Fiber micro-nano Fabry-Perot interference type pressure sensor and manufacturing method thereof

Abstract

The invention relates to a fiber micro-nano Fabry-Perot interference type pressure sensor and a manufacturing method thereof, and belongs to the fiber sensor technical field; the pressure sensor is formed by fusing a fiber (1) with a fiber film (2), wherein an end face of the fiber is provided with a micropore, and an end face of the fiber film (2) is complete; a fuse surface and the micropore form an embedded Fabry-Perot micro-cavity; the manufacturing method comprises the following steps: using a femto second laser to process the micropore on the end face fo the fiber; fusing the fiber with the other fiber having the complete end face so as to form the Fabry-Perot micro-cavity; cutting and grinding the fiber length on one end to several micrometers so as to form a fiber thin film, and forming the pressure sensor with a micro-nano structure. Compared with the prior art, a sensor head is in micro-nano size, so temperature has small intersect influence for pressure measurement; the sensor is made of quartz material with same performance, so thermal expansion coefficient is consistent, and structure is stable; considering material and a making process, the pressure sensor is high temperature resistant, has micro structure, is anti-electromagnetic interference, anti pollution, high in reliability, and high in precision.

Description

technical field [0001] The invention relates to a pressure sensor, in particular to an optical fiber micro-nano Faroese interference type pressure sensor and a manufacturing method thereof, belonging to the technical field of optical fiber sensors. Background technique [0002] The Fabry-Perot Interferometer (or FPI for short) pressure sensor is composed of the end face of an optical fiber and a force-deformable film as a reflective surface (for example, patent applications US Patent 7054011 B2, US Patent 6823738 B1, 201310151676), Or the interface composition formed by fusion of different kinds of optical fibers (C.Wu, et al. Optics Letters, 36, 412-414, 2011, C. Ma, et al. Intrinsic Fabry-Pérot interferometric (IFPI) fiber pressure sensor, Sensors, 76770T- 76770T-76779, 2010), microstructures can also be processed on the optical fiber, and two reflective surfaces can be fabricated by the method of coating (C.Frederik, et al. Journal of Micromechanics and Microengineering 1...

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Problems solved by technology

[0004] The purpose of the present invention is to solve the problem that the sensor head of the existing optical fiber F-P interference type pressure sensor has a large size, and the F-P cavity length is easily affected by temperature changes and interferes with the accuracy of pressure measurement; different materials have different thermal expansion coefficients and high temperature deformation It is easy to generate stress and easy to be damaged. An all-fiber micro-nano-Fapper interference type pressure sensor is proposed. When the sensor head uses a pure quartz photonic crystal fiber, it can also measure pressure in a high temperature environment of 1200 degrees.

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