The invention relates to a
fiber micro-nano Fabry-Perot interference type
pressure sensor and a manufacturing method thereof, and belongs to the
fiber sensor technical field; the
pressure sensor is formed by fusing a
fiber (1) with a fiber film (2), wherein an end face of the fiber is provided with a micropore, and an end face of the fiber film (2) is complete; a fuse surface and the micropore form an embedded Fabry-Perot micro-cavity; the manufacturing method comprises the following steps: using a
femto second
laser to process the micropore on the end face fo the fiber; fusing the fiber with the other fiber having the complete end face so as to form the Fabry-Perot micro-cavity;
cutting and
grinding the fiber length on one end to several micrometers so as to form a fiber thin film, and forming the
pressure sensor with a micro-nano structure. Compared with the prior art, a sensor head is in micro-
nano size, so temperature has small intersect influence for
pressure measurement; the sensor is made of
quartz material with same performance, so
thermal expansion coefficient is consistent, and structure is stable; considering material and a making process, the pressure sensor is high temperature resistant, has
micro structure, is anti-
electromagnetic interference, anti
pollution, high in reliability, and high in precision.