173results about "Scanning probe techniques" patented technology

The invention relates to the technical field of electron microscope sample pretreatment, and discloses a critical point drying control method and device based on online near-infrared monitoring, and the method comprises the steps: obtaining infrared spectrum data, and unmixing the spectrum data to obtain a feature data set of a solvent; outputting a to-be-corrected signal according to the feature data set, correcting the to-be-corrected signal with preset data, and determining a signal feature of the solvent; carrying out dynamic correction on the signal characteristics and a preset characteristic matrix, outputting concentration time sequence data of the solvent, carrying out steady state judgment by combining a preset convergence threshold value, and determining a critical state of the solvent; acquiring control strategy data according to the critical state, analyzing the control strategy data into execution response characteristics, performing multi-channel mapping and correction processing, and outputting a process control signal; and performing control gain correction on the process control signal to finish closed-loop feedback control of the final drying process. The method is based on multi-solvent spectrum sensing and concentration dynamic analysis, and self-adaptive closed-loop control of the critical point drying process is achieved.

Systems and approaches for semiconductor metrology and surface analysis using Secondary Ion Mass Spectrometry (SIMS) are disclosed. In an example, a secondary ion mass spectrometry (SIMS) system includes a sample stage. A primary ion beam is directed to the sample stage. An extraction lens is directed at the sample stage. The extraction lens is configured to provide a low extraction field for secondary ions emitted from a sample on the sample stage. A magnetic sector spectrograph is coupled to the extraction lens along an optical path of the SIMS system. The magnetic sector spectrograph includes an electrostatic analyzer (ESA) coupled to a magnetic sector analyzer (MSA).

A lithium secondary battery according to the present invention includes a positive electrode and a negative electrode disposed opposite the positive electrode. The slip step difference of the positive electrode is 20 nm or less. The slip segment difference is defined in such a manner that, in a line scan pattern obtained by measuring the surface of the positive electrode in a fully discharged state after 500 times of charging and discharging of the battery using an atomic force microscope (AFM), the distance between a pair of parallel lines in which the slope of the observed mountain shape is not zero may include two or more.

The present invention provides a method for placing the tip (106) of a probe (1106) of a nanomanipulator (104) onto a sample (102, 1102), particularly in a vacuum. The probe (1106) includes a cantilever (108) and a tip (106) attached thereto. The nanomanipulator (104) further includes an excitation unit (1110), the probe (1106) being mechanically coupled to the excitation unit (1110). The method includes the following steps: - when the tip (106) is not in contact with the sample (102), by providing a harmonic... A resonant drive signal (1010) is used to oscillate the probe (1106); - during a first approach phase, the first distance along the z-direction between the tip (106) and the sample (102) is reduced until at least one of a first set of stop conditions is met, wherein the first set of stop conditions includes detecting a shift in the frequency of the resonant drive signal (1010) used during the first approach phase; and - the first approach phase is terminated when the at least one of the first set of stop conditions is met, and the resonant drive signal (1010) is deactivated.

The utility model relates to the technical field of scanning probe microscopes, and particularly discloses a scanning probe microscope independent scanner low in cost and easy to process, which comprises a probe and a needle cylinder, the probe is coaxially arranged in the needle cylinder, one end of the needle cylinder is fixedly bonded with an insulating bottom cover, one end of the insulating bottom cover, which is deviated from the needle cylinder, is fixedly bonded with a piezoelectric scanning tube, and the piezoelectric scanning tube is connected with the needle cylinder. An insulating top cover is fixedly adhered to one end, deviating from the insulating bottom cover, of the piezoelectric scanning tube; and an internal sleeve is sleeved outside the insulating top cover and the external piezoelectric scanning tube. The utility model has the advantages of simple structure and low cost, is suitable for batch production, and the imaging effect is not easily influenced.

