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Superconducting quantum interference device and preparation method

A technology of superconducting quantum interference and devices, which is applied in the direction of magnetic field measurement, instruments, and measuring devices using superconducting devices, can solve problems such as unfavorable SQUID applications, reduce the modulation depth of the magnetic flux-voltage conversion coefficient of SQUID devices, and achieve Large application potential, high sensitivity, low noise effect

Inactive Publication Date: 2019-04-09
SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

But the hysteresis parameter β C The smaller the value of , the performance parameters such as the flux-voltage conversion coefficient and the modulation depth of the SQUID device will be reduced, which is not conducive to the application of SQUID

Method used

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  • Superconducting quantum interference device and preparation method
  • Superconducting quantum interference device and preparation method
  • Superconducting quantum interference device and preparation method

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Embodiment 1

[0035] Such as figure 1 As shown, the present embodiment provides a superconducting quantum interference device 1, and the superconducting quantum interference device 1 includes:

[0036] Underdamped SQUID11 and series resistor Rse.

[0037] Such as figure 1 As shown, the underdamped SQUID11 is connected in series with the series resistor Rse.

[0038] Specifically, the underdamped SQUID11 includes a superconducting ring composed of a first Josephson junction J1 and a second Josephson junction J2 connected in parallel, and a first shunt resistor R1 is connected in parallel to both ends of the first Josephson junction J1 , the two ends of the second Josephson junction J2 are connected in parallel with a second shunt resistor R2. Such as figure 1 As shown, the two ends of the first Josephson junction J1 are also connected in parallel with the equivalent capacitance C1 of the first Josephson junction J1, and the two ends of the second Josephson junction J2 are also connected ...

Embodiment 2

[0051] This embodiment provides the preparation method of the superconducting quantum interference device 1, the preparation method of the superconducting quantum interference device 1 simultaneously prepares the series resistance in the process step of preparing the shunt resistance, and the specific steps are as follows:

[0052] 1) Provide a substrate, sequentially deposit a first superconducting material layer, a first insulating material layer and a second superconducting material layer on the substrate, etch the first superconducting material layer, the first The insulating material layer and the second superconducting material layer form a superconducting loop and a bottom electrode structure.

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Abstract

The invention provides a superconducting quantum interference device and a preparation method. The superconducting quantum interference device comprises an under-damped SQUID and a series resistor; the under-damped SQUID and the series resistor are connected in series; and the two ends of the under-damped SQUID and the series resistor connected in series are connected with a bias voltage. A firstsuperconducting material layer, a first insulating material layer and a second superconducting material layer are sequentially deposited, and etching is performed to form a superconducting loop and abottom electrode structure; the second superconducting material layer is etched to form a Josephson junction; the second insulating material layer is deposited and etched, and an electrode opening isformed in the top of the Josephson junction; a resistance material layer is deposited and etched to form a bypass resistor and the series resistor; and a top electrode of a third superconducting material layer is deposited and etched. The under-damped SQUID and the resistor are connected in series to form a Series resistance SQUID device; the device works in a voltage bias mode and has the characteristics of being lower in noise and higher in sensitivity; and the preparation process is the same as a common SQUID preparation process, so that the preparation difficulty is not increased.

Description

technical field [0001] The invention relates to the technical field of superconducting circuit design, in particular to a superconducting quantum interference device and a preparation method. Background technique [0002] Superconducting Quantum Interference Device (hereinafter referred to as SQUID) is a superconducting electronic device composed of superconducting Josephson junction and superconducting ring based on the theory of flux quantization and Josephson effect. The small change is converted into a measurable voltage, which is equivalent to a flux-voltage converter, and it is the most sensitive sensor for measuring magnetic field so far. Low-temperature superconducting SQUID devices usually work at the temperature of liquid helium (4.2K), and its magnetic flux sensitivity is usually 10 -6 Φ 0 / Hz 1 / 2 Magnitude (Φ 0 =2.07×10 -15 Wb), sensitivity to magnetic field in fT / Hz 1 / 2 Magnitude (1fT=1×10 -15 T). Because low-temperature SQUID devices have extremely high...

Claims

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Application Information

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IPC IPC(8): G01R33/035G01R33/00
CPCG01R33/0052G01R33/0354
Inventor 王会武唐鑫张栖瑜公凯轩王镇
Owner SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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