use, the closed-loop control positioning is accurate, and the piezoelectric driving six-freedom-degree compliant positioning system is suitable for different application occasions.

The invention discloses a capacitive displacement assembly and a capacitive displacement sensor, and relates to the technical field of displacement detection, and the capacitive displacement assembly comprises a rigid housing, a first fixed electrode, a second fixed electrode, and a movable electrode. A plurality of first polar plate groups are arranged between the movable electrode and the first fixed electrode, each first polar plate group comprises a first fixed wave polar plate and a first movable wave polar plate, the first fixed wave polar plates are fixedly arranged on the first fixed electrode, and the first movable wave polar plates are fixedly arranged on the first side surface of the movable electrode; a plurality of second polar plate groups are arranged between the movable electrode and the second fixed electrode, each second polar plate group comprises a second fixed wave polar plate and a second movable wave polar plate, the second fixed wave polar plates are fixedly arranged on the second fixed electrode, and the second movable wave polar plates are fixedly arranged on the second side surface of the movable electrode; the second movable wave polar plate and the first movable wave polar plate are symmetrically arranged relative to the movable electrode; according to the invention, the volume value per unit volume can be effectively improved.

The invention belongs to the technical field of precise instruments, and particularly relates to an anti-crosstalk multi-axis nanoscale displacement table and a control method and application thereof. The displacement table comprises an objective table, a base, a bottom cover plate and four groups of piezoelectric ceramic actuators symmetrically distributed at four corners of the base; and each group of actuators is integrated with a four-connecting-rod five-hinge shell and a piezoelectric ceramic driving unit, and is connected with the objective table through a limiting flexible hinge. The output displacement of the four groups of actuators is cooperatively controlled, so that differential deformation of the limiting flexible hinge is generated, and the objective table is driven to realize Z-direction translation and deflection composite motion around the X / Y axis. The three sets of capacitive displacement sensors monitor pose changes in real time, and nanoscale positioning is achieved in combination with a closed-loop control algorithm. The design significantly reduces multi-axis motion crosstalk, is suitable for precise collimation and focusing of an optical system, and has the advantages of high positioning precision and fast dynamic response.

The application provides a fast swing mirror swing angle monitoring system and method based on a three-point capacitive displacement sensor, which comprises a capacitive displacement sensor, a signal conditioning circuit, a signal acquisition circuit, an FPGA angle calculation module and an upper computer. The three-point piezoelectric driving large-aperture fast swing mirror is a monitored component; three capacitive displacement sensors are distributed in an equilateral triangle around the center of the mirror surface, the included angle between each two actuators and the center connecting line is 120 DEG, the upper plate among them is installed at the bottom of the swing mirror, and the lower plate is installed to overlap with the upper plate on the support frame; the signal conditioning circuit converts the capacitive signal into a voltage signal, which is transmitted remotely through a current interface with the signal acquisition circuit; the signal acquisition circuit is connected with the FPGA angle calculation module; and the upper computer communicates with the FPGA. The application fully utilizes the high displacement detection precision of the capacitive sensor and the processing characteristics of the FPGA parallel calculation, and realizes high-precision and real-time swing mirror angle state monitoring of dynamic micro swing.

The application belongs to the technical field of precision instruments, and particularly relates to an anti-crosstalk multi-axis nanometer displacement stage and a control method and application thereof. The displacement stage comprises a stage, a base, a bottom cover plate, and four groups of piezoelectric ceramic actuators symmetrically distributed at four corners of the base; each group of actuators is integrated with a four-bar five-hinge shell and a piezoelectric ceramic driving unit, and is connected with the stage through a limiting flexible hinge. The output displacements of the four groups of actuators are cooperatively controlled, so that the limiting flexible hinge generates differential deformation, and the stage is driven to realize Z-direction translation and composite motion of yaw around the X / Y axes. Three groups of capacitive displacement sensors monitor the position and pose changes in real time, and nanometer positioning is realized in combination with a closed-loop control algorithm. The design significantly reduces multi-axis motion crosstalk, is suitable for precise collimation and focusing of an optical system, and has the advantages of high positioning precision and fast dynamic response.