The application discloses a vacuum sample clamp device combined with femtosecond laser sample preparation and atomic force microscope (AFM), and relates to the technical field of clamps.The vacuum sample clamp device combined with femtosecond laser sample preparation and atomic force microscope (AFM) comprises an outer shell, a supporting table, a sample table and a position recorder, the outer shell is provided with an inner cavity, a laser inlet and a communication hole, the laser inlet and the communication hole are communicated with the inner cavity respectively, the laser inlet is used for allowing sample preparation laser to enter, and the communication hole is used for being communicated with a vacuum device; the supporting table is movably connected to the inner cavity; the sample table is placed on the supporting table, the sample table is provided with a placing position and a mounting cavity, the placing position is located above the mounting cavity, and the placing position is used for placing a sample; and the position recorder is mounted in the mounting cavity and is used for recording displacement coordinates in a laser sample preparation process after the sample is placed in the placing position. The technical scheme provided by the application can realize fast transfer between a femtosecond laser sample preparation processing environment and an AFM test environment without repositioning.

An equipment mount for an x-ray apparatus is disclosed. The mount comprises a main shield element, a peripheral shield element and a secondary shield element arranged to permit a mounting element to pass through the main shield element in a shielded manner. A support apparatus for an x-ray apparatus is also disclosed. The support apparatus comprises a separable bearing for translating a support part between a first position and a second position and an elevator mechanism for translating the support part from the second position to a third position, thereby separating the bearing. A manipulator stage for an x-ray apparatus is also disclosed. The stage comprises a first support structure arranged to support a sample stage and supported at first and second positions either side of the sample stage by second and third support structures, the second and third support structures being configured to allow the first support structure to raise and lower while remaining supported at both ends.

A probe microscope system includes a probe including a cantilever mount, a cantilever extending from the cantilever mount to a free end, and a probe tip carried by the free end of the cantilever; a drive system configured to drive the probe toward and away from a training sample; a measurement system configured to acquire probe data in a measurement period in which the probe tip interacts with the training sample, where the measurement period comprises in succession a first driving phase in which the probe is driven towards the training sample and a second driving phase in which the probe is driven towards the training sample. A second driving phase in which the probe is driven away from the training sample and the probe data is acquired by measuring a parameter of the probe; a machine learning model; and a training module configured to input the probe data as training data into the machine learning model to train the machine learning model by machine learning, where the training data includes a data set of a plurality of measurements of the parameter of the probe, and each measurement in the data set is acquired in the same measurement period.

The present application relates to the technical field of scanning electron microscopy, and discloses a working distance calibration method and system for a scanning electron microscope, the scanning electron microscope and a medium. The method comprises the following steps: placing an elevation sample on a sample stage of a scanning electron microscope to be calibrated, adjusting objective lens excitation, changing the focal length of the objective lens, and obtaining objective lens excitation under different accelerating voltages; under the same working distance, fitting different accelerating voltages and corresponding objective lens excitation by using a first fitting model to determine first, second, third, fourth and fifth calibration parameters of the first fitting model; under the same accelerating voltage, fitting different working distances and corresponding objective lens excitation by using a second fitting model to determine the third, fourth and fifth calibration parameters of the second fitting model; and calibrating the scanning electron microscope to be calibrated by using the five calibration parameters. The present application determines multiple calibration parameters by using two fitting models, thereby improving the accuracy of calibration of key parameters of the scanning electron microscope before delivery.

A positioning device for an analytical instrument (e.g., an atom probe microscope or other nanoscale microscope) includes a primary carriage translatable relative to a vacuum chamber wall, and a secondary carriage connected to the primary carriage by a plurality of spaced actuators that allow the secondary carriage to translate and / or tilt relative to the primary carriage. An arm then extends from the secondary carriage through the vacuum chamber wall and connects to the instrument. The instrument may be rapidly extended or retracted within the vacuum chamber via its connection to the primary carriage, and may be more finely translated and / or tilted via its connection to the secondary carriage. A damping arrangement isolates the instrument from vibrations.

Systems and methods for simultaneous phase-contrast imaging and electron energy loss spectroscopy. The method and system for imaging a sample with charged particles include guiding charged particles toward the sample along a principal axis, and simultaneously detecting a first portion and a second portion of the charged particles transmitted through the sample using a first detector and a second detector, respectively. The second detector is positioned downstream of the first detector. Each of the transmitted charged particles exits the sample at an exit angle between the direction of the transmitted charged particle and the principal axis. The exit angle of the first portion of the transmitted charged particle overlaps with the exit angle of the second portion of the transmitted charged particle. In this way, complementary information, such as structural and compositional information, can be obtained simultaneously.

