The invention, which belongs to the MEMS field, discloses a micro-mechanical resonant
electrometer with ultra-high sensitivity. The method comprises a mechanical structure design method of an
electrometer header and a testing
circuit design method. Compared with the prior art using a movable
resonator charge input polar plate, the mechanical structure design enables the conversion efficiency between the electrostatic force and the axial stress to be improved; and with a micro-mechanical lever, the electrostatic force increases to improve mechanical sensitivity. When an external charge is inputted, rigidity disturbance on a
resonator I increases and thus the localization phenomenon of the mode becomes dramatic. Meanwhile, the two provided resonators with different structures employ differential detection structures; the
differential amplification circuit is used for detecting the amplitudes of the resonators and eliminating feed-through signals, so that the
signal to
noise ratio of the detection
signal can be improved. In terms of the testing
circuit design, a closed-loop testing plane is employed. To be specific, a
signal at a detection
electrode passes through a trans-impedance
amplifier, a subtracter, a band-pass filter and a
comparator and then is loaded at an alternating-current drive
electrode to form a
closed loop; rectification and filtering are carried out on two paths of outputs of the subtracter and dividing is carried out to obtain a direct-
current voltage signal reflecting an
amplitude ratio of two resonators. With a closed-loop drive detection circuit, the amplitude and
frequency noise of the
resonator can be reduced.