4 results about "Helium ionization detector" patented technology

The invention relates to a helium ionization detector based on an MEMS technology, and the detector comprises a substrate and a detection structure, the substrate comprises a substrate, a first bonding layer and a second bonding layer, the first bonding layer and the second bonding layer are respectively bonded to two opposite sides of the substrate in a first direction, and the first direction is perpendicular to the surface of the substrate; the detection structure comprises a detection channel, an air inlet assembly and an air outlet and detection assembly. The detection channel penetrates through the substrate along a first direction; the air inlet assembly is located at an air inlet port, close to the first bonding layer, of the detection channel and is in sealed connection with the air inlet port; the gas outlet and detection assembly is located at a gas outlet port, close to the second bonding layer, of the detection channel and is in sealed connection with the gas outlet port; a sealed space defined by the air inlet assembly, the air outlet and detection assembly and the detection channel is a cavity of the detection structure. The sealing performance between different film layers in the substrate and the sealing performance of the cavity are improved, and the sensitivity of the helium ionization detector is improved.

This invention provides a signal-enhanced pulsed discharge helium ionization detector and detection method, comprising a sample introduction module and, from top to bottom, a grounding module, a discharge region module, and a dual-biased electrode ion focusing module. The grounding module includes a grounding cathode needle. Helium, serving as both the carrier gas and discharge gas, enters the discharge region module from the grounding module. The grounding cathode needle is used to ionize the helium gas within the discharge region module to generate discharge material. The dual-biased electrode ion focusing module includes a collecting electrode and a first bias electrode and a second bias electrode coaxially disposed upstream and downstream of the collecting electrode. The second bias electrode provides a reverse electric field to transport electrons flowing with the helium gas to the collecting electrode. The sample introduction module, located below the dual-biased electrode ion focusing module, is used to inject the standard gas sample to be detected countercurrently from the bottom into the dual-biased electrode ion focusing module to mix and ionize with the discharge material. This invention can significantly enhance the output signal, improve sensitivity, and increase the signal-to-noise ratio.

The utility model relates to the technical field of trace phosphine analysis, in particular to a trace phosphine detection device for a disilane synthesis and purification process, which comprises a six-way valve, a first interface, a second interface, a third interface, a fourth interface, a fifth interface and a sixth interface are annularly and sequentially arranged on the six-way valve at equal intervals, the second interface is a carrier gas inlet, and the third interface is a carrier gas outlet. The fifth interface is a sample inlet, and the sixth interface is an emptying hole; the two ends of the first air pipe are communicated with the first connector and the fourth connector respectively, and a quantitative pipe is arranged on the first air pipe; one end of the second gas pipe is communicated with the third interface, the second organ is provided with a chromatographic column and a DID helium ionization detector, and the chromatographic column is arranged between the third interface and the DID helium ionization detector. When trace phosphorane is analyzed, impurity concentration changes can be rapidly detected, a balanced (stable state) analysis value can be rapidly measured, and the method has the advantages of being accurate in quantification, low in detection limit and short in analysis period.

The application provides a high-purity gas analyzer temperature control device which can simultaneously realize accurate detection and control of the temperature of eight targets. The application comprises a power supply circuit, a temperature sensor, a temperature signal conditioning circuit, a temperature signal analog-digital conversion circuit and a temperature heating control circuit. The multi-channel synchronous temperature heating control circuit based on a multi-channel time-division multiplexing PID algorithm simplifies the complex control algorithm and realizes accurate control of the multi-channel temperature. The temperature sensor, the temperature signal conditioning circuit and the temperature signal analog-digital conversion circuit form an eight-channel temperature detection unit which can simultaneously realize accurate detection and control of the temperature of eight targets. The application is applied to temperature detection and control of the high-purity gas analyzer, the chromatographic column of the chromatograph and the helium ionization detector, and has high temperature detection precision and high temperature control accuracy.