To reduce the work load on a user generated when a probe is brought in contact with the surface of a sample and the measurement environment of a scan type probe microscope for measuring the shape of the surface of the sample is changed.SOLUTION: A scan type probe microscope 100 is a scan type probe microscope for measuring the surface of a sample S by using a probe 109. The scan type probe microscope 100 includes: a microscope body part 10 having a probe 109; a controller 11 for controlling a microscope body part 10; an anti-vibration table 12 for supporting the microscope body part 10 arranged in a region R1; a housing 13 for containing the microscope body part 10, the controller 11, and the anti-vibration table 12; and a movement mechanism 14 used to move the housing 13.SELECTED DRAWING: Figure 2

The invention relates to a tactile sensor device 100, 200, 300 for bringing two elements into contact with (1) a positioning unit 110, 210, 310, which is configured to position a first element E1 linearly along a probing direction, wherein the positioning unit comprises: an end effector 112, 212, 312, which is connected to the first element, and a position sensor 213, which is configured to detect at least a change in the position of the end effector, and (2) a controller 120, 220, wherein the controller is configured to regulate the position of the end effector to a predefined setpoint, to determine a difference between an actual value and the predefined setpoint of the position of the end effector,to determine a change in the difference or a quantity dependent on the difference and, based on the change in the difference or the quantity dependent on the difference, to determine a force exerted by a second element on the first element connected to the end effector.

The utility model discloses a novel special sample table for a freezing scanning electron microscope, and relates to the technical field of experimental equipment, in particular to a novel special sample table for a freezing scanning electron microscope, which comprises a base and a sample table body, a square sample groove is arranged on the upper surface of the sample table body, and an adjusting sliding plate is slidably connected in the square sample groove. An adjusting bin is formed in the sample table body, a supporting shaft rod is arranged in the adjusting bin, an adjusting gear is rotationally connected to the outer surface of the supporting shaft rod, an adjusting rack is meshed with the outer surface of the adjusting gear, a connecting plate is arranged at one end of the adjusting rack, and one end of the connecting plate is arranged on the outer surface of an adjusting sliding plate. According to the novel special sample table for the freezing scanning electron microscope, the square sample groove, the adjusting sliding plate, the circular sample groove, the first adjusting ring and the second adjusting ring are arranged in a matched mode, so that the novel special sample table for the freezing scanning electron microscope has the effect that samples of different sizes and types can be conveniently tested.

A lithium secondary battery according to the present disclosure includes a cathode and an anode disposed opposite to the cathode. The cathode has a gliding step height of 20 nm or less. The gliding step height is defined as the distance between a pair of parallel lines having a non-zero slope that can include at least two mountain-like shapes observed in a line scan graph obtained using an atomic force microscope (AFM) of the cathode surface after 500 charge-discharge cycles in a fully discharged state.

The invention provides a method for transferring an in-situ transmission sample to a grid for post characterization, and belongs to the technical field of transmission sample processing, and the method comprises the following steps: preparing a metal target sample with a step structure and a deep groove through a focused ion beam micro-nano processing technology, meanwhile, a reusable metal protective cover formed by seamlessly welding a concave cover body and a cover cap with a connecting structure is machined; a metal protective cover is picked up by a transfer tool and covers a metal target sample after an in-situ experiment, an integrated assembly of the metal protective cover and the metal target sample is transferred to a target grid after being fixed, the sample and the protective cover are separated through ion beam excision along the deep groove position, the separated sample is used for post characterization, and the protective cover can be reused after being recycled and trimmed. By designing the reusable protective cover and optimizing the transfer process, the problems that a special carrier for an in-situ experiment is incompatible with a double-tilt transmission electron microscope grid, the surface of a sample is polluted due to Pt welding in the FIB transfer process, and then high-quality characterization after an event is restricted are solved.

An image processing method according to the present disclosure is a method for processing a target image generated on the basis of measuring a sample by a scanning probe microscope, the method comprising: a step (S12) for estimating, by an algorithm for calculating a regression line by excluding an outlier from data including the outlier, a first background image of a target image, the first background image arising due to inclination between a plane on which the sample is set and a predetermined plane, during measurement; and a step (S14) for generating a first corrected image in which the inclination of the target image is corrected on the basis of the first background image.

