Model-based hysteresis feed-forward correction method of piezoelectric ceramic scanner

Abstract

The invention relates to a model-based hysteresis feed-forward correction method of a piezoelectric ceramic scanner. The method comprises the following steps that: a capacitive displacement transducer is used to measure response data of a piezoelectric ceramic scanner under a linear input voltage; a mathematical model is established for hysteresis of the piezoelectric ceramic scanner; according to the response data obtained by the measurement, a mathematical model parameter is identified, and on the basis of the mathematical model parameter, a parameter of an inverse model is solved so as to establish the inverse model; and an output of the inverse model is used an input of the piezoelectric ceramic scanner as well as linear processing is carried out on the piezoelectric ceramic scanner, so that hysteresis feed-forward correction of the piezoelectric ceramic scanner is completed. According to the method provide in the invention, analytical inverse solution is obtained; and morphology of a scanning sample can be reflected really; and moreover, the method has advantages of good generality and high precision; therefore, the method has an important significance.

Description

technical field [0001] The invention relates to a hysteresis correction technology for a piezoelectric ceramic scanner in the field of nanometer observation and nanomanipulation, in particular to a model-based feedforward correction method for the hysteresis of a piezoelectric ceramic scanner. Background technique [0002] In the field of nano-observation and nano-manipulation, scanning probe microscope is a commonly used tool for observation and manipulation. Scanning probe microscopy can realize atomic-level imaging of samples, and the basis of single-atom operation lies in the piezoelectric ceramic scanner inside which can realize nanoscale positioning. The reason for choosing piezoelectric ceramics as the scanning probe microscope scanner is that piezoelectric ceramics have the characteristics of high displacement accuracy and resolution, fast response speed, etc., and can achieve fast and accurate nanoscale positioning. However, the inherent nonlinear factors of piezoe...

AI Technical Summary

Problems solved by technology

At present, there are mainly two open-loop calibration methods for piezoelectric ceramic scanners. One is the look-up table method, which records the input and output data of piezoelectric ceramics through offline experiments, and obtains the required voltage value by looking up the table during scanning. The disadvantage of this method is that it has poor versatility and can only set several typical scanning ranges; the other is to use a curve fitting method to fit a polynomial after measuring the response of piezoelectric ceramics, The problem with this method is that the accuracy of the model is low when the number of fitting polynomials is low, and the analytical inverse solution cannot be obtained if the number of times is too high

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