The utility model relates to the technical field of detection, in particular to an oil cylinder pressing plate deviation detection assembly and a filter press, the oil cylinder pressing plate deviation detection assembly comprises a plurality of capacitive displacement sensors, two electrodes of each displacement sensor are respectively fixed on opposite side faces of a pressing plate and an oil cylinder seat in the filter press in a magnetic attraction mode, and the displacement sensors are in signal communication with a controller. The first ring and the second ring are elastic and coaxial, the axis of the first ring and the axis of the second ring are parallel to the telescopic direction of the oil cylinder, the first ring and the second ring are rotationally installed on the opposite side faces of the pressing plate and the oil cylinder base respectively, and sliding sleeves are fixed to the first ring and the second ring respectively and arranged outside the electrode in a sleeving mode. And the peripheries of the first ring and the second ring are respectively and fixedly provided with a driving lever, and the two driving levers are connected through a connecting rod. The first ring and the second ring can synchronously rotate to a first position state and a second position state, and an electrode plate of the displacement sensor synchronously rotates along with the first ring and the second ring.

A kind of capacitive displacement sensor manufacturing method, it is related to capacitive displacement sensor, it is related to a kind of capacitive displacement sensor.Capacitive displacement sensor manufacturing method compatible with semiconductor process is provided.There is probe, insulating substrate, upper shell, lower shell, cable.The probe is manufactured using semiconductor process, the conductive and insulating part of probe main body is integrated manufacturing, the front of probe is three conductive parts and two insulating parts mutually coplanar nesting, as measurement plane;Insulating layer is prepared on the back of probe, and conductive material is embedded in specific position, and is bonded and electrically connected with insulating substrate.Probe is fixedly connected with lower shell through insulating substrate, and cable is connected with the conductive material of insulating substrate through upper shell;The insulating substrate is bonded with the upper and lower shell of sensor metal, and the conductive material in it is connected with cable.It has the advantages of batch manufacturing, reducing cost, reducing assembly difficulty and improving assembly coaxiality.

The utility model discloses a main shaft rotation error analysis device which comprises a base, a fixing frame, a testing assembly, a supporting plate and a positioning assembly, the fixing frame is arranged at the top of the base, the testing assembly is arranged in the middle of the fixing frame and used for obtaining main shaft rotation error data, and the supporting plate is fixedly connected to the top end of the base. The supporting plate is used for supporting the fixing frame, the positioning assembly is arranged at the top end of the base and used for fixing the position of the fixing frame, and the testing assembly comprises a capacitance displacement sensor connected to the middle of the fixing frame in a penetrating mode. Through the design of the supporting plate and the positioning assembly, when a transverse main shaft needs to be detected and analyzed, the base is fixed at a required position, then the fixing frame is placed on the supporting plate, finally, the base and the fixing frame are fixed through the positioning assembly, and the supporting plate is used for supporting; and the situation that the fixing frame and the test assembly fall off is avoided.

A capacitive displacement sensor system (1) with interdigitated combs comprising a capacitive detection unit in a direction (y) perpendicular to the surfaces of the combs facing each other, said combs being subjected to a sinusoidal motion (A0.sin(ωt)) in said direction (y), comprising: - a device (2) for converting the capacitance delivered by the sensor (1) into a voltage; - an analog / digital converter (3) configured to digitize the voltage delivered by said conversion device (2) and to provide a digitized signal (Vadc); and - a control unit (4) comprising: - a harmonic estimator (5) configured to estimate the amplitudes of the harmonics of order less than or equal to a maximum order based on the digitized signal (Vadc) and a reference angle (a) corresponding to the instantaneous angle of the input angular frequency (ωt); and - a signal reconstruction module (6) for reconstructing a signal from the amplitudes provided by said harmonic estimator (5) and the reference angle and the digitized signal delivered by said analog / digital converter (3).

The invention discloses a nanometer platform real-time pose calibration method fusing laser interference and multi-sensor data, and relates to the technical field of nanometer positioning and precision measurement. The method comprises the following steps: establishing a sensor system comprising a laser interference measurement module, a capacitive displacement sensor, a visual sensor and a high-precision optical fiber microprobe sensor (FMS), and completing initialization; multi-source data space-time synchronization is realized by taking a sampling clock of the laser interferometer as a reference; performing layered preprocessing on the synchronized data and extracting multi-dimensional key features; constructing a fusion weight adaptive distribution model, and outputting a dynamic fusion weight through an optimization objective function containing cutting operation and KL divergence penalty; pose fusion estimation is completed based on a multi-scale sliding window, hierarchical constraint, robust iteration and error feedback correction four-level framework; and finally, parameter self-optimization is realized through closed-loop feedback calibration. The method does not need an external auxiliary device, gives consideration to the pose calibration precision and robustness, improves the dynamic response capability, and is suitable for the real-time pose calibration of the nano platform under a complex working condition.