The invention discloses a quantitative analysis method for spatial distribution of material elements. The method comprises the following steps: acquiring a spatial intensity distribution diagram of to-be-detected elements in a sample by utilizing a micro-area imaging technology; measuring the average concentration of the to-be-measured element through an element quantitative analysis technology; carrying out normalization processing on the spatial intensity distribution diagram by taking the average concentration as a reference, and establishing a mapping model of an intensity value and an absolute concentration value; and according to the mapping model, converting the intensity value of each pixel point in the spatial intensity distribution diagram into an absolute concentration value, and generating a quantitative spatial distribution diagram of the elements. According to the method, element quantitative data and imaging data are coupled, the dependence of a traditional method on a matrix matching standard substance is broken through, accurate spatial quantitative analysis from ppm-level impurities to major elements under the micro-nano scale is realized, and the method has the characteristics of good traceability, full-concentration coverage, multi-technology compatibility and the like; the method can be widely applied to element distribution characterization of complex systems such as composite nanomaterials and heterojunction devices, and a reliable analysis means is provided for material performance optimization.

The application discloses a sample fixing mechanism for nano probe testing, a nano probe testing device and a sample testing method. The sample fixing mechanism comprises a base provided with a first assembly surface; a fixer provided with a second assembly surface matched with the first assembly surface, and further provided with a fixing surface opposite to the second assembly surface, the fixing surface being used for bonding and fixing the sample; and a locking structure provided with a locked state and an unlocked state, the locking structure being capable of relatively fixing the fixer with the base in the locked state, and the fixer being capable of being removed from the base in the unlocked state. The sample is firmly pasted with the fixer after the glue is melted by high-temperature heating, then the second assembly surface of the fixer is matched with the first assembly surface of the base, the fixer is relatively fixed with the base by the locking structure, then the sample is put into a nano probe machine, nano probe testing is carried out, and testing data of the sample is obtained.

The invention relates to the technical field of semiconductors, and provides a preparation method of a silicon through hole cross section sample of a bonding wafer. The method comprises the following steps: extracting a first through-silicon-via cross-section sample from a bonded wafer, wherein the first through-silicon-via cross-section sample comprises a through-silicon-via feature structure; mounting and grinding the first through-silicon-via cross-section sample, and stopping grinding to obtain a second through-silicon-via cross-section sample when the characteristic boundary of the through-silicon-via characteristic structure is completely exposed and the outline is clear in an OM dark field; and performing staged dynamic polishing treatment on the second through silicon via cross section sample, and when the cross section exposure area of the through silicon via feature structure is greater than a first preset threshold value, terminating the staged dynamic polishing treatment to obtain a final through silicon via cross section sample. According to the method, the silicon through hole section sample of the bonded wafer with good integrity can be prepared, so that the accuracy and reliability of the position and size measurement result of the silicon through hole of the bonded wafer can be ensured.

The invention discloses a scanning probe preparation and characterization device, and relates to the technical field of micro-nano. The scanning probe preparation and characterization device comprises a bottom plate, a containing table, a first moving platform and a first scanning probe module, the containing table is rotationally arranged on the bottom plate and used for bearing and fixing a sample, the first moving platform is arranged on the bottom plate corresponding to the containing table, and the first scanning probe module is arranged on the first moving platform corresponding to the containing table. The first scanning probe module is arranged on the first moving platform, the height of the first scanning probe module is adjustable, the first scanning probe module is used for preparing and representing a sample, and the first moving platform is used for adjusting the position of the first scanning probe module relative to the circle center of a to-be-operated area of the sample. According to the scanning probe preparation and characterization device, the position limitation of the supporting platform on the scanning probe module can be relieved, large-range etching and scanning of a sample are achieved, and the preparation and characterization efficiency of the scanning probe is improved.

The invention discloses a method for rapidly screening the high-temperature stability of a ternary layered positive electrode material of a lithium battery, and belongs to the technical field of material detection. The method provided by the invention comprises the following steps: preparing a ternary layered positive electrode material into a positive electrode, and matching with a negative electrode to assemble a battery; analyzing the alternating current impedance of the battery placed at high temperature for different time, and calculating to obtain an impedance change rate; observing the thickness of the SEI film on the surface of the ternary layered positive electrode material; speculating the high-temperature stability of the ternary layered positive electrode material according to the impedance change rate and the SEI film thickness change; and the ternary layered positive electrode material with small impedance change rate and small SEI film thickness change has good high-temperature stability. The method provided by the invention is stable and reliable, can evaluate the high-temperature stability of the ternary layered positive electrode material in a short time and screen out a high-quality material, and is simple, economical, rapid, efficient and easy to popularize and use.

