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55 results about "Superconducting loop" patented technology

Superconducting quantum interference device and preparation method

The invention provides a superconducting quantum interference device and a preparation method. The superconducting quantum interference device comprises an under-damped SQUID and a series resistor; the under-damped SQUID and the series resistor are connected in series; and the two ends of the under-damped SQUID and the series resistor connected in series are connected with a bias voltage. A firstsuperconducting material layer, a first insulating material layer and a second superconducting material layer are sequentially deposited, and etching is performed to form a superconducting loop and abottom electrode structure; the second superconducting material layer is etched to form a Josephson junction; the second insulating material layer is deposited and etched, and an electrode opening isformed in the top of the Josephson junction; a resistance material layer is deposited and etched to form a bypass resistor and the series resistor; and a top electrode of a third superconducting material layer is deposited and etched. The under-damped SQUID and the resistor are connected in series to form a Series resistance SQUID device; the device works in a voltage bias mode and has the characteristics of being lower in noise and higher in sensitivity; and the preparation process is the same as a common SQUID preparation process, so that the preparation difficulty is not increased.
Owner:SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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