The invention discloses an ultrahigh / extremely high thermal
cathode vacuum gauge calibration and
simulation integrated platform, which relates to the technical field of vacuum test instruments, and is characterized in that an
ionization gauge sensing unit ball is connected with an air inlet flowmeter, a
mass spectrometer and a comparison vacuum gauge, and an extremely high evacuation unit provides ultimate
vacuum pressure for an
ionization gauge sensing unit ball chamber; the pre-evacuating unit is used as a pre-evacuating pump after a to-be-tested thermionic
cathode ionization gauge is replaced, the automatic parameter adjusting unit is used for providing continuous and adjustable electrical parameters, the
electrometer is used for acquiring
ion flow acquisition signals, and the
mass spectrometer is used for providing a deflation rate and
component analysis function. The comparison vacuum gauge and the air
inlet flow meter form a calibration and
simulation integrated platform flow detection and
control unit, and the calculation unit serves as an
intelligent control unit and provides
algorithm processing, electrical parameter
adaptation and
data processing work for the calibration and
simulation integrated platform. Through the calibration and simulation
integrated design of the to-be-tested vacuum gauge, a real simulation environment is provided for development, optimization, iteration and shaping of the ultrahigh / extremely high thermal
cathode vacuum gauge.