The application discloses a compact structural glue-free capacitive displacement sensor and an assembling method thereof, and belongs to the technical field of precise geometric quantity measurement. The compact structural glue-free capacitive displacement sensor comprises a measuring electrode, three coaxial electric wires, an insulating film layer, a shell, a shell bottom cover and a protection ring. The shell is provided with the shell bottom cover at one end. The inner and outer surfaces of the protection ring are covered with the insulating film layer. The protection ring is arranged in the other end of the shell. The measuring electrode is arranged in the protection ring. The measuring electrode is connected with the three coaxial electric wires at one end. The other end of the three coaxial electric wires is sequentially arranged through the protection ring and the shell and is arranged out of the shell bottom cover. The interference fit is adopted between the shell and the protection ring and between the protection ring and the measuring electrode. The problem of the reduction of the measurement precision caused by the separation of the connection due to the long-term use of the adhesive in the prior art is solved. The practicability and the detection precision are improved.

The invention discloses a self-calibration capacitive displacement sensor and a gap measurement method. The sensor comprises a sensor measuring head unit, a signal conversion unit and a signal processing unit. According to the invention, through the design of a four-measuring-head differential structure with a known gap, the influence of a measured material, environmental factors and installation precision on the output value of the sensor is introduced, so that the sensor only needs to be calibrated once when leaving a factory and can be directly self-calibrated in subsequent use, and the measurement precision of the sensor is improved.

The invention relates to the technical field of automatic control, in particular to a capacitive displacement sensor based on a transparent electrode. Comprising a capacitive sensor unit; an AC excitation module; the signal conditioning and amplifying module comprises a first operational amplifier and a second operational amplifier, the first operational amplifier and the second operational amplifier are arranged to be transimpedance amplification topologies respectively, and after being input through an interface, an alternating current response signal is connected to the input end of the first operational amplifier and the input end of the second operational amplifier through a current limiting resistor and a filter capacitor in sequence; the signal conditioning and amplifying module further comprises a limited band filter circuit and a stable compensation circuit; the signal conditioning and amplifying module adopts a guard ring structure, a driving shielding structure and a short wiring layout; an analog-to-digital conversion module; and a digital processing module. According to the invention, coaxial measurement can be carried out without shielding a light path, miniaturization and light weight are facilitated, long-term stability of a vacuum, sterile or moisture-proof cavity is facilitated, and the geometric and thermal mechanical consistency of a channel is improved.

The invention relates to a micro-displacement platform integrated with a capacitive displacement sensor. The micro-displacement platform comprises a base, a load platform, a piezoelectric actuator mechanism arranged between the base and the load platform, and a capacitive displacement sensor mechanism, the piezoelectric actuator mechanisms are uniformly distributed in the circumferential direction of the load platform, the piezoelectric actuator mechanisms are used for driving the load platform to move in multiple directions, and the capacitance displacement sensor mechanism is used for detecting the moving distance of the load platform; according to the technical scheme, the load platform is integrated on the base, the piezoelectric actuator mechanism used in cooperation with the load platform is integrally installed on the base, and the capacitance displacement sensor mechanism is installed between the base and the load platform. When the piezoelectric actuator mechanism moves or rotates to adjust the load platform, the capacitive displacement sensor mechanism can accurately measure and feed back the load platform, and accurate and reliable positioning during operation of the load platform is ensured.

The present disclosure relates to a seismograph based on an inverted pendulum structure and a capacitive displacement sensor. The seismograph comprises a square frame, a bottom plate arranged at the bottom side of the square frame, a flexible support rod connected to the bottom plate and located in the square frame, a first capacitive plate and a second capacitive plate arranged at the inner side of the square frame and oppositely arranged in a first direction, a metal mass connected to one end of the flexible support rod away from the bottom plate, and the metal mass is located between the first capacitive plate and the second capacitive plate, the metal mass and the first capacitive plate form a first capacitor, and the metal mass and the second capacitive plate form a second capacitor, the initial capacitance values of the first capacitor and the second capacitor are equal, a power supply is electrically connected with the metal mass, and a processor is electrically connected with the first capacitive plate and the second capacitive plate respectively, and the processor is used to obtain the displacement of the metal mass in the first direction according to the initial capacitance and the capacitance change of the first capacitor and the second capacitor.