9 results about "Helium ionization detector" patented technology

An octafluoropropane impurity component analysis system and method, relating to the field of gas impurity measurement. Firstly, a first sample loop (3), a second sample loop (13) and a third sample loop (20) are respectively filled with a gas sample; and then, a first carrier gas (10), a first ten-way changeover valve (4), a first gas separation device and a pulsed discharge helium ionization detector (28) are used for measuring the contents of hydrogen, oxygen, argon, nitrogen, methane and carbon monoxide impurity components, a second carrier gas (19) is used for emptying hydrogen-oxygen-argon-nitrogen-methane-carbon monoxide combined peaks which are first separated by a second gas separation device, then a third carrier gas (16) carries later separated carbon dioxide impurity components for content measurement, and a fourth carrier gas (22) empties non-fluorocarbon components which are first separated by a third gas separation device, and then measures the contents of later separated fluorocarbon components. In this way, the main component-octafluoropropane can be back-flushed, thereby completing full analysis of the contents of μmol / mol-level impurity components by means of one-time sample injection.

The invention relates to a helium ionization detector based on an MEMS technology, and the detector comprises a substrate and a detection structure, the substrate comprises a substrate, a first bonding layer and a second bonding layer, the first bonding layer and the second bonding layer are respectively bonded to two opposite sides of the substrate in a first direction, and the first direction is perpendicular to the surface of the substrate; the detection structure comprises a detection channel, an air inlet assembly and an air outlet and detection assembly. The detection channel penetrates through the substrate along a first direction; the air inlet assembly is located at an air inlet port, close to the first bonding layer, of the detection channel and is in sealed connection with the air inlet port; the gas outlet and detection assembly is located at a gas outlet port, close to the second bonding layer, of the detection channel and is in sealed connection with the gas outlet port; a sealed space defined by the air inlet assembly, the air outlet and detection assembly and the detection channel is a cavity of the detection structure. The sealing performance between different film layers in the substrate and the sealing performance of the cavity are improved, and the sensitivity of the helium ionization detector is improved.

An analysis system for hydrocarbon components in ultrapure ammonia. The analysis system comprises: a sample storage tank (1), an electronic refrigeration and concentration apparatus (7), a carrier gas apparatus (10) and a detection apparatus, wherein the electronic refrigeration and concentration apparatus (7) is connected to the sample storage tank (1), and the electronic refrigeration and concentration apparatus (7) is also connected to both the carrier gas apparatus (10) and the detection apparatus; and the detection apparatus comprises a chromatographic column (12) and a hydrogen flame ionization detector (13). The electronic refrigeration and concentration apparatus (7) refrigerates and concentrates samples, and on this basis, hydrocarbon components in ultrapure ammonia can be detected by means of the chromatographic column (12) and / or the hydrogen flame ionization detector (13), without the need for using a pulse discharge helium ionization detector, thereby reducing the costs of detecting hydrocarbon components in ultrapure ammonia.

The utility model discloses a valve path system for analyzing trace or trace impurities in various high-purity gases. The valve path system is a four-valve six-column system; comprising a pulse discharge helium ionization detector, a detection gas inlet assembly, a first detection branch and a second detection branch. A four-valve six-column system is adopted, and four valves are switched, and six columns are separated; the method comprises the following steps: firstly, dividing trace or trace impurities in single-type high-purity gas into two types for independent detection; and secondly, high-purity gas and impurities which are not detected in the branch are discharged through switching of the states of the valves, and the impurities to be detected are conveyed to a pulse discharge helium ionization detector after being subjected to repeated center cutting for multiple times. Therefore, trace or trace impurities in five high-purity gases, namely hydrogen, argon, oxygen, nitrogen and helium, are simultaneously detected by using the valve path system, the purposes of simplifying the operation process and reducing the analysis cost are achieved, the peak area reproducibility (n is equal to 6) is less than or equal to 1%, and the lowest detection limit of each impurity is less than 20ppb.

This invention provides a signal-enhanced pulsed discharge helium ionization detector and detection method, comprising a sample introduction module and, from top to bottom, a grounding module, a discharge region module, and a dual-biased electrode ion focusing module. The grounding module includes a grounding cathode needle. Helium, serving as both the carrier gas and discharge gas, enters the discharge region module from the grounding module. The grounding cathode needle is used to ionize the helium gas within the discharge region module to generate discharge material. The dual-biased electrode ion focusing module includes a collecting electrode and a first bias electrode and a second bias electrode coaxially disposed upstream and downstream of the collecting electrode. The second bias electrode provides a reverse electric field to transport electrons flowing with the helium gas to the collecting electrode. The sample introduction module, located below the dual-biased electrode ion focusing module, is used to inject the standard gas sample to be detected countercurrently from the bottom into the dual-biased electrode ion focusing module to mix and ionize with the discharge material. This invention can significantly enhance the output signal, improve sensitivity, and increase the signal-to-noise ratio.

An analysis system for hydrocarbon components in ultrapure ammonia gas, including a sample storage tank, an electronic refrigeration and concentration device, a carrier gas device, and a detection dev

The utility model relates to the technical field of trace phosphine analysis, in particular to a trace phosphine detection device for a disilane synthesis and purification process, which comprises a six-way valve, a first interface, a second interface, a third interface, a fourth interface, a fifth interface and a sixth interface are annularly and sequentially arranged on the six-way valve at equal intervals, the second interface is a carrier gas inlet, and the third interface is a carrier gas outlet. The fifth interface is a sample inlet, and the sixth interface is an emptying hole; the two ends of the first air pipe are communicated with the first connector and the fourth connector respectively, and a quantitative pipe is arranged on the first air pipe; one end of the second gas pipe is communicated with the third interface, the second organ is provided with a chromatographic column and a DID helium ionization detector, and the chromatographic column is arranged between the third interface and the DID helium ionization detector. When trace phosphorane is analyzed, impurity concentration changes can be rapidly detected, a balanced (stable state) analysis value can be rapidly measured, and the method has the advantages of being accurate in quantification, low in detection limit and short in analysis period.

The application provides a high-purity gas analyzer temperature control device which can simultaneously realize accurate detection and control of the temperature of eight targets. The application comprises a power supply circuit, a temperature sensor, a temperature signal conditioning circuit, a temperature signal analog-digital conversion circuit and a temperature heating control circuit. The multi-channel synchronous temperature heating control circuit based on a multi-channel time-division multiplexing PID algorithm simplifies the complex control algorithm and realizes accurate control of the multi-channel temperature. The temperature sensor, the temperature signal conditioning circuit and the temperature signal analog-digital conversion circuit form an eight-channel temperature detection unit which can simultaneously realize accurate detection and control of the temperature of eight targets. The application is applied to temperature detection and control of the high-purity gas analyzer, the chromatographic column of the chromatograph and the helium ionization detector, and has high temperature detection precision and high temperature control accuracy.

The present invention discloses an industrial online chromatograph based on a helium ionization detector, which relates to the field of component detection. It includes a chromatograph body and an auxiliary sampling mechanism arranged on the chromatograph body. The auxiliary sampling mechanism includes a bracket arranged on the chromatograph body, and a syringe is slidably arranged on the bracket; a passive injection assembly is arranged between the bracket and the syringe. During the process of inserting the syringe into the sampling part, the passive injection assembly injects the sample inside the syringe into the inside of the sampling part. The industrial online chromatograph based on a helium ionization detector provided by the present invention, during the process of the syringe sliding downward along the bracket to insert the syringe needle into the sampling part, the sample in the syringe is passively injected into the inside of the sampling part through the passive injection assembly, so that the sampling process of the sample can be simplified.