The utility model discloses integrated circuit package substrate package detection bearing device, specifically related to integrated circuit detection technical field, including detection box body, its inside end surface's downside is equipped with the bearing base, the outside of bearing base upper end is equipped with the bearing station, the middle part of bearing station lower extreme is equipped with the support connecting rod, the lower extreme of support connecting rod is equipped with the spherical support block, the upper end of bearing base is equipped with the compression block. The utility model discloses actually use, through the corresponding setting state of spherical support block, concave adaptation slot, compression block, locking lug and locking bolt, can install locking bolt and compress the block tightly in the upper end of bearing base, thereby can conveniently spherical support block in the inside of concave adaptation slot sliding, in the support state of support connecting rod and spherical support block to bearing station, can conveniently bearing station carries out the adjustment of different angle and direction.

Disclosed herein is a system for detecting a per- and polyfluoroalkyl substance (PFAS), including a first microcantilever; and one or more polypeptides coupled to at least a portion of the first microcantilever, wherein interaction of the one or more polypeptides with the per- and polyfluoroalkyl substance (PFAS) induces a detectable deflection in the first microcantilever. Further disclosed is a method for detecting a per- and polyfluoroalkyl substance (PFAS), including exposing a sample containing a per- and polyfluoroalkyl substance (PFAS) to a first polypeptide functionalized microcantilever including: a first microcantilever, and one or more polypeptides coupled to at least a portion of the first microcantilever, wherein interaction of the one or more polypeptides with the per- and polyfluoroalkyl substance (PFAS) induces a detectable deflection in the first microcantilever; and detecting a movement of the microcantilever.

A method for optical metrology of a sample, the method comprising: illuminating an area of ​​the sample with a set of pulses of different wavelengths while the sample is moving at variable speeds; collecting light reflected from the sample as a result of said illumination to provide a set of such frames, each set of frames comprising partially overlapping frames associated with said different wavelengths; and processing said frames to provide optical measurement results indicative of one or more evaluation parameters of an element of the area of ​​the sample, wherein said processing is based on a mapping between said set of frames and reference measurements obtained by another optical metrology process exhibiting a higher spectral resolution than the spectral resolution obtained by said illumination and said collection.

The embodiment of the invention provides a signal measurement system and a signal measurement method, and relates to the technical field of measurement. The signal measuring system comprises a measuring sensor, an amplifying circuit, a signal generator and a main control device, the measurement sensor measures a target object and inputs an original measurement signal which is obtained by measurement and at least comprises a target measurement signal into the amplification circuit; the signal generating device generates an initial reference signal and directly or indirectly sends the initial reference signal to the amplifying circuit; the amplifying circuit is used for amplifying the received signal; the main control device obtains a specified reference signal after the initial reference signal is amplified and a specified measurement signal after the target measurement signal is amplified from the output signal of the amplification circuit; determining a noise characteristic parameter of the amplification circuit based on the initial reference signal and the specified reference signal; and obtaining a target measurement signal based on the noise characteristic parameter and the specified measurement signal. According to the invention, the noise in the measurement signal can be reduced and even eliminated.

Methods of moving or vibrating cantilevered optical fibers of scanning fiber devices are disclosed. In one aspect, a method may include vibrating the cantilevered optical fiber at an initial frequency that is substantially displaced from a resonant frequency of the cantilevered optical fiber. Then, the frequency of vibration of the cantilevered optical fiber may be changed over a period of time toward the resonant frequency. Light may be directed through an end of the cantilevered optical fiber while the cantilevered optical fiber is vibrated.

An adapter configured to be optically coupled to a plurality of microscopes and having (i) a first microscope interface configured to optically couple a first microscope system to an optical element that is in optical communication with an optical probe to provide first imaging data of a sample, and (ii) a second microscope interface configured to optically couple a second microscope system to the optical element to provide second imaging data of the sample. An optical imaging apparatus and method utilizing such adapter.